CN212404353U

CN212404353U - Furnace bottom heater for single crystal furnace

Info

Publication number: CN212404353U
Application number: CN202021408021.4U
Authority: CN
Inventors: 郑伟扬; 王思锋
Original assignee: Ningxia Gcl Crystal Technology Development Co ltd
Current assignee: Ningxia Gcl Crystal Technology Development Co ltd
Priority date: 2020-07-16
Filing date: 2020-07-16
Publication date: 2021-01-26
Anticipated expiration: 2030-07-16

Abstract

The utility model discloses a furnace bottom heater for a single crystal furnace, which comprises a heating body and a heater foot plate; the heating body comprises a plurality of strip-shaped heating parts which are distributed in a radiating shape with the same circle center, the end parts of each heating part are connected with each other, so that an annular loop is formed, and the center of the heating body is left empty; one end of the inner side of each heating part is horizontal so as to form a circular supporting surface, the part of the middle part, which is outward, is gradually inclined upwards, and the end part, which is outward, is provided with a vertically downward supporting surface; the heater foot plates are arranged on two opposite sides of the heating body, are horizontal plate surfaces, are connected with the corresponding outer end supporting surfaces of the heating parts, are positioned at the bottom of the supporting surfaces and are level to the bottom of the outer end supporting surfaces of other heating parts; and the heater foot plate is provided with a graphite bolt hole for connecting an electrode.

Description

Furnace bottom heater for single crystal furnace

Technical Field

The utility model belongs to monocrystalline silicon preparation field, concretely relates to stove bottom heater for single crystal growing furnace.

Background

The double-heater crystal pulling process is popularized in the single crystal industry, the material melting time can be effectively shortened by matching the main heater with the bottom heater, and the occupied ratio of the material melting time in the whole furnace operation working hours is reduced, so that the single-hour output is improved. The existing bottom heater has a cylindrical structure, long material melting time, large linear size, high purchase cost, and high use cost of single-furnace graphite parts due to the fact that the structure is complex and easy to damage in use. The material melting speed of the conventional flat plate heater is low, and the material melting is carried out for a long time at high power, so that the power consumption is increased; the barrel heater is large in linear size and high in purchasing cost, and the thermal fields of different sizes need to be purchased independently, so that the barrel heater is not universal.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that to prior art not enough, provide a heater that can even high-efficient heating to shorten the material time of changing, reduce the power consumption, reduce single stove bottom heater graphite spare cost simultaneously.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a furnace bottom heater for a single crystal furnace comprises a heating body and a heater foot plate; the heating body comprises a plurality of strip-shaped heating parts which are distributed in a radiating shape with the same circle center, the end parts of each heating part are connected with each other, so that an annular loop is formed, and the center of the heating body is left empty; one end of the inner side of each heating part is horizontal so as to form a circular supporting surface, the part of the middle part, which is outward, is gradually inclined upwards, and the end part, which is outward, is provided with a vertically downward supporting surface;

the heater foot plates are arranged on two opposite sides of the heating body, are horizontal plate surfaces, are connected with the corresponding outer end supporting surfaces of the heating parts, are positioned at the bottom of the supporting surfaces and are level to the bottom of the outer end supporting surfaces of other heating parts;

and the heater foot plate is provided with a graphite bolt hole for connecting an electrode.

Further, the heat generating portions include a first heat generating portion and a second heat generating portion; the first heating part is arranged on two opposite sides of the heating body, the supporting surface at the outer end of the first heating part is connected with the foot plate of the heater, and one end at the inner side of the first heating part is connected with the second heating part; the middle part of the second heating part is provided with an isolation groove from the inner side end to the outer side end, so that the second heating part is divided into two parts, the isolation groove is arranged to the middle part of the supporting surface, and the heating parts which are divided into two parts at two sides of the isolation groove are connected in series through the supporting surface, so that the total length of a heating body loop is increased, the sectional area is reduced, and the total resistance of the heater can meet the use requirement. The total resistance of the heater is determined by the basic parameters of the hardware device.

Preferably, the number of the first heating parts is four, and every two first heating parts are arranged on two opposite sides of the heating body; a heater foot plate is connected between the outer ends of the two first heating parts on each side so as to enhance the integral supporting strength of the heating body; meanwhile, the heater integrally forms a parallel circuit structure, a loop formed on one side cannot be disconnected, and heating parts on one side are in a series structure.

Preferably, the first heat generating part and the second heat generating part have the same width, which is beneficial to uniform heating of the single crystal furnace.

Preferably, the interval angle between two adjacent first heat-generating parts is 10-15 degrees; the interval angle between two adjacent second heating parts is 20-30 degrees; the interval angle between the first heating part and the second heating part is 8-15 degrees.

Preferably, the inclination angle of the outer part of the heating part is matched with the graphite crucible bottom commonly seen in the market, and the inclination angle is controlled to be 15-45 degrees.

Has the advantages that:

the utility model discloses bottom heater for single crystal growing furnace adopts the overall arrangement of equipartition formula heat-generating body, realizes that each part of heater evenly generates heat to increase of service life. Whole heater external diameter is less than the external diameter at the bottom of the crucible, covers at the bottom of the graphite crucible completely, does not blow by argon gas during crystal pulling and causes the reduction of self temperature, adopts bowl type structure at the bottom of the graphite crucible of laminating completely simultaneously, can closely carry out the intensive heating at the bottom of the crucible for change material speed shortens change material time, saves the power consumption, and 360 degrees equipartitions of each portion of generating heat open the lamella can realize the heating equilibrium to and the cooperation installation demand of heater sole. The heater is suitable for graphite crucibles and quartz crucibles with different thermal field sizes, and the purchase and later-stage management cost of the thermal field is reduced.

Drawings

These and/or other advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings and the following detailed description.

FIG. 1 is a schematic perspective view of a bottom heater for the single crystal furnace.

FIG. 2 is a view showing a state of use of the bottom heater for the single crystal furnace.

Wherein each reference numeral represents: 1 a heating element; 11 a heat generating portion; 111 a first heat generating portion; 112 a second heat generating portion; 113 an isolation trench; 12 a support surface; 2 heater foot plate; 21 graphite bolt holes; 3, graphite crucible bottom; 4, a quartz crucible; 5 polysilicon material.

Detailed Description

The invention will be better understood from the following examples.

The drawings in the specification show the structure, ratio, size, etc. only for the purpose of matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and not for the purpose of limiting the present invention, so the present invention does not have the essential meaning in the art, and any structure modification, ratio relationship change or size adjustment should still fall within the scope covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "front", "rear", "middle", and the like used in the present specification are for the sake of clarity only, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof are also considered to be the scope of the present invention without substantial changes in the technical content.

As shown in FIG. 1, the bottom heater for a single crystal furnace comprises a heating element 1 and a heater foot plate 2; the heating body 1 comprises a plurality of strip-shaped heating parts 11, the heating parts 11 are distributed in a radiating shape with the same circle center, the end parts of each heating part 11 are connected with each other, so that an annular loop is formed, and the center of the heating body 1 is left empty; the inner side of each heating part 11 is horizontal to form a circular supporting surface, the middle part of the heating part to the outer side is gradually inclined upwards, and the end part of the heating part to the outer side is provided with a vertical downward supporting surface 12. The heater foot plates 2 are disposed on two opposite sides of the heating element 1, are horizontal plate surfaces, are connected to the outer end supporting surfaces 12 of the corresponding heating parts 11, are located at the bottom of the supporting surfaces 12, and are flush with the bottom of the outer end supporting surfaces of the other heating parts 11.

The heat generating portion 11 includes a first heat generating portion 111 and a second heat generating portion 112; the first heat generating part 111 is arranged at two opposite sides of the heat generating body 1, the outer end supporting surface 12 is connected with the heater foot plate 2, and the inner end is connected with the second heat generating part 112; the middle part of the second heating part 112 is provided with an isolation groove 113 from the inner end to the outer end, so that the second heating part 112 is divided into two parts, the isolation groove 113 is arranged to the middle part of the supporting surface 12, and the heating parts divided into two parts at two sides of the isolation groove are connected in series through the supporting surface, so that the total length of the heating element loop is increased, the sectional area is reduced, and the total resistance of the heater meets the use requirement. Four first heat-generating parts 111 are arranged on two opposite sides of the heat-generating body 1; a heater leg plate 2 is connected between the outer ends of the two first heat generating parts 111 on each side to enhance the supporting strength of the entire heat generating body 1, and the heater is integrally formed in a parallel circuit structure.

The first heat generating part 111 and the second heat generating part 112 have the same width, which is beneficial to uniform heating of the single crystal furnace. The interval angle between two adjacent first heat-generating parts 111 is 10-15 degrees; the interval angle between two adjacent second heating parts 112 is 20-30 degrees; the angle of the interval between the first heat generating part 111 and the second heat generating part 112 is 8-15 °. The inclination angle of the outer part of the heating part 11 is matched with the bottom of a common graphite crucible in the market, and the inclination angle is controlled to be 15-45 degrees.

The heater foot plate 2 is provided with a graphite bolt hole 21 for connecting an electrode.

As shown in FIG. 2, the working principle of the furnace bottom heater for the single crystal furnace is as follows: through graphite bolt hole 21 fixed heating electrode, the back heat-generating body 1 begins to generate heat after the circular telegram, heats 3 at the bottom of the graphite crucible of upper portion, and quartz crucible 4 has been placed to the inside of graphite crucible, is equipped with polycrystalline silicon material 5 in the quartz crucible 4, through the heat-conduction at the bottom of the graphite crucible 3, realizes heating polycrystalline silicon material 5 in the quartz crucible 4.

The utility model provides a thought and method of stove bottom heater for single crystal growing furnace, the method and the way that specifically realize this technical scheme are many, above only the utility model discloses a preferred embodiment should point out, to the ordinary technical personnel in this technical field, not deviating from the utility model discloses under the prerequisite of principle, can also make a plurality of improvements and moist decorations, these improve and moist decorations should also regard as the utility model discloses a protection scope. All the components not specified in the present embodiment can be realized by the prior art.

Claims

1. A furnace bottom heater for a single crystal furnace is characterized by comprising a heating body (1) and a heater foot plate (2); the heating body (1) comprises a plurality of strip-shaped heating parts (11), the heating parts (11) are distributed in a radiating shape with the same circle center, the end parts of each heating part (11) are connected with each other, so that an annular loop is formed, and the center of the heating body (1) is left empty; one end of the inner side of each heating part (11) is horizontal so as to form a circular supporting surface, the part of the middle part, which is outward, is gradually inclined upwards, and the end part, which is outward, is provided with a vertical downward supporting surface (12);

the heater foot plates (2) are arranged on two opposite sides of the heating body (1), are horizontal plate surfaces, are connected with the outer end supporting surfaces (12) of the corresponding heating parts (11), are positioned at the bottoms of the supporting surfaces (12), and are level with the bottoms of the outer end supporting surfaces of other heating parts (11);

and a graphite bolt hole (21) for connecting an electrode is formed in the heater foot plate (2).

2. The bottom heater for a single crystal furnace according to claim 1, wherein the heat generating portion (11) comprises a first heat generating portion (111) and a second heat generating portion (112); the first heating part (111) is arranged at two opposite sides of the heating body (1), the outer end supporting surface (12) of the first heating part is connected with the heater foot plate (2), and the inner end of the first heating part is connected with the second heating part (112); an isolation groove (113) is formed in the middle of the second heating part (112) from the inner end to the outer end, so that the second heating part (112) is divided into two parts, and the isolation groove (113) is formed in the middle of the supporting surface (12).

3. The hearth heater for a single crystal furnace according to claim 2, wherein the number of the first heat generating parts (111) is four, and two of the first heat generating parts are provided on opposite sides of the heat generating body (1); the outer ends of the two first heat-generating parts (111) on each side are connected with a heater foot plate (2).

4. The hearth heater for a single crystal furnace according to claim 3, wherein said first heat generating portion (111) and said second heat generating portion (112) have the same width.

5. The hearth heater for a single crystal furnace according to claim 3, wherein an interval angle between two adjacent first heat generating portions (111) is 10 to 15 °; the interval angle between two adjacent second heating parts (112) is 20-30 degrees; the angle of the interval between the first heat generating part (111) and the second heat generating part (112) is 8-15 degrees.

6. The bottom heater for single crystal furnaces as claimed in claim 1, wherein the outer portion of the heat generating part (11) is inclined at an angle of 15 to 45 °.