CN212771041U

CN212771041U - Graphite support ring for thermal field of single crystal furnace

Info

Publication number: CN212771041U
Application number: CN202021526289.8U
Authority: CN
Inventors: 申连喜; 赵永敬
Original assignee: Jiaxiang Hongrun Carbon Co ltd
Current assignee: Jiaxiang Hongrun Carbon Co ltd
Priority date: 2020-07-29
Filing date: 2020-07-29
Publication date: 2021-03-23
Anticipated expiration: 2030-07-29

Abstract

The utility model discloses a single crystal growing furnace thermal field graphite support ring, including the furnace body, the fixed heat-preserving container subassembly that is equipped with in inside of furnace body, the heat-preserving container subassembly includes that the bottom is the staving of back taper form, interior heat preservation, outer heat preservation, protective layer, and the staving sets up the inside at the furnace body through four L type connecting rods and supporting component are fixed, and the fixed cover of interior heat preservation is established in the outside of staving, and the outside of heat preservation including the fixed cover of outer heat preservation is established, and the outside of heat preservation outside is established to the fixed cover of protective layer, and the top of four L type connecting rods sets up respectively around the furnace body top, the beneficial effects: through the matching of the first support rod and the second support rod in the L-shaped connecting rod and the support assembly, the heat-insulating barrel is convenient to mount and dismount while being fixed inside the furnace body, and the L-shaped connecting rod does not need to wait for cooling, so that the time is saved.

Description

Graphite support ring for thermal field of single crystal furnace

Technical Field

The utility model relates to a graphite support ring, in particular to a graphite support ring for a thermal field of a single crystal furnace, which belongs to the technical field of monocrystalline silicon processing equipment.

Background

Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is a main functional material for developing computers and integrated circuits, but also is a main functional material for photovoltaic power generation and solar energy utilization; the single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, and at present, in the preparation process of monocrystalline silicon by a czochralski method, a thermal field device needs to be disassembled and assembled for many times, so that the labor intensity is high, and the graphite piece is easily damaged due to negligence of personnel; for the heat removal field, when the heat removal field is cooled to a certain temperature, personnel can operate the heat removal field, a large amount of time is wasted, and the efficiency of the furnace for dismounting and mounting is seriously influenced; the units also adopt the disassembly-free supporting devices, but the heat preservation effect of the units is poor, heat is easy to leak, and the power is increased in the crystal pulling process.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a graphite support ring for a thermal field of a single crystal furnace, which solves the problem that the efficiency of the furnace for disassembling and assembling is influenced by the time waste of the prior art thermal field cooling proposed in the background technology; however, the disassembly-free supporting device has poor heat insulation effect and is easy to leak heat, so that the problem of power rise in the crystal pulling process is caused.

In order to achieve the above object, the utility model provides a following technical scheme: a graphite support ring for a thermal field of a single crystal furnace comprises a furnace body, wherein a heat-insulating barrel assembly is fixedly arranged inside the furnace body, the heat-insulating barrel assembly comprises a barrel body with the bottom in a shape of an inverted frustum, an inner heat-insulating layer, an outer heat-insulating layer and a protective layer, the barrel body is fixedly arranged inside the furnace body through four L-shaped connecting rods and a support assembly, the inner heat-insulating layer is fixedly sleeved outside the barrel body, the outer heat-insulating layer is fixedly sleeved outside the inner heat-insulating layer, the protective layer is fixedly sleeved outside the outer heat-insulating layer, the top ends of the four L-shaped connecting rods are respectively arranged around the top end of the furnace body, the support assembly comprises four first support rods, four second support rods, a first support ring and a second support ring, one end of each first support rod is fixedly arranged at the top of the inner wall of the furnace body through, and one end of each second support rod is fixedly arranged in the middle of the inner wall of the furnace body through screws, the second support ring is sleeved at the bottom of the protective layer, and the bottom ends of the L-shaped connecting rods are fixedly connected with the top ends of the four first support rods respectively.

As an optimal technical scheme of the utility model, the outer lane of first supporting ring respectively with the other end fixed connection of four first bracing pieces.

As an optimized technical scheme of the utility model, the outer lane of second support ring respectively with the other end fixed connection of four second bracing pieces.

As an optimal technical scheme of the utility model, two the L type connecting rod is made by the rock wool.

As an optimal technical scheme of the utility model, interior heat preservation is made by the heat preservation felt, outer heat preservation is made by the acupuncture felt, the protective layer is made by carbon-carbon composite.

As an optimal technical scheme of the utility model, four first bracing piece, four second bracing pieces, first support ring and second support ring are made by graphite.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model relates to a single crystal growing furnace thermal field graphite support ring, through the L type connecting rod that sets up and the cooperation of first bracing piece and second bracing piece in the supporting component, be convenient for fix the heat-preserving container in the inside of furnace body the dismouting of being convenient for, and the L type connecting rod through setting up need not wait for the cooling, save time, through the cooperation of the first supporting ring and the second supporting ring and the heat-preserving container subassembly that set up, when improving the heat preservation effect, owing to the cover establish the condition that can not have the heat leakage.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a schematic sectional structure of the present invention;

fig. 3 is a schematic top view of the cross-sectional structure of the present invention.

In the figure: 1. a furnace body; 2. a heat-insulating barrel assembly; 21. a barrel body; 22. an inner insulating layer; 23. an outer insulating layer; 24. a protective layer; 3. an L-shaped connecting rod; 4. a support assembly; 41. a first support bar; 42. a second support bar; 43. a first support ring; 44. a second support ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the utility model provides a graphite support ring for thermal field of single crystal furnace, which comprises a furnace body 1, a thermal insulation barrel assembly 2 is fixedly arranged inside the furnace body 1, the thermal insulation barrel assembly 2 comprises a barrel body 21 with a bottom in a shape of inverted frustum, an inner thermal insulation layer 22, an outer thermal insulation layer 23 and a protective layer 24, the barrel body 21 is fixedly arranged inside the furnace body 1 through four L-shaped connecting rods 3 and a support assembly 4, so as to be convenient for disassembly and assembly without cooling, save time, the inner thermal insulation layer 22 is fixedly sleeved outside the barrel body 21, the outer thermal insulation layer 23 is fixedly sleeved outside the inner thermal insulation layer 22, the protective layer 24 is fixedly sleeved outside the outer thermal insulation layer 23, the top ends of the four L-shaped connecting rods 3 are respectively arranged around the top end of the furnace body 1, the support assembly 4 comprises four first support rods 41, four second support rods 42, a first support ring 43 and a second support ring 44, one end of the four first support rods 41 are, the first support ring 43 is sleeved at the bottom of the protective layer 24, one ends of the four second support rods 42 are all fixedly arranged at the middle part of the inner wall of the furnace body 1 through screws, the second support ring 44 is sleeved at the bottom of the protective layer 24, and the bottom ends of the four L-shaped connecting rods 3 are respectively fixedly connected with the top ends of the four first support rods 41, so that the disassembly and assembly are facilitated.

Preferably, the outer ring of the first support ring 43 is fixedly connected with the other ends of the four first support rods 41, the outer ring of the second support ring 44 is fixedly connected with the other ends of the four second support rods 42, the barrel body 21 is convenient to fix, the two L-shaped connecting rods 3 are made of rock wool, the inner heat-insulating layer 22 is made of heat-insulating felt, the outer heat-insulating layer 23 is made of needled felt, the protective layer 24 is made of carbon-carbon composite material, and the four first support rods 41, the four second support rods 42, the first support ring 43 and the second support ring 44 are made of graphite and are convenient to support.

When in specific use, the utility model relates to a graphite support ring for a thermal field of a single crystal furnace, which is firstly mounted at a proper position with a first support rod 41 and a second support rod 42 in a support component 4 through screws, the heat-insulating barrel component 2 is fixed in the furnace body 1 through the matching of the L-shaped connecting rod 3 and the first supporting ring 43 and the second supporting ring 44 in the supporting component 4, so that the later-stage disassembly and assembly are convenient, secondly, the first support ring 43, the second support ring 44 and the heat-preserving barrel component 2 are matched, so that the heat-preserving performance is improved, meanwhile, the heat leakage situation is solved, through the cooperation of first bracing piece 41 and L type connecting rod 3, can directly carry out the dismouting without waiting for the cooling, save time can carry out the dismouting through the screw with the cooperation of second bracing piece 42 and second support ring 44 at last, can be better fix heat-preserving container subassembly 2 in the fixed stove when using without the dismouting.

In the description of the present invention, it should be understood that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.

In the present invention, unless otherwise explicitly specified or limited, for example, it may be fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a single crystal growing furnace thermal field graphite support ring, includes furnace body (1), its characterized in that, the fixed heat-preserving container subassembly (2) that is equipped with in inside of furnace body (1), heat-preserving container subassembly (2) are including staving (21), interior heat preservation (22), outer heat preservation (23), protective layer (24) that the bottom is the back taper platform form, staving (21) are through four L type connecting rods (3) and the fixed inside that sets up in furnace body (1) of supporting component (4), the fixed outside of establishing at staving (21) of interior heat preservation (22), the outside of heat preservation (22) including outer heat preservation (23) fixed cover is established in the outside of outer heat preservation (23) is fixed to protective layer (24), four the top of L type connecting rod (3) sets up respectively around furnace body (1) top, supporting component (4) include four first bracing pieces (41), The furnace body support structure comprises four second support rods (42), a first support ring (43) and a second support ring (44), wherein four first support rods (41) are all fixed at the top of the inner wall of the furnace body (1) through screws, the bottom of the protective layer (24) is sleeved with the first support ring (43), four second support rods (42) are all fixed at the middle of the inner wall of the furnace body (1) through screws, the bottom of the protective layer (24) is sleeved with the second support ring (44), and the bottom ends of the L-shaped connecting rods (3) are respectively fixedly connected with the top ends of the four first support rods (41).

2. The graphite support ring for the thermal field of the single crystal furnace according to claim 1, wherein: the outer ring of the first support ring (43) is fixedly connected with the other ends of the four first support rods (41) respectively.

3. The graphite support ring for the thermal field of the single crystal furnace according to claim 1, wherein: the outer ring of the second support ring (44) is fixedly connected with the other ends of the four second support rods (42) respectively.

4. The graphite support ring for the thermal field of the single crystal furnace according to claim 1, wherein: the two L-shaped connecting rods (3) are made of rock wool.

5. The graphite support ring for the thermal field of the single crystal furnace according to claim 1, wherein: the inner heat-insulating layer (22) is made of heat-insulating felt, the outer heat-insulating layer (23) is made of needled felt, and the protective layer (24) is made of carbon-carbon composite material.

6. The graphite support ring for the thermal field of the single crystal furnace according to claim 1, wherein: the four first supporting rods (41), the four second supporting rods (42), the first supporting ring (43) and the second supporting ring (44) are all made of graphite.