CN219137009U

CN219137009U - Heater assembly for crystal growing furnace

Info

Publication number: CN219137009U
Application number: CN202223586709.3U
Authority: CN
Inventors: 华伟; 陈伟; 潘国庆; 董永军
Original assignee: Nanjing Guangbao Crystal Technology Co ltd
Current assignee: Nanjing Guangbao Crystal Technology Co ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-06-06
Anticipated expiration: 2032-12-30

Abstract

The utility model discloses a heater component for a crystal growth furnace, in particular to the technical field of heaters of crystal growth furnaces, which comprises a plurality of heating blocks, wherein electrode plates are arranged at the bottoms of the heating blocks, the heating blocks are spliced to form a circular heater body, a splicing structure is arranged between every two heating blocks, the splicing structure comprises an inserting block, the inserting block is arranged at one end of each heating block, and a slot is formed at the other end of each heating block. According to the utility model, the plurality of heating blocks are spliced to form the heater body, so that once one part of the heater is damaged, only one of the heating blocks is needed to be replaced, the whole heater body is not needed to be replaced, the maintenance cost is reduced, each heating block works independently and generates heat, the heat conduction among the plurality of heating blocks is realized, and the damage to one part of the heater is avoided, so that the influence on the work of the crystal growth furnace is avoided.

Description

Heater assembly for crystal growing furnace

Technical Field

The present utility model relates to the field of heater technology for crystal growth furnaces, and more particularly to a heater assembly for a crystal growth furnace.

Background

The crystal growth furnace is a process test instrument used in the technical field of electronics and communication, when a crystal grows, a silicon material is required to be placed in the growth furnace, silicon is directionally solidified through processes such as heating, crystal growth, annealing and the like, unidirectional heat flow is formed by controlling the temperature change of a thermal field, so that a directional columnar crystal is formed, however, when the silicon material is heated, a heater is required to be used for heating the silicon material.

The utility model patent of patent application number CN201120023124.3 discloses a heating device of a polysilicon crystal growing furnace, which comprises a top heater and a side heater, wherein the top heater is arranged at the top of a crucible of the crystal growing furnace, the top heater is connected with a top heater electrode, the side heater is arranged around the crucible, the side heater is connected with a side heater electrode, and the top heater electrode and the side heater electrode are respectively connected with a transformer and a controller. According to the structure, two independently controlled double thermal fields are formed by the top heater and the four side heaters, according to different temperatures needed by the upper, middle and lower areas in the crystal growth process of a silicon solution in a crucible, the two independent power controllers respectively adjust the output size of the power of the heater, and through the adjustment of the temperature of the crystal growth device, the temperature gradient and the hot wall effect of crystal growth are formed, the adjustment range of the temperature gradient is large, the impurity removal effect is good, the thermal field is conveniently optimized, and the growth quality of crystals is facilitated.

However, in the practical use of the structure, the side heater arranged outside the crucible is of an integral structure, and once one part of the heater collides and is damaged, the whole heater needs to be replaced, so that the maintenance cost is increased.

Disclosure of Invention

The technical scheme of the utility model aims at solving the technical problem that the prior art is too single, provides a solution which is obviously different from the prior art, and aims at overcoming the defects of the prior art, and provides a heater assembly for a crystal growth furnace so as to solve the problems in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the heater component for the crystal growth furnace comprises a plurality of heating blocks, wherein electrode plates are arranged at the bottoms of the heating blocks, the heating blocks are spliced to form a circular heater body, and a splicing structure is arranged between every two heating blocks;

the splicing structure comprises an inserting block, the inserting block is arranged at one end of the heating block, the other end of the heating block is provided with a slot, the top of the heater body is provided with a reinforcing ring, the joint of the reinforcing ring and the heater is provided with a plurality of threaded holes, and bolts are arranged in the threaded holes.

Preferably, the heating blocks are arc-shaped, each heating block is wavy, and the heating blocks and the electrode plates are made of graphite.

Preferably, the insert block is made of carbon steel, the insert block is fixedly arranged at one end of the heating block, and the insert block is matched with the slot structure.

Preferably, the outer diameter of the reinforcing ring is identical to the outer diameter of the heater body, and the reinforcing ring is mounted on the surface of the top of the heater body.

Preferably, the number of the screw holes and the screw bolts are set to be the same, and the reinforcing ring is detachably connected with the heater body through the screw bolts and the screw holes.

The utility model has the technical effects and advantages that:

1. through setting up mosaic structure, insert the inside slot that another heating block offered with the inserted block of one of them heating block one end, realize the quick assembly of heater body, and install the fastening ring on the surface of heater body after the concatenation, through bolt and bolt hole, install the fastening ring on the surface of heater body after the concatenation, realize the concatenation and fastening between a plurality of heating blocks, and through bolt and screw hole, split fastening ring and heater body, and separate the inside of inserting block from the slot, can realize the separation of a plurality of heating blocks, thereby be convenient for change one of them heating block of heater body, need not to change whole heater body, reduce cost of maintenance;

2. through splice into the heater with a plurality of heating blocks, and the bottom of every heating block all is provided with the electrode plate, and then realizes the independent work and the heating of every heating block, in time once the damage takes place for one of them department of heater, also reduces the work to the growth furnace and causes the influence, and a plurality of back of assembling between the wave heating blocks that is moreover, realizes the heat conduction of every heating block, makes the inside crucible of growth furnace can be heated evenly, and improves the scope of heat conduction.

Drawings

Fig. 1 is a schematic diagram of the overall structure of the present utility model.

Fig. 2 is a schematic diagram of a connection structure of two heating blocks according to the present utility model.

Fig. 3 is an enlarged schematic view of the structure of fig. 1 a according to the present utility model.

FIG. 4 is a schematic view of the surface structure of the reinforcing ring according to the present utility model.

The reference numerals are: 1. a heating block; 2. an electrode plate; 3. a heater body; 4. inserting blocks; 5. a slot; 6. a reinforcing ring; 7. a threaded hole; 8. and (5) a bolt.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The heater assembly for the crystal growth furnace comprises a plurality of heating blocks 1, wherein electrode plates 2 are arranged at the bottoms of the heating blocks 1, the heating blocks 1 are spliced to form a circular heater body 3, and a splicing structure is arranged between every two heating blocks 1;

the splicing structure comprises an inserting block 4, the inserting block 4 is arranged at one end of a heating block 1, a slot 5 is formed in the other end of the heating block 1, a reinforcing ring 6 is arranged at the top of a heater body 3, a plurality of threaded holes 7 are formed in the joint of the reinforcing ring 6 and the heater, and bolts 8 are arranged in the threaded holes 7.

When the structure is specifically used, when the plurality of heating blocks 1 are assembled, the insertion block 4 at one end of one heating block 1 is inserted into the slot 5 formed in the other heating block 1, so that the heater body 3 is assembled quickly, the fastening ring is arranged on the surface of the spliced heater body 3, and the fastening ring is arranged on the surface of the spliced heater body 3 through the bolt 8 and the bolt 8 holes, so that the splicing and fastening among the plurality of heating blocks 1 are realized;

and in case when damage takes place for one of them department of heater body 3, only need through bolt 8 and screw hole 7, split fastening ring and heater body 3 to with the inside separation of inserted block 4 from slot 5, can realize the separation of a plurality of heating blocks 1, thereby be convenient for change one of them heating block 1 of heater body 3, need not to change whole heater body 3, reduce cost of maintenance.

In a preferred embodiment, as shown in fig. 1, 2 and 3, a plurality of heating blocks 1 are arc-shaped, each heating block 1 is respectively in wave-shaped, and each heating block 1 and each electrode plate 2 are made of graphite materials, so that a plurality of heating rings arranged in arc shapes can be spliced into a circular heater body 3, the heater body 3 can be arranged outside a crucible which is inside a crystal production furnace, the crystal production furnace is heated, and meanwhile, the graphite heating blocks 1 arranged in wave-shaped are used for realizing heat conduction and improving the heat propagation range and the heating efficiency of the crystal production furnace.

In a preferred embodiment, as shown in fig. 1, 2 and 3, the insert 4 is made of carbon steel, the insert 4 is fixedly installed at one end of the heating block 1, and the insert 4 is matched with the slot 5 in structure, so that the insert 4 at one end of one heating block 1 can be conveniently inserted into the slot 5 formed by the other heating block 1, the plurality of heating blocks 1 are conveniently spliced into the structure of the heater body 3, and meanwhile, once the heater body 3 is damaged, the whole heater body 3 does not need to be replaced by replacing one of the heating blocks 1, so that the maintenance cost is saved.

In a preferred embodiment, as shown in fig. 1, the outer diameter of the reinforcing ring 6 is consistent with the outer diameter of the heater body 3, and the reinforcing ring 6 is installed on the surface of the top of the heater body 3, so that the reinforcing ring 6 can be installed on the surface of the spliced heater body 3, and further, the plurality of spliced heating rings can be connected, so that the firmness of the heater body 3 is improved.

In a preferred embodiment, as shown in fig. 1, 2, 3 and 4, the number of the threaded holes 7 and the number of the bolts 8 are set to be the same, and the reinforcing ring 6 is detachably connected with the heater body 3 through the bolts 8 and the threaded holes 7, so that after the reinforcing ring 6 is mounted on the surface of the post-splicing heater body 3, the reinforcing ring 6 is connected with the post-splicing heater body 3 through the cooperation of the threads and the threaded holes 7, thereby realizing the connection between the plurality of heating blocks 1.

When the structure is specifically used, the heater body 3 is formed by splicing a plurality of arc-shaped heating blocks 1, the bottom of each heating block 1 is provided with the electrode plate 2, when the structure is specifically used, the plurality of heating blocks 1 are spliced to form the heater body 3, the heater body 3 is arranged outside a crucible which a crystal growth furnace belongs to, the electrode plate 2 at the bottom of each heating block 1 is powered on, so that each heating block 1 works only and generates heat, the plurality of heating blocks 1 mutually transfer heat, and the heat is transferred into the crucible which the growth furnace belongs to, so that the crucible which the crystal production furnace belongs to is heated;

when one of the heater bodies 3 is damaged, only one of the heating blocks 1 is required to be disassembled.

The foregoing description of the preferred embodiments of the utility model is not intended to limit the utility model to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and principles of the utility model are intended to be included within the scope of the utility model.

Claims

1. A heater assembly for a crystal growing furnace comprising a plurality of heating blocks (1), characterized in that: the bottoms of the heating blocks (1) are provided with electrode plates (2), and the heating blocks (1) are spliced to form a circular heater body (3), wherein a splicing structure is arranged between every two heating blocks (1);

the splicing structure comprises an inserting block (4), wherein the inserting block (4) is arranged at one end of a heating block (1), a slot (5) is formed in the other end of the heating block (1), a reinforcing ring (6) is arranged at the top of a heater body (3), a plurality of threaded holes (7) are formed in the joint of the reinforcing ring (6) and the heater body (3), and bolts (8) are arranged in the threaded holes (7).

2. A heater assembly for a crystal growing furnace according to claim 1, wherein: the heating blocks (1) are arranged in an arc shape, each heating block (1) is arranged in a wave shape, and the heating blocks (1) and the electrode plates (2) are made of graphite materials.

3. A heater assembly for a crystal growing furnace according to claim 1, wherein: the plug-in block (4) is made of carbon steel, the plug-in block (4) is fixedly arranged at one end of the heating block (1), and the plug-in block (4) is matched with the slot (5) in structure.

4. A heater assembly for a crystal growing furnace according to claim 1, wherein: the outer diameter of the reinforcing ring (6) is consistent with the outer diameter of the heater body (3), and the reinforcing ring (6) is arranged on the surface of the top of the heater body (3).

5. A heater assembly for a crystal growing furnace according to claim 1, wherein: the number of the threaded holes (7) and the number of the bolts (8) are the same, and the reinforcing ring (6) is detachably connected with the heater body (3) through the bolts (8) and the threaded holes (7).