CN205863207U - A kind of chain type transmission system - Google Patents
A kind of chain type transmission system Download PDFInfo
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- CN205863207U CN205863207U CN201620743670.7U CN201620743670U CN205863207U CN 205863207 U CN205863207 U CN 205863207U CN 201620743670 U CN201620743670 U CN 201620743670U CN 205863207 U CN205863207 U CN 205863207U
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- support plate
- transmission system
- chain type
- automatization
- cavity
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
This utility model relates to manufacture of solar cells technical field, it is provided that a kind of chain type transmission system.This chain type transmission system includes lower transmission system, and automatization's feeding platform, evacuation cavity, process cavity, venting cavity and the automatization's blanking bench being sequentially connected with；Described lower transmission system is connected with described automatization blanking bench and automatization's feeding platform respectively, is provided with support plate caching cooling stage between described automatization blanking bench and described venting cavity.The chain type transmission system that this utility model provides use buffer unit support plate can be made to have certain time of staying to make support plate cool down at this unit, support plate can be received and kept at loading and unloading station or other transmission station when sending out fault simultaneously, the support plate coming into vacuum is made to complete technical process, the support plate completing to process is cached, avoid the generation of waste product, also save the time of restarting；There is the advantage that productivity ratio is high and yield rate is high.
Description
Technical field
This utility model relates to manufacture of solar cells technical field, especially relates to a kind of chain type transmission system.
Background technology
Plasma (Plasma) is a kind of phenomenon that gas discharges under electric field action, plasma generator (also known as etc.
Ion source) it is a kind of device producing plasma under the conditions of conditions of certain gas flow, pressure, temperature, exciting power etc..Its phase
When in a chemical reaction system strengthened with electric power, to chemical gaseous phase deposition plating (PECVD), chemical reaction plasma surface
Etching (RIE) can produce various special result, is widely used in including quasiconductor, liquid crystal display, solaode electronics material
The production of material.
Produce baseplate material to enable plasma to be continually used for, need to configure one and can carry out base in vacuum
The system of plate transmission, and outside vacuum, carry out the exchange of substrate.It is illustrated in figure 1 existing chain type vacuum and continuously transmits work
Process flow figure, it may be used for the production technology of crystal-silicon battery slice.Such as: PECVD is (English entitled: Plasma Enhanced
Chemical Vapor Deposition, Chinese is entitled: plasma enhanced chemical vapor sedimentation) plated film silicon nitride (SiN),
Aluminium oxide (AlO), non-crystalline silicon (a-Si) etc..Can be used for plasma vacuum etching (also referred to as RIE dry method making herbs into wool) etc..Very
In empty plated film production process, substrate silicon chip is placed on support plate, and support plate is through evacuating cavity, and evacuation adding in this cavity
Heat；Just can enter process cavity after reaching vacuum and process cavity balance and carry out PECVD plated film；Vacuum state is entered after plated film
Venting cavity, just can be shifted out after in air discharge cavity, qi of chong channel ascending adversely is backfilling into atmospheric pressure.Similarly, in vacuum etching process,
Silicon chip is placed on support plate, and support plate enters vacuum through evacuating chamber evacuation, carries out plasma dry subsequently into process cavity
Making herbs into wool, enters after completing making herbs into wool after air discharge cavity body amplifies gas to go out to carry.Two kinds of equipment is different with heating steps except technique, other mistake
Journey is closely similar.
Ion processes equipment under existing chain type transmission conditions, including automatization's feeding platform, evacuation cavity, process cavity
Body, venting cavity, support plate cooling stage, automatization's blanking bench and lower transmission system.
Described evacuation cavity while being provided with first family of power and influence, evacuation cavity another side is provided with second family of power and influence, air discharge cavity
Body while being provided with the 3rd family of power and influence, venting cavity another side be provided with the 4th family of power and influence, process cavity front end be provided with buffering cavity one,
The front end of venting cavity is provided with buffering cavity two, is provided with and can produces the device of plasma and enter technique in described process cavity
The device of gas.
In this chain equipment running, support plate is entered continuously and out, altogether needs more than 7 pieces of support plates to reach one
Continual operation, makes the amount of silicon of production maximize, effectively utilizes apparatus and process ability.Every piece of support plate can be with holding multiple pieces
Silicon chip, is decided by the length and width size of the support plate of equipment.Place and take off silicon chip to have been distinguished by automatization's loader and unloading piece machine
Become.
From evacuate chamber, process cavity, to air discharge cavity, simultaneously with the presence of 3-4 block support plate, once equipment breaks down, especially
Silicon chip automatic blanking process or transmission are broken down, and process operation must stop, because relieving platform can only place one piece of support plate.
But coming into the support plate in vacuum cavity body to need not stop continuously to process, once stop, the silicon chip in cavity body just damages
Bad, affect yield rate, and restart and just take a lot of time.
Utility model content
Solve the technical problem that
The purpose of this utility model is to provide chain type transmission system, to solve in prior art in running, one
Denier breaks down, and technique must be stopped, but the support plate in cavity body needs continuous processing to process, and otherwise may make to suspend
Silicon chip in cavity body damages, and affects yield rate, also can extend the time restarted and difficult technology problem.
Technical scheme
For solving above-mentioned technical problem, the chain type transmission system that this utility model provides includes: under transmit system, and successively
Automatization's feeding platform, evacuation cavity, process cavity, venting cavity and the automatization's blanking bench connected；Described lower transmission system
It is connected with described automatization blanking bench and automatization's feeding platform respectively, sets between described automatization blanking bench and described venting cavity
It is equipped with support plate caching cooling stage.
Further, described support plate caching cooling stage includes that frame and the Guan Bi chamber being arranged in frame and caching are single
Unit；Being provided with the transmission unit for horizontal transport support plate in described Guan Bi chamber, buffer unit corresponds to described transmission unit
Vertical direction be arranged in described Guan Bi chamber, and can move in the vertical direction for caching described support plate with support plate.
Further, described Guan Bi chamber includes multiple sealing plate, is arranged at the described sealing at described Guan Bi chamber two ends
The opening come in and gone out for described support plate it is provided with on plate.I.e. it is arranged on the sealing plate at Guan Bi two ends, chamber left and right and is provided with out
Mouthful.
Further, also include being arranged on described Guan Bi chamber and be provided with through hole, be used for discharge of bleeding.In order to prevent work
Process gases long term accumulation, can produce unhealthy environment, also includes the exhaust flange being arranged on described airtight cavity room.Degassing method
Orchid is arranged at the top of Guan Bi chamber and connects with through hole, by factory service exhaust system, residual gas is emitted.
Further, described transmission unit includes the conveying roller being arranged in described frame, it is possible to by described support plate from
Described automatization blanking bench moves on the bracket of described buffer unit.
Further, multiple described brackets constitute multiple stations, and described support plate is positioned at described station, and described bracket passes through
Cylinder drives and moves in the vertical direction.
Further, described cylinder is provided with solenoid electric valve, it is possible to control described bracket and drive described support plate upper and lower
Mobile.
Further, the sensor arranged corresponding to described buffer unit, described sensor and central controller are also included
Connect.Support plate is passed to corresponding station, sensor-triggered by conveying roller, and cylinder solenoid electric valve obtains electric, and cylinder rises, and caches one
Block support plate.
In order to process cavity support plate out is cooled down, further, also include arranging corresponding to described support plate
Fan.
In order to preferably support plate be lowered the temperature, further, the plate-type heat-exchange arranged corresponding to described fan is also included
Device.Plate type heat exchanger is contained in below the suction opeing of fan, can reduce convulsion temperature, reach cooling effect.
Beneficial effect
Using technique scheme, this utility model has the advantages that the chain type transmission that this utility model provides
System includes lower transmission system, and be sequentially connected with automatization's feeding platform, evacuation cavity, process cavity, venting cavity and from
Dynamicization blanking bench；Described lower transmission system is connected with described automatization blanking bench and automatization's feeding platform respectively, described automatization
Support plate caching cooling stage it is provided with between blanking bench and described venting cavity.The chain type transmission system that this utility model provides is adopted
Support plate can be made to have certain time of staying to make support plate cool down at this unit with buffer unit, simultaneously loading and unloading station or other
Transmission station can receive and keep support plate when sending out fault, makes the support plate coming into vacuum complete technical process, will complete the support plate processed
It is cached, it is to avoid the generation of waste product, also saves the time of restarting；There is the advantage that productivity ratio is high and yield rate is high.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model detailed description of the invention or technical scheme of the prior art are below by right
In detailed description of the invention or description of the prior art, the required accompanying drawing used is briefly described, it should be apparent that, describe below
In accompanying drawing be embodiments more of the present utility model, for those of ordinary skill in the art, do not paying creativeness
On the premise of work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
The process chart of the chain type continuous transmission system that Fig. 1 provides for this utility model background technology；
The structural representation of support plate caching cooling stage in the chain type transmission system that Fig. 2 provides for this utility model embodiment；
Fig. 3 is the A-A sectional view of Fig. 2；
Fig. 4 is the B-B sectional view of Fig. 2；
Cylinder and the structural representation of bracket in the chain type transmission system that Fig. 5 provides for this utility model embodiment；
The process chart of the chain type transmission system that Fig. 6 provides for this utility model embodiment.
Reference:
1-exhaust flange；2-seals lucite；3-fan；
4-plate type heat exchanger；5-support plate；6-cylinder；
7-conveying roller；8-bracket.
Detailed description of the invention
Below in conjunction with accompanying drawing, the technical solution of the utility model is clearly and completely described, it is clear that described
Embodiment is a part of embodiment of this utility model rather than whole embodiments.Based on the embodiment in this utility model, this
The every other embodiment that field those of ordinary skill is obtained under not making creative work premise, broadly falls into this practicality
Novel protected scope.
In description of the present utility model, it should be noted that term " " center ", " on ", D score, "left", "right", " hang down
Directly ", " level ", " interior ", the orientation of the instruction such as " outward " or position relationship be based on orientation shown in the drawings or position relationship, be only
Must have specific for the ease of describing this utility model and simplification description rather than instruction or the device of hint indication or element
Orientation, with specific azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.Additionally, term " the
One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that instruction or hint relative importance.
In description of the present utility model, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", should be interpreted broadly " being connected ", " connection ", for example, it may be fix connection, it is also possible to be to removably connect, or integratedly
Connect；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Language concrete meaning in this utility model.
Embodiment one
The chain type transmission system that this utility model provides as shown in Figure 6 includes lower transmission system, and be sequentially connected with automatic
Change feeding platform, evacuation cavity, process cavity, venting cavity and automatization's blanking bench；Described lower transmission system is respectively with described
Automatization's blanking bench and automatization's feeding platform connect, and be provided with support plate and delay between described automatization blanking bench and described venting cavity
Deposit cooling stage.The chain type transmission system that this utility model provides use buffer unit can continue to technique, true coming into
Empty support plate completes technical process, is cached by the support plate completing to process, then cools down.Support plate caching cooling stage is used to substitute existing
Some support plate cooling stage, it is to avoid the generation of waste product, also saves the time of restarting；Have that productivity ratio is high and that yield rate is high is excellent
Point.
The structural representation of support plate caching cooling stage in the chain type transmission system that Fig. 2 provides for this utility model embodiment,
Fig. 3 is the A-A sectional view of Fig. 2, and Fig. 4 is the B-B sectional view of Fig. 2, and the chain type transmission that Fig. 5 provides for this utility model embodiment is
Cylinder and the structural representation of bracket in system；As shown in Figures 2 to 5, described support plate caching cooling stage includes frame and is arranged at
Guan Bi chamber in frame and buffer unit；It is provided with the transmission unit for horizontal transport support plate in described Guan Bi chamber, slow
Memory cell is arranged in described Guan Bi chamber corresponding to the vertical direction of described transmission unit, and can be with support plate along Vertical Square
It is used for caching described support plate to movement.Buffer unit can move in the vertical direction for caching described support plate.
Buffer unit is arranged in described Guan Bi chamber corresponding to described transmission unit, and can move in the vertical direction use
In caching described support plate.In the chain type transmission system that this utility model provides, buffer unit will be carried by vertically mobile
Plate is placed on buffer unit.
Described Guan Bi chamber in the present embodiment one includes multiple sealing plate, sealing plate can for being sealed with machine glass 2, if
It is placed on the described sealing lucite 2 at described Guan Bi chamber two ends and is provided with the opening come in and gone out for described support plate.I.e. arrange
It is provided with opening on the sealing lucite 2 at Guan Bi two ends, chamber left and right.
Described in the chain type transmission system that this utility model provides, transmission unit includes the transmission being arranged in described frame
Roller 7, conveying roller 7 can carry out the transmission of horizontal direction by rotating to support plate, i.e. left and right directions, by described support plate from institute
State automatization's blanking bench to move on the bracket of described buffer unit.
Buffer unit described in the present embodiment one is the bracket 8 flushed with described transmission unit, the bracket 8 of caching support plate
Quantity can be determined according to the total number of carrying plates in vacuum technology cavity, and conventional design needs to cache four support plates altogether.Multiple
Described bracket constitutes multiple stations, and described support plate is positioned at described station, and described bracket is driven by cylinder and vertically moves
Dynamic.I.e. bracket 8 rises to the position flushed with conveying roller 7, and first support plate out transmits to Guan Bi from vacuum technology cavity
In chamber, to bracket 8.Bracket 8 drives first support plate to decline, and places second bracket 8, on bracket 8 above bracket 8
Rise, second support plate reaches on second bracket 8, and second bracket 8 drives support plate to decline, the like can cache four loads
Plate.This utility model is not limited to four support plates can also arrange the quantity of bracket according to demand.Promoted step by step by cylinder,
Polylith support plate 5 can be stored on storage bed.Being declined step by step by cylinder, support plate 5 returns to transmit horizontal level, support plate
Carry out, carry out blanking circulation, continue to produce.
Buffer unit described in the present embodiment is driven by cylinder 6 and moves in the vertical direction.
The solenoid electric valve for controlling Telescopic-cylinder it is provided with, it is possible to control on described cylinder 6 in the present embodiment one
Described bracket drives described support plate to move up and down.
The chain type transmission system that this utility model provides also includes the sensor arranged corresponding to described buffer unit, institute
State sensor to be connected with central controller, the existence of sensor energy perception support plate, and inform central controller.Conveying roller 7
Support plate passes to corresponding station, and during such as the middle part of carrier plate transmission to bracket 8, sensor-triggered, cylinder solenoid electric valve obtains
Electricity, cylinder 6 rises, and caches one piece of support plate.When equipment fault releases, support plate passes sequentially through conveying roller 7 and removes chain type and transmit and is
System.
In the process cavity of support plate dual frequency plasma generator under the conditions of chain type, process cavity two ends are provided with support plate and enter
The opening gone out, support plate is between high frequency RF power source and low frequency radio frequency power supply.Process cavity connects with vacuum pump, on support plate
Silicon chip needs processing, by plasma reaction, thus obtains the device architecture of needs, in the fully out heating region of support plate
Depart from roller later and leave from the other end of process cavity.Enter Guan Bi chamber, in the case of needs suspend, open sensing
Device, support plate is passed to corresponding station by conveying roller, and sensor transmits a signal to solenoid electric valve unlatching cylinder 6 and delays
Deposit, thus form the uninterrupted chain type condition produced, it is to avoid the generation of waste product, also save the time of restarting.
Being made up of pair of parallel plate in process cavity, the first battery lead plate of parallel-plate connects high frequency RF power source, the second electricity
Pole plate connects low frequency radio frequency power supply, and the second battery lead plate is connected by one or more rollers or conduction brush etc. with support plate.Support plate can
To enter from one end of vacuum equipment, through plasma generator region, then leave from the other end of process cavity.Enter caching
In the Guan Bi chamber of platform.
Embodiment two
Can be with the process gas of residual owing to just going out silicon chip on the support plate carried, process gas long-term accumulated can produce and not be good for
Health environment, needs air draft.In order to prevent process gas long term accumulation, the present embodiment two also includes be arranged at described Guan Bi chamber
On be provided with through hole, be used for discharge of bleeding.In order to prevent process gas long term accumulation, unhealthy environment can be produced, also include setting
It is placed in the exhaust flange 1 on described airtight cavity room.Exhaust flange 1 is arranged at the top of Guan Bi chamber and connects with through hole, passes through
Factory service exhaust system emits residual gas.
In the present embodiment two, exhaust flange 1 is arranged at the top of Guan Bi chamber, as the suction interface of Guan Bi chamber, passes through
Factory service exhaust system, can extract out the gas in Guan Bi chamber and residual gas is emitted.Other are with embodiment one.
Embodiment three
Owing to support plate is heat, in order to cool down process cavity support plate out, it is right also to include in the present embodiment three
The fan 3 that support plate described in Ying Yu is arranged.I.e. fan 3 is arranged at the lower section of support plate.
Further, in order to preferably support plate be lowered the temperature, the present embodiment three also includes set corresponding to described fan 3
The plate type heat exchanger 4 put.Plate type heat exchanger 4 is contained in below the suction opeing of fan 3, can reduce convulsion temperature, reaches cooling effect
Really.Plate type heat exchanger can also be the heat exchanger being capable of cooling of other forms.
Embodiment four
Automatization's feeding platform and automatization's blanking bench are in same one end, and situation one sequentially passes through loading chamber end for support plate, passes down
Communication system, lifting platform, automatization's blanking bench, automatization's feeding platform are finally to loading chamber.Situation two is passed through in unloading chamber for support plate
End i.e. air discharge cavity, support plate caching cooling stage, automatization's blanking bench, automatization's feeding platform, lifting platform are finally to lower transmission system.
When the chain type transmission system that this utility model provides uses, support plate Jin Guo automatization feeding platform, evacuation chamber successively
Body and process cavity, when going out to carry equipment fault in process cavity, sensor is opened, and support plate is passed to corresponding work by conveying roller 7
Position, during such as the middle part of carrier plate transmission to bracket 8, sensor-triggered, cylinder solenoid electric valve obtains electric, and cylinder 6 rises, caching
One piece of support plate.Equipment fault release time, support plate pass sequentially through conveying roller 7 remove chain type transmission system enter venting cavity and from
Dynamicization blanking bench.Exhaust flange 1 can be opened when needing and steam is extracted, or use fan 3 support plate to be dispelled the heat, also
Heat exchanger can be arranged as required to.
In sum, the chain type transmission system that this utility model provides includes lower transmission system, and be sequentially connected with automatic
Change feeding platform, evacuation cavity, process cavity, venting cavity and automatization's blanking bench；Described lower transmission system is respectively with described
Automatization's blanking bench and automatization's feeding platform connect, and be provided with support plate and delay between described automatization blanking bench and described venting cavity
Deposit cooling stage.The chain type transmission system that this utility model provides use buffer unit support plate can be made to have certain at this unit
The time of staying makes support plate cool down, and can receive and keep support plate at loading and unloading station or other transmission station simultaneously, make when sending out fault
The support plate entering vacuum completes technical process, is cached by the support plate completing to process, it is to avoid the generation of waste product, also saves
The startup time；There is the advantage that productivity ratio is high and yield rate is high.
Last it is noted that various embodiments above is only in order to illustrate the technical solution of the utility model, rather than it is limited
System；Although being described in detail this utility model with reference to foregoing embodiments, those of ordinary skill in the art should
Understand: the technical scheme described in foregoing embodiments still can be modified by it, or to the most some or all of
Technical characteristic carries out equivalent；And these amendments or replacement, do not make the essence of appropriate technical solution depart from this practicality new
The scope of type each embodiment technical scheme.
Claims (10)
1. chain type transmission system, it is characterised in that including: under transmit system, and be sequentially connected with automatization's feeding platform, take out
Vacuum cavity, process cavity, venting cavity and automatization's blanking bench；Described lower transmission system respectively with described automatization blanking bench
And automatization's feeding platform connects, between described automatization blanking bench and described venting cavity, it is provided with support plate caching cooling stage.
Chain type the most according to claim 1 transmission system, it is characterised in that described support plate caching cooling stage include frame and
The Guan Bi chamber being arranged in frame and buffer unit；The transmission list for horizontal transport support plate it is provided with in described Guan Bi chamber
Unit, buffer unit is arranged in described Guan Bi chamber corresponding to the vertical direction of described transmission unit, and can be with support plate edge
Vertical direction moves for caching described support plate.
Chain type the most according to claim 2 transmission system, it is characterised in that described Guan Bi chamber includes multiple sealing plate,
It is arranged on the described sealing plate at described Guan Bi chamber two ends and is provided with the opening come in and gone out for described support plate.
Chain type the most according to claim 3 transmission system, it is characterised in that also include being arranged on described Guan Bi chamber and set
It is equipped with through hole, is used for discharge of bleeding.
Chain type the most according to claim 2 transmission system, it is characterised in that described transmission unit includes being arranged at described machine
Conveying roller on frame, it is possible to described support plate is moved to the bracket of described buffer unit from described automatization blanking bench.
Chain type the most according to claim 5 transmission system, it is characterised in that multiple described brackets constitute multiple stations, institute
Stating support plate and be positioned at described station, described bracket is driven by cylinder and moves in the vertical direction.
Chain type the most according to claim 6 transmission system, it is characterised in that be provided with solenoid electric valve on described cylinder,
Can control described bracket drives described support plate to move up and down.
Chain type the most according to claim 7 transmission system, it is characterised in that also include arranging corresponding to described buffer unit
Sensor, described sensor is connected with central controller.
Chain type the most according to claim 2 transmission system, it is characterised in that also include the wind arranged corresponding to described support plate
Fan.
Chain type the most according to claim 9 transmission system, it is characterised in that also include arranging corresponding to described fan
Plate type heat exchanger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620743670.7U CN205863207U (en) | 2016-07-14 | 2016-07-14 | A kind of chain type transmission system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620743670.7U CN205863207U (en) | 2016-07-14 | 2016-07-14 | A kind of chain type transmission system |
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| Publication Number | Publication Date |
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| CN205863207U true CN205863207U (en) | 2017-01-04 |
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ID=57647178
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| CN201620743670.7U Active CN205863207U (en) | 2016-07-14 | 2016-07-14 | A kind of chain type transmission system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957925A (en) * | 2016-07-14 | 2016-09-21 | 常州比太科技有限公司 | Chain transmission system |
| CN113066745A (en) * | 2021-03-26 | 2021-07-02 | 江苏大学 | Reactive ion etching device and method for continuously preparing large-area nano suede |
-
2016
- 2016-07-14 CN CN201620743670.7U patent/CN205863207U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957925A (en) * | 2016-07-14 | 2016-09-21 | 常州比太科技有限公司 | Chain transmission system |
| CN113066745A (en) * | 2021-03-26 | 2021-07-02 | 江苏大学 | Reactive ion etching device and method for continuously preparing large-area nano suede |
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