CN219689927U - Cooling equipment for production of Czochralski monocrystalline silicon rod - Google Patents
Cooling equipment for production of Czochralski monocrystalline silicon rod Download PDFInfo
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- CN219689927U CN219689927U CN202320909545.9U CN202320909545U CN219689927U CN 219689927 U CN219689927 U CN 219689927U CN 202320909545 U CN202320909545 U CN 202320909545U CN 219689927 U CN219689927 U CN 219689927U
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- 238000001816 cooling Methods 0.000 title claims abstract description 41
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 108
- 239000013078 crystal Substances 0.000 claims abstract description 52
- 238000003860 storage Methods 0.000 claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 239000010453 quartz Substances 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 7
- 238000004891 communication Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 25
- 238000009413 insulation Methods 0.000 claims description 15
- 239000000725 suspension Substances 0.000 claims 2
- 238000000034 method Methods 0.000 description 4
- 238000002231 Czochralski process Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses cooling equipment for producing a Czochralski monocrystalline silicon rod, wherein a crucible transmission device is fixedly arranged on a base, a crucible rotating shaft is arranged above the crucible transmission device, a quartz crucible is fixedly arranged above a carbon crucible, and a silicon solution is placed in the quartz crucible. The water storage tank of the cooling device for producing the straight-pull monocrystalline silicon rod is driven by the water pump to uniformly disperse water flow through the water inlet pipe and the Y-shaped shunt pipe, and a communication structure is formed by the connecting pipe and the cold water pipe, so that the crystal surface is cooled down through the cold water pipe, the cold water pipe and the water storage tank form a circulating structure, the water flow in the cold water pipe is ensured to be in a low-temperature state continuously, the cooling efficiency of the cold water jacket is ensured, the fan of the device is driven by the first electric push rod to form a horizontal pushing structure with the crystal through the first telescopic arm, the concave connecting plate, the fan is used for radiating the heat below the crystal, and hot air is discharged through the through hole above the auxiliary furnace.
Description
Technical field:
the utility model relates to the technical field of production of monocrystalline silicon rods, in particular to cooling equipment for production of a Czochralski monocrystalline silicon rod.
The background technology is as follows:
the single crystal silicon rod is used for manufacturing semiconductor devices and solar cells, is formed by shaping or pulling in a hearth through a zone melting or Czochralski process, and is a silicon single crystal rod with silicon atoms rearranged according to the lattice arrangement direction of seed crystals. In the production process of the monocrystalline silicon rod, the monocrystalline silicon rod needs to be shaped by cooling, so that the monocrystalline silicon rod is processed by using cooling equipment.
The existing cooling equipment is cooled by a single cooling device in the using process, so that the cooling rate of the monocrystalline silicon rod is low, and the cooling efficiency of crystals is easily affected by hot gas in a heating bin below the auxiliary furnace. Thus, a cooling apparatus for the production of a Czochralski silicon single crystal rod is designed to solve the above-described problems.
The utility model comprises the following steps:
the utility model aims to provide cooling equipment for producing a Czochralski single crystal silicon rod, which aims to solve the problems that the cooling rate of the single crystal silicon rod is low and the cooling efficiency of crystals is easily affected by hot air in a heating bin below a secondary furnace because the cooling equipment is only cooled by a single cooling device in the use process in the prior art.
The utility model is implemented by the following technical scheme: the cooling equipment for producing the Czochralski single crystal silicon rod comprises a base, a crucible transmission device is fixedly arranged on the base, a crucible rotating shaft is arranged above the crucible transmission device, a heating bin is fixedly arranged above the base, the crucible rotating shaft is connected with a carbon crucible in the heating bin, a quartz crucible is fixedly arranged above the carbon crucible, a silicon solution is placed in the quartz crucible, an auxiliary furnace is fixedly arranged above the heating bin, a crystal lifting device is arranged at the top end of the auxiliary furnace, a lifting wire is arranged in the auxiliary furnace below the crystal lifting device, the lower end of the lifting wire is connected with a seed crystal, the lower end of the seed crystal generates crystals, the auxiliary furnace and the heating bin are penetrated with heat insulation plates at the joint, two groups of heat insulation plates are penetrated with L-shaped clamping rods at the outer ends respectively, two groups of clamping holes are correspondingly formed in the upper end face of the heating bin, and the L-shaped clamping rods are clamped in the clamping holes;
a box body is arranged on the back of the auxiliary furnace above the heat insulating plate, a first electric push rod is fixedly arranged in the box body, one end of the first electric push rod is provided with a first telescopic arm, the other end of the first telescopic arm is connected with a concave connecting plate, a fan is fixedly connected to the concave connecting plate, and a plurality of groups of through holes are uniformly formed in the upper end face of the auxiliary furnace;
the auxiliary furnace is equipped with the box body in both sides outer wall respectively, and the fixed second electric putter that is equipped with in box body, the opposite face of two sets of second electric putter is equipped with the flexible arm of second respectively, and the flexible arm other end of second is equipped with the cold water jacket respectively, and cold water jacket internal fixation is equipped with the cold water pipe, the base is equipped with the water storage box in the rear, and the fixed water pump that is equipped with of water storage box up end, be equipped with the inlet tube on the water pump, and the Y shape shunt tubes is connected to the inlet tube other end, the Y shape shunt tubes other end is equipped with the connecting pipe respectively, and the water inlet of cold water pipe upper end is connected to the connecting pipe other end, the delivery port of cold water pipe lower extreme is equipped with the outlet pipe respectively, and the water storage box is connected to the outlet pipe other end.
Preferably, a semi-arc groove matched with the diameter of the hanging wire is formed in the middle of the heat insulating plate, and the heat insulating plate and the heating bin form a clamping limiting structure in the clamping hole through an L-shaped clamping rod.
Preferably, the fan and the crystal form a horizontal pushing structure through the first telescopic arm and the concave connecting plate under the drive of the first electric push rod.
Preferably, the water storage tank is driven by the water pump to uniformly disperse water flow through the water inlet pipe and the Y-shaped shunt pipe, a communication structure is formed by the connecting pipe and the cold water pipe, and a circulating structure is formed by the cold water pipe and the water storage tank through the water outlet pipe.
The utility model has the advantages that: the water storage tank of the cooling device for producing the straight-pull monocrystalline silicon rod is driven by the water pump to uniformly disperse water flow through the water inlet pipe and the Y-shaped shunt pipe, and a communicating structure is formed by the connecting pipe and the cold water pipe, so that the crystal surface is cooled down through the cold water pipe, the cold water pipe and the water storage tank form a circulating structure, the water flow in the cold water pipe is ensured to be in a low-temperature state continuously, the cooling efficiency of the cold water jacket is ensured, the fan of the device is driven by the first electric push rod to form a horizontal pushing structure with the crystal through the first telescopic arm and the concave connecting plate, so that the fan is used for radiating the heat below the crystal, and hot air is discharged through the through hole above the auxiliary furnace, and the heat insulation plate of the device is used for forming a clamping limiting structure with the heating bin in the clamping hole through the L-shaped clamping rod, so that the hot air in the heating bin is isolated through the heat insulation plate, and the influence of the hot air on the working efficiency of the upper cooling device is avoided.
Description of the drawings:
in order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a cooling apparatus for producing a Czochralski silicon single crystal rod in accordance with the present utility model;
FIG. 2 is a schematic side view of a cooling apparatus for producing a Czochralski silicon single crystal rod of the present utility model;
FIG. 3 is a schematic top view of a cooling apparatus fan assembly for producing Czochralski silicon single crystal rod of the present utility model;
FIG. 4 is a schematic top view of a cooling apparatus cooling jacket assembly for producing Czochralski silicon single crystal rod;
FIG. 5 is a schematic top view of a heat shield assembly of a cooling apparatus for producing Czochralski silicon single crystal rod in accordance with the present utility model;
FIG. 6 is an enlarged schematic view of the cooling apparatus for producing a Czochralski silicon single crystal rod of the present utility model, shown at A in FIG. 2.
In the figure: 1. the device comprises a base, 2, a heating bin, 3, an auxiliary furnace, 4, a crystal lifting device, 5, seed crystals, 6, crystals, 7, a heat insulation plate, 8, a first electric push rod, 9, a first telescopic arm, 10, a concave connecting plate, 11, a fan, 12, a second electric push rod, 13, a second telescopic arm, 14, a cold water jacket, 15, a cold water pipe, 16, a water storage tank, 17, a water pump, 18, a water inlet pipe, 19, a Y-shaped shunt pipe, 20, a connecting pipe, 21 and a water outlet pipe.
The specific embodiment is as follows:
the following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-6, the present utility model provides a technical solution: a cooling device for producing a Czochralski single crystal silicon rod comprises a base 1, wherein a crucible transmission device is fixedly arranged on the base 1, a crucible rotating shaft is arranged above the crucible transmission device, a heating bin 2 is fixedly arranged above the base 1, a carbon crucible is connected in the heating bin 2 through the crucible rotating shaft, a quartz crucible is fixedly arranged above the carbon crucible, a silicon solution is placed in the quartz crucible, a secondary furnace 3 is fixedly arranged above the heating bin 2, a crystal lifting device 4 is arranged at the top end of the secondary furnace 3, a lifting wire is arranged in the secondary furnace 3 below the crystal lifting device 4, the lower end of the lifting wire is connected with a seed crystal 5, a crystal 6 is generated at the lower end of the seed crystal 5, two groups of heat insulation plates 7 are inserted into L-shaped clamping rods at the connecting positions of the secondary furnace 3 and the heating bin 2, two groups of clamping holes are correspondingly formed in the upper end of the heating bin 2, and the L-shaped clamping rods are clamped in the clamping holes;
further, a semi-arc groove matched with the diameter of the hanging wire is formed in the middle of the heat insulating plate 7, and the heat insulating plate 7 and the heating bin 2 form a clamping limiting structure in the clamping hole through an L-shaped clamping rod, so that hot air in the heating bin 2 is prevented from entering the auxiliary furnace 3 through the heat insulating plate 7 in the cooling process of the crystal 6, and the temperature in the auxiliary furnace 3 is further reduced.
A box body is arranged on the back surface of the auxiliary furnace 3 above the heat insulation plate 7, a first electric push rod 8 is fixedly arranged in the box body, one end of the first electric push rod 8 is provided with a first telescopic arm 9, the other end of the first telescopic arm 9 is connected with a concave connecting plate 10, a fan 11 is fixedly connected on the concave connecting plate 10, and a plurality of groups of through holes are uniformly opened and closed on the upper end surface of the auxiliary furnace 3;
further, the fan 11 and the crystal 6 form a horizontal pushing structure under the driving of the first electric push rod 8 through the first telescopic arm 9 and the concave connecting plate 10, so that the fan 11 is used for blowing and radiating air below the crystal 6, and hot air of the fan leaves through a through hole on the upper end face of the auxiliary furnace 3, so that the crystal 6 is primarily cooled.
The auxiliary furnace 3 is provided with box bodies on the outer walls of two sides respectively, second electric push rods 12 are fixedly arranged in the box bodies, second telescopic arms 13 are respectively arranged on the opposite surfaces of the two groups of second electric push rods 12, cold water jackets 14 are respectively arranged at the other ends of the second telescopic arms 13, cold water pipes 15 are fixedly arranged in the cold water jackets 14, a water storage tank 16 is arranged at the rear of the base 1, a water pump 17 is fixedly arranged on the upper end surface of the water storage tank 16, a water inlet pipe 18 is arranged on the water pump 17, the other end of the water inlet pipe 18 is connected with a Y-shaped shunt pipe 19, connecting pipes 20 are respectively arranged at the other ends of the Y-shaped shunt pipes 19, the other ends of the connecting pipes 20 are connected with water inlets at the upper ends of the cold water pipes 15, water outlets at the lower ends of the cold water pipes 15 are respectively provided with water outlet pipes 21, and the other ends of the water outlet pipes 21 are connected with the water storage tank 16;
further, the water storage tank 16 is driven by the water pump 17 to uniformly disperse water flow through the water inlet pipe 18 and the Y-shaped shunt pipe 19, and a communication structure is formed by the connecting pipe 20 and the cold water pipe 15, so that the surface of the crystal 6 is cooled by the cold water pipe 15, and the cold water pipe 15 and the water storage tank 16 form a circulating structure through the water outlet pipe 21, so that the water flow in the cold water pipe 15 is kept in a low-temperature state, and the cooling efficiency of the device is improved.
Working principle: when the cooling equipment for producing the Czochralski monocrystalline silicon rod is used, the L-shaped clamping blocks on the heat insulation plate 7 are lifted upwards, so that the heat insulation plate 7 is moved to two sides, then the crystal lifting device 4 is used for lifting the seed crystal 5 and crystals 6 generated below the seed crystal 5 upwards, after the crystals 6 are placed in the auxiliary furnace 3, the heat insulation plates 7 on two sides can be pushed to the middle and clamped in the clamping holes through the L-shaped clamping rods, so that the heat insulation plate 7 is limited, and then hot air in the heating bin 2 below is isolated through the heat insulation plate 7, the cooling efficiency of the device is prevented from being reduced by the hot air, then the first electric push rod 8 and the second electric push rod 12 are started at the same time, the first electric push rod 8 drives the fan 11 to move through the first telescopic arm 9, so that the fan 11 is positioned right below the crystals 6, and the surface of the crystals is radiated through the fan 11, and the hot gas is discharged through the through hole of the upper end surface of the auxiliary furnace 3, thereby the crystal 6 is primarily cooled, the second electric push rod 12 drives the cold water jackets 14 to move through the second telescopic arms 13, thereby the two groups of cold water jackets 14 are close to the surface of the crystal 6, then the water pump 17 is started, the water in the water storage tank 16 is evenly split through the water inlet pipe 18 and the Y-shaped split pipe 19 under the driving of the water pump 17, and the cold water pipe 15 is carried out through the connecting pipe 20, thereby the surface of the crystal 6 is cooled through the cold water pipe 15, and the water in the cold water pipe 15 returns to the water storage tank 16 through the water outlet pipe 21, thereby the circulation of the water flow in the cold water pipe 15 is ensured, the water flow in the cold water pipe 15 is continuously in a low-temperature state, and the cooling efficiency of the device is further increased, and the cooling efficiency of the device is the use process of the cooling equipment for producing the Czochralski single crystal silicon rod.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (4)
1. The utility model provides a cooling arrangement of straight pull type monocrystalline silicon stick production, includes base (1), fixed being equipped with crucible transmission on base (1), and crucible transmission top is equipped with the crucible rotation axis, fixed heating storehouse (2) that are equipped with in base (1) top, and the crucible rotation axis is in heating storehouse (2) internal connection carbon crucible, fixed quartz crucible that is equipped with in carbon crucible top, and has placed the silicon solution in the quartz crucible, heating storehouse (2) top is fixed to be equipped with auxiliary furnace (3), and auxiliary furnace (3) top is equipped with crystal hoisting device (4), crystal hoisting device (4) below is equipped with the suspension wire in auxiliary furnace (3), and suspension wire lower extreme connection seed crystal (5), and seed crystal (5) lower extreme generate crystal (6), its characterized in that: the auxiliary furnace (3) and the heating bin (2) are inserted with heat insulation plates (7) at the joint parts, the outer ends of the two groups of heat insulation plates (7) are respectively inserted with L-shaped clamping rods, the upper end surface of the heating bin (2) is correspondingly provided with two groups of clamping holes, and the L-shaped clamping rods are clamped in the clamping holes;
a box body is arranged above the heat insulation plate (7) on the back of the auxiliary furnace (3), a first electric push rod (8) is fixedly arranged in the box body, one end of the first electric push rod (8) is provided with a first telescopic arm (9), the other end of the first telescopic arm (9) is connected with a concave connecting plate (10), a fan (11) is fixedly connected on the concave connecting plate (10), and a plurality of groups of through holes are uniformly formed in the upper end face of the auxiliary furnace (3);
the auxiliary furnace (3) is equipped with the box body respectively in both sides outer wall, and the box body internal fixation is equipped with second electric putter (12), the opposite face of two sets of second electric putter (12) is equipped with second telescopic boom (13) respectively, and the second telescopic boom (13) other end is equipped with cold water jacket (14) respectively, and cold water jacket (14) internal fixation is equipped with cold water pipe (15), base (1) are equipped with water storage tank (16) in the rear, and water storage tank (16) up end is fixed and is equipped with water pump (17), be equipped with inlet tube (18) on water pump (17), and the Y shape shunt tubes (19) are connected to the inlet tube (18) other end, Y shape shunt tubes (19) other end is equipped with connecting pipe (20) respectively, and the water inlet of cold water pipe (15) upper end is connected to the connecting pipe (20) other end, the delivery port of cold water pipe (15) lower extreme is equipped with outlet pipe (21) respectively, and water outlet pipe (21) other end connection water storage tank (16).
2. The cooling apparatus for producing a czochralski silicon rod of claim 1, wherein: the middle of the heat insulating plate (7) is provided with a semi-arc groove matched with the diameter of the hanging wire, and the heat insulating plate (7) and the heating bin (2) form a clamping limiting structure in the clamping hole through an L-shaped clamping rod.
3. The cooling apparatus for producing a czochralski silicon rod of claim 1, wherein: the fan (11) is driven by the first electric push rod (8) to form a horizontal pushing structure with the crystal (6) through the first telescopic arm (9) and the concave connecting plate (10).
4. The cooling apparatus for producing a czochralski silicon rod of claim 1, wherein: the water storage tank (16) is driven by the water pump (17) to uniformly disperse water flow through the water inlet pipe (18) and the Y-shaped shunt pipe (19), a communication structure is formed by the water storage tank (16) and the cold water pipe (15) through the connecting pipe (20), and the cold water pipe (15) and the water storage tank (16) form a circulating structure through the water outlet pipe (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320909545.9U CN219689927U (en) | 2023-04-20 | 2023-04-20 | Cooling equipment for production of Czochralski monocrystalline silicon rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320909545.9U CN219689927U (en) | 2023-04-20 | 2023-04-20 | Cooling equipment for production of Czochralski monocrystalline silicon rod |
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| CN219689927U true CN219689927U (en) | 2023-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202320909545.9U Active CN219689927U (en) | 2023-04-20 | 2023-04-20 | Cooling equipment for production of Czochralski monocrystalline silicon rod |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117187953A (en) * | 2023-10-25 | 2023-12-08 | 江苏科罗兹硅业有限公司 | Monocrystalline silicon preparation furnace and monocrystalline silicon preparation method |
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2023
- 2023-04-20 CN CN202320909545.9U patent/CN219689927U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117187953A (en) * | 2023-10-25 | 2023-12-08 | 江苏科罗兹硅业有限公司 | Monocrystalline silicon preparation furnace and monocrystalline silicon preparation method |
| CN117187953B (en) * | 2023-10-25 | 2024-06-04 | 江苏科罗兹硅业有限公司 | Preparation method of monocrystalline silicon |
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