CN102296358B - Combination method for carbon material combined crucible, and combined crucible thereof - Google Patents
Combination method for carbon material combined crucible, and combined crucible thereof Download PDFInfo
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- CN102296358B CN102296358B CN201110146108.8A CN201110146108A CN102296358B CN 102296358 B CN102296358 B CN 102296358B CN 201110146108 A CN201110146108 A CN 201110146108A CN 102296358 B CN102296358 B CN 102296358B
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Abstract
The invention discloses a combination method for a carbon material combined crucible which conveniently removes quartz crucible residues, and maintains the roundness of the crucible, and a combined crucible thereof. The combined crucible is the combined crucible prepared from a carbon/carbon composite material or a graphite material. The combination method is characterized by: firstly preparing a crucible tube (1) and a crucible bowl (3), wherein the crucible tube (1) is cylindrical, the crucible bowl (3) has 2-4 petals; combining the crucible tube (1) and the crucible bowl (3) into the whole crucible. With the present invention, the structure of the apparatus is simple; the operation is convenient; the work intensity of the worker is reduced; the damage to the combined crucible during removal of the quartz crucible residues can be effectively reduced; the service life of the crucible is prolonged; the combined crucible has characteristics of good roundness and steady; the whole rod rate and the crystal forming rate during crystal pulling are high.
Description
Technical field
The present invention relates to a kind of high temperature furnace used frock, specifically a kind of crucible, particularly relates to a kind of combined method of Combined carbon crucible and combines crucible.
Background technology
At present; during single crystal growing furnace pulling monocrystal silicon rod; the quartz crucible of the raw materials such as splendid attire polysilicon block is put into the crucible being positioned on crucible holder; heat fused in protective atmosphere, regulation and control are after technological temperature, and seed crystal inserts in melting polysilicon liquid through guide shell; crucible is placed in crucible holder and drives together rotation by the crucible holder axle under it; meanwhile, also retrograde rotation upwards promoting of seed crystal, makes polysilicon liquid become silicon single crystal rod by the Siliciumatom of the seed crystal crystallization and freezing that puts in order.In silicon single crystal rod pulling process, in stove temperature up to 1500 ℃ of left and right, now, quartz crucible deliquescing, crucible support that be outside, quartz crucible residual after crystal pulling is often close to crucible inwall.
Because quartz crucible is disposable frock, must change by stove, when crucible is one-piece construction, quartz crucible is removed comparatively difficulty, even damages crucible during removal.When crucible adopts many valve structures, as plumbago crucible, because of its mechanical property poor, plumbago crucible uses in hot environment, want support quartz crucible and raw-material weight, and in rotating state, under the effect of external force, easily break, therefore, the many valve structures of the general employing of graphite crucible for single crystal furnace at present.For having improved the mechanical property of crucible, also there is the carbon/carbon compound material of employing to prepare many valve structures crucible.
Although many valve structures crucible can solve the problem of removing the residual body of quartz crucible, but its many valve structures only depend on its base cone face coordinate and become one with the inner conical surface of crucible holder, the circularity of many valve structures crucible is not good, and in use, its circularity also likely changes, affect the stable of crystal pulling environment, whole excellent rate and crystal forming rate are all affected, and cause enterprise's production cost to increase.
Summary of the invention
The object of this invention is to provide a kind of convenient combined method and combination crucible of removing the residual body of quartz crucible and keeping again the Combined carbon crucible of crucible circularity.
The present invention adopts following technical scheme to realize its goal of the invention, a kind of combined method of Combined carbon crucible, it comprises the combination crucible of being prepared by carbon/carbon compound material or graphite material, it first prepares crucible cylinder, crucible bowl, described crucible cylinder is cylindric, described crucible bowl is 2 lobe～4 lobes, then crucible cylinder and crucible bowl are combined into integral crucible.
The present invention is the right alignment of guaranteeing crucible cylinder and crucible bowl, and the contact surface of crucible cylinder and crucible bowl is cone match, and its cone angle is 90 °～150 °.
The present invention is for guaranteeing the circularity of combination crucible, and the height of crucible cylinder is 30 ㎜～210 ㎜.
The present invention, for guaranteeing the intensity of combination crucible, is combined into one crucible cylinder and crucible bowl, adopts pin to connect between crucible cylinder and crucible bowl.
The combination crucible that Combined carbon crucible combined method is produced as mentioned above, it comprises the crucible body of being prepared by carbon/carbon compound material or graphite material, and described crucible body comprises crucible cylinder, crucible bowl, and described crucible cylinder is that cylindric, described crucible bowl is 2 lobe～4 lobes.
The junction of crucible cylinder of the present invention and crucible bowl is cone match, and its cone angle is 90 °～150 °.
The height of crucible cylinder of the present invention is 30 ㎜～210 ㎜.
Crucible cylinder of the present invention is respectively equipped with connecting hole with the corresponding position that is connected of crucible bowl, is provided with joint pin in connecting hole, and the diameter of described joint pin is 5 ㎜～10 ㎜, and length is 15 ㎜～50 ㎜.
Owing to adopting technique scheme, the present invention has realized goal of the invention preferably, it is simple in structure, easy to operate, alleviated workman's labour intensity, can effectively alleviate the damage to combination crucible while removing the residual body of quartz crucible, extended the work-ing life of combination crucible, in addition, the circularity of combination crucible is good and stable, and during crystal pulling, whole excellent rate and crystal forming rate are higher.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is joint pin 2 schematic diagram during for column structure;
Fig. 3 is joint pin 2 schematic diagram during for single head bolt structure;
Fig. 4 is joint pin 2 schematic diagram during for single head conical structure;
Fig. 5 is joint pin 2 schematic diagram during for double ended cone structure.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Embodiment 1:
A kind of combined method of Combined carbon crucible, it comprises the combination crucible of being prepared by carbon/carbon compound material or graphite material, and it first prepares crucible cylinder 1, crucible bowl 3, and described crucible cylinder 1 is cylindric, described crucible bowl 3 is 2 lobe～4 lobes, then crucible cylinder 1 and crucible bowl 3 are combined into integral crucible.
The present embodiment combination crucible adopts carbon/carbon compound material preparation, the carbon fiber reinforced carbon matrix composite material that described carbon/carbon compound material is comprised of pure carbon, its moulding is combined into prefabricated component by carbon fibre web tire and carbon cloth through lamination, by making base substrate after chemical vapour deposition density and/or dipping density, finally by crossing, be machined to crucible cylinder 1, crucible bowl 3 again.
The present invention is the right alignment of guaranteeing crucible cylinder 1 and crucible bowl 3, and the contact surface of crucible cylinder 1 and crucible bowl 3 is cone match, and its cone angle is 90 °～150 °.
The present invention is for guaranteeing the circularity of combination crucible, and the height of crucible cylinder 1 is 30 ㎜～210 ㎜.
As shown in Figure 1, the combination crucible that a kind of as above-mentioned Combined carbon crucible combined method is produced, it comprises the crucible body of being prepared by carbon/carbon compound material or graphite material, the present embodiment is carbon/carbon compound material, described crucible body comprises crucible cylinder 1, crucible bowl 3, described crucible cylinder 1 is that cylindric, described crucible bowl 3 is 2 lobe～4 lobes (the present embodiment is 2 lobes).
The junction of described crucible cylinder 1 and crucible bowl 3 is cone match, and its cone angle is 90 °～150 ° (the present embodiment is 130 °).
The height of described crucible cylinder 1 is 30 ㎜～210 ㎜ (the present embodiment is 100 ㎜).
When described combination crucible combination, use, the port of many valve structures crucible bowl 3 and crucible cylinder 1 adopt cone match, and bottom coordinates and becomes one with the inner conical surface of crucible holder 5 by its base cone face.
When the present invention uses; first combination crucible is put in the crucible holder 5 in single crystal growing furnace; then quartz crucible is put among combination crucible, then the starting material such as polysilicon are put into quartz crucible, in protective atmosphere environment, the starting material heat fused such as polysilicon are carried out to the production of silicon single crystal rod.When silicon single crystal rod draws the residual body of complete removal quartz crucible, by the lifting hole(eyelet) 4 on crucible cylinder 1, the crucible cylinder 1 of combination crucible is upwards mentioned, can crucible cylinder 1 is separated with crucible bowl 3, because crucible bowl 3 forms (the present embodiment is 2 lobes) by many lobes, can be played the part of out easily and separated with the residual body of quartz crucible.
On probation through putting into practice, the present invention is easy to operate, can effectively alleviate the damage to combination crucible while removing the residual body of quartz crucible, extended the work-ing life of combination crucible, in addition, the circularity of combination crucible is good and stable, many lobes crucible crystal pulling relatively, its whole excellent rate improves 3 ﹪～10 ﹪.
Embodiment 2:
The present invention, for guaranteeing the intensity of combination crucible, is combined into one crucible cylinder 1 and crucible bowl 3, adopts pin to connect between crucible cylinder 1 and crucible bowl 3.
Described crucible cylinder 1 is respectively equipped with connecting hole with the corresponding position that is connected of crucible bowl 3, in connecting hole, be provided with joint pin 2, as shown in Figure 2, joint pin 2 is column structure, the diameter of described joint pin 2 is 5 ㎜～10 ㎜ (the present embodiment is 6 ㎜), and length is 15 ㎜～50 ㎜ (the present embodiment is 30 ㎜).
When described combination crucible combination, use, the port of many valve structures crucible bowl 3 adopts cone match to adopt pin to be connected simultaneously with crucible cylinder 1, and bottom leans on its base cone face coordinate and become one with the inner conical surface of crucible holder 5.
Remaining with embodiment 1.
Embodiment 3:
As shown in Figure 3, joint pin 2 is single head bolt structure, and the connecting hole on crucible cylinder 1 is screw, in the connecting hole of threaded screw-in crucible cylinder 1 end face of joint pin 2, and remaining same embodiment 1.
Embodiment 4:
As shown in Figure 4, joint pin 2 is single head conical structure, and the connecting hole on crucible bowl 3 is taper hole, in the connecting hole of reeve crucible cylinder 1 end face of joint pin 2 cylinders, and a connecting hole that inserts crucible bowl 3 end faces of circular cone, remaining same embodiment 1.
Embodiment 5:
As shown in Figure 5, joint pin 2 is double ended cone structure, and the connecting hole on crucible cylinder 1, crucible bowl 3 is taper hole, and insert respectively in the connecting hole of crucible cylinder 1 end face and crucible bowl 3 end faces at two of circular cone, remaining same embodiment 1.
Claims (4)
1. the combined method of a Combined carbon crucible, it comprises the combination crucible of being prepared by carbon/carbon compound material or graphite material, it is characterized in that it first prepares crucible cylinder (1), crucible bowl (3), described crucible cylinder (1) is cylindric, described crucible bowl (3) is 2 lobe～4 lobes, then crucible cylinder (1) and crucible bowl (3) are combined into integral crucible; The contact surface of crucible cylinder (1) and crucible bowl (3) is cone match, and its cone angle is 90 °～150 °, and the height of described crucible cylinder (1) is 30 ㎜～210 ㎜.
2. Combined carbon crucible combined method according to claim 1, is characterized in that adopting pin to connect between crucible cylinder (1) and crucible bowl (3).
3. the combination crucible that Combined carbon crucible combined method is produced as claimed in claim 1, it comprises the crucible body of being prepared by carbon/carbon compound material or graphite material, it is characterized in that described crucible body comprises crucible cylinder (1), crucible bowl (3), described crucible cylinder (1) is that cylindric, described crucible bowl (3) is 2 lobe～4 lobes; The junction of crucible cylinder (1) and crucible bowl (3) is cone match, and its cone angle is 90 °～150 °, and the height of described crucible cylinder (1) is 30 ㎜～210 ㎜.
4. Combined carbon crucible according to claim 3, it is characterized in that crucible cylinder (1) is respectively equipped with connecting hole with the corresponding position that is connected of crucible bowl (3), in connecting hole, be provided with joint pin (2), the diameter of described joint pin (2) is 5 ㎜～10 ㎜, and length is 15 ㎜～50 ㎜.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110146108.8A CN102296358B (en) | 2011-06-01 | 2011-06-01 | Combination method for carbon material combined crucible, and combined crucible thereof |
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| CN201110146108.8A CN102296358B (en) | 2011-06-01 | 2011-06-01 | Combination method for carbon material combined crucible, and combined crucible thereof |
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| CN102296358A CN102296358A (en) | 2011-12-28 |
| CN102296358B true CN102296358B (en) | 2014-03-26 |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103060922A (en) * | 2013-01-18 | 2013-04-24 | 奕雪春 | Volume-adjustable combined type crucible |
| CN204097595U (en) * | 2014-09-09 | 2015-01-14 | 湖南南方搏云新材料有限责任公司 | A kind of four joint formula Combined carbon crucibles |
| CN104894638A (en) * | 2015-06-30 | 2015-09-09 | 湖南南方搏云新材料有限责任公司 | Carbon-material combined crucible for single-crystal furnace |
| CN107227493B (en) * | 2017-07-11 | 2023-11-24 | 江苏星特亮科技有限公司 | Assembled crucible |
| CN113061979B (en) * | 2021-03-19 | 2022-05-27 | 湖南世鑫新材料有限公司 | Multi-section carbon-carbon composite material crucible with thermal barrier coating and preparation method and application thereof |
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| JP2000001390A (en) * | 1998-06-11 | 2000-01-07 | Komatsu Electronic Metals Co Ltd | Holder crucible for use in single crystal pulling equipment and crucible device provided with the same |
| CN102041550A (en) * | 2009-10-23 | 2011-05-04 | 上海杰姆斯电子材料有限公司 | Method for prolonging service life of single crystal furnace thermal field crucible, and Czochralski crystal growing furnace |
| CN201842895U (en) * | 2010-11-09 | 2011-05-25 | 浙江瑞迪硅谷新能源科技有限公司 | Graphite crucible of monocrystalline silicon growing furnace |
| CN102071457A (en) * | 2011-01-30 | 2011-05-25 | 江西赛维Ldk太阳能高科技有限公司 | Combined crucible for accommodating silicon materials |
| CN202030857U (en) * | 2010-12-30 | 2011-11-09 | 山东伟基炭科技有限公司 | Combined crucible for monocrystal pulling furnace |
| CN202090096U (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combined carbon crucible |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10158089A (en) * | 1996-11-22 | 1998-06-16 | Mitsubishi Materials Shilicon Corp | Crucible structure of single crystal pulling-up device |
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2011
- 2011-06-01 CN CN201110146108.8A patent/CN102296358B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000001390A (en) * | 1998-06-11 | 2000-01-07 | Komatsu Electronic Metals Co Ltd | Holder crucible for use in single crystal pulling equipment and crucible device provided with the same |
| CN102041550A (en) * | 2009-10-23 | 2011-05-04 | 上海杰姆斯电子材料有限公司 | Method for prolonging service life of single crystal furnace thermal field crucible, and Czochralski crystal growing furnace |
| CN201842895U (en) * | 2010-11-09 | 2011-05-25 | 浙江瑞迪硅谷新能源科技有限公司 | Graphite crucible of monocrystalline silicon growing furnace |
| CN202030857U (en) * | 2010-12-30 | 2011-11-09 | 山东伟基炭科技有限公司 | Combined crucible for monocrystal pulling furnace |
| CN102071457A (en) * | 2011-01-30 | 2011-05-25 | 江西赛维Ldk太阳能高科技有限公司 | Combined crucible for accommodating silicon materials |
| CN202090096U (en) * | 2011-06-01 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Combined carbon crucible |
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Address after: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee after: Hunan gold carbon Limited by Share Ltd Address before: 413000 Hunan province Yiyang Yingbin Road No. 2 Patentee before: Hunan KBCarbon Composite Science and Technology Co., Ltd. |