CN215856464U - Novel furnace chassis structure - Google Patents
Novel furnace chassis structure Download PDFInfo
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- CN215856464U CN215856464U CN202121226394.4U CN202121226394U CN215856464U CN 215856464 U CN215856464 U CN 215856464U CN 202121226394 U CN202121226394 U CN 202121226394U CN 215856464 U CN215856464 U CN 215856464U
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- water retaining
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- bottom plate
- furnace chassis
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Abstract
The utility model discloses a novel furnace chassis structure, which comprises: the furnace bottom plate is provided with a crucible shaft flange in the middle; the furnace chassis water retaining strip is connected to the lower surface of the bottom plate of the furnace chassis, and a cooling water path is enclosed between the furnace chassis water retaining strip and the lower surface of the bottom plate of the furnace chassis. The utility model has the beneficial effects that: this novel stove chassis structure adopts the mode of layering connection to set up the water route of cooling usefulness, compares the mode of traditional milling flutes, under the prerequisite that satisfies all functions, has greatly reduced material cost, has also reduced the processing cost simultaneously.
Description
Technical Field
The utility model belongs to the field of single crystal production equipment, and particularly relates to a novel furnace chassis structure.
Background
The monocrystalline furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, the monocrystalline silicon is one of the most important monocrystalline materials in the world at present as a key supporting material of the modern information society, and the monocrystalline furnace is not only a main functional material for developing computers and integrated circuits, but also a main functional material for photovoltaic power generation and utilizing solar energy. The furnace chassis is an important part in single crystal furnace equipment and plays the roles of bearing, ventilating, cooling and the like. The structure of the machine needs to contain a cooling water channel, the traditional processing method generally adopts a mode of milling grooves on a bottom plate, and the material and processing cost is high
In summary, in order to solve the existing technical problems, the utility model designs a novel furnace chassis structure which is simple in structure, saves cost and simplifies the production process.
Disclosure of Invention
The utility model designs a novel furnace chassis structure which is simple in structure, saves cost and simplifies the production process in order to solve the prior technical problems.
The purpose of the utility model can be realized by the following technical scheme:
a novel furnace chassis structure comprising:
the furnace bottom plate is provided with a crucible shaft flange in the middle;
the furnace chassis water retaining strip is connected to the lower surface of the bottom plate of the furnace chassis, and a cooling water path is enclosed between the furnace chassis water retaining strip and the lower surface of the bottom plate of the furnace chassis;
the furnace bottom plate is characterized in that a plurality of annular furnace bottom plate water retaining strips are arranged below the furnace bottom plate, the furnace bottom plate water retaining strips corresponding to the lower part of the crucible shaft flange are first water retaining strips, the furnace bottom plate water retaining strips corresponding to the edge of the furnace bottom plate are second water retaining strips, vertical water retaining strips are communicated between the first water retaining strips and the second water retaining strips, the furnace bottom plate water retaining strips are communicated with the vertical water retaining strips, and one ends, close to the edge of the furnace bottom plate, of the vertical water retaining strips are water inlets.
Further, an electrode flange and a vacuum pipeline flange are arranged on the bottom plate of the furnace chassis outside the crucible flange, a first surrounding water retaining strip is correspondingly arranged on the electrode flange, a second surrounding water retaining strip is correspondingly arranged on the vacuum pipeline flange, and a third water retaining strip is connected in series between the first surrounding water retaining strip and the second surrounding water retaining strip.
Furthermore, a fourth water retaining strip is arranged between the third water retaining strip and the first water retaining strip.
Furthermore, a fifth water retaining strip is arranged between the third water retaining strip and the second water retaining strip.
Further, a furnace chassis cover plate is arranged below the furnace chassis water retaining bar.
Compared with the prior art, the utility model has reasonable structure and arrangement: this novel stove chassis structure adopts the mode of layering connection to set up the water route of cooling usefulness, compares the mode of traditional milling flutes, under the prerequisite that satisfies all functions, has greatly reduced material cost, has also reduced the processing cost simultaneously.
Drawings
FIG. 1 is a schematic view of the overall structure of the novel furnace chassis structure;
FIG. 2 is a schematic side view of the novel furnace base plate structure;
referring to fig. 1-2, wherein: 1. a furnace chassis floor; 11. a crucible shaft flange; 12. an electrode flange; 13. A vacuum pipe flange; 2. a furnace chassis water bar; 21. a first water bar; 22. a second water stop strip; 23. a third water retaining strip; 231. the first surrounding water retaining strip; 232. the second surrounds the water bar; 24. a fourth water bar; 25. A fifth water bar; 26. a vertical water retaining strip; 261. a water inlet; 3. a furnace chassis cover plate.
Detailed Description
The technical solution of the present invention is further illustrated by the following examples. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The first embodiment is as follows:
a novel furnace chassis structure comprising:
the furnace bottom plate 1 is characterized in that a crucible shaft flange 11 is arranged in the middle of the furnace bottom plate 1;
the furnace chassis water retaining strip 2 is connected to the lower surface of the furnace chassis bottom plate 1, and a cooling water path is enclosed between the furnace chassis water retaining strip 2 and the lower surface of the furnace chassis bottom plate 1;
a plurality of annular furnace chassis water retaining strips 2 are arranged below the furnace chassis bottom plate 1, the furnace chassis water retaining strips 2 corresponding to the lower part of the crucible shaft flange 11 are first water retaining strips 21, the furnace chassis water retaining strips 2 corresponding to the edge of the furnace chassis bottom plate 1 are second water retaining strips 22, vertical water retaining strips 26 are communicated between the first water retaining strips 21 and the second water retaining strips 22, the furnace chassis water retaining strips 2 are communicated with the vertical water retaining strips 26, and one ends, close to the edge of the furnace chassis bottom plate 1, of the vertical water retaining strips 26 are water inlets 261.
Specifically, cooling water can be introduced into a cooling water channel formed by enclosing the furnace chassis water retaining strip 2 and the furnace chassis base plate 1 to cool the furnace chassis base plate 1 and equipment arranged on the furnace chassis base plate 1, so that the furnace chassis water retaining strip 2 is prevented from being burnt out due to overhigh temperature, and compared with a common mode of milling grooves on the base plate, the furnace chassis water retaining strip 2 is connected to the lower part of the furnace chassis base plate 1 in modes of welding and the like, so that the processing is more convenient and quicker, the materials are saved, and the processing cost is low; when the cooling device is used, cooling water is injected into the vertical water retaining strips 26 through the water inlet 261, the vertical water retaining strips 26 guide and distribute the cooling water into the furnace chassis water retaining strips 2 below the furnace chassis bottom plate 1 to effectively cool the furnace chassis bottom plate 1, and if the first water retaining strips 21 guide the cooling water, a crucible shaft connected with the crucible shaft flange 11 can be cooled.
Example two:
the difference between the second embodiment and the first embodiment is that the furnace base plate 1 is provided with an electrode flange 12 and a vacuum pipeline flange 13 on the outer side of the crucible flange 11, the electrode flange 12 is correspondingly provided with a first surrounding water retaining strip 231, the vacuum pipeline flange 13 is correspondingly provided with a second surrounding water retaining strip 232, and a third water retaining strip 23 is connected in series between the first surrounding water retaining strip 231 and the second surrounding water retaining strip 232.
Specifically, electrode flange 12 is used for connecting heating electrode, and vacuum tube flange 13 is used for connecting the evacuation pipe, and the leading-in cooling water of first manger plate strip 231 of encircleing can cool off heating electrode, and the leading-in cooling water of second manger plate strip 232 can cool off evacuation pipe, and the leading-in cooling water of third manger plate strip 23 can be with the leading-in first manger plate strip 231 of encircleing of cooling water and the second encircleing in the manger plate strip 232, and the leading-in cooling water of third manger plate strip 23 also can cool off furnace chassis bottom plate.
Example three:
the third embodiment is different from the second embodiment in that a fourth water bar 24 is disposed between the third water bar 23 and the first water bar 21.
A fifth water retaining strip 25 is arranged between the third water retaining strip 23 and the second water retaining strip 22.
Specifically, the fourth water bar 24 and the fifth water bar 25 can guide cooling water to cool the bottom plate of the furnace chassis in a large area.
Example four:
the fourth embodiment is different from the first embodiment in that a furnace chassis cover plate 3 is arranged below the furnace chassis water retaining strip 2.
Specifically, the furnace base plate cover plate 3 can cover the furnace bottom plate water retaining strip 2 from the lower part, so that the furnace base plate water retaining strip 2 is protected, and the condition of breakage and water leakage is avoided.
What has been described herein is merely a preferred embodiment of the utility model, and the scope of the utility model is not limited thereto. Modifications, additions, or substitutions by those skilled in the art to the specific embodiments described herein are intended to be within the scope of the utility model.
Claims (5)
1. A novel furnace chassis structure, its characterized in that includes:
the furnace bottom plate is provided with a crucible shaft flange in the middle;
the furnace chassis water retaining strip is connected to the lower surface of the bottom plate of the furnace chassis, and a cooling water path is enclosed between the furnace chassis water retaining strip and the lower surface of the bottom plate of the furnace chassis;
the furnace bottom plate is characterized in that a plurality of annular furnace bottom plate water retaining strips are arranged below the furnace bottom plate, the furnace bottom plate water retaining strips corresponding to the lower part of the crucible shaft flange are first water retaining strips, the furnace bottom plate water retaining strips corresponding to the edge of the furnace bottom plate are second water retaining strips, vertical water retaining strips are communicated between the first water retaining strips and the second water retaining strips, the furnace bottom plate water retaining strips are communicated with the vertical water retaining strips, and one ends, close to the edge of the furnace bottom plate, of the vertical water retaining strips are water inlets.
2. The novel furnace chassis structure as claimed in claim 1, wherein the furnace chassis base plate is provided with an electrode flange and a vacuum pipeline flange on the outer side of the crucible flange, the electrode flange is correspondingly provided with a first surrounding water bar, the vacuum pipeline flange is correspondingly provided with a second surrounding water bar, and a third water bar is connected in series between the first surrounding water bar and the second surrounding water bar.
3. The novel furnace chassis structure as claimed in claim 2, wherein a fourth water bar is arranged between the third water bar and the first water bar.
4. The novel furnace chassis structure as claimed in claim 2, wherein a fifth water retaining strip is arranged between the third water retaining strip and the second water retaining strip.
5. The novel furnace chassis structure as claimed in claim 1, wherein a furnace chassis cover plate is arranged below the furnace chassis water bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121226394.4U CN215856464U (en) | 2021-06-02 | 2021-06-02 | Novel furnace chassis structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121226394.4U CN215856464U (en) | 2021-06-02 | 2021-06-02 | Novel furnace chassis structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215856464U true CN215856464U (en) | 2022-02-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121226394.4U Active CN215856464U (en) | 2021-06-02 | 2021-06-02 | Novel furnace chassis structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114808145A (en) * | 2022-05-05 | 2022-07-29 | 倪建刚 | Quick cooling single crystal furnace chassis and use method thereof |
| CN116604163A (en) * | 2023-05-19 | 2023-08-18 | 迪森(常州)能源装备有限公司 | Silicon carbide furnace and welding process thereof |
-
2021
- 2021-06-02 CN CN202121226394.4U patent/CN215856464U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114808145A (en) * | 2022-05-05 | 2022-07-29 | 倪建刚 | Quick cooling single crystal furnace chassis and use method thereof |
| CN114808145B (en) * | 2022-05-05 | 2024-04-12 | 倪建刚 | Single crystal furnace chassis capable of rapidly cooling and application method thereof |
| CN116604163A (en) * | 2023-05-19 | 2023-08-18 | 迪森(常州)能源装备有限公司 | Silicon carbide furnace and welding process thereof |
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