CN215366064U - Combined carbon-carbon composite material bushing for single crystal furnace - Google Patents
Combined carbon-carbon composite material bushing for single crystal furnace Download PDFInfo
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- CN215366064U CN215366064U CN202121848239.6U CN202121848239U CN215366064U CN 215366064 U CN215366064 U CN 215366064U CN 202121848239 U CN202121848239 U CN 202121848239U CN 215366064 U CN215366064 U CN 215366064U
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Abstract
The utility model relates to a combined carbon-carbon composite material bushing for a single crystal furnace, which comprises the following components: the device comprises an upper fixing ring (1), a lower fixing ring (2) arranged at an interval with the upper fixing ring (1), and an annular side wall (3) arranged between the upper fixing ring (1) and the lower fixing ring (2); the annular side wall (3) comprises: a plurality of sidewall structures (31); a plurality of the mutual setting of splicing of lateral wall structure spare (31), just the upper and lower both ends of lateral wall structure spare (31) respectively with go up solid fixed ring (1) with gu fixed ring (2) detachably connects down. When the bushing is partially damaged or fails, only the damaged or failed part of the bushing needs to be detached and replaced, so that the whole bushing cannot be scrapped, carbon-carbon composite material resources are effectively saved, and the production cost of the silicon single crystal is reduced.
Description
Technical Field
The utility model relates to a bushing for a single crystal furnace, in particular to a combined carbon-carbon composite material bushing for the single crystal furnace.
Background
Semiconductor silicon single crystals, about 85%, are manufactured by the Czochralski (CZ) method, which is abbreviated as the CZ method, and are generally carried out in a single crystal silicon furnace. The CZ method silicon single crystal growth process comprises the following steps: the method comprises the steps of putting polycrystalline silicon into a quartz lining, heating and melting, slightly cooling molten silicon, giving a certain supercooling degree, contacting a silicon single crystal (called seed crystal) with a specific crystal orientation with melt silicon, adjusting the lifting speed when the seed crystal is shouldered and grown to a target diameter by adjusting the temperature of the melt and the upward lifting speed of the seed crystal, and growing the single crystal at a constant diameter. In the process of pulling the single crystal silicon rod, the temperature in the furnace is as high as about 1550 ℃, at the moment, a guide cylinder is supported by a bushing in the heat insulation layer, and in addition, silicon steam is diffused in a thermal field.
The thermal field in the monocrystalline silicon furnace can be used as a heat-insulating cover, the heat-insulating cover is formed by wrapping a plurality of layers of graphite carbon felts outside a lining, wherein the specific number of the layers of the graphite carbon felts is determined according to the specific requirements of the thermal field in the furnace. At present, in CZ single crystal furnaces, semiconductors and other vacuum high-temperature furnaces, most of the bushings are isostatic pressing graphite bushings or integral carbon/carbon composite material bushings; the graphite lining is generally low in service life, easy to damage in the processes of disassembly, assembly and transportation, high in heat conductivity coefficient and large in heat dissipation, and causes high use cost and high power consumption; the carbon/carbon composite material bushing has low productivity and high cost, and needs to be replaced after being partially damaged, so that the maintenance cost is high.
In addition, as single crystal furnaces are larger and larger, the size of a thermal field of the single crystal furnace is from 30inch to 42inch, the diameter of the liner is larger and larger (reaching phi 1200), the charging rate of the whole carbon-carbon composite material liner in a chemical vapor deposition furnace (CVD furnace) is less and less (the charging rate is about 30 percent or the space utilization rate of the CVD furnace is 30 percent), and the preparation cost is more and more expensive.
How to use new materials and new schemes to improve the service life of the bushing and reduce the production and maintenance cost is a technical problem to be solved urgently by technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a combined carbon-carbon composite material bushing for a single crystal furnace, which solves the problem of high use cost of the bushing.
In order to achieve the above object, the present invention provides a combined carbon-carbon composite bushing for a single crystal furnace, comprising: the upper fixing ring, the lower fixing ring arranged at an interval with the upper fixing ring, and the annular side wall arranged between the upper fixing ring and the lower fixing ring;
the annular sidewall includes: a plurality of sidewall structural members;
a plurality of the mutual setting of concatenation of lateral wall structure, just the upper and lower both ends of lateral wall structure respectively with go up solid fixed ring with gu fixed ring detachably connects down.
According to one aspect of the utility model, the side wall structural member is rectangular strip-shaped;
connecting bulges are arranged at two ends of the side wall structural part in the length direction;
one side of the side wall structural member in the width direction is provided with a splicing bulge, and the other side of the side wall structural member is provided with a splicing groove;
the splicing bulge and the splicing groove are matched in shape.
According to one aspect of the present invention, the upper fixing ring is provided with an annular first groove, and the lower fixing ring is provided with an annular second groove;
the connecting protrusions on the side wall structural member are respectively connected with the first groove and the second groove.
According to one aspect of the utility model, the side wall structural member is rectangular strip-shaped;
connecting grooves are formed in the two ends of the side wall structural member in the length direction;
one side of the side wall structural member in the width direction is provided with a splicing bulge, and the other side of the side wall structural member is provided with a splicing groove;
the splicing bulge and the splicing groove are matched in shape.
According to one aspect of the present invention, the upper fixing ring is provided with a first annular protrusion, and the lower fixing ring is provided with a second annular protrusion;
the connecting groove on the side wall structural member is respectively connected with the first protrusion and the second protrusion.
According to one aspect of the present invention, in the width direction of the side wall structural member, the side surface on which the splicing groove is provided is inclined with respect to the side surface on which the splicing protrusion is provided.
According to one aspect of the utility model, the gap between adjacent side wall structural members in the annular side wall is less than 0.2 mm;
the positions of the upper fixing ring and the lower fixing ring which are respectively connected with the side wall structural part are fixed by pin shafts or threaded connectors;
the diameter of the pin shaft or the threaded connecting piece is 4-8 mm.
According to one aspect of the utility model, the inclination angle of the side face provided with the splicing groove in the width direction of the side wall structural member is 360 DEG/N, wherein 120 is more than or equal to N is more than or equal to 30.
According to one aspect of the utility model, the outer side surfaces of the upper fixing ring, the upper fixing ring and the annular side wall are provided with an anti-oxidation coating.
According to one aspect of the utility model, the thickness of the oxidation resistant coating is 4 μm to 100 μm.
According to one scheme of the utility model, when the lining is partially damaged or failed, only the damaged or failed part of the lining needs to be detached and replaced, so that the whole lining cannot be scrapped, carbon-carbon composite material resources are effectively saved, and the production cost of the silicon single crystal is reduced.
According to the scheme of the utility model, the side wall structural member can be formed by cutting and processing the carbon-carbon composite material plate, and the charging rate of the carbon-carbon composite material plate in the CVD furnace can be more than or equal to 80% by adopting the side wall structural member of the scheme, so that the space utilization rate of the CVD furnace is effectively improved. And the charging rate of the traditional integral carbon-carbon composite material bushing in a chemical vapor deposition furnace (CVD furnace) is only about 30 percent or the space utilization rate of the CVD furnace is 30 percent, so that the scheme greatly improves the space utilization rate of the CVD furnace and reduces the preparation cost of the bushing.
According to one scheme of the utility model, the upper fixing ring and the lower fixing ring are used for fixing the side wall structural part in a pin shaft or threaded connection mode, the fixing structure is convenient, the processing is simple, meanwhile, the disassembly is easier when corresponding parts need to be replaced, and the maintainability is high.
According to one scheme of the utility model, one side of the side wall structural member is provided with the inclined surface, so that circumferential bending of the side wall structural member during splicing can be facilitated, stable connection with the upper fixing ring and the lower fixing ring can be realized under the condition that good splicing precision is ensured, and the scheme is further beneficial to ensuring the structural stability.
According to the scheme of the utility model, the connection clearance between the adjacent side wall structural members is controlled within 0.2mm, so that the connection precision and the tightness of the annular side wall in the scheme are effectively ensured, and the scheme is favorable for ensuring the use reliability of the scheme.
According to one scheme of the utility model, the inclination angle of the inclined side surface on the side wall structural member is set in the range, so that under the condition of ensuring the connection precision and stability, the processing of the inclined surface is facilitated, and the problems of large processing difficulty and low finished product yield caused by too large or too small inclination angle are avoided.
According to the scheme of the utility model, the anti-oxidation coating is arranged on the outer surface of the structure, so that the stable use of the scheme in a high-temperature environment is further ensured, and the service life and the reliability of the scheme are effectively improved.
According to one scheme of the utility model, the thickness of the anti-oxidation coating is set to be in the range of 4-100 μm, so that the anti-oxidation performance of the whole bushing is effectively ensured, and the scheme is favorable for ensuring the service life of the scheme.
Drawings
Fig. 1 is a structural view schematically showing a carbon-carbon composite bushing according to an embodiment of the present invention;
FIG. 2 is a block diagram schematically illustrating a sidewall structure according to an embodiment of the present invention;
FIG. 3 is a top view schematically illustrating a sidewall structure according to an embodiment of the present invention;
FIG. 4 is a block diagram schematically illustrating an upper retaining ring according to one embodiment of the present invention;
FIG. 5 is a block diagram schematically illustrating a lower retaining ring, in accordance with one embodiment of the present invention;
FIG. 6 is an enlarged view schematically showing the position A in FIG. 1;
FIG. 7 is an enlarged view schematically showing a position B in FIG. 1;
fig. 8 is a structural view schematically showing a carbon-carbon composite bushing according to another embodiment of the present invention;
fig. 9 is an enlarged view schematically showing a position C in fig. 8;
fig. 10 is an enlarged view schematically showing a position D in fig. 8.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the utility model, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
In describing embodiments of the present invention, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship that is based on the orientation or positional relationship shown in the associated drawings, which is for convenience and simplicity of description only, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, the above-described terms should not be construed as limiting the present invention.
The present invention is described in detail below with reference to the drawings and the specific embodiments, which are not repeated herein, but the embodiments of the present invention are not limited to the following embodiments.
As shown in fig. 1, according to an embodiment of the present invention, a composite carbon-carbon composite bushing for a single crystal furnace of the present invention includes: an upper fixing ring 1, a lower fixing ring 2 provided at an interval from the upper fixing ring 1, and an annular side wall 3 installed between the upper fixing ring 1 and the lower fixing ring 2. In the present embodiment, the upper fixing ring 1, the lower fixing ring 2 and the annular side wall 3 are detachably connected in a combined manner. Wherein, the coaxial interval that upper fixing ring 1 and lower fixing ring 2 paralleled sets up, and both ends are connected with upper fixing ring 1 and lower fixing ring 2 respectively about annular lateral wall 3 to constitute holistic combination formula bush structure.
In the present embodiment, the annular side wall 3 includes: a plurality of sidewall structures 31. Wherein, the setting of a plurality of mutual concatenations of lateral wall structure 31, and the upper and lower both ends of lateral wall structure 31 are connected with upper fixed ring 1 and lower fixed ring 2 detachably respectively.
In the present embodiment, the upper fixing ring 1, the lower fixing ring 2 and the annular side wall 3 are made of a carbon-carbon composite material, and the density thereof is 1.3g/cm or more3The bending strength is greater than or equal to 80 MPa.
It is to be noted that the carbon-carbon composite (C/C) is a high performance composite of a carbon fiber reinforced carbon matrix. The carbon/carbon composite material bushing mainly plays a role in supporting the weight of the guide cylinder in the single crystal furnace and preventing the erosion of silicon vapor to the heat-insulating layer
According to the utility model, the combined structure is adopted to form the bushing, so that the use and maintenance performance of the scheme are effectively improved, and particularly, when parts are damaged, the integrity of the whole bushing can be ensured only by detaching the corresponding parts and re-replacing the new structure, so that the whole bushing is repeatedly used, the maintenance cost is effectively reduced, and the service life is prolonged.
Referring to fig. 1, 2 and 3, according to an embodiment of the present invention, the sidewall structure 31 has a rectangular strip shape. In the present embodiment, the side wall structure 31 has connecting protrusions 311 at both ends in the longitudinal direction; the side wall structure 31 has a joining protrusion 312 on one side in the width direction and a joining groove 313 on the other side. In the present embodiment, the splicing protrusion 312 and the splicing groove 313 are arranged in a shape matching manner. In the present embodiment, the connecting protrusions 311 and the splicing protrusions 312 are connected to each other at three sides of the side wall structure 31 to form a continuous protrusion structure. The splicing protrusion 312 and the splicing groove 313 are arranged in a matching manner, so that splicing connection of the plurality of side wall structural members 31 and connection accuracy are achieved. In this embodiment, the bottom surface of the splicing groove 313 is flush with the end surface of the end of the connecting protrusion 311 away from the splicing protrusion 312, so as to ensure the fitting degree when the adjacent side wall structural members 31 are connected, and ensure the sealing performance after the connection.
Referring to fig. 1, 2, 4 and 5, according to an embodiment of the present invention, an annular first groove 11 is formed on the upper fixing ring 1, and an annular second groove 21 is formed on the lower fixing ring 2. In the present embodiment, the coupling protrusions 311 of the sidewall structural member 31 are coupled with the first recess 11 and the second recess 21, respectively.
In the present embodiment, the positions where the upper fixing ring 1 and the lower fixing ring 2 are respectively connected to the sidewall structural member 31 are fixed by using a pin or a screw connector. In this embodiment, the pin or threaded connection has a diameter of 4 to 8 mm. Preferably, the diameter of the pin or the threaded connection may be set to 5mm or 6 mm. In this embodiment, the pin or the threaded connection is made of a carbon-carbon composite material.
Referring to fig. 1, 2, 4 and 5, in this embodiment, a first through hole a may be formed on the connecting protrusion 311 at two opposite ends of the side wall structure 31, and a first fixing hole b corresponding to the first through hole a is correspondingly formed on the upper fixing ring 1 and the lower fixing ring 2, so that the side wall structure 31 may be fixed by sequentially passing a pin or a threaded connector through the aligned first through hole a and the first fixing hole b.
Through the setting, the mode that upper fixing ring 1 and lower fixing ring 2 pass through round pin axle or threaded connection spare in this scheme is fixed the lateral wall structure spare, and its fixed knot constructs conveniently, and processing is simple, and simultaneously, its dismantlement is also easier when corresponding part is changed to needs, and maintainability is high.
As shown in fig. 3, according to an embodiment of the present invention, in the width direction of the side wall structural member 31, the side surface where the engaging groove 313 is provided is obliquely provided with respect to the side surface where the engaging protrusion 312 is provided.
Through the setting, one side through with lateral wall structure 31 sets up to the inclined plane and can help realizing that lateral wall structure 31 is crooked and then can realize under the circumstances of guaranteeing good concatenation precision with the stable connection of solid fixed ring 1 and solid fixed ring 2 down when the concatenation, and then beneficial to guaranteeing the stable in structure of this scheme.
According to one embodiment of the utility model, the gap between adjacent sidewall structures 31 in the annular sidewall 3 is less than 0.2 mm.
Through the arrangement, the connection clearance between the adjacent side wall structural members 31 is controlled within 0.2mm, the connection precision and the tightness of the annular side wall 3 in the scheme are effectively guaranteed, and the scheme is favorable for guaranteeing the use reliability.
As shown in FIG. 3, according to an embodiment of the present invention, the inclination angle α of the side surface where the engagement groove 313 is provided is 360/N in the width direction of the side wall structural member 31, wherein 120. gtoreq.N.gtoreq.30. In the present embodiment, the value of N is preferably one of 45, 60, 72, and 90.
Through the arrangement, the inclination angle of the inclined side surface of the side wall structural part 31 is arranged in the range, the connection precision and the stability are guaranteed, the processing of the inclined surface is facilitated, and the problems that the processing difficulty is large and the yield of finished products is low due to too large or too small inclination angle are avoided.
According to one embodiment of the present invention, the outer side surfaces of the upper fixing ring 1, and the annular side wall 3 are provided with an oxidation resistant coating. In the present embodiment, the oxidation-resistant coating may employ a SiC coating.
Through the setting, set up anti-oxidant coating at the structure surface of this scheme, further guaranteed that the use of this scheme under high temperature environment is stable, the effectual life and the reliability that improves this scheme.
According to one embodiment of the utility model, the thickness of the oxidation resistant coating is 4 μm to 100 μm.
Through the arrangement, the thickness of the anti-oxidation coating is set within the range of 4-100 mu m, so that the anti-oxidation performance of the whole bushing is effectively guaranteed, and the scheme is favorable for guaranteeing the service life of the bushing.
As shown in fig. 1, according to an embodiment of the present invention, a boss is provided at an end of the upper fixing ring 1 away from the annular side wall 3, and a groove is provided at an end of the lower fixing ring 2 away from the annular side wall 3, and the groove is matched with the boss provided on the upper fixing ring 1 in shape, so that stacking of a plurality of bushings of the present invention can be realized, and the flexibility of use of the present invention is improved.
As shown in fig. 8, according to another embodiment of the present invention, the sidewall structural member 31 has a rectangular strip shape. In the present embodiment, the side wall structure 31 is provided with connecting grooves 314 at both ends in the length direction; the side wall structure 31 has a joining protrusion 312 on one side in the width direction and a joining groove 313 on the other side. In the present embodiment, the splicing protrusion 312 and the splicing groove 313 are arranged in a shape matching manner.
Referring to fig. 8, 9 and 10, according to another embodiment of the present invention, the upper fixing ring 1 is provided with a first annular protrusion 12, and the lower fixing ring 2 is provided with a second annular protrusion 22. In the present embodiment, the connecting grooves 314 of the sidewall structural member 31 are connected with the first protrusion 12 and the second protrusion 22, respectively.
In the present embodiment, the positions where the upper fixing ring 1 and the lower fixing ring 2 are respectively connected to the sidewall structural member 31 are fixed by using a pin or a screw connector. In this embodiment, the pin or threaded connection has a diameter of 4 to 8 mm. Preferably, the diameter of the pin or the threaded connection may be set to 5mm or 6 mm. In this embodiment, the pin or the threaded connection is made of a carbon-carbon composite material.
In this embodiment, the second communication holes c may be disposed on the connection grooves 314 at two opposite ends of the side wall structure 31, and the second fixing hole locations d corresponding to the second communication holes c may be correspondingly disposed on the first protrusions 12 of the upper fixing ring 1 and the second protrusions 22 of the lower fixing ring 2, so that the side wall structure 31 may be fixed by sequentially passing pins or screws through the aligned second communication holes c and second fixing hole locations d.
Through the setting, the mode that upper fixing ring 1 and lower fixing ring 2 pass through round pin axle or threaded connection spare in this scheme is fixed the lateral wall structure spare, and its fixed knot constructs conveniently, and processing is simple, and simultaneously, its dismantlement is also easier when corresponding part is changed to needs, and maintainability is high.
According to another embodiment of the present invention, in the width direction of the side wall structural member 31, the side surface on which the engaging groove 313 is provided is obliquely provided with respect to the side surface on which the engaging protrusion 312 is provided.
Through the setting, one side through with lateral wall structure 31 sets up to the inclined plane and can help realizing that lateral wall structure 31 is crooked and then can realize under the circumstances of guaranteeing good concatenation precision with the stable connection of solid fixed ring 1 and solid fixed ring 2 down when the concatenation, and then beneficial to guaranteeing the stable in structure of this scheme.
According to another embodiment of the utility model, the gap between adjacent sidewall structures 31 in the annular sidewall 3 is less than 0.2 mm.
Through the arrangement, the connection clearance between the adjacent side wall structural members 31 is controlled within 0.2mm, the connection precision and the tightness of the annular side wall 3 in the scheme are effectively guaranteed, and the scheme is favorable for guaranteeing the use reliability.
According to another embodiment of the present invention, the inclination angle α of the side surface where the splicing groove 313 is provided is 360 °/N in the width direction of the side wall structural member 31, wherein 120 ≧ N ≧ 30. In the present embodiment, the value of N is preferably one of 45, 60, 72, and 90.
Through the arrangement, the inclination angle of the inclined side surface of the side wall structural part 31 is arranged in the range, the connection precision and the stability are guaranteed, the processing of the inclined surface is facilitated, and the problems that the processing difficulty is large and the yield of finished products is low due to too large or too small inclination angle are avoided.
According to another embodiment of the present invention, the outer side surfaces of the upper fixing ring 1, the upper fixing ring 1 and the annular side wall 3 are provided with an oxidation resistant coating. In the present embodiment, the oxidation-resistant coating may employ a SiC coating.
Through the setting, set up anti-oxidant coating at the structure surface of this scheme, further guaranteed that the use of this scheme under high temperature environment is stable, the effectual life and the reliability that improves this scheme.
According to another embodiment of the utility model, the thickness of the oxidation resistant coating is between 4 μm and 100 μm.
Through the arrangement, the thickness of the anti-oxidation coating is set within the range of 4-100 mu m, so that the anti-oxidation performance of the whole bushing is effectively guaranteed, and the scheme is favorable for guaranteeing the service life of the bushing.
According to another embodiment of the utility model, a boss is arranged at one end of the upper fixing ring 1 far away from the annular side wall 3, and a groove is arranged at one end of the lower fixing ring 2 far away from the annular side wall 3, and the groove is matched with the boss arranged on the upper fixing ring 1 in shape, so that the stacking of a plurality of bushings of the utility model can be realized, and the use flexibility of the utility model is improved.
The foregoing is merely exemplary of particular aspects of the present invention and devices and structures not specifically described herein are understood to be those of ordinary skill in the art and are intended to be implemented in such conventional ways.
The above description is only one embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A combined carbon-carbon composite material bushing for a single crystal furnace, comprising: the device comprises an upper fixing ring (1), a lower fixing ring (2) arranged at an interval with the upper fixing ring (1), and an annular side wall (3) arranged between the upper fixing ring (1) and the lower fixing ring (2);
the annular side wall (3) comprises: a plurality of sidewall structures (31);
a plurality of the mutual setting of splicing of lateral wall structure spare (31), just the upper and lower both ends of lateral wall structure spare (31) respectively with go up solid fixed ring (1) with gu fixed ring (2) detachably connects down.
2. The combined carbon-carbon composite bushing for a single crystal furnace according to claim 1, wherein the sidewall structural member (31) has a rectangular bar shape;
connecting bulges (311) are arranged at two ends of the side wall structural part (31) in the length direction;
a splicing bulge (312) is arranged on one side of the side wall structural member (31) in the width direction, and a splicing groove (313) is arranged on the other side of the side wall structural member;
the splicing protrusion (312) and the splicing groove (313) are matched in shape.
3. The combined carbon-carbon composite material bushing for the single crystal furnace according to claim 2, wherein the upper fixing ring (1) is provided with a first annular groove (11), and the lower fixing ring (2) is provided with a second annular groove (21);
the connecting protrusions (311) on the side wall structural member (31) are respectively connected with the first groove (11) and the second groove (21).
4. The combined carbon-carbon composite bushing for a single crystal furnace according to claim 1, wherein the sidewall structural member (31) has a rectangular bar shape;
two ends of the side wall structural member (31) in the length direction are provided with connecting grooves (314);
a splicing bulge (312) is arranged on one side of the side wall structural member (31) in the width direction, and a splicing groove (313) is arranged on the other side of the side wall structural member;
the splicing protrusion (312) and the splicing groove (313) are matched in shape.
5. The combined carbon-carbon composite material bushing for the single crystal furnace according to claim 4, wherein the upper fixing ring (1) is provided with a first annular protrusion (12), and the lower fixing ring (2) is provided with a second annular protrusion (22);
the connecting grooves (314) on the side wall structural part (31) are respectively connected with the first protrusions (12) and the second protrusions (22).
6. The modular carbon-carbon composite bushing for a single crystal furnace according to any one of claims 2 to 5, wherein a side surface on which the splicing groove (313) is provided is inclined with respect to a side surface on which the splicing protrusion (312) is provided in a width direction of the sidewall structural member (31).
7. The modular carbon-carbon composite bushing for single crystal furnaces as claimed in any one of claims 1 to 5, wherein the gap between adjacent sidewall structures (31) in the annular sidewall (3) is less than 0.2 mm;
the positions of the upper fixing ring (1) and the lower fixing ring (2) which are respectively connected with the side wall structural part (31) are fixed by pin shafts or threaded connectors;
the diameter of the pin shaft or the threaded connecting piece is 4-8 mm.
8. The combined carbon-carbon composite material bushing for a single crystal furnace according to claim 6, wherein an inclination angle of a side surface on which the splicing groove (313) is provided in a width direction of the sidewall structural member (31) is 360 °/N, wherein 120. gtoreq.N.gtoreq.30.
9. The combined carbon-carbon composite material bushing for the single crystal furnace according to any one of claims 1 to 5, wherein the outer side surfaces of the upper fixing ring (1), the upper fixing ring (1) and the annular side wall (3) are provided with an oxidation resistant coating.
10. The modular carbon-carbon composite bushing for a single crystal furnace of claim 9, wherein the thickness of the oxidation resistant coating is 4 μm to 100 μm.
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| CN202121848239.6U CN215366064U (en) | 2021-08-09 | 2021-08-09 | Combined carbon-carbon composite material bushing for single crystal furnace |
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| CN202121848239.6U CN215366064U (en) | 2021-08-09 | 2021-08-09 | Combined carbon-carbon composite material bushing for single crystal furnace |
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