CN201588005U - Two-stage side heater in vertical gradient freeze crystal growing furnace - Google Patents
Two-stage side heater in vertical gradient freeze crystal growing furnace Download PDFInfo
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- CN201588005U CN201588005U CN2009202741775U CN200920274177U CN201588005U CN 201588005 U CN201588005 U CN 201588005U CN 2009202741775 U CN2009202741775 U CN 2009202741775U CN 200920274177 U CN200920274177 U CN 200920274177U CN 201588005 U CN201588005 U CN 201588005U
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Abstract
The utility model relates to a two-stage side heater in a vertical gradient freeze crystal growing furnace, comprising a graphite sleeve, an upper heater and a lower heater which are positioned in the graphite sleeve, wherein the upper heater in the graphite sleeve is connected with graphite electrodes fixed on an upper furnace cover plate, and is connected with the graphite sleeve through boron nitride; or the upper heater is supported by graphite blocks, and the graphite sleeve is connected with the electrodes fixed on the upper furnace cover plate; and the lower heater is installed in the graphite sleeve and supported by the graphite blocks, and the graphite sleeve is connected with the electrodes fixed on the upper furnace cover plate and is also fixed on the upper furnace cover plate by screws. The two-stage side heater in the vertical gradient freeze crystal growing furnace has the advantages that a suspended side heating system can integrally move up along with a furnace cover and then be integrally dismounted, and a heat insulating layer outside the heating system does not need to be dismounted, thereby providing great convenience for equipment maintenance, charging and discharging; and slab-shaped electrodes are adopted, and a complete graphite cylinder is formed outside the side heating system and can absorb the heat of reradiation as well as the heat of a reflection heater, thereby not only increasing the utilization rate of heat energy, but also leading the thermal field to have better symmetry and stability.
Description
Technical field
The utility model relates to field of crystal growth, when particularly adopting Vertical Gradient Freeze (VGF) technology (VGF) growing single-crystal, and the design of heating system.
Background technology
VGF (Vertical Gradient Freeze (VGF)) technology has become one of mainstream technology of growth major diameter, low dislocation monocrystalline, and its biggest advantage is and can forms less thermograde at the solid-liquid interface place of crystal growth.Guarantee thermal field symmetry, keep the key of the stable VGF of the being thermal field design of thermal field.And the side well heater is a primary heater in the crystal system, and it is determining the character of thermal field, so the design of side heating system is one of core content of whole crystal growth system.At present side adds two kinds of thermal recovery coil heats and high purity graphite heating in the VGF single crystal growing system, because coil at high temperature can cause the volatilization of metal, can be commonly used in the crystal growth with closed system polluting in the stove; And high purity graphite at high temperature, has better chemical stability, often is used in the purified environment, as growing semiconductor monocrystalline etc.The supporting structure of graphite heater adopts lower support structure usually at present, as patent US 0087125, US 5698029 etc.This assembling mode is no doubt succinct, but when putting into raw material, getting material and during to the well heater demolition and maintenance, all need the thermal insulation layer of outside is removed one by one, and then split one by one, so bring very big inconvenience for production and maintenance of the equipment.
Summary of the invention
The purpose of this utility model provides multi-stage type side well heater in the Vertical Gradient Freeze (VGF) crystal growing furnace, this well heater can be by the power of each well heater of control, and the thermal field condition that satisfies VGF technology growth monocrystalline comprises rational temperature gradient, solid-liquid interface shape, direction of heat flow etc.; Guarantee that thermal field has higher symmetry, and suppress the temperature fluctuation of thermal field, it is stable to keep thermal field; Improve the utilization ratio of heat energy; Be convenient to dismounting and safeguard; Be convenient to charging, get material.
For realizing above purpose, the utility model by the following technical solutions:
Multi-stage type side well heater in the Vertical Gradient Freeze (VGF) crystal growing furnace, it comprises: graphite sleeve, the upper heater that is positioned at the graphite sleeve, following well heater, upper heater links to each other with Graphite Electrodes on being fixed on stove cover plate in the graphite sleeve, and upper heater is connected with the graphite sleeve with boron nitride; Or upper heater supports with graphite block, and the graphite sleeve is connected with electrode on being fixed on stove cover plate; Following heater cartridge supports with graphite block in the graphite sleeve, and the graphite sleeve is connected with electrode on being fixed on stove cover plate, and the graphite sleeve is fixed on the stove cover plate with screw.
The graphite sleeve is made up of two semicircle graphite cylinders.
The graphite sleeve is made up of 1/4 or 1/8 or 1/10 circular-arc long slab electrode.
Following group well heater is the multistage well heater, and the quantity of section is 1～5.
Adopt high purity graphite to make well heater, and install by following dual mode:
(1) upper heater directly be fixed on stove cover plate on Graphite Electrodes link to each other, and down well heater is contained in back in the circular graphite cylinder of two halves at first in advance and is connected with electrode on being fixed on bell, its structure and distribution are shown among Fig. 27,9; Two groups of well heaters all are positioned at the graphite sleeve after the installation,
(2) adopt 1/4 circular-arc long slab electrode, respectively upper heater, following well heater are coupled together.After the installation, two groups of well heaters are positioned at the graphite sleeve that the long plate shape electrode is surrounded.Both common ground are to form a complete graphite sleeve outside graphite heater, and the position distribution of upper and lower well heater as shown in Figure 2.
The graphite sleeve with the heat absorption that well heater sends launch again, reflection etc. is transported to the nucleus of crystal growth once more, thereby the effect of playing soaking, improving utilization efficiency of heat energy; Owing to reduced the hot-fluid loss of the well heater outside, can promote to form axial hot-fluid; The graphite sleeve is fixed on the insulation that is connected with bell, heat-proof quality preferably on the cover plate, during by the outboard leadscrew lifting, the side heating system is along with lifting, thereby make the side heating system can make things convenient for complete taking-up or put into, made things convenient for the demolition and maintenance of well heater thus, and getting in the crystal growing process expected and charging; Consider the character of differing materials,, adjust the power of well heater up and down, make to form certain temperature difference up and down between the well heater, thereby satisfy the processing condition of crystal growth as volatility, thermal conductivity, transparency etc.
Advantage of the present utility model: compare with background technology, suspension type side heating system can be whole with after moving on the bell, and integral demounting need not dismantled the outer thermal insulation layer of heating system, so to maintenance of the equipment and charging, the very big convenience of having got strip.Adopt the long plate shape electrode, form a complete graphite cylinder in the side heating system outside, graphite cylinder can absorb the heat of radiation again, reflection well heater, has so not only improved the utilising efficiency of heat energy, and has made thermal field have symmetry and stability preferably.
Description of drawings
Fig. 1 is a Vertical Gradient Freeze (VGF) single crystal growing furnace structural representation
Fig. 2 is a kind of two sections heater structure synoptic diagram of the present invention
Fig. 3 is the graphite sleeve that 1/4 circular-arc long slab electrode is formed
Among Fig. 1, Fig. 2, Fig. 3,1 is crucible, 2 well heaters, and 3 is thermal insulation layer, and 4 is the body of heater shell, and 5 is last stove cover plate, and 6 is the molybdenum screw, and 7 is upper heater, and 9 is boron nitride, and 10 are following well heater, and 11 is graphite block, and 8 is circular-arc long slab electrode, and 12 is screw.
Embodiment
Mount scheme one: upper heater is directly linked to each other with Graphite Electrodes, and well heater is contained in the graphite tube of being made up of two half-cylindrical graphite drums earlier in advance down, and the graphite sleeve is linked to each other with electrode.For guaranteeing the safety of Graphite Electrodes, can not allow Graphite Electrodes stressed, symmetric two BN pieces are installed to support upper heater on the graphite sleeve, following well heater adopts the graphite block support and connection, the graphite sleeve then adopts the molybdenum bolting on last stove cover plate, leading screw by the body of heater outside rises bell or when reducing like this, the graphite sleeve shift out together with well heater or the body of heater of packing in.
Mount scheme two: adopt 1/4 cylindric long slab that upper and lower well heater is coupled together, adopt graphite block to support each well heater at connecting portion, after the installation, outside two well heaters, form a complete graphite sleeve, then the graphite sleeve is connected with Graphite Electrodes respectively.For guaranteeing the safety of installing electrodes, do not allow Graphite Electrodes stressed, the graphite sleeve adopts the molybdenum bolting to stove cover plate.Leading screw by the body of heater outside rises bell or when reducing like this, the graphite sleeve shift out together with well heater or the body of heater of packing in.
Heat protocol (using method): satisfy the thermograde of crystal growth, mainly depend on two parameters, the position in the thermal field and the temperature difference between the well heater up and down.During the growth different crystal, take all factors into consideration the factor of crystalline character, crystalline growth efficiency and crystal mass each side, adopt the different temperature difference up and down between the well heater.For example, during the GaAs monocrystalline of 6 inches low dislocations of growth, for reducing the thermal stresses in the crystal, near the thermograde the growth interface should also should be considered molten being held in about 15 ℃ simultaneously less than 5K/cm.And when the elemental semiconductor of growth,,, should suitably improve the thermograde in the melt for keeping the stability of crystal growth interface because the thermal conductivity of Ge melt is very big as Ge, so the time up and down the temperature difference of well heater generally about 50 ℃.
Claims (3)
1. two-part side well heater in the Vertical Gradient Freeze (VGF) crystal growing furnace, it is characterized in that: it comprises: graphite sleeve, the upper heater that is positioned at the graphite sleeve, following well heater, upper heater links to each other with Graphite Electrodes on being fixed on stove cover plate in the graphite sleeve, upper heater is connected with the graphite sleeve with boron nitride, following heater cartridge is in the graphite sleeve, support with graphite block, the graphite sleeve is connected with electrode on being fixed on stove cover plate, and the graphite sleeve is fixed on the stove cover plate with screw.
2. two-part side well heater in the Vertical Gradient Freeze (VGF) crystal growing furnace according to claim 1 is characterized in that: the graphite sleeve is made up of two semicircle graphite cylinders.
3. two-part side well heater in the Vertical Gradient Freeze (VGF) crystal growing furnace according to claim 1 is characterized in that: the graphite sleeve is made up of 1/4 or 1/8 or 1/10 circular-arc long slab electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202741775U CN201588005U (en) | 2009-12-29 | 2009-12-29 | Two-stage side heater in vertical gradient freeze crystal growing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202741775U CN201588005U (en) | 2009-12-29 | 2009-12-29 | Two-stage side heater in vertical gradient freeze crystal growing furnace |
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| Publication Number | Publication Date |
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| CN201588005U true CN201588005U (en) | 2010-09-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009202741775U Expired - Fee Related CN201588005U (en) | 2009-12-29 | 2009-12-29 | Two-stage side heater in vertical gradient freeze crystal growing furnace |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102758248A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Isothermal type heating system for single crystal furnace |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN103451727A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof |
| CN103451726A (en) * | 2013-08-27 | 2013-12-18 | 天威新能源控股有限公司 | Water chilling ingot furnace and ingot casting process thereof |
| CN105200529A (en) * | 2015-09-29 | 2015-12-30 | 郎业方 | Double-region heater for single-crystal furnace |
| CN106637386A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Single crystal straight-pulling heater capable of increasing crystal pulling rate, and single crystal straight-pulling method |
-
2009
- 2009-12-29 CN CN2009202741775U patent/CN201588005U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102758248A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Isothermal type heating system for single crystal furnace |
| CN102758254A (en) * | 2012-06-20 | 2012-10-31 | 合肥景坤新能源有限公司 | Heating system for single crystal furnace |
| CN103451727A (en) * | 2013-08-19 | 2013-12-18 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod heat preservation device and heat preservation method thereof |
| CN103451727B (en) * | 2013-08-19 | 2016-10-12 | 浙江晶盛机电股份有限公司 | Zone melting furnace polycrystalline rod attemperator and heat preserving method thereof |
| CN103451726A (en) * | 2013-08-27 | 2013-12-18 | 天威新能源控股有限公司 | Water chilling ingot furnace and ingot casting process thereof |
| CN105200529A (en) * | 2015-09-29 | 2015-12-30 | 郎业方 | Double-region heater for single-crystal furnace |
| CN106637386A (en) * | 2015-10-30 | 2017-05-10 | 西安通鑫半导体辅料有限公司 | Single crystal straight-pulling heater capable of increasing crystal pulling rate, and single crystal straight-pulling method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING GUOJING INFRARED OPTICAL TECHNOLOGY CO., L Free format text: FORMER OWNER: BEIJING CENTRAL INST.OF THE NONFERROUS METAL Effective date: 20130802 Free format text: FORMER OWNER: BEIJING GUOJING INFRARED OPTICAL TECHNOLOGY CO., LTD. Effective date: 20130802 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20130802 Address after: 100088, 2, Xinjie street, Beijing Patentee after: Beijing Guojing Infrared Optical Technology Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals Patentee before: Beijing Guojing Infrared Optical Technology Co., Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100922 Termination date: 20151229 |
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| EXPY | Termination of patent right or utility model |