CN217869175U - Thermal field heat preservation device of single crystal furnace - Google Patents
Thermal field heat preservation device of single crystal furnace Download PDFInfo
- Publication number
- CN217869175U CN217869175U CN202220291761.7U CN202220291761U CN217869175U CN 217869175 U CN217869175 U CN 217869175U CN 202220291761 U CN202220291761 U CN 202220291761U CN 217869175 U CN217869175 U CN 217869175U
- Authority
- CN
- China
- Prior art keywords
- heat preservation
- single crystal
- heat
- thermal field
- insulation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a thermal field heat preservation device of a single crystal furnace, relating to the technical field of single crystal furnaces. The utility model discloses a heat preservation piece of quartzy material is equipped with the thermal insulation layer in the heat preservation piece, the heat preservation piece is monolithic structure or components of a whole that can function independently concatenation formula structure, be equipped with thermal insulation material in the thermal insulation layer.
Description
Technical Field
The utility model relates to a single crystal growing furnace technical field, concretely relates to single crystal growing furnace thermal field heat preservation device.
Background
The thermal field material of the single crystal furnace mainly provides heat energy and heat preservation for the growth of the straight pulling single crystal silicon rod, the whole thermal field is functionally divided into a supporting component, a heat preservation component, a functional component and a heating component, wherein the quality of the heat preservation component directly influences the power consumption cost and the yield of single crystal pulling.
In the prior art, the traditional heat preservation structure of the czochralski crystal growing furnace completely adopts a soft felt or a solid felt made of graphite fiber yarns, and the heat preservation structure has high material cost and short service life.
SUMMERY OF THE UTILITY MODEL
The utility model aims to develop a single crystal furnace thermal field heat preservation device which reduces the production and use cost and prolongs the service life.
The utility model discloses a following technical scheme realizes:
a thermal field heat preservation device of a single crystal furnace comprises:
the heat preservation piece is made of quartz;
the heat insulation layer is arranged in the heat insulation piece;
the heat insulation piece is of an integral structure or a split splicing structure, and heat insulation materials are arranged in the heat insulation layer.
Optionally, the heat insulation material in the heat insulation layer is a carbon fiber felt.
Optionally, the heat insulation material in the heat insulation layer is a ceramic fiber felt.
Optionally, the heat insulation material in the heat insulation layer is foamed ceramic.
Optionally, the heat insulation material in the heat insulation layer is a graphite fiber felt.
Optionally, the heat preservation member is in a shape of a barrel, a non-planar sheet or a flat plate.
Optionally, the heat preservation piece is of a barrel-shaped split splicing type structure, the heat preservation piece is divided into multiple parts in the circumferential direction, and splicing buckles matched with each other are arranged at two ends of each part respectively.
Optionally, the heat insulating layer has an air hole therein.
Optionally, the heat insulation layer is a vacuum layer.
The utility model has the advantages that:
the utility model discloses the outside felt of fungible traditional single crystal growing furnace thermal field heat preservation bucket, single crystal growing furnace stove bottom of a furnace felt and single crystal growing furnace thermal field upper portion high temperature lid through replacing partial single crystal growing furnace thermal field heat retaining graphite fiber felt, reaches reduction in production cost's purpose, and the quartz material is as outside substrate, forms certain protection to inside heat preservation thermal-insulated layer, improves insulation construction life to quartz material purity is higher, can reach the effect of cavity in the clean equipment.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a structural view of a barrel-shaped integrated heat-insulating member;
FIG. 2 is a structural view of a barrel-shaped split splicing type heat preservation part;
fig. 3 is an internal structure view of the barrel-shaped heat-insulating member.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments may be modified in various different ways, without departing from the spirit or scope of the invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the present invention, unless otherwise specifically stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the creation of the present invention can be understood according to specific situations by those of ordinary skill in the art.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1 to 3, the utility model discloses a single crystal furnace thermal field heat preservation device, including heat preservation 1, heat preservation 1 uses quartzy as the substrate, and heat preservation 1 is monolithic structure or components of a whole that can function independently concatenation formula structure, and monolithic heat preservation 1 is structure as an organic whole, and components of a whole that can function independently concatenation formula then forms complete heat preservation 1 through the concatenation by a plurality of components of a whole that can function independently. The shape of the heat preservation member 1 includes a barrel shape, a non-planar sheet shape and a flat plate shape.
In this embodiment, the thermal insulation member 1 is barrel-shaped and has a split splicing structure, the thermal insulation member 1 is uniformly split into four parts in the circumferential direction, and two ends of each part are respectively provided with splicing buckles 11 which are matched with each other.
The heat insulation piece 1 is internally provided with a heat insulation layer 2, the heat insulation layer 2 is internally provided with air holes 3, different air porosities can be adjusted according to the use environment, and the heat insulation layer 2 can be vacuumized to be in a vacuum state.
The heat preservation and insulation material is arranged in the heat preservation and insulation layer 2, and can be made of carbon fiber felt, ceramic fiber felt or foamed ceramic, or graphite fiber felt.
The heat preservation part 1 can be used by being mixed with the graphite fiber felt, the heat preservation part 1 is arranged outside the graphite fiber felt, the purity of the quartz material is higher, and the cleanliness of a thermal field of the single crystal furnace can be improved.
The utility model discloses the outside felt of fungible traditional single crystal growing furnace thermal field heat-preservation bucket, single crystal growing furnace stove bottom of a furnace felt and single crystal growing furnace thermal field upper portion high temperature lid through replacing partial single crystal growing furnace thermal field heat retaining graphite fiber felt, reaches reduction in production cost's purpose, and the quartz material forms certain protection to inside heat preservation insulating layer 2 as outside substrate, improves insulation construction life to quartz material purity is higher, can reach the effect of cavity in the clean equipment.
The above-mentioned embodiment is only the preferred embodiment of the present invention, and is not to the limitation of the technical solution of the present invention, as long as the technical solution can be realized on the basis of the above-mentioned embodiment without creative work, all should be regarded as falling into the protection scope of the right of the present invention.
Claims (6)
1. A thermal field heat preservation device of a single crystal furnace is characterized by comprising:
the heat preservation piece is made of quartz;
the heat insulation layer is arranged in the heat insulation piece;
the heat insulation piece is of an integral structure or a split splicing structure, a heat insulation material is arranged in the heat insulation layer, the heat insulation piece is in a barrel shape, a non-planar sheet shape or a flat plate shape, air holes are formed in the heat insulation layer, and the heat insulation layer is a vacuum layer.
2. The single crystal furnace thermal field heat preservation device according to claim 1, characterized in that the heat preservation and insulation material in the heat preservation and insulation layer is a carbon fiber felt.
3. The single crystal furnace thermal field heat preservation device according to claim 1, characterized in that the heat preservation and insulation material in the heat preservation and insulation layer is ceramic fiber felt.
4. The single crystal furnace thermal field heat preservation device according to claim 1, characterized in that the heat preservation and insulation material in the heat preservation and insulation layer is foamed ceramic.
5. The single crystal furnace thermal field heat preservation device according to claim 1, characterized in that the heat preservation and insulation material in the heat preservation and insulation layer is a graphite fiber felt.
6. The single crystal furnace thermal field heat preservation device of claim 1, wherein the heat preservation member is a barrel-shaped split splicing structure, the heat preservation member is uniformly split into multiple parts in the circumferential direction, and splicing buckles which are matched with each other are respectively arranged at two ends of each part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220291761.7U CN217869175U (en) | 2022-02-14 | 2022-02-14 | Thermal field heat preservation device of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220291761.7U CN217869175U (en) | 2022-02-14 | 2022-02-14 | Thermal field heat preservation device of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217869175U true CN217869175U (en) | 2022-11-22 |
Family
ID=84085590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220291761.7U Active CN217869175U (en) | 2022-02-14 | 2022-02-14 | Thermal field heat preservation device of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217869175U (en) |
-
2022
- 2022-02-14 CN CN202220291761.7U patent/CN217869175U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW202028548A (en) | Large-size high-purity silicon carbide single crystal, substrate, preparation method therefor and preparation device thereof | |
| CN217869175U (en) | Thermal field heat preservation device of single crystal furnace | |
| CN220132405U (en) | Crucible for single crystal growth | |
| CN203923453U (en) | Kyropoulos sapphire single-crystal furnace insulation construction | |
| CN211921742U (en) | Thermal field suspension device and single crystal furnace | |
| CN216074096U (en) | Combined outer guide cylinder for single crystal furnace | |
| CN212404353U (en) | Furnace bottom heater for single crystal furnace | |
| CN201605350U (en) | Thermal field device used for reducing crystal drawing power of single crystal furnace | |
| CN220827489U (en) | Electrode sheath, bottom heat preservation assembly and single crystal furnace | |
| CN207690774U (en) | A kind of boat piece spacing gradual change novel graphite boat | |
| CN218147036U (en) | Novel furnace bottom supporting plate for single crystal furnace and single crystal furnace | |
| CN220246329U (en) | Heat shield and semiconductor processing equipment | |
| CN221588748U (en) | Air guide oxygen reduction structure and device for single crystal furnace | |
| CN111218672A (en) | MOCVD heater | |
| CN211947285U (en) | Single crystal growing furnace keeps warm and covers structure | |
| CN204898122U (en) | Polycrystalline silicon ingot furnace | |
| CN216738632U (en) | Spliced combined crucible pot for single crystal furnace | |
| CN221522851U (en) | Heat insulation supporting rod sheath for single crystal furnace and single crystal furnace | |
| CN215366064U (en) | Combined carbon-carbon composite material bushing for single crystal furnace | |
| CN212771041U (en) | Graphite support ring for thermal field of single crystal furnace | |
| CN100371506C (en) | heat preservation device of single crystal furnace | |
| CN220103739U (en) | Composite construction insulating brick | |
| CN221480164U (en) | Tile heater structure for single crystal furnace | |
| CN221398150U (en) | Thermal insulation device made of solid felt material | |
| CN219653176U (en) | Oxygen reduction device for single crystal furnace and single crystal furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |