CN218059199U - Water-cooled heating element electrode device - Google Patents
Water-cooled heating element electrode device Download PDFInfo
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- CN218059199U CN218059199U CN202221329626.3U CN202221329626U CN218059199U CN 218059199 U CN218059199 U CN 218059199U CN 202221329626 U CN202221329626 U CN 202221329626U CN 218059199 U CN218059199 U CN 218059199U
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Abstract
The utility model provides a water-cooled heat-generating body electrode device relates to CVD vapor deposition stove and makes technical field, has solved the water-cooled heat-generating body electrode that prior art exists, and the cooling effect is relatively poor, shortens the technical problem of the life of copper electrode easily. This water-cooled heat-generating body electrode assembly includes copper electrode and inlet tube, wherein: the copper electrode is of a hollow tubular structure with one open end and the other closed end, and a water outlet is formed in the tube wall of the open end of the copper electrode; the water inlet pipe is inserted into the closed end of the copper electrode from the open end of the copper electrode, the water inlet pipe is connected with the copper electrode at the open end of the copper electrode in an interference fit manner, and a water cooling channel is formed between the water inlet pipe and the copper electrode; the closed end of the copper electrode extends outwards to form an electrode copper clamp. The utility model is used for improve the cooling effect of cooling water to the copper electrode, prolong the life of copper electrode.
Description
Technical Field
The utility model relates to a CVD vapor deposition furnace makes technical field, especially relates to a water-cooled heat-generating body electrode assembly.
Background
In the technical field of CVD vapor deposition furnace manufacturing, when a water-cooled heating body copper electrode runs at a high temperature and a high-voltage current passes through the copper electrode, the temperature of the copper electrode needs to be reduced by introducing circulating cooling water into the copper electrode, so that the copper electrode can normally work in a high-temperature environment.
The applicant found that: in the existing cooling mode, cooling water generally cannot completely flow through the inside of the copper electrode or only flows through the surface of the copper electrode, the cooling effect is not good enough, and the service life of the copper electrode is influenced.
In summary, the prior art has at least the following technical problems:
the water-cooling heating body electrode provided by the prior art has poor cooling effect and is easy to shorten the service life of the copper electrode.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a water-cooled heat-generating body electrode device has solved the water-cooled heat-generating body electrode that prior art exists, and the cooling effect is relatively poor, shortens the technical problem of copper electrode's life easily.
In order to achieve the above purpose, the utility model provides a following technical scheme:
the utility model provides a water-cooled heat-generating body electrode device of embodiment, including copper electrode and inlet tube, wherein:
the copper electrode is a hollow tubular structure with one open end and the other closed end, and a water outlet is formed in the tube wall of the open end of the copper electrode; the water inlet pipe is inserted into the closed end of the copper electrode from the open end of the copper electrode, the water inlet pipe is connected with the copper electrode at the open end of the copper electrode in an interference fit manner, and a water cooling channel is formed between the water inlet pipe and the copper electrode; the closed end of the copper electrode extends outwards to form an electrode copper clamp.
In an alternative embodiment, the copper electrode is peripherally coated with an insulating bakelite.
In an alternative embodiment, both ends of the bakelite are provided with an insulating rubber ring.
In an alternative embodiment, one end of the water inlet pipe is provided with a detachably connected copper pagoda.
In an alternative embodiment, the electrode copper clip includes a first electrode copper clip and a second electrode copper clip, the first electrode copper clip having a depth that is longer than a depth of the second electrode copper clip.
In an optional embodiment, the electrode fastening ring is fixedly connected with the copper electrode.
In an alternative embodiment, the electrode fastening ring is provided with a flange.
In an alternative embodiment, the inner diameter of the water outlet is smaller than the inner diameter of the water inlet pipe.
Based on the technical scheme, the embodiment of the utility model provides a can produce following technological effect at least:
the utility model provides a water-cooled heating element electrode device, wherein a copper electrode is a hollow tubular structure with one open end and the other closed end, and a water outlet is arranged on the tube wall of the open end of the copper electrode; the water inlet pipe is inserted into the closed end of the copper electrode from the open end of the copper electrode, the water inlet pipe is connected with the copper electrode at the open end of the copper electrode in an interference fit manner, and a water cooling channel is formed between the water inlet pipe and the copper electrode; the closed end of the copper electrode extends outwards to form an electrode copper clamp.
Thus, compared with the prior art, the utility model discloses be cavity with heat-generating body copper electrode design, and stretch into the heat-generating body electrode bottommost with the cooling water inlet tube, the cooling water gets into from the bottommost of heat-generating body electrode like this, direct and electrode inner wall contact, make the highest position of ambient temperature cool off earlier, set up the cooling water delivery port at the electrode root, because the delivery port diameter slightly is less than the inlet tube diameter, guaranteed that the cooling water fully contacts with copper electrode inner wall under the pressure effect, conduct the heat on the electrode body fast to the cooling water on, make cooling water maximum and electrode contact, at cooling water backward flow in-process, cool off the electrode entire body, thereby realize the cooling of copper electrode maximum under the high temperature environment, the effect of cooling water to electrode cooling is improved, the life of copper electrode has been prolonged, the water-cooling heat-generating body electrode that prior art exists has been solved, the cooling effect is relatively poor, shorten the technical problem of copper electrode's life easily.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor.
FIG. 1 is a schematic perspective view of a water-cooled heater electrode assembly according to an embodiment of the present invention;
FIG. 2 is a schematic front view of a water-cooled heater electrode assembly according to an embodiment of the present invention;
FIG. 3 is a schematic sectional view of a water-cooled heat-generating element electrode device according to an embodiment of the present invention.
Reference numerals: 1. a copper pagoda; 2. a water inlet pipe; 3. a copper electrode; 4. a water outlet; 5. an electrode fastening ring; 6. a flange plate; 7. bakelite insulation; 71. an insulating rubber ring; 8. a first electrode copper clip; 9. a second electrode copper clip; 10. and (4) a water cooling channel.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below. It is to be understood that the described embodiment is only one of the embodiments of the present invention, and not all embodiments. Based on the embodiment in the utility model provides a, this technical field ordinary skilled person does not make all other implementation modes that obtain under the prerequisite of creative work, all belong to the utility model discloses the scope protected.
The embodiment of the utility model provides a water-cooled heat-generating body electrode assembly.
The technical solution provided by the present invention is explained in more detail with reference to fig. 1 to 3.
As shown in fig. 1-3, the embodiment of the present invention provides a water-cooled heating element electrode device, which comprises a copper electrode 3 and a water inlet pipe 2, wherein:
the copper electrode 3 is a hollow tubular structure with one open end and the other closed end, and a water outlet 4 is arranged on the tube wall of the open end of the copper electrode 3; the water inlet pipe 2 is inserted into the closed end of the copper electrode 3 from the open end of the copper electrode 3, the water inlet pipe 2 is connected with the copper electrode 3 at the open end of the copper electrode 3 in an interference fit manner, and a water cooling channel 10 is formed between the water inlet pipe 2 and the copper electrode 3; the closed end of the copper electrode 3 extends outwards to form an electrode copper clamp.
Compared with the prior art, the utility model discloses it is cavity with heat-generating body copper electrode 3 design, and stretch into heat-generating body electrode bottommost with cooling water inlet tube 2, the cooling water gets into from the bottommost of heat-generating body electrode like this, direct and electrode inner wall contact, make the position that ambient temperature is the highest cool off earlier, set up cooling water delivery port 4 at the electrode root, because delivery port 4 diameter slightly is less than inlet tube 2 diameter, guaranteed that the cooling water fully contacts with copper electrode 3 inner walls under the pressure effect, conduct the heat on the electrode body fast to the cooling water on, make cooling water maximum and electrode contact, at cooling water backward flow in-process, cool off the electrode entire body, thereby realize copper electrode 3 maximum cooling under the high temperature environment, the effect of cooling water to electrode cooling has been improved, copper electrode 3's life has been prolonged, so solved the water-cooling heat-generating body electrode that prior art exists, the cooling effect is relatively poor, shorten copper electrode 3's life's technical problem easily.
As an alternative embodiment, the copper electrode 3 is peripherally coated with an insulating bakelite 7. The bakelite 7 plays a role in insulation and protection and can protect the copper electrode 3.
As an alternative embodiment, both ends of the bakelite 7 are provided with an insulation rubber ring 71. The insulating rubber rings 71 at the two ends in the structure are convenient for fixing the insulating bakelite 7.
As an alternative embodiment, one end of the water intake pipe 2 is provided with a detachably connected copper pagoda 1. The copper pagoda 1 is convenient for injecting cooling water into the water inlet pipe 2.
As an alternative embodiment, the electrode copper clip includes a first electrode copper clip 8 and a second electrode copper clip 9, and the depth of the first electrode copper clip 8 is longer than the depth of the second electrode copper clip 9. The structure is convenient to process and manufacture.
As an optional embodiment, an electrode fastening ring 5 fixedly connected with the copper electrode 3 is further included. The structure is convenient to process and manufacture.
In an alternative embodiment, the electrode fastening ring 5 is provided with a flange 6. The structure is convenient to process and manufacture, and the flange 6 is used for installing bolts.
As an alternative embodiment, the inner diameter of the water outlet 4 is smaller than the inner diameter of the water inlet pipe 2. The structure is convenient for processing and manufacturing, and ensures that the cooling water is fully contacted with the inner wall of the copper electrode 3 under the action of pressure.
The utility model discloses a theory of operation:
the utility model discloses among the mainly used CVD vapor deposition stove manufacturing technology field class high temperature equipment, concrete structure includes copper electrode 3, inlet tube 2, copper pagoda 1, and insulated bakelite 7, insulating rubber ring 71, electrode tighrening ring 5, first electrode copper presss from both sides 8 and second electrode copper presss from both sides 9 etc..
One end of the copper electrode 3 is connected with the first electrode copper clamp 8 and the second electrode copper clamp 9, the other end of the copper electrode 3 is connected with the transformer through a cable, the other ends of the first electrode copper clamp 8 and the second electrode copper clamp 9 are connected with the heating equipment, namely, the current connection between the transformer and the heating equipment is realized through the copper electrode 3, the first electrode copper clamp 8 and the second electrode copper clamp 9; the insulating bakelite 7 is installed on the copper electrode 3, and insulating rubber ring 71 is installed to both sides fixedly, injects the cooling water into the inlet tube 2 through copper pagoda 1, and the inlet tube 2 directly stretches into hollow copper electrode 3 bottommost, and the cooling water flows back to delivery port 4 from the copper electrode 3 root, and the cooling water absorbs the heat that the electrode produced in the inside of copper electrode 3, guarantees electrode operational reliability. Meanwhile, a flange 6 is arranged on the electrode fastening ring 5, and bolts can be installed on the flange for fixing the copper electrode 3.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
In the description of the present invention, it is to be noted that, unless otherwise specified, "a plurality" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood as the case may be, by those of ordinary skill in the art.
Claims (8)
1. The utility model provides a water-cooled heat-generating body electrode device which characterized in that, includes copper electrode and inlet tube, wherein:
the copper electrode is of a hollow tubular structure with one open end and the other closed end, and a water outlet is formed in the tube wall of the open end of the copper electrode; the water inlet pipe is inserted into the closed end of the copper electrode from the open end of the copper electrode, the water inlet pipe is connected with the copper electrode at the open end of the copper electrode in an interference fit manner, and a water cooling channel is formed between the water inlet pipe and the copper electrode; and the closed end of the copper electrode extends outwards to form an electrode copper clamp.
2. A water-cooled heat-generating body electrode apparatus as described in claim 1, wherein the copper electrode is coated with an insulating bakelite at its periphery.
3. A water-cooled heat-generating body electrode apparatus as described in claim 2, wherein both ends of said bakelite are provided with an insulating rubber ring.
4. A water-cooled heat-generating body electrode apparatus as described in claim 1, wherein one end of said water inlet pipe is provided with a detachably attached copper pagoda.
5. A water-cooled heater electrode assembly as claimed in claim 1, wherein the electrode copper clip includes a first electrode copper clip and a second electrode copper clip, the first electrode copper clip having a depth longer than the second electrode copper clip.
6. A water-cooled heat-generating body electrode apparatus as described in claim 1, further comprising an electrode fastening ring fixedly connected to said copper electrode.
7. A water-cooled heat-generating body electrode assembly as described in claim 6, wherein a flange is provided on said electrode fastening ring.
8. A water-cooled heat-generating body electrode apparatus as described in claim 1, wherein an inner diameter of said water outlet is smaller than an inner diameter of said water inlet pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221329626.3U CN218059199U (en) | 2022-05-19 | 2022-05-19 | Water-cooled heating element electrode device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221329626.3U CN218059199U (en) | 2022-05-19 | 2022-05-19 | Water-cooled heating element electrode device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218059199U true CN218059199U (en) | 2022-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221329626.3U Active CN218059199U (en) | 2022-05-19 | 2022-05-19 | Water-cooled heating element electrode device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218059199U (en) |
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2022
- 2022-05-19 CN CN202221329626.3U patent/CN218059199U/en active Active
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