CN106643182B - A kind of vacuum high temperature furnace water cooled electrode - Google Patents
A kind of vacuum high temperature furnace water cooled electrode Download PDFInfo
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- CN106643182B CN106643182B CN201510711954.8A CN201510711954A CN106643182B CN 106643182 B CN106643182 B CN 106643182B CN 201510711954 A CN201510711954 A CN 201510711954A CN 106643182 B CN106643182 B CN 106643182B
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Abstract
The invention belongs to vacuum drying oven equipment technical field, specifically a kind of vacuum high temperature furnace water cooled electrode.Including electrode block, conducting copper belt, electrode body, water inlet pipe, influent-effluent base, water-cooling flange and angle coupling, wherein electrode body is fixedly mounted on the water-cooling flange, and insulating and sealing member is provided between the electrode body and the water-cooling flange, cooling chamber is equipped with inside the electrode body, one end of the electrode body is arranged in the influent-effluent base, the water inlet pipe is arranged on influent-effluent base, and it is accommodated in the cooling chamber of electrode body, the other end two sides of the electrode body are connected separately with conducting copper belt, the conducting copper belt passes through angle coupling respectively and is connected with electrode block.The present invention uses temperature up to 1700 DEG C, and can use under aggressive atmosphere, simple in structure, good airproof performance, long service life, and production cost is low.
Description
Technical field
The invention belongs to vacuum drying oven equipment technical field, specifically a kind of vacuum high temperature furnace water cooled electrode.
Background technique
Water cooled electrode is the port of vacuum drying oven connection furnace internal heat generation body component, is connection furnace external power and furnace internal heat generation element
Critical component.Raising with workpiece to vacuum drying oven operating temperature requirements, it is also corresponding using temperature to vacuum drying oven water cooled electrode
Raising, can the performance quality of water cooled electrode be directly related to vacuum drying oven and touch the mark requirement.
Existing water cooled electrode is only applicable to 1400 DEG C of vacuum drying ovens below, and cannot use under aggressive atmosphere,
Once being higher than this temperature or furnace including the gas that is corrosive and will damage to electrode.
Summary of the invention
In view of the above-mentioned problems, the purpose of the present invention is to provide a kind of vacuum high temperature furnace water cooled electrodes.Electrode structure letter
List, good airproof performance, long service life, production cost are low.
To achieve the above object, the invention adopts the following technical scheme:
A kind of vacuum high temperature furnace water cooled electrode, including electrode block, conducting copper belt, electrode body, water inlet pipe, influent-effluent base, water
Cold process is blue and angle coupling, and wherein electrode body is fixedly mounted on the water-cooling flange and the electrode body and the water cooling
It is provided with insulating and sealing member between orchid, cooling chamber is equipped with inside the electrode body, the influent-effluent base is arranged in the electrode
One end of body, the water inlet pipe are arranged on the influent-effluent base and are accommodated in the cooling chamber of the electrode body, the electrode
The other end two sides of body are connected separately with the conducting copper belt, and the conducting copper belt passes through the angle coupling and the electricity respectively
Pole block is connected.
The electrode body includes electrode tip and electrode stem, and edge is axially arranged with the cooling chamber, the electricity in the electrode stem
One end of pole bar is threadedly coupled with the influent-effluent base, and the other end is fixedly connected with the electrode tip, the two sides of the electrode tip
It is connect respectively with the conducting copper belt.
The stepped hole coaxial with the cooling chamber of the electrode body is equipped in the influent-effluent base, the water inlet pipe is inserted in this
It is threadedly coupled in stepped hole and with the outboard end of the stepped hole, the influent-effluent base is equipped with the water being connected to the stepped hole
Seat apopore.
Insulating and sealing member between the electrode body and the water-cooling flange is insulation sleeve, the insulation sleeve and the water
It is provided with the first sealing ring between cold process orchid, is provided with the second sealing ring between the electrode body and the insulation sleeve.
The electrode stem of the electrode body is equipped with external screw thread, and it is logical to be inserted in that the water-cooling flange is equipped with for the electrode stem
In hole and pass through electrode tip axial limiting, hex nut is threaded on the electrode stem, the electrode body passes through hexagonal spiral shell
Mother is fixed on the water-cooling flange, and felt pad and washer are equipped between the hex nut and the water-cooling flange, described exhausted
Edge pad is arranged between the water-cooling flange and washer.
The insulation sleeve and felt pad are all made of polytetrafluoro material.
One end of the conducting copper belt is separately fixed at the two sides of the electrode tip of the electrode body by screw, and is equipped with flat
Washer, spring washer and pressing plate, the pressing plate are arranged between the conducting copper belt and plain washer.
The other end of the conducting copper belt is fixed on backing plate and by screw, plain washer, spring washer and pressing plate and institute
It states angle coupling to be connected, the conducting copper belt is arranged between the pressing plate and the backing plate.
Circumferentially arranged with water jacket on the sealing surface of the water-cooling flange, the water jacket outside passes through retaining ring sealing, the water
The other side of cold flange sealing surface is equipped with the inlet and outlet being connected to the water jacket.
The water-cooling flange is connect by bolt with furnace body electrode flange, and the water-cooling flange and furnace body electrode flange cooperate
Electrode sealing ring is provided between face.
Advantages of the present invention and good effect are as follows:
The present invention provides a kind of vacuum high temperature furnace water cooled electrodes.The electrode uses temperature up to 1700 DEG C, and can be in corruption
It is used under corrosion atmosphere, simple in structure, good airproof performance, long service life, production cost is low.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the structural schematic diagram of electrode body in the present invention；
Fig. 3 is the left view of Fig. 2；
Fig. 4 is the structural schematic diagram of water-cooling flange in the present invention；
Fig. 5 is the top view of water-cooling flange in the present invention；
Fig. 6 is the structural schematic diagram of electrode block in the present invention；
Fig. 7 is A-A cross-sectional view in Fig. 6.
In figure: 1 is electrode block, and 2 be pressing plate, and 3 be conducting copper belt, and 4 be electrode body, and 5 be the first sealing ring, and 6 be insulation sleeve,
7 be felt pad, and 8 be washer, and 9 be hex nut, and 10 be water inlet pipe, and 11 be influent-effluent base, and 12 be electrode sealing ring, and 13 be water cooling
Flange, 14 be the second sealing ring, and 15 be backing plate, and 16 be angle coupling, and 17 be stud, and 18 be nut, and 19 are discharged for water seat
Hole, 20 be retaining ring, and 21 be baffle, and 22 be electrode tip, and 23 be electrode stem.
Specific embodiment
The invention will be further described with reference to the accompanying drawing.
As shown in Figure 1, a kind of vacuum high temperature furnace water cooled electrode provided by the invention, including electrode block 1, conducting copper belt 3, electricity
Pole body 4, water inlet pipe 10, influent-effluent base 11, water-cooling flange 13 and angle coupling 16, wherein electrode body 4 is fixedly mounted on the water
Insulating and sealing member is provided on cold process orchid 13 and between the electrode body 4 and the water-cooling flange 13, in the electrode body 4
Portion is equipped with cooling chamber, and one end of the electrode body 4 is arranged in the influent-effluent base 11, and the water inlet pipe 10 is arranged in the disengaging
It on water seat 11 and is accommodated in the cooling chamber of the electrode body 4, the other end two sides of the electrode body 4 are connected separately with one
The conducting copper belt 3, two conducting copper belts 3 are connected by an angle coupling 16 with the electrode block 1 respectively.
As Figure 2-3, the electrode body 4 includes electrode tip 22 and electrode stem 23, is set in the electrode stem 23 along axial direction
There is the cooling chamber, one end of the electrode stem 23 is threadedly coupled with the influent-effluent base 11, the other end and the electrode tip 22
It is fixedly connected by welding manner, postwelding is suppressed into the cooling chamber of the electrode body 4, guarantees cooling cavity pressure 4kg/cm2,
There must not be leakage in half an hour.The two sides of the electrode tip 22 are connect with a conducting copper belt 3 respectively.
The stepped hole coaxial with the cooling chamber of the electrode body 4 is equipped in the influent-effluent base 11, the water inlet pipe 10 is inserted
It is threadedly coupled in the stepped hole and with the outboard end of the stepped hole, the influent-effluent base 11 is equipped with and the stepped hole
The water seat apopore 19 of connection, the water seat apopore 19 are vertical with the stepped hole.Raw material band can be used in each threaded connection place
To prevent leak-stopping water.
Insulating and sealing member between the electrode body 4 and the water-cooling flange 13 is insulation sleeve 6,6 sets of the insulation sleeve
It on the electrode stem 22 of the electrode body 4 and penetrates in the through-hole on the water-cooling flange 13, the insulation sleeve 6 and the water
It is provided with the first sealing ring 5 between cold process orchid 13, the second sealing ring 14 is provided between the electrode body 4 and the insulation sleeve 6.
In the present embodiment, the cross section of the insulation sleeve 6 is T-type structure, and the T-type structure is by electrode tip 22 and electrode stem 23 and the water
Cold process orchid 13 is isolated, and realizes the purpose of insulation.It is set between the one side of the end shoulders of the T-type structure and the water-cooling flange 13
There is first sealing ring 5, described second is equipped between the another side of the end shoulders of the T-type structure and the electrode tip 22
Sealing ring 14.
The electrode stem 23 of the electrode body 4 is equipped with external screw thread, and the electrode stem 23 is inserted on the water-cooling flange 13
In the through-hole being equipped with and pass through 22 axial limiting of electrode tip, is threaded with hex nut 9, the electrode body 4 on electrode stem 23
It is fixed on the water-cooling flange 13 by hex nut 9, insulation is equipped between the hex nut 9 and the water-cooling flange 13
Pad 7 and washer 8, the felt pad 7 are arranged between the water-cooling flange 13 and washer 8.The insulation sleeve 6 and felt pad 7 are equal
Using polytetrafluoro material.
One end of the conducting copper belt 3 is separately fixed at the two sides of the electrode tip 22 of the electrode body 4 by screw, and sets
There are plain washer, spring washer and pressing plate 2, the pressing plate 2 is arranged between the conducting copper belt 3 and plain washer.The conductive copper
The other end with 3 is fixed on backing plate 15 and by screw, plain washer, spring washer and pressing plate 2 and 16 phase of angle coupling
Connection, the conducting copper belt 3 are arranged between the pressing plate 2 and the backing plate 15.
In the present embodiment, the 22 two sides symmetry direction of electrode tip of the electrode body 4 is respectively equipped with two groups of threaded hole (such as Fig. 3
It is shown), the conducting copper belt 3 is fixed on each threaded hole of 22 two sides of electrode tip by soket head cap screw, and is equipped with
Plain washer, spring washer and pressing plate 2, wherein pressing plate 2 is arranged between the conducting copper belt 3 and plain washer.The conducting copper belt 3
The other side is connected by soket head cap screw with the angle coupling 16, is fixed on the backing plate 15 equipped with screw buckle, and be equipped with
Plain washer, spring washer and pressing plate 2, the angle coupling 16 are arranged with the conducting copper belt 3 in the pressing plate 2 and the backing plate
Between 15.The pressing plate 2 uses stainless steel 304 material, to ensure the conducting copper belt 3 and the electrode body 4 and described straight
It is contacted between angle joint 16 good.
The conducting copper belt 3 is by being stacked with a thickness of the copper foil layer of 0.1mm, and conducting copper belt 3 described in every group has 45 copper
Foil can offset the deflection of heater element by the flexibility of copper foil.
16 other end of angle coupling is connected by soket head cap screw with the electrode block 1, and is equipped with plain washer, spring
Washer and pressing plate 2.As shown in fig. 6-7, the center of the electrode block 1 is equipped with the centre bore for clamping heating element, will be described
Electrode block 1 is processed into symmetrical two parts along the axis of centre bore, in a portion the two sides of centre bore be symmetrically arranged with
The vertical unthreaded hole of centre bore is equipped with two coaxial with two unthreaded holes respectively threaded holes on another part, passes through double end
Bolt 17 is sequentially inserted into unthreaded hole and threaded hole, and is fixed with spring washer and nut, to clamp heating element.The double end
Bolt 17 uses 316 stainless steel material resistant to high temperature, and above-mentioned soket head cap screw, plain washer, spring washer are stainless steel material,
The electrode block 1 uses nickel material, nickel with respect to other conductive materials more resistant to high temperature and resistivity it is sufficiently low, resistivity becomes with temperature
Change small, easy to process, price is lower.
As illustrated in figures 4-5, on the sealing surface of the water-cooling flange 13 circumferentially arranged with water jacket, the water-cooling flange 13 it is close
The cover other side is equipped with the inlet and outlet being connected to the water jacket.Baffle is equipped between the water inlet and water outlet
21, the baffle 21 is connect using welding manner with the water-cooling flange 13, for separating the water inlet and water outlet.It is described
Water jacket is externally provided with the retaining ring 20 for sealed water jacket, and the retaining ring 20 is connect using welding manner with the water-cooling flange 13, welded
It is suppressed in the backward water jacket, guarantees pressure 4kg/cm in water jacket2, must not have leakage in half an hour.
The water-cooling flange 13 is connect by bolt with furnace body electrode flange, the water-cooling flange 13 and furnace body electrode flange
Electrode sealing ring 12 is provided between mating surface.
The operation principle of the present invention is that:
When work, by the water inlet of influent-effluent base 11 and water-cooling flange 13 respectively to the cooling chamber of the electrode body 4 and
It is filled with cooling water in the water jacket of the water-cooling flange 13, temperature when reducing electrode body 4 and the work of water-cooling flange 13, the electricity
The cooling cavity outer wall of pole body 4 is thicker to be not easily susceptible to corrode and leak；In addition with heater element coupling part, set knot
Structure and temperature-resistant material can work and smaller to resistivity effects under high-temperature vacuum.
The present invention provides a kind of vacuum high temperature furnace water cooled electrodes.The electrode, up to 1700 DEG C, can corroded using temperature
It is used under property atmosphere, simple in structure, good airproof performance, long service life, production cost is low.
Claims (10)
1. a kind of vacuum high temperature furnace water cooled electrode, which is characterized in that including electrode block (1), conducting copper belt (3), electrode body (4),
Water inlet pipe (10), influent-effluent base (11), water-cooling flange (13) and angle coupling (16), wherein electrode body (4) is fixedly mounted on institute
It states on water-cooling flange (13) and is provided with insulating and sealing member between the electrode body (4) and the water-cooling flange (13), it is described
Cooling chamber is equipped with inside electrode body (4), the influent-effluent base (11) is arranged in one end of the electrode body (4), the water inlet pipe
(10) it is arranged on the influent-effluent base (11) and is accommodated in the cooling chamber of the electrode body (4), the electrode body (4)
Other end two sides are connected separately with the conducting copper belt (3), the conducting copper belt (3) respectively by the angle coupling (16) with
The electrode block (1) is connected.
2. vacuum high temperature furnace water cooled electrode according to claim 1, which is characterized in that the electrode body (4) includes electrode tip
(22) and electrode stem (23), in the electrode stem (23) along being axially arranged with the cooling chamber, one end of the electrode stem (23) with
The influent-effluent base (11) is threadedly coupled, and the other end is fixedly connected with the electrode tip (22), the two sides of the electrode tip (22)
It is connect respectively with the conducting copper belt (3).
3. vacuum high temperature furnace water cooled electrode as described in claim 2, which is characterized in that be equipped in the influent-effluent base (11) with
The coaxial stepped hole of the cooling chamber of the electrode body (4), the water inlet pipe (10) be inserted in the stepped hole and with the stepped hole
Outboard end be threadedly coupled, the influent-effluent base (11) is equipped with the water seat apopore (19) that is connected to the stepped hole.
4. vacuum high temperature furnace water cooled electrode as described in claim 2, which is characterized in that the electrode body (4) and the water cooling
Insulating and sealing member between flange (13) is insulation sleeve (6), is arranged between the insulation sleeve (6) and the water-cooling flange (13)
Have the first sealing ring (5), the second sealing ring (14) are provided between the electrode body (4) and the insulation sleeve (6).
5. vacuum high temperature furnace water cooled electrode according to claim 4, which is characterized in that the electrode stem of the electrode body (4)
(23) it is equipped with external screw thread, the electrode stem (23) is inserted in the through-hole that the water-cooling flange (13) is equipped with and passes through electricity
Cartridge (22) axial limiting is threaded with hex nut (9) on the electrode stem (23), and the electrode body (4) passes through hexagonal
Nut (9) is fixed on the water-cooling flange (13), and insulation is equipped between the hex nut (9) and the water-cooling flange (13)
It pads (7) and washer (8), the felt pad (7) is arranged between the water-cooling flange (13) and washer (8).
6. vacuum high temperature furnace water cooled electrode as described in claim 5, which is characterized in that the insulation sleeve (6) and felt pad (7)
It is all made of polytetrafluoro material.
7. vacuum high temperature furnace water cooled electrode as described in claim 2, which is characterized in that one end of the conducting copper belt (3) is logical
The two sides that screw is separately fixed at the electrode tip (22) of the electrode body (4) are crossed, and are equipped with plain washer, spring washer and pressing plate
(2), the pressing plate (2) is arranged between the conducting copper belt (3) and plain washer.
8. vacuum high temperature furnace water cooled electrode according to claim 7, which is characterized in that the other end of the conducting copper belt (3)
It is fixed on backing plate (15) and is connected by screw, plain washer, spring washer and pressing plate (2) with the angle coupling (16),
The conducting copper belt (3) is arranged between the pressing plate (2) and the backing plate (15).
9. vacuum high temperature furnace water cooled electrode according to claim 1, which is characterized in that the sealing surface of the water-cooling flange (13)
On circumferentially arranged with water jacket, sealed on the outside of the water jacket by retaining ring (20), the other side of water-cooling flange (13) sealing surface
Equipped with the inlet and outlet being connected to the water jacket.
10. pressing the described in any item vacuum high temperature furnace water cooled electrodes of claim 1-9, which is characterized in that the water-cooling flange
(13) it is connect by bolt with furnace body electrode flange, is provided between the water-cooling flange (13) and furnace body electrode flange mating surface
Electrode sealing ring (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510711954.8A CN106643182B (en) | 2015-10-28 | 2015-10-28 | A kind of vacuum high temperature furnace water cooled electrode |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510711954.8A CN106643182B (en) | 2015-10-28 | 2015-10-28 | A kind of vacuum high temperature furnace water cooled electrode |
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| Publication Number | Publication Date |
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| CN106643182A CN106643182A (en) | 2017-05-10 |
| CN106643182B true CN106643182B (en) | 2019-05-14 |
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| CN201510711954.8A Active CN106643182B (en) | 2015-10-28 | 2015-10-28 | A kind of vacuum high temperature furnace water cooled electrode |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112097525B (en) * | 2020-09-09 | 2022-11-01 | 中国振华集团云科电子有限公司 | Cooling device and cooling method for vacuum atmosphere tube furnace |
| CN113564718A (en) * | 2021-07-07 | 2021-10-29 | 中国电子科技集团公司第四十八研究所 | Water-cooled electrode for semiconductor equipment |
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|---|---|---|---|---|
| CN2069638U (en) * | 1990-04-21 | 1991-01-16 | 张玉祥 | Water-cooling complex electrode |
| JP3871172B2 (en) * | 1998-10-05 | 2007-01-24 | ラサ商事株式会社 | Molybdenum electrode body used in the former furnace attached to the electric melting furnace |
| CN201032395Y (en) * | 2007-05-10 | 2008-03-05 | 上海晨华电炉有限公司 | Low voltage great current water cooling electrode for vacuum furnace |
| CN102519266A (en) * | 2011-12-14 | 2012-06-27 | 张家港圣汇气体化工装备有限公司 | Water-cooled electrode of high temperature vacuum furnace |
| CN102809298A (en) * | 2012-09-13 | 2012-12-05 | 无锡四方集团真空炉业有限公司 | Water-cooled electrode device for vacuum furnace |
| CN102954698A (en) * | 2012-10-31 | 2013-03-06 | 西安合元冶金设备工程有限责任公司 | High titanium slag electrode holder |
| CN205119841U (en) * | 2015-10-28 | 2016-03-30 | 沈阳沈真真空技术有限责任公司 | High temperature vacuum furnace water cooled electrode |
-
2015
- 2015-10-28 CN CN201510711954.8A patent/CN106643182B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2069638U (en) * | 1990-04-21 | 1991-01-16 | 张玉祥 | Water-cooling complex electrode |
| JP3871172B2 (en) * | 1998-10-05 | 2007-01-24 | ラサ商事株式会社 | Molybdenum electrode body used in the former furnace attached to the electric melting furnace |
| CN201032395Y (en) * | 2007-05-10 | 2008-03-05 | 上海晨华电炉有限公司 | Low voltage great current water cooling electrode for vacuum furnace |
| CN102519266A (en) * | 2011-12-14 | 2012-06-27 | 张家港圣汇气体化工装备有限公司 | Water-cooled electrode of high temperature vacuum furnace |
| CN102809298A (en) * | 2012-09-13 | 2012-12-05 | 无锡四方集团真空炉业有限公司 | Water-cooled electrode device for vacuum furnace |
| CN102954698A (en) * | 2012-10-31 | 2013-03-06 | 西安合元冶金设备工程有限责任公司 | High titanium slag electrode holder |
| CN205119841U (en) * | 2015-10-28 | 2016-03-30 | 沈阳沈真真空技术有限责任公司 | High temperature vacuum furnace water cooled electrode |
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