CN213037872U - Water-cooling draft tube - Google Patents
Water-cooling draft tube Download PDFInfo
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- CN213037872U CN213037872U CN202021250485.7U CN202021250485U CN213037872U CN 213037872 U CN213037872 U CN 213037872U CN 202021250485 U CN202021250485 U CN 202021250485U CN 213037872 U CN213037872 U CN 213037872U
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Abstract
The utility model discloses a water-cooling draft tube for preparing silicon single crystal, which relates to the technical field of silicon single crystal rod crystal pulling equipment. It includes the draft tube main part, locates the water cooled pipeline of draft tube main part with be used for fixing the fixed ring body of water cooled pipeline, the inner wall of draft tube main part is including heat dissipation reinforcing area and observation area, a plurality of fin is installed in heat dissipation reinforcing area. The utility model provides a pair of water-cooling draft tube can take away the crystallization latent heat of solid liquid level handing-over department fast for the single crystal growth improves single crystal output and single crystal pulling speed.
Description
Technical Field
The utility model relates to a silicon single crystal stick crystal pulling equipment technical field especially relates to a water-cooling draft tube for preparing silicon single crystal.
Background
The single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, and the monocrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization. In the process of pulling the silicon single crystal, the cooling speed of the crystal bar is effectively improved through the water-cooling guide shell, so that the pulling efficiency is improved.
Therefore, the research on the novel water-cooling guide cylinder for solving the problem of low pulling speed of the single crystal Czochralski method is of great significance.
SUMMERY OF THE UTILITY MODEL
In order to solve the defects of the prior art, the main object of the utility model is to provide a water-cooling draft tube, which increases the heat dissipation strengthening area to quickly take away the crystallization latent heat of the joint of the solid liquid level and improve the pulling speed of the single crystal.
In order to achieve the above purpose, the technical solution of the present invention is as follows:
the utility model provides a water-cooling draft tube, includes the draft tube main part, locates the water-cooling pipeline of draft tube main part is fixed with being used for water-cooling pipeline's fixed ring body, the inner wall of draft tube main part is including heat dissipation reinforcing area and observation area, a plurality of fin is installed in heat dissipation reinforcing area.
Optionally, the ratio of the observation area to the inner wall of the draft tube body is 10% to 50%.
Optionally, a number of the fins are evenly and symmetrically distributed.
Optionally, the number of the heat radiating fins is not less than 18.
Optionally, the heat sink is installed along a direction from the opening of the guide shell body to the bottom of the guide shell body.
Optionally, the guide shell main body and the cooling fin are integrally formed.
Optionally, the inner wall of the draft tube main body and the surface of the heat sink are provided with an oxide layer for absorbing heat.
Optionally, the guide shell main body and the cooling fins are made of stainless steel.
The utility model provides a pair of water-cooling draft tube, including draft tube main part, water-cooling pipeline and fixed ring body, through setting up heat dissipation reinforced area and observation area at the inner wall of draft tube main part, strengthen the district at the heat dissipation and install a plurality of fin, take away the crystallization latent heat of vertical pulling method crossing department when drawing the single crystal through the fin fast for the single crystal is grown, improves single crystal output to single crystal pulling speed has been improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural view of a water-cooling draft tube according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a water-cooled guide shell according to FIG. 1;
fig. 3 is a schematic view of the installation of the heat sink of a water-cooled guide shell according to fig. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following description will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-3, the utility model provides a water-cooling draft tube, generally, can include draft tube main part 1, water-cooling pipeline 2 and fixed ring body 3. The water cooling pipeline 2 is arranged on the guide shell main body 1 and used for cooling the guide shell main body 1. The fixed ring body 3 is arranged on the periphery of the opening of the guide cylinder main body 1 and is fixedly connected with the water cooling pipeline 2 so as to be used for fixing the water cooling pipeline 2. The guide shell main body 1 is a conical shell. The inner wall of the conical cylinder of the guide cylinder main body 1 is provided with a heat dissipation strengthening area 11 and an observation area 12. It is important to note that the viewing zone referred to herein is an angular region occupying an angle of not less than 5% of the circumference, i.e. taking 360 ° of the circumference of the nozzle of the guide shell body as an example, the occupied angle of one viewing zone is not less than 18 °. The heat dissipation enhancing area 11 is provided with a plurality of heat dissipation fins 4. The heat dissipation enhancing area 11 is used for increasing the cooling speed of the water-cooling guide cylinder so as to rapidly take away the latent heat of crystallization at the joint of the solid liquid level; the observation area 12 is used for a user to observe the growth state of the seed crystal conveniently, so that the heat radiating fins 4 are prevented from blocking the sight of the user, and adverse effects are prevented. The radiating fins 4 are fin-shaped radiating fins and are longitudinally arranged on the inner wall of the conical cylinder, namely the installation direction (the longitudinal installation direction, the radiating fins are arranged along the direction from the cylinder opening of the conical cylinder to the cylinder bottom) of the radiating fins 4 is parallel to the axis of the guide cylinder main body 1. In use, a user may look into the cooling guide shell body 1 from a position obliquely above the mouth of the shell through the viewing area 12. Because the diameter of the seed crystal is smaller, the diameter of the cylinder opening is larger, a certain distance is reserved between the seed crystal and the edge of the cylinder opening (in the diameter direction), and a user can observe the seed crystal from the gap between the seed crystal and the edge of the cylinder opening to the inside of the cylinder, thereby being capable of checking the growth state of the seed crystal. The utility model provides a pair of water-cooling draft tube, fin 4 can take away the crystallization latent heat of solid liquid level handing-over department fast, improves the single crystal pulling rate to solve the not high problem of single crystal czochralski method pulling rate.
The utility model provides a pair of water-cooling draft tube for czochralski crystal manufacturing method makes silicon single crystal technology, and its theory of operation is: czochralski (CZ method) Czochralski method is a method of pulling a single crystal by putting a polycrystalline silicon ingot as a raw material in a quartz crucible, melting the ingot by heating in a single crystal furnace, and immersing a rod-shaped seed crystal (referred to as seed crystal) in the melt. At a proper temperature, silicon atoms in the melt form regular crystals on a solid-liquid interface along the silicon atom arrangement structure of the seed crystal, and the crystals become single crystals. The utility model provides a pair of water-cooling draft tube through set up heat dissipation reinforcing area 11 and observation area 12 on the inner wall at water-cooling draft tube, increases heat dissipation reinforcing area 11 installation fin 4 promptly, takes away the crystallization latent heat of solid-liquid face intersection department when czochralski method draws the single crystal fast through fin 4 for the single crystal growth improves single crystal output, thereby has improved the single crystal pulling speed.
Specifically, the guide cylinder body 1, the water-cooled pipe 2 and the fixing ring body 3 may be of a guide cylinder structure well known to those skilled in the art. For example, the guide shell body 1 may include an inner shell, an outer shell, and an annular bottom. The inner cylinder and the outer cylinder are both conical cylinders with large upper parts and small lower parts. The inner cylinder is concentrically sleeved in the outer cylinder. The annular bottom is arranged at the lower end parts of the inner cylinder and the outer cylinder. The inner ring wall of the annular bottom is connected with the outer ring wall of the inner cylinder in a sealing mode, the outer ring wall of the annular bottom is connected with the inner ring wall of the outer cylinder in a sealing mode, and the top of the outer cylinder is folded inwards to form an inner edge. The end face of the inner edge is hermetically connected with the outer ring wall of the upper end part of the inner cylinder, and the inner cylinder, the outer cylinder and the annular bottom form an annular inner cavity. A plurality of clapboards are arranged in the annular inner cavity. And a cooling liquid inlet and a cooling liquid outlet are arranged on the annular wall among the plurality of partition plates. The water-cooled pipeline 2 comprises a water inlet pipe and a water outlet pipe. The water inlet pipe and the water outlet pipe form 5 water path pipes and are communicated with the cooling liquid inlet and the cooling liquid outlet. The cooling liquid outlet is arranged close to the inner edge of the outer cylinder, one end of the water outlet pipe is a free end, and the other end of the water outlet pipe is connected with the cooling liquid outlet. The coolant liquid inlet is close to a baffle, and the one end of inlet tube is the free end, and the other end and the coolant liquid inlet of inlet tube are connected.
Alternatively, since the guide shell body 1 is a conical shell, the inner wall circumference thereof is 360 °. The inner wall of the draft tube main body 1 is divided into a heat dissipation strengthening area 11 and an observation area 12. The proportion of the observation area 12 in the inner wall of the guide shell main body 1 is 10-50%. The size of the observation region 12 is such that the user's observation of the growth state of the seed crystal can be achieved. In a specific embodiment, the heat dissipation enhancing area 11 is uniformly provided with a plurality of heat dissipation fins 4. The number of the heat radiation fins 4 is not less than 18. The number of the radiating fins 4 is set according to actual needs so as to achieve a better cooling effect and achieve the purpose of not influencing observation. Optionally, when the height of the tapered cylinder is more than 350mm, the number of the heat dissipation enhancing areas 11 and the number of the observation areas 12 are both two, the heat dissipation enhancing areas 11 and the observation areas 12 are alternately arranged, the two heat dissipation enhancing areas 11 are symmetrical to each other, and the two observation areas 12 are symmetrical to each other. 9 radiating fins 4 are arranged in one radiating reinforcing area 11, the interval between adjacent radiating fins 4 is 12 degrees, the thickness of the radiating fins 4 is 3-10mm, the height is 8-20mm, and the length is larger than 340 mm. It should be noted that the height of the fins referred to herein is the dimension of the fins in the radial direction of the circular cross section of the tapered cylinder; the length of the heat sink refers to the dimension of the tapered cylinder in the direction from the cylinder opening to the cylinder bottom.
The utility model provides a pair of water-cooling draft tube, draft tube main part 1 and fin 4 adopt integrated into one piece to make to be provided with on the inner wall surface of draft tube main part 1 and the surface of fin 4 and be used for absorbing thermal oxide layer (not shown in the figure). The guide shell body 1 and the radiating fins 4 are preferably made of stainless steel. The oxide layer can be prepared by salt bath blackening treatment, namely forming an oxide layer or a nitride layer on the surfaces of the guide cylinder main body 1 and the radiating fins 4 through a salt bath blackening process, so as to better absorb latent heat of crystallization at the joint of the solid liquid surface and accelerate the growth of single crystals.
It is mainly supplemented that the cooling liquid adopted by the water cooling pipeline of the water cooling guide cylinder of the utility model is not only limited to water, but also can be other liquid or gas or other media.
The utility model provides a pair of water-cooling draft tube sets up heat dissipation reinforcing area 11 and observation area 12 through the inner wall at draft tube main part 1, and the crystallization latent heat of solid-liquid face junction when czochralski method is drawn the single crystal can be taken away fast to fin 4 for the single crystal is grown, improves single crystal output, thereby has improved the single crystal pulling speed, and the setting of observation area 12 is simultaneously convenient for observe the seed crystal at the brilliant in-process of system, has convenient operation practical advantage.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.
Claims (8)
1. The utility model provides a water-cooling draft tube, its characterized in that includes the draft tube main part, locates the water-cooling pipeline of draft tube main part is fixed with being used for water-cooling pipeline's fixed ring body, the inner wall of draft tube main part is including heat dissipation reinforcing area and observation area, a plurality of fin is installed in heat dissipation reinforcing area.
2. The water-cooled guide shell according to claim 1, wherein the ratio of the observation area to the inner wall of the guide shell body is 10-50%.
3. The water-cooled guide shell according to claim 1 or 2, wherein the plurality of cooling fins are uniformly and symmetrically distributed.
4. The water-cooled guide cylinder according to claim 3, wherein the number of the heat radiating fins is not less than 18.
5. The water-cooled guide shell according to claim 4, wherein the heat sink is installed along a direction from a shell mouth to a shell bottom of the guide shell body.
6. The water-cooled guide cylinder according to claim 1, wherein the guide cylinder body and the heat sink are integrally formed.
7. The water-cooled guide cylinder according to claim 1, wherein an oxide layer or a nitride layer for absorbing heat is provided on an inner wall of the guide cylinder body and a surface of the heat radiating fin.
8. The water-cooled guide shell according to claim 1, wherein the guide shell body and the heat sink are made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021250485.7U CN213037872U (en) | 2020-06-30 | 2020-06-30 | Water-cooling draft tube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021250485.7U CN213037872U (en) | 2020-06-30 | 2020-06-30 | Water-cooling draft tube |
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| CN213037872U true CN213037872U (en) | 2021-04-23 |
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| CN202021250485.7U Active CN213037872U (en) | 2020-06-30 | 2020-06-30 | Water-cooling draft tube |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113481591A (en) * | 2021-08-11 | 2021-10-08 | 包头美科硅能源有限公司 | Device and method for increasing growth speed of single crystal |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113481591A (en) * | 2021-08-11 | 2021-10-08 | 包头美科硅能源有限公司 | Device and method for increasing growth speed of single crystal |
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Effective date of registration: 20220909 Address after: 055550 Jing Long Street, Ningjin County, Xingtai, Hebei Patentee after: JA SOLAR Co.,Ltd. Address before: 055550 high tech Development Zone, Ningjin County, Xingtai City, Hebei Province Patentee before: NINGJIN JINGXING ELECTRONIC MATERIAL Co.,Ltd. |