WO2023231927A1

WO2023231927A1 - Electrode device, heater power supply structure, and furnace bottom structure of single crystal furnace

Info

Publication number: WO2023231927A1
Application number: PCT/CN2023/096613
Authority: WO
Inventors: 董升; 邓浩; 李侨
Original assignee: 隆基绿能科技股份有限公司
Priority date: 2022-05-31
Filing date: 2023-05-26
Publication date: 2023-12-07
Also published as: CN218301686U

Abstract

The present application relates to the technical field of solar photovoltaics, and discloses an electrode device, a heater power supply structure, and a furnace bottom structure of a single crystal furnace, aiming to provide the technical solution capable of improving the heating efficiency of a heater. The electrode device is applied to a heater, and comprises an electrode body. A first end of the electrode body is provided with a preset structure configured to be in cooperative connection with the heater, the preset structure having a first end face and a second end face opposite to each other, and a side wall connecting the first end face and the second end face, and the area of the second end face being greater than that of the first end face.

Description

An electrode device, a heater power supply structure and a furnace bottom structure of a single crystal furnace

Cross-references to related applications

This disclosure requires the priority of the patent application submitted to the China Patent Office on May 31, 2022, with application number 202221352857.6 and titled "An electrode device, a heater power supply structure and a furnace bottom structure of a single crystal furnace", all of which The contents are incorporated by reference into this disclosure.

Technical field

This application belongs to the field of solar photovoltaic technology, and in particular relates to an electrode device, a heater power supply structure and a furnace bottom structure of a single crystal furnace.

Background technique

The cooling electrode is the port of the vacuum furnace connected to the heater in the furnace, and is a key component connecting the power supply and heater outside the furnace. Therefore, the performance of the cooling electrode is directly related to whether the vacuum furnace can meet the index requirements.

But at present, the resistance between the cooling electrode and the heater is large, resulting in a decrease in the heating efficiency of the heater.

Contents of the invention

The purpose of this application is to provide an electrode device, a heater power supply structure and a furnace bottom structure of a single crystal furnace, so as to provide a technical solution that can improve the heating efficiency of the heater.

In a first aspect, the electrode device provided by this application is used in a heater, and the electrode device includes an electrode body;

The first end of the electrode body has a preset structure for mating and connecting with the heater. The preset structure has an opposite first end face and a second end face, and connects the first end face and the third end face. A side wall with two end faces, wherein the area of the second end face is greater than the area of the first end face.

Further, in the direction from the first end surface to the second end surface, the side walls of the preset structure are inclined outward.

When the above technical solution is adopted, in this application, the electrode body is connected to the heater through a first end, wherein the first end of the electrode body has a preset structure, and the area of the second end surface of the preset structure is larger than The area of the first end face, that is, the side wall of the preset structure has a certain inclination angle along the direction from the first end face to the second end face. It should be understood that side walls with a certain inclination increase the surface area relative to vertical side walls. In practice, the electrode body is connected to the heater through a preset structure In conjunction, when the surface area of the side wall of the preset structure increases, the contact area between the preset structure and the heater also increases accordingly. At this time, the resistance between the preset structure and the heater will decrease accordingly, thus The conductivity between the electrode body and the heater is better, thereby improving the heating efficiency of the heater.

In a possible implementation, the electrode device further includes a cooling tube, and the electrode body has a first cavity opened from the second end to the first end; the cooling tube is at least partially disposed on In the first cavity, there is a gap between the first cavity and the cooling tube.

When the above technical solution is adopted, the electrode body has a first cavity opened from the second end to the first end, and the cooling pipe is placed in the first cavity, so the cooling pipe can The electrode body is cooled down.

In a possible implementation, the liquid inlet of the cooling pipe is close to the second end of the electrode body, and the liquid outlet of the cooling pipe is close to the first end of the electrode body and is located in the predetermined position. in the structure.

When the above technical solution is adopted, the cooling liquid can enter the cooling pipe along the liquid inlet of the cooling pipe, and enter the first cavity from the liquid inlet of the cooling pipe to penetrate the entire electrode body to realize the cooling of the electrode body. Cool down.

In a second aspect, the application provides a heater power supply structure, including a heater support and the above-mentioned electrode device;

The heater support has a connection hole that matches the preset structural shape, the preset structure of the electrode body is inserted into the connection hole, and the side wall is in contact with the hole wall of the connection hole. touch.

When the above technical solution is adopted, the heater support and the electrode device are connected to the preset structure through the connection hole, and the side wall of the preset structure is in contact with the wall of the connection hole. Based on this, the electrode device can be enlarged At this time, the resistance between the electrode device and the heater support will be reduced accordingly, thereby making the conductivity between the electrode device and the heater support better, thereby improving the heating efficiency. The heating efficiency of the device.

In a possible implementation, the heater power supply structure further includes a mounting base and a first sealing member; the mounting base is connected to the second end of the electrode device, and the first sealing member is disposed on the The connection between the second end of the electrode body and the mounting base.

When the above technical solution is adopted, the first sealing member is provided at the connection between the electrode body and the mounting base, thereby realizing the sealing of the coolant inside the heater power supply structure and ensuring that the heater power supply structure does not leak. Coolant.

In a possible implementation, the electrode device further includes a cooling tube, and the electrode body has a first cavity opened from the second end to the first end;

The mounting base has a second cavity, and an end of the second cavity close to the electrode body has a second opening. The first opening of the first cavity matches the second opening, so After the mounting base is connected to the second end of the electrode body, the first cavity and the second cavity form a hollow cavity; the cooling tube is placed in the hollow cavity; the cooling tube is connected to the second end of the electrode body. The electrode body is arranged coaxially.

When the above technical solution is adopted, the cooling tube can be placed in the hollow cavity to cool down the electrode device in the hollow cavity formed by the first cavity and the second cavity.

In a possible implementation, the mounting base has a cooling liquid inlet and a cooling liquid outlet, the heater power supply structure also includes a first water cooling joint provided at the cooling liquid inlet, and the cooling liquid outlet is provided The second water-cooling joint at In the cooling tube, the liquid flows out from the liquid outlet of the cooling tube, enters the hollow cavity, and flows out from the second water-cooling joint.

When the above technical solution is adopted, the coolant enters the cooling tube through the coolant inlet, flows out from the outlet of the cooling tube, enters the hollow cavity, and then flows out from the coolant outlet. It should be understood that due to the The liquid outlet is located at the end of the electrode body away from the mounting base, and the coolant outlet is located on the mounting base. Therefore, when the coolant enters the hollow cavity along the end of the electrode body away from the mounting base and flows out of the mounting base, the coolant It penetrates the entire hollow cavity to achieve cooling of the entire electrode device.

In a possible implementation, the heater power supply structure further includes a graphite pressure ring. The graphite pressure ring is disposed on the first end of the electrode body and is disposed on the heater support away from the electrode body. One side of the second end is used to fix the heater support member to the electrode body.

In a third aspect, this application also provides a furnace bottom structure of a single crystal furnace, including a furnace bottom plate and the above-mentioned heater power supply structure; a through hole is provided on the furnace bottom plate, and the furnace bottom plate is sleeved through the through hole. On the outside of the electrode body, and disposed between the liquid inlet and the liquid outlet of the cooling pipe of the heater power supply structure.

Furthermore, the furnace bottom structure of the single crystal furnace further includes an insulating material layer disposed between the furnace bottom plate and the electrode body.

When the above technical solution is adopted, since the electrode body and the furnace bottom plate are both conductors, in order to To prevent leakage, embodiments of the present application provide an insulating layer between the electrode body and the furnace bottom plate to electrically isolate the electrode device from the furnace bottom plate.

In a possible implementation, the furnace bottom plate has an opposite first side and a second side, the electrode device includes a cooling tube, the heater power supply structure has a hollow cavity, and the cooling tube is placed in the hollow cavity;

The mounting base has a cooling liquid inlet and a cooling liquid outlet. The cooling liquid inlet is provided at the cooling liquid inlet. The cooling pipe outlet is located at the first end of the electrode body. The first side of the furnace floor is located between the liquid inlet of the cooling pipe and the liquid outlet of the cooling pipe, and the second side of the furnace floor is located between the first side of the furnace floor and the cooling pipe. between the liquid outlets.

In a possible implementation, the electrode device further includes a fastener, an insulator, and an insulating elastic component. The connection between the electrode body and the first side of the furnace bottom plate has a boss structure. The furnace The first side of the bottom plate is in contact with the boss structure through the insulation piece, and the fastener is provided at the connection between the electrode body and the second side of the furnace bottom plate for fastening the furnace. The bottom plate and the electrode body, the insulating elastic component is disposed between the fastener and the second side of the furnace bottom plate.

When the above technical solution is adopted, the connection between the electrode body and the second side of the furnace floor is connected through a fastener. Since most of the fasteners are conductors, the fastener is connected to the first side of the furnace floor. An insulating member is provided, and an insulating elastic component is provided between the fastener and the second side of the furnace bottom plate to achieve insulation between the furnace bottom plate and the electrode body.

Further, the electrode device further includes a second sealing member and a third sealing member; the second sealing member is disposed between the insulating elastic component and the electrode body, and the third sealing member is disposed between the insulating elastic component and the electrode body. Insulate between the elastic component and the second side of the furnace floor.

Based on this, the second side of the furnace floor is sealed by the second sealing member and the third sealing member, thereby isolating the space on the upper and lower sides of the furnace floor and ensuring that the first side of the furnace floor is in a high vacuum state. The second side of the furnace floor is in the atmosphere.

Furthermore, the insulating elastic component includes an insulating elastic piece and an insulating gasket, and the electrode device also includes a fourth sealing member; the insulating gasket and the insulating elastic piece are sequentially arranged between the fastener and the furnace. Between the second side of the bottom plate, the second sealing member is provided between the insulating elastic member and the electrode body, and the third sealing member is provided between the insulating elastic member and the second side of the furnace bottom plate. between the two sides; the fourth sealing member is provided between the insulating elastic member and the insulating gasket.

When the above technical solution is adopted, the sealing and fastening effect on the second side of the furnace floor is achieved.

In a possible implementation, the electrode device further includes a flow regulator, a temperature sensor, and a controller electrically connected to the flow regulator, the temperature sensor, and the temperature sensor;

The flow regulator is arranged in the cooling tube, the temperature sensor is arranged close to the electrode body, and is used to collect the temperature of the electrode body and send it to the controller. The flow regulator is used to adjust the temperature of the electrode body. The flow rate of coolant in the cooling pipe.

When the above technical solution is adopted, the flow rate of the cooling liquid in the electrode device can be adjusted through the flow regulator, temperature sensor and controller, so that when the temperature of the electrode device is too high, the flow rate of the cooling liquid in the electrode device can be increased. Cool down the electrode assembly to avoid overheating of the electrode assembly. It is also possible to reduce the flow rate of the coolant in the electrode device when the temperature of the electrode device is normal to achieve water and energy saving.

The above description is only an overview of the technical solution of the present invention. In order to have a clearer understanding of the technical means of the present invention, it can be implemented according to the content of the description, and in order to make the above and other objects, features and advantages of the present invention more obvious and understandable. , the specific embodiments of the present invention are listed below.

Description of the drawings

The drawings described here are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation of the present application. In the attached picture:

Figure 1 shows a cross-sectional view of an electrode device provided by an embodiment of the present application;

Figure 2 shows a cross-sectional view of a heater power supply structure provided by an embodiment of the present application;

Figure 3 shows a schematic structural diagram of the furnace bottom structure of a single crystal furnace provided by an embodiment of the present application;

Figure 4 shows a cross-sectional view of the furnace bottom structure of a single crystal furnace provided by an embodiment of the present application.

Reference signs:
1-electrode body, 101-first end, 102-second end, 103-first end face, 104-second end face,
105-side wall, 2-mounting seat, 3-hollow cavity, 4-cooling tube, 5-first seal, 6-graphite pressure ring, 7-furnace bottom plate, 8-insulation layer, 9-fasteners, 10-insulation piece, 11-insulation gasket, 12-insulation elastic piece, 13-second seal, 14-third seal, 15-fourth seal, 16-first water-cooling joint, 17-second water-cooling joint , 18-heater support.

Specific embodiments

In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clear, this application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application and are not used to limit the present application.

It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

In addition, the terms “first” and “second” are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of this application, "plurality" means two or more than two, unless otherwise explicitly and specifically limited. "Several" means one or more than one, unless otherwise expressly and specifically limited.

In the description of this application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "back", "left", "right", etc. are based on those shown in the accompanying drawings. The orientation or positional relationship is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present application.

In the description of this application, it should be noted that, unless otherwise clearly stated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. Connection, or integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

However, at present, the resistance between the cooling electrode and the heater is relatively large, resulting in a decrease in the heating efficiency of the heater.

Based on this, in the first aspect, referring to FIG. 1 , an embodiment of the present application provides an electrode device. The electrode device is used in a heater and includes an electrode body 1 . The first end 101 of the electrode body 1 has a preset structure for mating and connecting with the heater. The preset structure has an opposite first end face 103 and a second end face 104, and is connected to the first end face. 103 and the side wall 105 of the second end surface 104. The area of the second end surface 104 is larger than the area of the first end surface 103. It should be understood that The side walls with a certain inclination increase the surface area compared to the vertical side walls. In practice, the electrode body 1 cooperates with the heater through a preset structure. When the surface area of the side wall 105 of the preset structure increases, the contact area between the preset structure and the heater also increases accordingly. At this time, the preset structure It is assumed that the resistance between the structure and the heater will decrease accordingly. It should be understood that when the resistance decreases, the current flowing between the electrode body 1 and the heater will increase accordingly, thereby heating the electrode body 1 The conductivity between the heaters is better, thereby improving the heating efficiency of the heater.

Referring to FIG. 1 , further, in the direction from the first end face 103 to the second end face 104 , the side walls of the preset structure are inclined outward. Based on this, the preset structure may be a truncated cone-shaped structure or a truncated cone-like structure with a curved side wall, which is not specifically limited in the embodiments of the present application.

Referring to Figure 1, the electrode device further includes a cooling tube 4. The electrode body 1 has a first cavity opened from the second end 102 to the first end 101; the cooling tube 4 is at least partially disposed on In the first cavity, there is a gap between the first cavity and the cooling pipe 4 . Based on this, the cooling tube 4 is located inside the electrode body 1. When the cooling liquid is passed into the cooling tube 4, it is used to cool down the electrode body 1. The gap between the first cavity and the cooling pipe 4 is used to allow the cooling liquid flowing out of the cooling pipe 4 to flow to the cooling liquid outlet to achieve circulation of the cooling liquid in the electrode body 1 .

Specifically, the liquid inlet of the cooling pipe 4 is close to the second end 102 of the electrode body 1, and the liquid outlet of the cooling pipe 4 is close to the first end 101 of the electrode body 1, and is located in the predetermined position. in the structure. Based on this, the cooling liquid enters the electrode body 1 from the first end 101 of the electrode body 1 and flows out from the second end 102 of the electrode body 1 into the first cavity. Since there is a gap between the cooling tube 4 and the first cavity , the cooling liquid will flow from the second end 102 of the electrode body 1 to the cooling liquid outlet again, that is to say, the cooling liquid penetrates the entire electrode body 1 to achieve cooling of the electrode body 1 .

In the second aspect, referring to FIG. 2 , the embodiment of the present application also provides a heater power supply structure, including a heater support 18 and the electrode device provided in the first aspect, wherein the heater support 18 has a structure similar to that of the heater support 18 . A connection hole with a matching structure and shape is preset. The preset structure of the electrode body 1 is inserted into the connection hole, and the side wall is in contact with the wall of the connection hole.

According to the description of the first aspect, it can be seen that the preset structure of the electrode body 1 has an opposite first end surface and a second end surface, and a side wall connecting the first end surface and the second end surface. The area of the second end surface greater than the area of the first end surface. Based on this, it can be seen that the side walls of the preset structure have a certain inclination angle. It should be understood that the side walls with a certain inclination angle increase the surface area relative to the vertical side walls. In practice, when the surface area of the side walls of the preset structure increases, the preset structure and the heater support The contact area of the parts also increases accordingly. At this time, the resistance between the preset structure and the heater support will decrease accordingly, thereby making the conductivity between the electrode body 1 and the heater support better, thereby improving the The heating efficiency of the heater. The design of the preset structure can also prevent the electrode device from sparking in high voltage and low current usage environments.

For example, the angle range between the side wall and the bottom of the preset structure includes 45°-80°. Preferably, in order to facilitate installation and production, the first end surface and the second end surface of the preset structure are coaxially arranged, and the included angles between the side walls of the preset structure and the bottom are the same everywhere.

Based on the angle range between the side wall and the bottom of the above preset structure, it can not only ensure the contact area between the heater and the electrode device, but also ensure that the manufacturing process of the preset structure is simple.

Furthermore, the above-mentioned heater power supply structure also includes a graphite pressure ring 6, wherein the graphite pressure ring 6 is provided at the first end of the electrode body 1 and is located on the side of the heater support away from the second end of the electrode body 1 for attaching the The heater support is fixed to the electrode body 1 . As a possible implementation, the upper side of the first end of the electrode body 1 has an external thread that matches the graphite pressure ring 6. The graphite pressure ring 6 is detachably connected to the electrode body 1 through the external thread, and can be detachably connected to the electrode body 1 through the external thread. way to fix the heater support and the electrode body 1 together.

In some implementations, the heater power supply structure also includes a mounting base 2 and a first sealing member 5; the mounting base 2 is connected to the second end of the electrode device, and the first sealing member 5 is disposed on the The connection point between the second end of the electrode body 1 and the mounting base 2. In practice, the mounting base 2 is used to house power cables to power the electrode device. The mounting base 2 is provided at the second end of the electrode device and is fixedly connected to the electrode body 1. In order to prevent the cooling liquid in the heater power supply structure from flowing out, the embodiment of the present application is also provided with a third mounting base 2 between the electrode body 1 and the mounting base 2. A seal 5 realizes the sealing of the coolant inside the heater power supply structure, ensuring that the heater power supply structure does not leak coolant.

According to the description of the first aspect above, the electrode device also includes a cooling tube 4, and the electrode body 1 has a first cavity opened from the second end to the first end, the mounting base 2 has a second cavity, and the The second cavity has a second opening at one end close to the electrode body 1, and the first opening matches the second opening. After the mounting base 2 is connected to the second end of the electrode body 1, The first cavity and the second cavity form a hollow cavity 3; the cooling tube 4 is placed in the hollow cavity 3.

In practice, cooling liquid is passed into the cooling pipe 4, and the heat generated when the heater power supply structure is working is dissipated through the circulation of the cooling liquid in the cooling pipe 4 and the hollow cavity 3. Wherein, the above-mentioned cooling liquid may be cooling water, or may be other liquids with cooling functions. In the embodiment of the present application There is no specific limitation on this.

Furthermore, the cooling tube 4 is coaxially arranged with the electrode body 1. Based on this, the cooling liquid flowing out from the outlet of the cooling tube 4 can be evenly distributed in the hollow cavity 3 when entering the hollow cavity 3. 3, in order to evenly dissipate the heater power supply structure.

In the specific implementation process, due to the need for the entry and exit of the cooling liquid, the embodiment of the present application is provided with a cooling liquid inlet and a cooling liquid outlet on the mounting base 2. The cooling liquid inlet and the cooling liquid outlet are arranged oppositely, so that the cooling liquid It can be entered from one side and exited from the other side. The heater power supply structure also includes a first water-cooling joint 16 provided at the cooling liquid inlet, and a second water-cooling joint 17 provided at the cooling liquid outlet; wherein, the first water-cooling joint 16 and the second water-cooling joint 17 Both are connected to external water-cooling pipes. The first water-cooling joint 16 is connected to the external cooling water supply end through the water-cooling pipe, and the second water-cooling joint 17 is connected to the external cooling water recovery end through the water-cooling pipe. The liquid inlet of the cooling pipe 4 is connected to the first water-cooling joint 16, the second water-cooling joint 17 is sealingly connected to the cooling liquid outlet, and the cooling liquid enters the cooling pipe from the first water-cooling joint 16. 4, flows out from the liquid outlet of the cooling tube 4, enters the hollow cavity 3, and flows out from the second water-cooling joint 17. Since the liquid outlet of the cooling tube 4 is located at the end of the electrode body 1 away from the mounting base 2, and the coolant outlet is located on the mounting base 2, when the coolant enters the hollow cavity along the end of the electrode body 1 away from the mounting base 2, and When flowing out from the mounting base 2, the coolant penetrates the entire hollow cavity, thereby cooling the entire electrode device.

In the third aspect, with reference to Figures 3 and 4, embodiments of the present application also provide a furnace bottom structure of a single crystal furnace, including a furnace bottom plate 7 and the above-mentioned heater power supply structure; the furnace bottom plate 7 is provided with through holes, The furnace bottom plate 7 is sleeved on the outside of the electrode body 1 through the through hole, and is disposed between the liquid inlet and the liquid outlet of the cooling pipe 4 of the heater power supply structure.

Furthermore, since the electrode body 1 and the furnace bottom plate 7 are both conductors, in order to prevent leakage, the embodiment of the present application provides an insulating layer 8 between the electrode body 1 and the furnace bottom plate 7 for electrically connecting the electrode device to the furnace bottom plate. Sexual isolation. For example, the material of the above-mentioned insulating layer 8 may be insulating ceramics. Since the ceramic material is relatively brittle, the size of the ceramic material along the axial direction of the electrode device is smaller than the size of the furnace bottom plate 7 to prevent the insulating layer 8 from being squeezed and cracked when the furnace bottom plate 7 is tightened.

The furnace bottom plate has opposite first and second sides. The electrode device includes a cooling tube 4. The heater power supply structure has a hollow cavity 3. The cooling tube 4 is placed in the hollow cavity 3. middle;

The mounting base has a cooling liquid inlet and a cooling liquid outlet, and the liquid inlet of the cooling pipe is arranged on At the cooling liquid inlet, the liquid outlet of the cooling pipe is located at the first end of the electrode body, and the first side of the furnace floor is located between the liquid inlet of the cooling pipe and the liquid outlet of the cooling pipe. between the openings, the second side of the furnace bottom plate is located between the first side of the furnace bottom plate and the liquid outlet of the cooling tube.

Further, the electrode device also includes fasteners 9, insulators 10 and insulating elastic components. The connection between the electrode body 1 and the first side of the furnace bottom plate 7 has a boss structure. The furnace bottom plate 7 The first side of the insulator 10 is in contact with the boss structure, and the fastener 9 is provided at the connection between the electrode body 1 and the second side of the furnace bottom plate 7 for fastening. The insulating elastic component is disposed between the furnace bottom plate 7 and the electrode body 1 and the fastener 9 and the second side of the furnace bottom plate 7 .

It should be understood that the above-mentioned fasteners 9 and the boss structure can realize the fastening connection between the furnace bottom plate 7 and the electrode body 1 . And since the electrode body 1 and the furnace bottom plate 7 are both conductors, in this application, an insulating member 10 is provided at the connection between the electrode body 1 and the first side of the furnace bottom plate 7 to realize the connection between the electrode body 1 and the furnace bottom plate 7 . Insulation on the first side. Furthermore, the insulating member 10 may be an insulating ceramic gasket. The connection between the electrode body 1 and the second side of the furnace floor 7 is connected through a fastener 9. Since most of the fasteners 9 are conductors, insulation is provided between the fastener 9 and the second side of the furnace floor 7. Elastomeric components for insulation and sealing. For example, the above-mentioned fastener 9 is a wing nut.

Specifically, the electrode device also includes a second sealing member 13 and a third sealing member 14; the second sealing member 13 is disposed between the insulating elastic component and the electrode body 1, and the third sealing member 14 is disposed between the insulating elastic component and the electrode body 1. 14 is disposed between the insulating elastic component and the second side of the furnace bottom plate 7 . Based on this, the second sealing member 13 and the third sealing member 14 can be used to seal the second side of the furnace floor 7 , thereby isolating the upper and lower spaces of the furnace floor 7 and ensuring that the first side of the furnace floor 7 is in a In a high vacuum state, the second side of the furnace floor 7 is in an atmospheric state.

Illustratively, the above-mentioned second sealing member 13 and the third sealing member 14 are both sealing rings. In this application, the second sealing member 13 is used to seal the second side of the furnace bottom plate 7 through surface sealing, and the third sealing member 14 is used to seal the second side of the furnace bottom plate 7 through surface sealing. The shaft seal seals the second side of the furnace floor 7 .

Furthermore, the insulating elastic component includes an insulating elastic member 12 and an insulating gasket 11, and the electrode device also includes a fourth seal 15; the insulating gasket 11 and the insulating elastic member 12 are sequentially arranged on the fastening 9 and the second side of the furnace bottom plate 7, the second sealing member 13 is provided between the insulating elastic member 12 and the electrode body 1, and the third sealing member 14 is provided between the Between the insulating elastic member 12 and the second side of the furnace bottom plate 7; the fourth sealing member 15 is provided between the insulating elastic member 12 and the insulating gasket 11 . Based on this, the fastening effect of the furnace bottom plate 7 and the electrode body 1 can be achieved, and the sealing of the second side of the furnace bottom plate 7 and the electrode body 1 can be achieved.

For example, the above-mentioned insulating gasket 11 is a ceramic gasket, and the insulating elastic member 12 is a polymer insulating gasket. Since the ceramic gasket is highly brittle, in this application, the polymer insulating gasket 11 can be used to reduce the fastening force of the fastener 9 to the furnace bottom plate 7 and prevent the insulating gasket 11 from breaking.

The electrode device provided by the embodiment of the present application also includes a flow regulator, a temperature sensor, and a controller electrically connected to the flow regulator, the temperature sensor, and the temperature sensor.

The flow regulator is arranged in the cooling pipe 4, and the temperature sensor is arranged close to the electrode body 1 to collect the temperature of the electrode body 1 and send it to the controller, which is used to The flow regulator is controlled according to the temperature of the electrode body 1 to adjust the flow rate of the cooling liquid in the cooling pipe 4 .

When the above technical solution is adopted, the embodiment of the present application can adjust the flow rate of the cooling liquid in the electrode device through the flow regulator, temperature sensor and controller, so that when the temperature of the electrode device is too high, the cooling liquid in the electrode device can be increased. flow to cool down the electrode device to avoid overheating of the electrode device. It is also possible to reduce the flow rate of the coolant in the electrode device when the temperature of the electrode device is normal to achieve water and energy saving.

In the above description of the embodiments, specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application. should be covered by the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims

An electrode device, characterized in that, used in a heater, the electrode device includes an electrode body; the electrode body has an opposite first end and a second end;

The first end of the electrode body has a preset structure for mating and connecting with the heater. The preset structure has an opposite first end face and a second end face, and connects the first end face and the third end face. A side wall with two end surfaces, the area of the second end surface is larger than the area of the first end surface.
The electrode device according to claim 1, wherein the electrode device further includes a cooling tube, and the electrode body has a first cavity opened from the second end to the first end; the cooling The tube is at least partially disposed in the first cavity, and the inner diameter of the electrode body is greater than the outer diameter of the cooling tube.
The electrode device according to claim 2, wherein the liquid inlet of the cooling pipe is close to the second end of the electrode body, and the liquid outlet of the cooling pipe is close to the first end of the electrode body, and located in the preset structure.
The electrode device according to claim 1, wherein the side walls of the preset structure are inclined outward in a direction from the first end surface to the second end surface.
A heater power supply structure, characterized in that the heater power supply structure includes a heater support member and an electrode device according to any one of claims 1 to 4;

The heater support has a connection hole that matches the preset structural shape, the preset structure of the electrode body is inserted into the connection hole, and the side wall is in contact with the hole wall of the connection hole. touch.
The heater power supply structure according to claim 5, characterized in that the heater power supply structure further includes a mounting seat and a first sealing member; the mounting seat is connected to the second end of the electrode device, and the third A sealing member is provided at the connection between the second end of the electrode body and the mounting base.
The heater power supply structure according to claim 6, wherein the electrode device further includes a cooling tube, and the electrode body has a first cavity opened from the second end to the first end;

The mounting base has a second cavity, and an end of the second cavity close to the electrode body has a second opening. The first opening of the first cavity matches the second opening, so The mounting seat matches the second end of the electrode body, and the first cavity and the second cavity form a hollow cavity; the cooling tube is placed in the hollow cavity;

The cooling tube is coaxially arranged with the electrode body.
The heater power supply structure according to claim 7, characterized in that the installation seat There is a cooling liquid inlet and a cooling liquid outlet. The heater power supply structure also includes a first water-cooling joint provided at the cooling liquid inlet and a second water-cooling joint provided at the cooling liquid outlet; the inlet of the cooling pipe The liquid port is connected to the first water-cooling joint, the second water-cooling joint is sealingly connected to the cooling liquid outlet, the cooling liquid enters the cooling pipe from the first water-cooling joint, and exits from the outlet of the cooling pipe. The liquid outlet flows out, enters the hollow cavity, and flows out from the second water-cooling joint.
The heater power supply structure according to claim 5, characterized in that the heater power supply structure further includes a graphite pressure ring, the graphite pressure ring is disposed on the first end of the electrode body and is disposed on the heater. A side of the support member away from the second end of the electrode body is used to fix the heater support member and the electrode body.
A furnace bottom structure of a single crystal furnace, characterized in that it includes a furnace bottom plate and a heater power supply structure according to any one of claims 5 to 9; a through hole is provided on the furnace bottom plate, and the furnace bottom plate passes through The through hole is sleeved on the outside of the electrode body and is located between the liquid inlet and the liquid outlet of the cooling pipe of the heater power supply structure.
The furnace bottom structure of the single crystal furnace according to claim 10, characterized in that the furnace bottom structure of the single crystal furnace further includes an insulating material layer disposed between the furnace bottom plate and the electrode body.
The furnace bottom structure of a single crystal furnace according to claim 10, wherein the furnace bottom plate has an opposite first side and a second side, the electrode device includes a cooling tube, and the heater power supply structure has A hollow cavity, the cooling tube is placed in the hollow cavity;

The mounting base has a cooling liquid inlet and a cooling liquid outlet. The cooling liquid inlet is provided at the cooling liquid inlet. The cooling pipe outlet is located at the first end of the electrode body. The first side of the furnace floor is located between the liquid inlet of the cooling pipe and the liquid outlet of the cooling pipe, and the second side of the furnace floor is located between the first side of the furnace floor and the cooling pipe. between the liquid outlets.
The furnace bottom structure of the single crystal furnace according to claim 12, characterized in that the furnace bottom structure of the single crystal furnace further includes fasteners, insulating parts and insulating elastic components, and the electrode body and the furnace bottom plate The connection point on the first side has a boss structure, the first side of the furnace bottom plate is in contact with the boss structure through the insulating member, and the fastener is provided on the electrode body and the furnace bottom plate The connection point on the second side is used to fasten the furnace bottom plate and the electrode body, and the insulating elastic component is disposed between the fastener and the second side of the furnace bottom plate.
The furnace bottom structure of the single crystal furnace according to claim 13, characterized in that the furnace bottom structure of the single crystal furnace further includes a second sealing member and a third sealing member; the second sealing member is arranged with the between the insulating elastic component and the electrode body, and the third sealing member is disposed between the insulating elastic component and the second side of the furnace bottom plate.
The furnace bottom structure of the single crystal furnace according to claim 14, wherein the insulating elastic component includes an insulating elastic piece and an insulating gasket, and the furnace bottom structure of the single crystal furnace further includes a fourth sealing member;

The insulating gasket and the insulating elastic piece are arranged in sequence between the fastener and the second side of the furnace bottom plate, and the second sealing member is arranged between the insulating elastic piece and the electrode body , the third sealing member is provided between the insulating elastic member and the second side of the furnace bottom plate; the fourth sealing member is provided between the insulating elastic member and the insulating gasket.
The furnace bottom structure of the single crystal furnace according to any one of claims 12 to 15, characterized in that the furnace bottom structure of the single crystal furnace further includes a flow regulator, a temperature sensor and a flow regulator and the furnace bottom structure. The temperature sensor is electrically connected to a controller;

The flow regulator is arranged in the cooling tube, the temperature sensor is arranged close to the electrode body, and is used to collect the temperature of the electrode body and send it to the controller. The flow regulator is used to adjust the temperature of the electrode body. The flow rate of coolant in the cooling pipe.