CN115341278B - Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof - Google Patents

Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof Download PDF

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Publication number
CN115341278B
CN115341278B CN202210897951.8A CN202210897951A CN115341278B CN 115341278 B CN115341278 B CN 115341278B CN 202210897951 A CN202210897951 A CN 202210897951A CN 115341278 B CN115341278 B CN 115341278B
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water
inner cylinder
baffle
annular space
section inner
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CN115341278A (en
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马明月
庾高峰
张航
李雷
宁超
王文斌
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Shaanxi Sirui Advanced Materials Co Ltd
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Shaanxi Sirui Advanced Materials Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B27/00Single-crystal growth under a protective fluid
    • C30B27/02Single-crystal growth under a protective fluid by pulling from a melt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/08Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for tubular bodies or pipes
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention discloses a single crystal furnace water-cooling heat shield prepared by copper or copper alloy and a preparation method thereof, and relates to the technical field of copper alloy preparation. The preparation method of the water-cooling heat shield of the single crystal furnace comprises the following steps: s1, preparing an inner cylinder and an outer cylinder; s2, preparing a diversion passage; s3, preparing an annular space. The invention optimizes the temperature distribution in the growth process of monocrystalline silicon, is matched with the pulling speed, and finally achieves the purposes of increasing the pulling speed and improving the production efficiency.

Description

Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof
Technical Field
The invention relates to the technical field of copper alloy preparation, in particular to a single crystal furnace water-cooling heat shield prepared by copper or copper alloy and a preparation method thereof.
Background
Monocrystalline silicon is used as a key supporting material of modern information society, is one of the most important monocrystalline materials in the world at present, and is not only a main functional material for developing computers and integrated circuits, but also a main functional material in solar energy and semiconductor industries for photovoltaic power generation.
The Czochralski method is the most commonly used method for producing single crystal silicon, and the growth rate of single crystal silicon is greatly affected by the longitudinal temperature gradient of the crystal near the crystal interface, and the larger the temperature gradient of the crystal near the crystal interface, the faster the single crystal silicon grows. Since silicon is converted from a liquid state to a solid state requiring a large amount of heat release, increasing the longitudinal temperature gradient of the crystal near the crystal interface is the most rapid and efficient method of heat dissipation.
The single crystal furnace is a necessary device in the process of converting polycrystalline silicon into monocrystalline silicon, and is a device for melting polycrystalline materials such as polycrystalline silicon and the like in an inert gas environment by using a graphite heater and the like and then growing a crystal bar by using a Czochralski method. The crystal bar can be used for manufacturing dislocation-free single crystal materials. In the process of upward movement of the crystal bar, cooling is required, so that the crystal bar is fixedly formed. The existing cooling mode is that a water-cooling heat shield is fixedly arranged at a position with a certain height in a single crystal furnace, cooling liquid is introduced into the water-cooling heat shield, and when the crystal bar moves upwards through the water-cooling heat shield, the crystal bar is cooled through the water-cooling heat shield.
The monocrystalline silicon can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growth process. The temperature mainly determines whether crystallization can occur, and the speed directly influences the intrinsic quality of the crystal, which can only be known by detection after pulling out the single crystal. The thermal field with proper temperature distribution not only ensures smooth growth of single crystals, but also has higher quality; if the temperature distribution of the thermal field is not reasonable, various defects are easy to generate in the process of growing single crystals, the quality is influenced, and even the phenomenon of crystal transformation is serious, so that the single crystals cannot be grown.
Disclosure of Invention
Aiming at the problems, the invention provides a water-cooling heat shield of a single crystal furnace prepared by copper or copper alloy and a preparation method thereof.
The technical scheme of the invention is as follows:
the utility model provides a single crystal furnace water-cooling heat shield prepared by copper or copper alloy, includes cone section urceolus and cone section inner tube that cup joints each other, the top of cone section urceolus and cone section inner tube is through annular last flange joint, and cone section urceolus bottom is equipped with straight section urceolus, cone section inner tube bottom is equipped with straight section inner tube, straight section urceolus and straight section inner tube bottom are through annular lower flange joint, form the first annular space that is used for the water between cone section urceolus and the cone section inner tube, form the second annular space that is used for the water between straight section urceolus and the straight section inner tube, be equipped with annular baffle between first annular space and the second annular space, inlet tube and outlet pipe have been seted up to upper flange bilateral symmetry,
two water inlet baffles are arranged in the first annular space corresponding to the lower part of the water inlet pipe, the water inlet baffles extend to the bottom of the first annular space, one water inlet baffle is connected with the bottom of the first annular space, the bottom of the other water inlet baffle is provided with a water inlet, a plurality of annular flow guide baffles are arranged in the first annular space, each flow guide baffle is parallel and equidistant, each flow guide baffle is connected with one water inlet baffle and is provided with an opening with the other water inlet baffle, the water inlet baffles connected with two adjacent flow guide baffles are different, so that a reverse rising flow guide passage is formed in the first annular space by the flow guide baffles, one flow guide baffle positioned at the bottom is connected with the water inlet baffle provided with a water inlet, the flow guide baffle positioned at the top extends to the right side of the water outlet pipe and is connected with the upper flange, a survival water area is formed in the first annular space positioned at the right side of the top one flow guide baffle, and a movable baffle for flow guide is arranged in the middle of the survival water area;
the second annular space is internally provided with a spiral descending type flow guide pipe, the upper part of the flow guide pipe is connected with a flow dividing port arranged on the annular baffle plate between the two water inlet baffle plates, and the flow guide pipe extends to the bottom of the second annular space and then is connected with a water outlet arranged in the lower flange.
Further, the movable baffle comprises a water passing plate and a rotating plate, wherein the water passing plate is in sliding connection with the inner cone of the cone section, the rotating plate is in rotating connection with the water passing plate, a sliding block is arranged on the side wall of one side of the inner cone of the cone section, which corresponds to the sliding groove arranged on the side wall of the inner cone of the cone section, the bottom of the sliding block is connected with the bottom of the sliding groove through a spring, a plurality of groups of water passing holes which are arranged at equal intervals are arranged on the surface of the water passing plate, water passing plates corresponding to one group of water passing holes in two groups of adjacent water passing holes are slidably arranged on the upper surface of the water passing plate, one water passing hole is arranged at each group of water passing holes, limiting blocks are arranged on two sides of the bottom of the water passing plate, T-shaped grooves are slidably connected with the two sides of the upper surface of the water passing plate, each water passing plate is connected through a connecting rod, the side wall of one water passing plate corresponding to one side of the inner cone section of the bottom of the inner cylinder is provided with a sliding groove, and the sliding groove on one section of the sliding rod is shifted to the position of the sliding groove, so that the sliding rod after the sliding rod is shifted to the sliding rod is driven to the position between the two groups of adjacent water passing holes. The movable baffle can effectively improve the fluidity of cooling water in the living water area, and the occurrence of a dead water area is avoided.
Further, a rotating shaft is arranged in the middle of the side wall of the water passing plate, which corresponds to one side of the rotating plate, and the rotating shaft is rotationally connected with the rotating plate. Through the setting of pivot and pivoted plate, order about the pivoted plate and rotate along the water board when making rivers flow through the pivoted plate, further improved cooling water mobility.
Further, the water passing plate and the rotating plate are both obliquely arranged, the two ends of the water passing plate and the two ends of the rotating plate are both a section of horizontal plane, the upper surface of the horizontal plane above which the water passing plate is positioned is provided with a magnetic sheet which is used for magnetically attracting and butting with the bottom surface of the upper flange and plays an auxiliary fixing role, and the lower surface of the horizontal plane below which the water passing plate is positioned is also provided with a magnetic sheet which is used for magnetically attracting and butting with the upper second diversion baffle in the first annular space and plays an auxiliary fixing role.
Further, the water holes are 5 groups, the number of the water baffles is 3, and each group of water holes is provided with 3 water holes. Through the setting of water hole, can make the water board select to shelter from the different modes of water board in the quantity that corresponds high velocity of flow and low velocity of flow two kinds of circumstances, thereby improved water efficiency to the mobility in running water district has been guaranteed.
The preparation method of the water-cooling heat shield of the single crystal furnace prepared by copper or copper alloy, which is characterized by comprising the following steps:
s1, preparing an inner cylinder and an outer cylinder: selecting pure copper or copper alloy as a raw material, integrally forming the cone section outer cylinder, the cone section inner cylinder, the straight section outer cylinder and the straight section inner cylinder through spinning, carrying out solution treatment on the formed cone section outer cylinder, cone section inner cylinder, straight section outer cylinder and straight section inner cylinder at 950-980 ℃ for 2 hours, and then carrying out aging treatment on the cone section outer cylinder, cone section inner cylinder, straight section outer cylinder and straight section inner cylinder after solution treatment to obtain a complete cone section outer cylinder, cone section inner cylinder, straight section outer cylinder and straight section inner cylinder;
s2, preparing a diversion passage: connecting the forged prefabricated water inlet baffle and the forged prefabricated diversion baffle on the complete cone section inner cylinder obtained in the step S1 in a welding mode, reserving the position of a water activating area, and then installing a movable baffle;
s3, preparing an annular space: welding the complete cone section outer cylinder and the upper flange obtained in the step S1 with the cone section inner cylinder respectively to form a first annular space, welding and installing an annular baffle at the bottom of the first annular space, welding and installing a straight section inner cylinder below the cone section inner cylinder, welding and installing a straight section outer cylinder below the cone section outer cylinder, connecting the forged and prefabricated honeycomb duct with the complete straight section inner cylinder obtained in the step S1 in a welding manner, and welding the complete straight section outer cylinder and the lower flange obtained in the step S1 with the straight section inner cylinder respectively to form a second annular space;
further, the welding mode is argon arc welding, gas shield welding or electron beam welding. The cone section outer cylinder, the cone section inner cylinder, the straight section outer cylinder and the straight section inner cylinder are firmly connected through welding.
Further, the copper alloy in the step S1 is CuZr, cuCrZr, cuCrNbZr or CuNi 2 Si. The heat conductivity of copper and copper alloy is approximately 20 times of that of stainless steel, and the heat conduction efficiency of the water-cooling heat shield structure can be effectively improved, so that the pulling efficiency of monocrystalline silicon is improved.
Further, the temperature of the aging treatment in the step S1 is 395-435 ℃, and the time of the aging treatment is 2-6h. The integral strength and the heat conductivity of the material are improved through ageing treatment.
The beneficial effects of the invention are as follows:
(1) According to the water-cooling heat shield of the single crystal furnace, through the upper cone section cooling and the lower straight section cooling methods, cold water intake extends from the middle part of the water-cooling heat shield to two ends, the cooling effect is better, the temperature distribution of the single crystal silicon in the growth process is optimized, the temperature distribution is matched with the pulling speed, and finally the purposes of increasing the pulling speed and improving the production efficiency are achieved.
(2) According to the water-cooling heat shield of the single crystal furnace, through the movable water area and the movable baffle plate arranged in the movable water area, the circulation of cooling water can be improved, the occurrence of a dead water area is effectively avoided, the water passing plate on the movable baffle plate can shield a certain number of water passing holes through adjustment so as to select different modes according to different cooling water flow rates, a part of water passing holes are shielded at a low flow rate, all water passing holes are opened at a high flow rate, meanwhile, the cooling water flowing through the movable water area is dredged by matching with the rotation of the rotating plate, the smooth flow of the water is ensured, and the generation of the dead water area and the generation of gasification are further avoided.
(3) According to the preparation method of the water-cooling heat shield of the single crystal furnace, copper or copper alloy is used as a raw material to be integrally formed, so that the strength of the water-cooling heat shield is improved, a stainless steel product is replaced to improve the heat conduction rate of the water-cooling heat shield structure, meanwhile, the preparation method has good high temperature resistance, can bear the higher use temperature in the single crystal furnace, has the heat conductivity approximately 20 times that of stainless steel, can effectively improve the heat conduction efficiency of the water-cooling heat shield structure, and therefore improves the lifting efficiency of single crystal silicon, the hardness is reduced through solution treatment, the subsequent shape correction treatment is facilitated, and the integral strength and the heat conductivity of the material are improved through aging treatment.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a water cooling and heating screen of a single crystal furnace;
FIG. 2 is a schematic view of the internal structure of a first annular space on the water inlet pipe side of the water Leng Rebing single crystal furnace of the invention;
FIG. 3 is a schematic view of the internal structure of a first annular space on one side of a movable baffle of a water cooling and heating screen of a single crystal furnace according to the invention;
FIG. 4 is a schematic view of the internal structure of a first annular space on one side of a water outlet pipe of the single crystal furnace water Leng Rebing of the invention;
FIG. 5 is a schematic diagram of the internal structure of a first annular space and a second annular space on one side of a movable baffle of a water cooling and heating screen of a single crystal furnace;
FIG. 6 is a schematic diagram of a movable baffle plate structure of a water-cooling heat shield of the single crystal furnace;
FIG. 7 is a top view of a movable baffle plate after the water baffle plate of the water-cooling heat shield of the single crystal furnace slides;
FIG. 8 is a schematic diagram of the bottom structure of a movable baffle after the rotating plate of the water-cooling heat shield of the single crystal furnace is rotated;
FIG. 9 is a schematic diagram of a sliding connection structure of a water baffle and a water passing plate of a water cooling heat shield of a single crystal furnace;
FIG. 10 is a flow chart of a method for preparing a water-cooled heat shield of a single crystal furnace.
The device comprises a 1-cone section outer cylinder, a 2-cone section inner cylinder, a 21-sliding groove, a 22-sliding rod groove, a 3-upper flange, a 31-water inlet pipe, a 32-water outlet pipe, a 4-straight section outer cylinder, a 5-straight section inner cylinder, a 6-lower flange, a 61-water outlet, a 7-first annular space, a 71-water inlet baffle, a 72-water inlet, a 73-flow guide baffle, a 74-opening, a 75-flow guide passage, a 76-water activating region, an 8-second annular space, a 81-annular baffle, a 82-flow guide pipe, a 83-split port, a 9-movable baffle, a 91-water passing plate, a 911-water passing hole, a 912-T-shaped groove, a 92-rotating plate, a 93-sliding block, 931-spring, a 94-water baffle, a 941-limiting block, a 95-connecting rod, a 96-sliding rod, a 97-rotating shaft and a 98-magnetic sheet.
Detailed Description
Example 1
As shown in figures 1 and 5, the water-cooling heat shield of the single crystal furnace prepared by copper or copper alloy comprises a cone section outer cylinder 1 and a cone section inner cylinder 2 which are mutually sleeved, wherein the tops of the cone section outer cylinder 1 and the cone section inner cylinder 2 are connected through an annular upper flange 3, a straight section outer cylinder 4 is arranged at the bottom of the cone section outer cylinder 1, a straight section inner cylinder 5 is arranged at the bottom of the cone section inner cylinder 2, the bottoms of the straight section outer cylinder 4 and the straight section inner cylinder 5 are connected through an annular lower flange 6, a first annular space 7 for water passing is formed between the cone section outer cylinder 1 and the cone section inner cylinder 2, a second annular space 8 for water passing is formed between the straight section outer cylinder 4 and the straight section inner cylinder 5, an annular baffle 81 is arranged between the first annular space 7 and the second annular space 8, a water inlet pipe 31 and a water outlet pipe 32 are symmetrically arranged at two sides of the upper flange 3,
as shown in fig. 2-5, two water inlet baffles 71 are arranged below the corresponding water inlet pipe 31 in the first annular space 7, the water inlet baffles 71 extend to the bottom of the first annular space 7, one water inlet baffle 71 is connected with the bottom of the first annular space 7, the bottom of the other water inlet baffle 71 is provided with a water inlet 72, 9 annular water guide baffles 73 are arranged in the first annular space 7, each water guide baffle 73 is parallel and equidistant, each water guide baffle 73 is connected with one water inlet baffle 71 and is provided with an opening 74 between the other water inlet baffles 71, the water inlet baffles 71 connected with the two adjacent water guide baffles 73 are different, so that the water guide baffles 73 form a reverse rising water guide passage 75 in the first annular space 7, one water guide baffle 73 at the bottom is connected with the water inlet baffle 71 provided with the water inlet 72, the water guide baffle 73 at the top extends to the right side of the water outlet pipe 32 and is connected with the upper flange 3, a water activating area 76 is formed in the first annular space 7 at the right side of the top of the water guide baffle 73, and a movable baffle 9 for water guiding is arranged in the middle of the water activating area 76;
as shown in fig. 5, a spiral descending type flow guide pipe 82 is arranged in the second annular space 8, the upper part of the flow guide pipe 82 is connected with a flow dividing port 83 arranged on an annular baffle 81 positioned between two water inlet baffles 71, and the flow guide pipe 82 extends to the bottom of the second annular space 8 and then is connected with a water outlet 61 arranged in the lower flange 6;
as shown in fig. 6-9, the movable baffle 9 comprises a water passing plate 91 slidingly connected with the cone inner cylinder 2 and a rotating plate 92 rotationally connected with the water passing plate 91, a rotating shaft 97 is arranged in the middle of the side wall of one corresponding side of the water passing plate 91 and the rotating plate 92, the rotating shaft 97 is rotationally connected with the rotating plate 92, a sliding block 93 is arranged in the middle of the water passing plate 91 and corresponds to the side wall of one corresponding side of the cone inner cylinder 2, the sliding block 93 is slidingly connected with a sliding chute 21 arranged on the side wall of the cone inner cylinder 2 up and down, the bottom of the sliding block 93 is connected with the bottom of the sliding chute 21 through a spring 931, 5 groups of water passing holes 911 are arranged on the surface of the water passing plate 91 at equal intervals, water passing plates 91 corresponding to one group of water passing holes 911 in two adjacent groups of water passing holes 911 are slidingly provided with water blocking plates 94, one water blocking plate 94 is provided with 3 water passing holes 911 per group of water passing holes 911, the two sides of the bottom of each water baffle 94 are provided with inverted T-shaped limiting blocks 941, the limiting blocks 941 are in sliding connection with T-shaped grooves 912 arranged on two sides of the upper surface of each water passing plate 91, the middle of each water baffle 94 is connected through a connecting rod 95 to enable each water baffle 94 to synchronously slide, the side wall of one side of the middle of the lowest water baffle 94 corresponding to the cone section inner cylinder 2 is provided with a sliding rod 96, the sliding rod 96 is in sliding connection with a sliding rod groove 22 arranged on the side wall of the cone section inner cylinder 2, one section of the upper part of the sliding rod groove 22 deviates to the position of the sliding groove 21, the sliding rod 96 after the deviation drives the water passing plate 94 to slide to the position between two adjacent groups of water passing holes 911, the water passing plates 91 and the rotating plates 92 are in inclined arrangement, the two ends of each water passing plate 91 and the rotating plates 92 are in a section of horizontal plane, the upper surface of the water passing plate 91 positioned above is provided with magnetic sheets 98 which are in magnetic attraction butt joint with the bottom surface of the upper flange 3 and play a role of auxiliary fixing, the lower surface of the water passing plate 91, which is positioned below, is also provided with a magnetic sheet 98 which is used for magnetically attracting and abutting with the second diversion baffle 73 above the first annular space 7 and plays an auxiliary fixing role.
Example 2
This embodiment is substantially the same as embodiment 1 except that: the water passing holes 911 and the water blocking plates 94 are provided in different numbers.
The number of the water holes 911 is 7, the number of the water baffles 94 is 4, and 4 water holes 911 are arranged in each water hole 911.
Example 3
This embodiment is substantially the same as embodiment 1 except that: the number of the flow-guiding baffles 73 is different.
10 annular deflector baffles 73 are provided in the first annular space 7.
Example 4
The preparation method of the water-cooling heat shield of the single crystal furnace prepared by copper or copper alloy based on the embodiment 1 is shown in fig. 10, and comprises the following steps:
s1, preparing an inner cylinder and an outer cylinder: pure copper is selected as a raw material, the cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5 are integrally formed through spinning, the formed cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5 are subjected to solution treatment, the temperature of the solution treatment is 960 ℃, the time of the solution treatment is 2 hours, and then the cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5 after the solution treatment are subjected to aging treatment to obtain a complete cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5, the temperature of the aging treatment is 400 ℃, and the time of the aging treatment is 4 hours;
s2, preparing a diversion passage 75: connecting the forged and prefabricated water inlet baffle 71 and the forged and prefabricated flow guide baffle 73 to the complete cone section inner cylinder 2 obtained in the step S1 in a welding mode, wherein the welding mode is argon arc welding, the position of a water activating area 76 is reserved, then installing a movable baffle 9, and the upper-lower distance between the flow guide baffle 73 is 30mm, and the depth is 30mm;
s3, preparing an annular space: the complete cone section outer cylinder 1 and the upper flange 3 obtained in the step S1 are respectively welded with the cone section inner cylinder 2 to form a first annular space 7, an annular baffle 81 is welded and installed at the bottom of the first annular space 7, a straight section inner cylinder 5 is welded and installed below the cone section inner cylinder 2, a straight section outer cylinder 4 is welded and installed below the cone section outer cylinder 1, a forged and prefabricated honeycomb duct 82 is connected to the complete straight section inner cylinder 5 obtained in the step S1 in a welding mode, and the complete straight section outer cylinder 4 and the lower flange 6 obtained in the step S1 are respectively welded with the straight section inner cylinder 5 to form a second annular space 8.
Example 5
This embodiment is substantially the same as embodiment 4 except that:
s1, preparing an inner cylinder and an outer cylinder: the method comprises the steps of selecting CuZr copper alloy as a raw material, integrally forming a cone section outer cylinder 1, a cone section inner cylinder 2, a straight section outer cylinder 4 and a straight section inner cylinder 5 through spinning, carrying out solid solution treatment on the formed cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5 at 950 ℃ for 2 hours, and then carrying out aging treatment on the cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5 after the solid solution treatment to obtain a complete cone section outer cylinder 1, the cone section inner cylinder 2, the straight section outer cylinder 4 and the straight section inner cylinder 5, wherein the aging treatment temperature is 395 ℃ and the aging treatment time is 6 hours.
Example 6
This embodiment is substantially the same as embodiment 4 except that:
s1, preparing an inner cylinder and an outer cylinder: the method comprises the steps of selecting CuCrZr copper alloy as a raw material, integrally forming a cone section outer cylinder 1, a cone section inner cylinder 2, a straight section outer cylinder 4 and a straight section inner cylinder 5 through spinning, carrying out solid solution treatment on the formed cone section outer cylinder 1, cone section inner cylinder 2, straight section outer cylinder 4 and straight section inner cylinder 5 at 980 ℃ for 2 hours, and then carrying out aging treatment on the cone section outer cylinder 1, cone section inner cylinder 2, straight section outer cylinder 4 and straight section inner cylinder 5 after solid solution treatment to obtain a complete cone section outer cylinder 1, cone section inner cylinder 2, straight section outer cylinder 4 and straight section inner cylinder 5, wherein the aging treatment temperature is 435 ℃ and the aging treatment time is 2 hours.
Example 7
This embodiment is substantially the same as embodiment 4 except that:
the CuCrNbZr copper alloy is selected as a raw material, and the welding mode is gas shielded welding.
Example 8
This embodiment is substantially the same as embodiment 4 except that:
CuNi is selected for use 2 Si copper alloy is used as a raw material, and the welding mode is electron beam welding.
Working principle:
in the following, when the working principle of the water-cooling heat shield of the single crystal furnace is described briefly, taking embodiment 1 as an example, when the required cooling temperature is low, a low-temperature mode is selected, namely the cooling water is in a low flow rate, at this time, the cooling water in the first annular space 7 enters the running water area 76 through the water inlet pipe 31, the water inlet baffle 71, the water inlet 72 and the diversion channel 75 and flows out from the water outlet pipe 32, the magnetic sheet 98 below the water passing plate 91 is in butt joint with the diversion baffle 73 under the low flow rate, the 3 water baffle 94 shields the 3 groups of water holes 911, the flow rate is controlled while the water flow is ensured, the rotation of the rotation plate 92 plays a certain role in diversion, and the cooling water in the running water area 76 is ensured to continuously flow;
meanwhile, cooling water in the second annular space 8 flows through the diversion pipe 82 from the diversion port 83 and flows out from the water outlet 61, and cold water intake extends from the middle part of the water-cooling heat shield to two ends by the upper cone section cooling and lower straight section cooling methods, so that the cooling effect is better;
when the required cooling temperature rises and the flow rate of cooling water needs to be increased, after the cooling water with high flow rate enters the water activating region 76, the water passing plate 91 is pushed to rise, the sliding block 93 slides upwards along the sliding groove 21, the sliding bar 96 slides upwards along the sliding bar groove 22, and simultaneously the sliding bar 96 moves towards one side of the sliding groove 21, so that the water blocking plate 94 slides on the surface of the water passing plate 91, the water blocking plate 94 does not block the water passing holes 911 any more, the water passing flow rate is increased, and the problem of gasification caused by uneven flow rates up and down is prevented.
Experimental example
The performance of the water-cooling heat shield of the single crystal furnace prepared in examples 4 to 8 was tested and compared with that of conventional 316 stainless steel, and the comparison results are shown in table 1 as a comparison example.
Table 1 single crystal furnace water cooling heat shield performance for examples and comparative examples
As can be seen by comparing the table 1, the copper or copper alloy material selected by the invention has obviously improved various performances compared with the conventional stainless steel material, wherein the water-cooling heat shield of the single crystal furnace prepared by the CuCrZr alloy in the embodiment 6 has the optimal comprehensive performance.

Claims (9)

1. The utility model provides a utilize single crystal growing furnace water-cooling heat shield of copper or copper alloy preparation, its characterized in that includes cone section urceolus (1) and cone section inner tube (2) that cup joint each other, the top of cone section urceolus (1) and cone section inner tube (2) is connected through annular flange (3) on, and cone section urceolus (1) bottom is equipped with straight section urceolus (4), cone section inner tube (2) bottom is equipped with straight section urceolus (5), straight section urceolus (4) and straight section urceolus (5) bottom are connected through annular lower flange (6), form first annular space (7) that are used for the water between cone section urceolus (1) and cone section inner tube (2), form second annular space (8) that are used for the water between straight section urceolus (4) and the straight section inner tube (5), be equipped with annular baffle (81) between first annular space (7) and the second annular space (8), inlet tube (31) and outlet pipe (32) have been seted up to upper flange (3) bilateral symmetry,
two water inlet baffles (71) are arranged in the first annular space (7) corresponding to the lower part of the water inlet pipe (31), the water inlet baffles (71) extend to the bottom of the first annular space (7), one water inlet baffle (71) is connected with the bottom of the first annular space (7), the bottom of the other water inlet baffle (71) is provided with a water inlet (72), a plurality of annular flow guide baffles (73) are arranged in the first annular space (7), each flow guide baffle (73) is parallel and equidistant, each flow guide baffle (73) is connected with one water inlet baffle (71) and is provided with an opening (74) between the other water inlet baffle (71), the water inlet baffles (71) connected with the two adjacent flow guide baffles (73) are different, so that the flow guide baffles (73) form a reverse-folded and rising flow guide passage (75) in the first annular space (7), one flow guide baffle (73) positioned at the bottom is connected with the water inlet baffle (71) provided with the water inlet (72), one flow guide baffle (73) positioned at the top is connected with the water outlet flange (32) positioned at the top side and extends to the right side of the upper annular space (7) to form a water outlet flange (76), a movable baffle (9) for guiding flow is arranged in the middle of the water activating area (76);
the second annular space (8) is internally provided with a spiral descending type flow guide pipe (82), the upper part of the flow guide pipe (82) is connected with a flow division port (83) arranged on an annular baffle (81) between two water inlet baffles (71), and the flow guide pipe (82) extends to the bottom of the second annular space (8) and then is connected with a water outlet (61) arranged in the lower flange (6).
2. The water-cooling heat shield of a single crystal furnace prepared by copper or copper alloy according to claim 1, wherein the movable baffle (9) comprises a water passing plate (91) which is in sliding connection with the conical section inner cylinder (2) and a rotating plate (92) which is in rotating connection with the water passing plate (91), the side wall of one side of the middle part of the water passing plate (91) corresponding to the conical section inner cylinder (2) is provided with a sliding block (93), the sliding block (93) is in up-down sliding connection with a sliding groove (21) arranged on the side wall of the conical section inner cylinder (2), the bottom of the sliding block (93) is connected with the bottom of the sliding groove (21) through a spring (931), the surface of the water passing plate (91) is provided with a plurality of groups of water passing holes (911) which are arranged at equal intervals, the upper surface of one group of water passing plates (91) corresponding to the water passing holes (911) in two adjacent groups of water passing holes (911) is provided with a water blocking plate (94) in a sliding manner, both sides of the bottom of the water blocking plate (94) are provided with a limit block (1) of a 94T shape, the limit block (1) is arranged on both sides of the bottom of the water blocking plate (94) at intervals, the water blocking plate (912) is connected with the water passing holes (911) at intervals, the water passing holes (911) are connected with each water passing plate through the water passing plate (95) through the water passing holes, the side wall of one side of the cone section inner cylinder (2) corresponding to the middle part of the lowest water baffle (94) is provided with a slide bar (96), the slide bar (96) is in sliding connection with a slide bar groove (22) arranged on the side wall of the cone section inner cylinder (2), one section of the upper part of the slide bar groove (22) deviates to the position of the slide groove (21), and the deviated slide bar (96) drives the water baffle (94) to slide to the position between two adjacent groups of water holes (911).
3. The water-cooling heat shield of a single crystal furnace prepared by copper or copper alloy according to claim 2, wherein a rotating shaft (97) is arranged in the middle of the side wall of the water passing plate (91) corresponding to the rotating plate (92), and the rotating shaft (97) is rotationally connected with the rotating plate (92).
4. The water-cooling heat shield of the single crystal furnace prepared by copper or copper alloy according to claim 2, wherein the water passing plate (91) and the rotating plate (92) are obliquely arranged, two ends of the water passing plate (91) and the rotating plate (92) are both horizontal planes, a magnetic sheet (98) which is used for magnetically abutting with the bottom surface of the upper flange (3) and plays an auxiliary fixing role is arranged on the upper surface of the horizontal plane above the water passing plate (91), and a magnetic sheet (98) which is used for magnetically abutting with the second upper part above the inside of the first annular space (7) and plays an auxiliary fixing role is also arranged on the lower surface of the horizontal plane below the water passing plate (91).
5. The water-cooling heat shield of a single crystal furnace prepared by copper or copper alloy according to claim 2, wherein the number of water holes (911) is 5, the number of water baffles (94) is 3, and each group of water holes (911) is provided with 3 water holes (911).
6. The method for preparing the water-cooling heat shield of the single crystal furnace by using copper or copper alloy according to any one of claims 1 to 5, comprising the following steps:
s1, preparing an inner cylinder and an outer cylinder: pure copper or copper alloy is selected as a raw material, a cone section outer cylinder (1), a cone section inner cylinder (2), a straight section outer cylinder (4) and a straight section inner cylinder (5) are integrally formed through spinning, the formed cone section outer cylinder (1), cone section inner cylinder (2), straight section outer cylinder (4) and straight section inner cylinder (5) are subjected to solution treatment, the temperature of the solution treatment is 950-980 ℃, the time of the solution treatment is 2 hours, and then the cone section outer cylinder (1), the cone section inner cylinder (2), the straight section outer cylinder (4) and the straight section inner cylinder (5) after the solution treatment are subjected to aging treatment to obtain a complete cone section outer cylinder (1), a cone section inner cylinder (2), a straight section outer cylinder (4) and a straight section inner cylinder (5);
s2, preparing a diversion passage (75): connecting the forged and prefabricated water inlet baffle (71) and the forged and prefabricated flow guide baffle (73) to the complete conical section inner cylinder (2) obtained in the step S1 in a welding mode, reserving the position of a water activation area (76), and then installing a movable baffle (9);
s3, preparing an annular space: the method comprises the steps of welding a complete conical section outer cylinder (1) and an upper flange (3) obtained in the step S1 with a conical section inner cylinder (2) respectively to form a first annular space (7), welding and installing an annular baffle (81) at the bottom of the first annular space (7), welding and installing a straight section inner cylinder (5) below the conical section inner cylinder (2), welding and installing a straight section outer cylinder (4) below the conical section outer cylinder (1), connecting a forged prefabricated honeycomb duct (82) with the complete straight section inner cylinder (5) obtained in the step S1 in a welding mode, and welding the complete straight section outer cylinder (4) and a lower flange (6) obtained in the step S1 with the straight section inner cylinder (5) respectively to form a second annular space (8).
7. The method for preparing the water-cooling heat shield of the single crystal furnace by using copper or copper alloy according to claim 6, wherein the welding mode is argon arc welding, gas shielded welding or electron beam welding.
8. The method for preparing a single crystal furnace water-cooling heat shield by copper or copper alloy according to claim 6, wherein the copper alloy in the step S1 is CuZr, cuCrZr, cuCrNbZr or CuNi 2 Si。
9. The method for preparing a water-cooling heat shield of a single crystal furnace by using copper or copper alloy according to claim 6, wherein the aging treatment temperature in the step S1 is 395-435 ℃, and the aging treatment time is 2-6h.
CN202210897951.8A 2022-07-28 2022-07-28 Single crystal furnace water-cooling heat shield prepared from copper or copper alloy and preparation method thereof Active CN115341278B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3076443A (en) * 1958-06-19 1963-02-05 Mitchell Engineering Ltd Heat exchanger
CN208717464U (en) * 2018-07-19 2019-04-09 浙江晶阳机电有限公司 A kind of water cooling heat shielding structure of single crystal growing furnace
CN210151239U (en) * 2019-06-20 2020-03-17 宁夏旭樱新能源科技有限公司 But quick assembly disassembly formula is water-cooling heat shield and single crystal growing furnace for monocrystalline silicon preparation
CN211522367U (en) * 2019-12-27 2020-09-18 杞县东磁新能源有限公司 Water-cooling heat shield structure of single crystal furnace
CN214736220U (en) * 2021-04-15 2021-11-16 陕西斯瑞新材料股份有限公司 Novel water-cooling exchanger based on monocrystalline silicon smelting

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3076443A (en) * 1958-06-19 1963-02-05 Mitchell Engineering Ltd Heat exchanger
CN208717464U (en) * 2018-07-19 2019-04-09 浙江晶阳机电有限公司 A kind of water cooling heat shielding structure of single crystal growing furnace
CN210151239U (en) * 2019-06-20 2020-03-17 宁夏旭樱新能源科技有限公司 But quick assembly disassembly formula is water-cooling heat shield and single crystal growing furnace for monocrystalline silicon preparation
CN211522367U (en) * 2019-12-27 2020-09-18 杞县东磁新能源有限公司 Water-cooling heat shield structure of single crystal furnace
CN214736220U (en) * 2021-04-15 2021-11-16 陕西斯瑞新材料股份有限公司 Novel water-cooling exchanger based on monocrystalline silicon smelting

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