CN211522367U - Water-cooling heat shield structure of single crystal furnace - Google Patents
Water-cooling heat shield structure of single crystal furnace Download PDFInfo
- Publication number
- CN211522367U CN211522367U CN201922388746.5U CN201922388746U CN211522367U CN 211522367 U CN211522367 U CN 211522367U CN 201922388746 U CN201922388746 U CN 201922388746U CN 211522367 U CN211522367 U CN 211522367U
- Authority
- CN
- China
- Prior art keywords
- water
- heat shield
- cooling heat
- cooling
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a single crystal growing furnace technical field just discloses a water-cooling heat shield structure of single crystal growing furnace, including water-cooling heat shield body, the inside of water-cooling heat shield body is provided with the inner shield. This water-cooling heat shield structure of single crystal growing furnace, through setting up the water-cooling heat shield body, the water-cooling heat shield body is taken away the heat on the water-cooling heat shield body inner wall fast through the recirculated cooling water in the water course, form the passageway that a heat gived off fast, can create a temperature space that is favorable to the crystallization better, thereby accelerate the crystallization rate of crystal bar, shorten the growth time of crystal bar, improve crystal pulling efficiency, through setting up hot melt board and heat-conducting plate, the inside cooling rate of multiplicable water-cooling heat shield body, be aluminum plate and copper respectively because of hot melt board and heat-conducting plate, the cooling and the heat absorption effect of aluminum plate and copper are better, the cooling rate of multiplicable this structure, make the production rate of crystallization higher, the production efficiency of this structure also can be higher, the cost also has certain decline.
Description
Technical Field
The utility model relates to a single crystal growing furnace technical field specifically is a water-cooling heat shield structure of single crystal growing furnace.
Background
The monocrystalline furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, the monocrystalline silicon is also a basic raw material in the photovoltaic power generation and semiconductor industries, the monocrystalline silicon is used as a key supporting material of the modern information society, is one of the most important monocrystalline materials in the world at present, not only is a main functional material for developing computers and integrated circuits, but also is a main functional material for photovoltaic power generation and utilizing solar energy, and the water-cooling heat shield structure for the monocrystalline furnace has the following functions: in the process of drawing the monocrystalline silicon, the cooling speed of the crystal bar is accelerated through the water-cooling heat shield structure, so that the drawing speed is improved, and the cost of the monocrystalline silicon is reduced.
The existing single crystal growing furnace generally adopts a straight-tube type water cooling jacket cooling mode and mainly cools through a water cooling way, and has the defects that the heat dissipated to the inner wall of the water cooling jacket through heat radiation in unit time is limited, and the argon can not be fully utilized to take away the heat, so that the efficiency of a water cooling heat shield is not high enough, and the problem provided by the water cooling heat shield structure of the single crystal growing furnace is solved.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
The utility model provides a not enough to prior art, the utility model provides a water-cooling heat shield structure of single crystal growing furnace possesses advantages such as cooling efficiency height, has solved present single crystal growing furnace and has generally adopted straight cartridge type water-cooling jacket cooling method, mainly still cools off through this way of water-cooling, and its shortcoming is that it is limited to give off the heat of water-cooling jacket inner wall through heat radiation in the unit interval, can not make full use of argon gas take away the heat moreover for the efficiency of water-cooling heat shield is problem high inadequately.
(II) technical scheme
For the purpose that realizes above-mentioned cooling efficiency is high, the utility model provides a following technical scheme: the utility model provides a water-cooling heat shield structure of single crystal growing furnace, includes water-cooling heat shield body, the inside of water-cooling heat shield body is provided with the inner shield, and the outside of water-cooling heat shield body is provided with the outer shield, the inner wall fixed mounting of water-cooling heat shield body has solid fixed ring, and solid fixed ring's top fixed mounting has the hot melt board with inner shield fixed connection, and solid fixed ring's top fixed mounting has the heat-conducting plate with hot melt board fixed connection, the top outside fixed mounting of water-cooling heat shield body has the connector, and the top left side movable mounting of connector has the inlet tube, and the top right side fixed mounting of connector has the outlet pipe, and the equal movable mounting in both sides in bottom of connector has the construction bolt that runs through the connector and extend to inlet tube and outlet pipe respectively, the.
Preferably, the water-cooling heat shield body is made of high-purity stainless steel, and the mounting bolt and the water inlet pipe are in threaded connection with the water outlet pipe.
Preferably, the water-cooling heat shield body and the connecting body are welded, and heat absorbing coatings are arranged on the inner walls of the water-cooling heat shield body, the hot melt plate and the heat conducting plate.
Preferably, the hot melt plate is an aluminum plate, the heat conducting plate is a copper plate, and the hot melt plate and the heat conducting plate are both annular plates.
Preferably, the thickness of the hot melt plate is the same as that of the heat conducting plate, and the thickness of the hot melt plate and that of the heat conducting plate are both between zero point two millimeters and two millimeters.
Preferably, the number of the supporting pipes is not less than two, and the supporting pipes are installed in an inclined mode.
(III) advantageous effects
Compared with the prior art, the utility model provides a water-cooling heat shield structure of single crystal growing furnace possesses following beneficial effect:
this water-cooling heat shield structure of single crystal growing furnace, through setting up the water-cooling heat shield body, the water-cooling heat shield body is taken away the heat on the water-cooling heat shield body inner wall fast through the recirculated cooling water in the water course, form the passageway that a heat gived off fast, can create a temperature space that is favorable to the crystallization better, thereby accelerate the crystallization rate of crystal bar, shorten the growth time of crystal bar, improve crystal pulling efficiency, through setting up hot melt board and heat-conducting plate, the inside cooling rate of multiplicable water-cooling heat shield body, be aluminum plate and copper respectively because of hot melt board and heat-conducting plate, the cooling and the heat absorption effect of aluminum plate and copper are better, the cooling rate of multiplicable this structure, make the production rate of crystallization higher, the production efficiency of this structure also can be higher, the cost also has certain decline, can more be favorable to.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is an enlarged view of a portion a in fig. 1 according to the present invention.
In the figure: the heat shield comprises a water-cooling heat shield body 1, an inner shield 2, an outer shield 3, a fixing ring 4, a hot melt plate 5, a heat conducting plate 6, a connecting body 7, a water inlet pipe 8, a water outlet pipe 9, a mounting bolt 10 and a supporting pipe 11.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, a water-cooling heat shield structure of a single crystal furnace comprises a water-cooling heat shield body 1, an inner shield 2 is arranged inside the water-cooling heat shield body 1, an outer shield 3 is arranged outside the water-cooling heat shield body 1, a fixing ring 4 is fixedly arranged on the inner wall of the water-cooling heat shield body 1, a hot melt plate 5 fixedly connected with the inner shield 2 is fixedly arranged at the top of the fixing ring 4, a heat conduction plate 6 fixedly connected with the hot melt plate 5 is fixedly arranged at the top of the fixing ring 4, the hot melt plate 5 is an aluminum plate, the heat conduction plate 6 is a copper plate, the hot melt plate 5 and the heat conduction plate 6 are both annular plates, the hot melt plate 5 and the heat conduction plate 6 are the same in thickness, the hot melt plate 5 and the heat conduction plate 6 are both between zero two millimeters and two millimeters in thickness, a connecting body 7 is fixedly arranged on the outer side of the top of the water-, The inner walls of the hot melt plate 5 and the heat conducting plate 6 are both provided with heat absorbing coatings, the left side of the top of the connecting body 7 is movably provided with a water inlet pipe 8, the right side of the top of the connecting body 7 is fixedly provided with a water outlet pipe 9, the left side and the right side of the bottom of the connecting body 7 are movably provided with mounting bolts 10 which penetrate through the connecting body 7 and respectively extend into the water inlet pipe 8 and the water outlet pipe 9, the water-cooling heat shield body 1 is made of high-purity stainless steel, the mounting bolts 10 and the water inlet pipe 8 are in threaded connection with the water outlet pipe 9, the inside of the connecting body 7 is fixedly provided with supporting pipes 11 which are fixedly connected with the water-cooling heat shield body 1, the number of the supporting pipes 11 is not less than two, the supporting pipes 11 are obliquely arranged, through the arrangement of the water-cooling heat, can create a temperature space that is favorable to the crystallization better, thereby accelerate the crystallization speed of crystal bar, shorten the growth time of crystal bar, improve crystal pulling efficiency, through setting up hot melt plate 5 and heat-conducting plate 6, the cooling rate of 1 inside of multiplicable water-cooling heat shield body, be aluminum plate and copper respectively because of hot melt plate 5 and heat-conducting plate 6, the cooling and the heat absorption effect of aluminum plate and copper are better, the cooling rate of multiplicable this structure, make the production speed of crystallization higher, the production efficiency of this structure also can be higher, the cost also has certain decline, can more be favorable to the user to use.
In conclusion, the water-cooling heat shield structure of the single crystal furnace is characterized in that the water-cooling heat shield body 1 is arranged, the water-cooling heat shield body 1 can quickly take away heat on the inner wall of the water-cooling heat shield body 1 through circulating cooling water in a water channel to form a channel for quickly dissipating the heat, a temperature space beneficial to crystallization can be better created, so that the crystallization speed of a crystal bar is accelerated, the growth time of the crystal bar is shortened, the crystal pulling efficiency is improved, the cooling speed in the water-cooling heat shield body 1 can be increased by arranging the hot melting plate 5 and the heat conducting plate 6, the cooling speed of the structure can be increased because the hot melting plate 5 and the heat conducting plate 6 are respectively an aluminum plate and a copper plate, the cooling and heat absorption effects of the aluminum plate and the copper plate are better, the cooling speed of the structure can be increased, the production speed of the crystallization is higher, the production efficiency of the structure can be higher, the cost can be reduced to a certain extent, the, the cooling is mainly carried out through the way of water cooling, and the defect that the heat dissipated to the inner wall of the water cooling jacket through heat radiation in unit time is limited, and the argon can not be fully utilized to take away the heat, so that the efficiency of the water cooling heat shield is not high enough.
It is to be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a water-cooling heat shield structure of single crystal growing furnace, includes water-cooling heat shield body (1), its characterized in that: the water-cooling heat shield comprises a water-cooling heat shield body (1), wherein an inner shield (2) is arranged inside the water-cooling heat shield body (1), an outer shield (3) is arranged outside the water-cooling heat shield body (1), a fixing ring (4) is fixedly arranged on the inner wall of the water-cooling heat shield body (1), a hot melting plate (5) fixedly connected with the inner shield (2) is fixedly arranged at the top of the fixing ring (4), a heat conducting plate (6) fixedly connected with the hot melting plate (5) is fixedly arranged at the top of the fixing ring (4), a connecting body (7) is fixedly arranged on the outer side of the top of the water-cooling heat shield body (1), a water inlet pipe (8) is movably arranged on the left side of the top of the connecting body (7), a water outlet pipe (9) is fixedly arranged on the right side of the top of the connecting body (7), mounting bolts (10) which, the inside fixed mounting of connector (7) has stay tube (11) with water-cooling heat shield body (1) fixed connection.
2. The water-cooling heat shield structure of the single crystal furnace according to claim 1, characterized in that: the water-cooling heat shield body (1) is made of high-purity stainless steel, and the mounting bolts (10) and the water inlet pipe (8) are in threaded connection with the water outlet pipe (9).
3. The water-cooling heat shield structure of the single crystal furnace according to claim 1, characterized in that: the water-cooling heat shield is characterized in that the water-cooling heat shield body (1) and the connecting body (7) are welded, and heat absorbing coatings are arranged on the inner walls of the water-cooling heat shield body (1), the hot melting plate (5) and the heat conducting plate (6).
4. The water-cooling heat shield structure of the single crystal furnace according to claim 1, characterized in that: the hot melt plate (5) is an aluminum plate, the heat conducting plate (6) is a copper plate, and the hot melt plate (5) and the heat conducting plate (6) are both annular plates.
5. The water-cooling heat shield structure of the single crystal furnace according to claim 1, characterized in that: the thickness of the hot melting plate (5) is the same as that of the heat conducting plate (6), and the thickness of the hot melting plate (5) and that of the heat conducting plate (6) are both between two millimeters and two millimeters at zero point.
6. The water-cooling heat shield structure of the single crystal furnace according to claim 1, characterized in that: the number of the supporting pipes (11) is not less than two, and the supporting pipes (11) are installed in an inclined mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922388746.5U CN211522367U (en) | 2019-12-27 | 2019-12-27 | Water-cooling heat shield structure of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922388746.5U CN211522367U (en) | 2019-12-27 | 2019-12-27 | Water-cooling heat shield structure of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211522367U true CN211522367U (en) | 2020-09-18 |
Family
ID=72466983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922388746.5U Active CN211522367U (en) | 2019-12-27 | 2019-12-27 | Water-cooling heat shield structure of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211522367U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018072A (en) * | 2021-11-02 | 2022-02-08 | 连城凯克斯科技有限公司 | High-thermal-conductivity water-cooling heat shield heat exchanger for single crystal furnace |
| CN114381794A (en) * | 2021-12-10 | 2022-04-22 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
| CN114635181A (en) * | 2022-03-23 | 2022-06-17 | 双良硅材料(包头)有限公司 | Water-cooling heat shield structure of single crystal furnace, single crystal furnace and growth method of monocrystalline silicon |
| CN114737247A (en) * | 2022-05-18 | 2022-07-12 | 西安奕斯伟材料科技有限公司 | Water-cooling jacket device and single crystal furnace |
| CN115341278A (en) * | 2022-07-28 | 2022-11-15 | 陕西斯瑞新材料股份有限公司 | Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof |
-
2019
- 2019-12-27 CN CN201922388746.5U patent/CN211522367U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018072A (en) * | 2021-11-02 | 2022-02-08 | 连城凯克斯科技有限公司 | High-thermal-conductivity water-cooling heat shield heat exchanger for single crystal furnace |
| CN114018072B (en) * | 2021-11-02 | 2023-09-22 | 连城凯克斯科技有限公司 | High-thermal-conductivity water-cooling heat shield heat exchanger for single crystal furnace |
| CN114381794A (en) * | 2021-12-10 | 2022-04-22 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
| CN114381794B (en) * | 2021-12-10 | 2024-01-23 | 四川晶科能源有限公司 | Cooling screen and single crystal furnace |
| CN114635181A (en) * | 2022-03-23 | 2022-06-17 | 双良硅材料(包头)有限公司 | Water-cooling heat shield structure of single crystal furnace, single crystal furnace and growth method of monocrystalline silicon |
| CN114635181B (en) * | 2022-03-23 | 2023-01-31 | 双良硅材料(包头)有限公司 | Water-cooling heat shield structure of single crystal furnace, single crystal furnace and growth method of monocrystalline silicon |
| CN114737247A (en) * | 2022-05-18 | 2022-07-12 | 西安奕斯伟材料科技有限公司 | Water-cooling jacket device and single crystal furnace |
| CN115341278A (en) * | 2022-07-28 | 2022-11-15 | 陕西斯瑞新材料股份有限公司 | Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof |
| CN115341278B (en) * | 2022-07-28 | 2023-10-10 | 陕西斯瑞新材料股份有限公司 | Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN211522367U (en) | Water-cooling heat shield structure of single crystal furnace | |
| CN101311656B (en) | Quick-opening type water-cooling structure polycrystalline silicon reducing furnace | |
| CN202131390U (en) | Recirculated cooling water energy saving device for polycrystal ingot casting production | |
| CN212316280U (en) | Single crystal production line and water cooling device | |
| CN111472042A (en) | Single crystal production line and water cooling device | |
| CN111010846A (en) | Heat exchanger substrate of plate-type frequency converter, heat exchanger, frequency converter and automatic temperature adjusting method of frequency converter | |
| CN104747386A (en) | Frequency converter cooling device of wind power generator unit | |
| CN108006995B (en) | Integrated photovoltaic photo-thermal water filtering water-cooling energy system | |
| CN215628407U (en) | Cooling device for rapid growth of crystal bar and single crystal furnace | |
| CN206019416U (en) | A kind of stacked plate rushes high-efficiency oil cooler | |
| CN204553115U (en) | A kind of wind power generator unit frequency converter cooling device | |
| CN207109143U (en) | A kind of polycrystalline furnace for being used to produce solar level high-efficiency polycrystalline silicon chip | |
| CN114016084A (en) | Aluminum cell waste heat recycling system device | |
| CN103574567A (en) | Device for reclaiming heat energy from hot dregs | |
| CN208023108U (en) | A kind of polycrystalline silicon ingot or purifying furnace | |
| CN202562297U (en) | Vacuum melting quick-setting furnace air cooling circulating water device | |
| CN208353290U (en) | A kind of photovoltaic combiner box of circulation cooling | |
| CN208382943U (en) | Synth sink heat recovery apparatus | |
| CN210560877U (en) | Ingot furnace heat preservation device | |
| CN205295429U (en) | Crystallizer of electroslag furnace | |
| CN218217222U (en) | Photovoltaic system installation device | |
| CN213037872U (en) | Water-cooling draft tube | |
| CN216213405U (en) | Power electronic water-cooling radiator | |
| CN221036876U (en) | Condensing and liquefying device for purifying high-purity silicon | |
| CN217077886U (en) | Carbon fiber high temperature carbide furnace of low-power consumption high efficiency |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |