CN201605348U - Silicon seedholder used for growing single crystal silicon in zone melting method - Google Patents
Silicon seedholder used for growing single crystal silicon in zone melting method Download PDFInfo
- Publication number
- CN201605348U CN201605348U CN2009202778248U CN200920277824U CN201605348U CN 201605348 U CN201605348 U CN 201605348U CN 2009202778248 U CN2009202778248 U CN 2009202778248U CN 200920277824 U CN200920277824 U CN 200920277824U CN 201605348 U CN201605348 U CN 201605348U
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- China
- Prior art keywords
- seedholder
- seed crystal
- silicon
- cavity
- seed
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims abstract description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 6
- 238000004857 zone melting Methods 0.000 title claims abstract description 6
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 53
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000717 retained effect Effects 0.000 description 6
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a silicon seedholder used for growing single crystal silicon in a zone melting method, which comprises a seedholder body (1) and a fastening sleeve (2) matched with the seedholder body (1), wherein the seedholder body (1) comprises an upper cone (1b), a lower base (1c) is a cylinder, the outer part of the cylinder is provided with screw threads, and the inner part of the fastening sleeve is provided with screw threads matched with the outer screw threads of the lower base (1c) of the holder. The utility model has the advantages that the fastening sleeve is utilized to make the cavity for arranging seed crystal of the holding part shrink to clamp the seed crystal, so the seed crystal can not shake in the production process; and the seed crystal can be taken out or put in conveniently via relatively rotating the fastening sleeve and the holder body. The processing of the seed crystal only needs to meet the requirement on the size that the seed crystal can be put into the cavity in the holding part, and no strict requirement exists on the shape of the seed crystal.
Description
Technical field
The utility model relates to a kind of zone melting method growing single-crystal silicon silicon seed clamper.
Background technology
In the zone-melted silicon single crystal manufacturing processed, need a kind of silicon single crystal of particular crystal orientation, be commonly referred to seed crystal.It is by the cutting of the silicon single-crystal in certain crystal orientation or drills through and form.Crystal orientation commonly used is＜100 〉,＜111,＜110 etc.Seed crystal is generally rectangular parallelepiped, need be fixed on seed crystal in the workpiece that is called seedholder with pin or wire.
In the zone-melted silicon single crystal manufacturing processed, the silicon seed clamper is essential parts, seed crystal must well be installed in the seedholder, guarantee in the silicon monocrystal growth process, to be unlikely to shake, the silicon monocrystal growth process is finished smoothly, so the structure of silicon seed clamper wants to keep the stable of seed crystal in the crystal growing process.Currently used seed holder has two kinds usually: a kind of seed holder is made of main body and wire two portions, and seed holder main body top is vertically to remove 1/4 right cylinder, and has a plurality of breach on right cylinder.The right angle face of seed holder matches with the rectangular parallelepiped seed crystal, with wire the two is fixed together, and wire is by the breach on the right cylinder, and breach plays the effect that prevents that wire from sliding.The shortcoming of this seed holder is:
A) wire when fixing seed crystal with seed crystal for some contact, seed crystal is had certain physical abuse, be easy to generate defective owing to stress concentration aborning, influence the monocrystalline quality.
B) wire is that point contacts with seed crystal, and the seed crystal discontinuity causes easily in process of binding and breaks.
C) seed crystal is that face contacts with the seed holder main body, contacts with wire point, easily causes seed crystal to rock in anchor clamps.
D) seed crystal is difficult for changing.
Another kind of seed holder is mainly by main body and cylindrical sleeve, and sleeve inner is furnished with jackscrew.After seed crystal being positioned in the rectangular tank of main body cylindrical sleeve is put, use jackscrew that jig main body and cylindrical sleeve are combined closely then, thereby seed crystal is fixed.The advantage of this seed holder is overcome last kind seed crystal anchor clamps and used fixedly seed crystal caused various defectives in seed crystal of wire, but its shortcoming to be also apparent in view, mainly is:
A) exist face to cooperate between seed crystal and the seed holder, strict to the machining angle of seed crystal, otherwise being difficult to realization face with seed holder, seed crystal contacts.Usually owing to the error of angle, seed crystal contacts with anchor clamps some realization face.In the production, along with the growth of monocrystalline, cause the contact site stress concentration and cause defective, or cause problems such as seed crystal strength degradation.
B) owing to fix by jackscrew between seed holder main body and the cylindrical sleeve, discontinuity between jig main body and the sleeve is easy to generate and relatively moves, and causes seed crystal loosening in seed holder, influences crystalline and grows.
Summary of the invention
The purpose of this utility model is to provide a kind of zone melting method growing single-crystal silicon silicon seed clamper, and this seedholder can be changed seed crystal easily, avoids the problem that produces because of the seed crystal stress concentration simultaneously.
To achieve the above object of the invention, the technical solution of the utility model is:
This seed holder is made up of seedholder main body (1) and fixing sleeve (2).Seed holder main body lower end is a middle cylinder 1a who has cylindrical cavity vertically, and this cylindrical cavity can closely cooperate with single crystal growing furnace lower shaft spindle nose.Seed holder main body (1) top is the retained part 1b that is used to install the cone shape of seed crystal, retained part 1b inside has the cavity that is used to lay seed crystal 3 vertically, the conical surface has four equally distributed slits vertically, and retained part lower base (1C) outside has screw thread.
The side of described seedholder upper cone body (1b) and the angle α between the vertical line are 10 °～90 °.
The utility model to the outer shape of described clamp body and fixing sleeve without limits.Can be wherein a kind of such as right cylinder, prism, round platform.
The utility model has the advantages that the cavity that utilizes fixing sleeve to make retained part lay seed crystal shrinks the clamping seed crystal, seed crystal can not shake in process of production; Can take out or put into seed crystal easily by relative rotation fixing sleeve and jig main body.The processing of seed crystal only needs the satisfied needs of putting into the retained part internal cavities of size to get final product, and the shape of seed crystal is not strict with.
Description of drawings
Fig. 1 seedholder agent structure synoptic diagram
Fig. 2 fixing sleeve structural representation
Embodiment
This seedholder comprises seedholder main body 1 and fixing sleeve 2.Main body comprises upper cone body (1b), lower base (1C), and it is to lay seed crystal that the inner cavity of upper cone body (1b) mainly acts on, the pedestal of bottom (1C) outside has screw thread.Wherein, fixing sleeve inside has the screw thread that is complementary with clamper lower base (1C) external screw-thread.Fixing sleeve (2) has the cavity of a up/down perforation vertically, cavity top is platform shape 2a, the bottom is that cylindric 2b. column cavity 2b has the screw thread that is complementary with retained part lower base (1C) external screw-thread, the effect of fixing sleeve is, by relative seedholder main body moves downward with the threaded function of lower base (1C) outside, platform shape cavity by top in the moving process shrinks the cone that has the slit, thereby fixes seed crystal.
Claims (6)
1. a zone melting method growing single-crystal silicon silicon seed clamper is characterized in that it comprises: seedholder main body (1) and the fixing sleeve (2) that matches with seedholder main body (1).
2. silicon seed clamper according to claim 1 is characterized in that described seedholder main body comprises upper cone body (1b), lower base (1C), and wherein lower base is a right cylinder, this right cylinder outside has screw thread.
3. silicon seed clamper according to claim 2, it is characterized in that described fixing sleeve (2) has the cavity of a up/down perforation vertically, cavity top (2a) is the platform shape, bottom (2b) is cylindric, and the cylindrical cavity inwall has the screw thread that the external screw-thread with the clamper top base is complementary.
4. according to claim 2 or 3 described silicon seed clampers, it is characterized in that described seedholder upper interior portion has a cavity vertically, the shape of this cavity is cylindrical or prismatic.
5. according to claim 2 or 3 described silicon seed clampers, it is characterized in that the side of described seedholder upper cone body (1b) and the angle α between the vertical line are 10 °～90 °.
6. silicon seed clamper according to claim 1 is characterized in that seedholder lower body part pedestal (1a) and fastening telescopic outer shape are wherein a kind of of right cylinder, prism, round platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202778248U CN201605348U (en) | 2009-11-26 | 2009-11-26 | Silicon seedholder used for growing single crystal silicon in zone melting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202778248U CN201605348U (en) | 2009-11-26 | 2009-11-26 | Silicon seedholder used for growing single crystal silicon in zone melting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201605348U true CN201605348U (en) | 2010-10-13 |
Family
ID=42950055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202778248U Expired - Lifetime CN201605348U (en) | 2009-11-26 | 2009-11-26 | Silicon seedholder used for growing single crystal silicon in zone melting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201605348U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
-
2009
- 2009-11-26 CN CN2009202778248U patent/CN201605348U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102275238A (en) * | 2011-09-05 | 2011-12-14 | 镇江大成新能源有限公司 | Fixture for connecting seed crystals |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: BEIJING GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS Effective date: 20120207 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20120207 Address after: 100088, 2, Xinjie street, Beijing Co-patentee after: Guotai Semiconductor Materials Co., Ltd. Patentee after: GRINM Semiconductor Materials Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Co-patentee before: GRINM Semiconductor Materials Co., Ltd. Patentee before: General Research Institute for Nonferrous Metals Co-patentee before: Guotai Semiconductor Materials Co., Ltd. |
|
| C56 | Change in the name or address of the patentee |
Owner name: GRINM ADVANCED MATERIALS CO., LTD. Free format text: FORMER NAME: GRINM SEMICONDUCTOR MATERIALS CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100088, 2, Xinjie street, Beijing Patentee after: YOUYAN NEW MATERIAL CO., LTD. Patentee after: Guotai Semiconductor Materials Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: GRINM Semiconductor Materials Co., Ltd. Patentee before: Guotai Semiconductor Materials Co., Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Patentee after: YOUYAN NEW MATERIAL CO., LTD. Patentee after: You Yan Semi Materials Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: YOUYAN NEW MATERIAL CO., LTD. Patentee before: Guotai Semiconductor Materials Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Owner name: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Free format text: FORMER OWNER: GRINM ADVANCED MATERIALS CO., LTD. Effective date: 20150708 Free format text: FORMER OWNER: GRINM SEMICONDUCTOR MATERIALS CO., LTD. Effective date: 20150708 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150708 Address after: 101300 Beijing city Shunyi District Shuanghe Linhe Industrial Development Zone on the south side of the road Patentee after: You Yan Semi Materials Co., Ltd. Address before: 100088 Beijing city Xicheng District Xinjiekou Avenue No. 2 Patentee before: YOUYAN NEW MATERIAL CO., LTD. Patentee before: You Yan Semi Materials Co., Ltd. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20101013 |
|
| CX01 | Expiry of patent term |