CN114411244A - Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace - Google Patents
Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace Download PDFInfo
- Publication number
- CN114411244A CN114411244A CN202210088981.4A CN202210088981A CN114411244A CN 114411244 A CN114411244 A CN 114411244A CN 202210088981 A CN202210088981 A CN 202210088981A CN 114411244 A CN114411244 A CN 114411244A
- Authority
- CN
- China
- Prior art keywords
- single crystal
- nut
- rotating shaft
- winding wheel
- crystal furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 title claims abstract description 73
- 239000013078 crystal Substances 0.000 title claims abstract description 61
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 239000003638 chemical reducing agent Substances 0.000 claims description 24
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 24
- 238000000034 method Methods 0.000 abstract description 14
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 10
- 230000005484 gravity Effects 0.000 abstract description 9
- 238000009730 filament winding Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 208000004350 Strabismus Diseases 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application relates to the field of machinery, in particular to a single crystal furnace crystal growth lifting device and a wire winding wheel assembly for a single crystal furnace. The wire winding wheel assembly comprises a shell, a rotating shaft, a wire winding wheel, a screw rod, a first nut, a counterweight part and a guide rod. The shell is provided with a first sealing cavity, the wire winding wheel is positioned in the first sealing cavity, and the wire winding wheel is connected with the rotating shaft. The screw rod is connected with the rotating shaft, and the screw thread of the screw rod and the screw thread of the wire winding wheel have opposite rotating directions; the first nut is connected with the screw rod; the counterweight part is connected with the first nut; the guide rod is connected with the shell, and the first nut or the counterweight is connected with the guide rod in a sliding mode. When the rotating shaft rotates, the moving direction of the wire winding wheel is opposite to that of the first nut and the counterweight, in the process, the center of gravity of the wire winding wheel and other parts is less in shift, even the center of gravity is almost not shifted, the problem that the tungsten wire rope shakes is avoided to a great extent, and therefore monocrystalline silicon shakes in the pulling process, and the probability of dislocation of the monocrystalline silicon is reduced.
Description
Technical Field
The application relates to the field of machinery, in particular to a single crystal furnace crystal growth lifting device and a wire winding wheel assembly for a single crystal furnace.
Background
The pulling method is to realize the growth of the single crystal by driving the seed crystal to rotate and pull through the transmission mechanism. The pulling procedure mainly comprises the steps that a transmission mechanism drives a wire winding wheel to rotate, and a seed crystal flexible shaft is wound or separated on the wire winding wheel along a set track to drive a seed crystal to move up and down; in the crystal growth process, the dislocation of the single crystal silicon rod sometimes occurs.
Disclosure of Invention
An object of the embodiments of the present application is to provide a crystal growth lifting device for a single crystal furnace and a filament winding wheel assembly for the single crystal furnace, which aim to reduce dislocation of monocrystalline silicon in a monocrystalline silicon growth process.
The application provides a wire winding wheel assembly for a single crystal furnace, which comprises a shell, a rotating shaft, a wire winding wheel, a screw rod, a first nut, a counterweight and a guide rod. The shell is provided with a first sealing cavity; the rotating shaft extends into the first sealing cavity and is rotatably connected with the shell; the wire winding wheel is located in the first sealing cavity, the wire winding wheel is connected with the rotating shaft, the wire winding wheel is connected with the shell through first threads, and the wire winding wheel can move along the axis direction of the rotating shaft when the rotating shaft rotates.
The screw rod is connected with the rotating shaft and is provided with a second thread with the opposite rotation direction to the first thread; the first nut is connected with the screw rod through the second thread; the weight part is connected with the first nut; the guide rod is connected with the shell, and the first nut or the counterweight is connected with the guide rod in a sliding mode.
Through the lead screw, first nut, the setting of counterweight and guide arm, when the axis of rotation rotates, the direction of motion and first nut of book silk wheel, the direction of motion of counterweight is opposite, make book silk wheel and first nut, the counterweight is synchronous to be close to each other or keep away from, at aforementioned in-process, roll up silk wheel, the counterweight, first nut, the lead screw, the focus skew of parts such as axis of rotation is less or even the focus hardly squints, greatly avoid leading to the problem that the tungsten filament rope rocked because the focus skew is great, thereby it rocks to reduce single crystal silicon in carrying the in-process, the dislocation probability appears in the reduction single crystal silicon.
In some embodiments of the present application, the wire winding wheel assembly for a single crystal furnace further includes a cover body, the cover body is connected to the housing, the cover body and the housing enclose a second cavity, and the lead screw, the first nut, the weight member, and the guide rod are all located in the second cavity.
In some embodiments of the present application, the second cavity is a sealed cavity;
optionally, the second cavity is communicated with the first sealed cavity;
optionally, the cover is integral with the housing.
In some embodiments of the present application, the wire winding wheel assembly for the single crystal furnace further comprises a guide sleeve slidably sleeved outside the guide rod, and the guide sleeve is connected with the weight member.
In some embodiments of the present application, the wire wheel assembly for a single crystal furnace further comprises a second nut coupled to the housing and located within the first sealed chamber, the second nut being threadably coupled to the wire wheel via the first threads.
In some embodiments of the present application, the wire wheel assembly for a single crystal furnace further comprises a speed reducer, a coupling and an encoder;
the speed reducer with the rotation axis connection, the one end that the lead screw was kept away from to the axis of rotation with the coupling joint, the insulating part of coupling joint with the encoder is connected.
In some embodiments of the present application, the encoder is in insulated connection with the retarder.
In some embodiments of the present application, the speed reducer is connected to a bracket in an insulated manner, and the encoder is mounted to the bracket;
optionally, the bracket is connected with the speed reducer through a bolt, and an insulating sleeve is arranged between the bolt and the bracket;
optionally, an insulating gasket is arranged between the speed reducer and the bracket.
The application still provides a single crystal growing hoisting device of single crystal growing furnace, and single crystal growing hoisting device includes:
a base;
the supporting plate is rotatably connected with the base;
the wire wheel winding assembly for any single crystal furnace is arranged on the supporting plate; and
and the rotary driving assembly is used for driving the supporting disk and the wire wheel winding assembly for the single crystal furnace to rotate.
The present application further provides a wire reel assembly, comprising:
a mounting frame is arranged on the base plate,
the rotating shaft is rotatably connected with the mounting frame;
the wire winding wheel is connected with the rotating shaft through a first thread and can move along the axial direction of the rotating shaft when the rotating shaft rotates;
the screw rod is connected with the rotating shaft and is provided with a second thread with the opposite rotation direction to the first thread;
the nut is connected with the screw rod through the second threads;
the weight part is connected with the nut; and
the guide rod is connected with the mounting frame, and the nut or the counterweight is connected with the guide rod in a sliding manner.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic structural diagram of a first view angle of a crystal growth pulling device of a single crystal furnace provided by the embodiment of the application;
FIG. 2 is a schematic structural diagram of a second view angle of a crystal growth pulling device of the single crystal furnace provided by the embodiment of the application;
FIG. 3 shows an enlarged schematic view at A in FIG. 2;
FIG. 4 shows an enlarged schematic view at B in FIG. 2;
fig. 5 shows an enlarged schematic view at C in fig. 2.
Icon: 100-crystal growth pulling device of single crystal furnace; 101-a base; 102-a support plate; 103-rotation driving; 104-a support disk; 105-a counterweight; 106-an encoder; 107-threading tube; 108-tungsten wire rope; 109-a linear drive assembly; 111-a motor; 112-a reducer; 1121 — an insulating part; 113-a coupling; 114-a scaffold; 115-an insulator; 116-an insulating sleeve; 200-a wire wheel winding assembly; 201-a first sealed chamber; 202-a second cavity; 203-spline nuts; 210-a housing; 211-a cover body; 220-a rotating shaft; 230-wire winding wheel; 240-screw mandrel; 250-a first nut; 260-a weight member; 270-a guide rod; 271-a guide sleeve; 280-second nut.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present application, it is to be understood that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like, refer to the orientation or positional relationship as shown in the drawings, or as conventionally placed in use of the product of the application, or as conventionally understood by those skilled in the art, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore should not be considered as limiting the present application.
Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present application, it should also be noted that, unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
Examples
Fig. 1 shows a schematic structural diagram of a first view angle of a crystal growth pulling apparatus 100 of a single crystal furnace provided in an embodiment of the present application, fig. 2 shows a schematic structural diagram of a second view angle of the crystal growth pulling apparatus 100 of the single crystal furnace provided in the embodiment of the present application, and referring to fig. 1 and fig. 2, the crystal growth pulling apparatus 100 of the single crystal furnace provided in the embodiment of the present application mainly includes a base 101, a support plate 102, a rotary drive 103, a support plate 104, a counterweight 105, an encoder 106, a threading tube 107, a tungsten wire rope 108, a linear drive assembly 109, and a wire winding wheel assembly 200.
The supporting plate 102 is connected with the base 101, and the weight 105, the encoder 106, the threading pipe 107, the linear driving assembly 109 and the wire winding wheel assembly 200 are connected with the supporting plate 104. The rotation drive 103 drives the support plate 104 and the components mounted on the support plate 104 to rotate, the tungsten wire 108 passes through the base 101 and the support plate 104 and is connected with the wire winding wheel 230 of the wire winding wheel assembly 200, specifically, one end of the tungsten wire 108 is wound on the wire winding wheel 230 and passes through the weighing device, and the other end is connected with the weight with the seed crystal. The rotary drive 103 rotates the tungsten wire rope 108 and the linear drive assembly 109 raises and lowers the tungsten wire rope 108.
In this embodiment, the rotary drive 103 includes a motor 111 and a plurality of speed reducers 112, the motor 111 is connected to the speed reducers 112, and the rotary drive 103 drives the supporting disc 104 to rotate through a multi-wedge pulley and a rotating shaft.
It should be noted that, in the present application, the material of the tungsten wire rope 108 may be other conductive materials, which is not limited in the present application, and the embodiment and the drawings are only one example of the base 101, the support plate 102, the rotary drive 103, the support plate 104, the counterweight portion 105, the encoder 106, the threading pipe 107, the tungsten wire rope 108, the linear drive assembly 109, and other structures may be selected to achieve corresponding functions.
The linear drive assembly 109 transmits power to the wire wheel assembly 200; the filament winding wheel 230 is moved, so that the tungsten filament rope 108 winds around the filament winding wheel 230 to realize the lifting of the tungsten filament rope 108.
Fig. 3 shows an enlarged schematic view at a in fig. 2, and fig. 4 shows an enlarged schematic view at B in fig. 2.
Referring to fig. 4 and 3 together, in the present application, the wire winding wheel assembly 200 includes a housing 210, a rotating shaft 220, a wire winding wheel 230, a lead screw 240, a first nut 250, a weight member 260, and a guide rod 270. A first sealed cavity 201 is arranged in the housing 210, and the wire winding wheel 230 is positioned in the first sealed cavity 201.
The rotating shaft 220 is connected with the linear driving assembly 109, the linear driving assembly 109 drives the rotating shaft 220 to rotate, the wire winding wheel 230 is connected with the rotating shaft 220, and the wire winding wheel 230 can move along the axial direction of the rotating shaft 220 when the rotating shaft 220 rotates.
In this embodiment, the rotating shaft 220 is a spline shaft, and the spline shaft is connected to the wire winding wheel 230 through a spline nut 203. The linear driving assembly 109 comprises a motor 111 and a speed reducer 112 which are in transmission connection, and the speed reducer 112 is connected with a rotating shaft 220; it should be noted that, in the embodiment of the present application, the type and structure of the linear driving assembly 109 are not limited as long as the rotating shaft 220 can be driven to rotate stably.
In some embodiments of the present application, the housing 210 is threadably connected to the wire takeup wheel 230 by a second nut 280; the surface of the wire winding wheel 230 is provided with a first thread, the second nut 280 is connected with the wire winding wheel 230 through the first thread, so that the wire winding wheel 230 moves along the axis direction of the rotating shaft 220 while being constrained by the second nut 280, the wire winding wheel 230 moves along a straight line, the lifting of the tungsten wire rope 108 is controlled accurately, the tungsten wire rope is prevented from separating from a groove on the surface of the wire winding wheel 230, and the precision of lifting distance control is improved. It will be appreciated that in some embodiments of the present application, the second nut may not be provided, and threads may be provided where the housing 210 is coupled to the wire takeup wheel, with the first threads on the surface of the wire takeup wheel being coupled to the housing 210.
The screw 240 is connected to the rotating shaft 220, and the screw 240 and the linear driving assembly 109 are respectively located at two opposite ends of the rotating shaft 220.
In this embodiment, the screw 240 is fixedly connected to the rotating shaft 220 through a bolt, and the rotating shaft 220 drives the screw 240 to rotate synchronously in the rotating process; in the present embodiment, the lead screw 240 is disposed coaxially with the rotating shaft 220, and it is understood that in some other embodiments of the present application, the axis of the lead screw 240 may be parallel to the axis of the rotating shaft 220, and the two may not be coaxial.
The screw 240 is provided with a first nut 250, and the screw 240 and the first nut 250 form a screw-nut pair structure. The lead screw 240 is in threaded connection with the first nut 250 through a second thread (not shown); in the present application, when the rotating shaft 220 rotates, in order to make the first nut 250 and the wire winding wheel 230 have a tendency to rotate in opposite directions, the second thread is opposite to the first thread; that is, the thread (second thread) on the lead screw 240 is a left-hand thread, and the thread (first thread) on the wire winding wheel 230 is a right-hand thread; alternatively, the thread (first thread) on the winding wheel 230 is a left-hand thread and the thread (second thread) on the lead screw 240 is a right-hand thread. When the rotating shaft 220 rotates, the first nut 250 and the wire winding wheel 230 have a tendency to rotate in opposite directions.
The weight member 260 is coupled to the first nut 250, the guide rod 270 is coupled to the housing 210, and the first nut 250 or the weight member 260 is slidably coupled to the guide rod 270. When the lead screw 240 rotates, the first nut 250 converts the aforementioned tendency of rotation into sliding along the length direction of the guide bar 270; since the weight member 260 is coupled to the first nut 250, the weight member 260 slides along the length direction of the guide rod 270 together with the first nut 250.
In this embodiment, the first nut 250 is slidably coupled to the guide 270. It will be appreciated that in other embodiments of the present application, it may be arranged to: the weight member 260 is slidably connected with the guide rod 270; since the weight member 260 is connected to the first nut 250, the weight member 260 and the first nut 250 can slide together with respect to the guide rod 270; alternatively, the weight 260 may be slidably coupled to the guide rod 270, and the weight 260 may be slidable along the longitudinal direction of the guide rod 270 together with the first nut 250.
As mentioned above, the first nut 250 and the wire winding wheel 230 have a tendency to rotate in opposite directions. Taking fig. 2 as an example, when the rotating shaft 220 and the lead screw 240 synchronously rotate in the forward direction, the wire winding wheel 230 moves from right to left, and the weight member 260 moves from left to right together with the first nut 250, i.e., the wire winding wheel 230 and the weight member 260 approach each other; when the rotating shaft 220 and the lead screw 240 synchronously rotate in opposite directions, the wire winding wheel 230 moves from left to right, and the weight member 260 moves from right to left together with the first nut 250, i.e. the wire winding wheel 230 and the weight member 260 are far away from each other; in the foregoing process, the center of gravity of the reel 230, the weight 260, the first nut 250, the lead screw 240, the rotation shaft 220, and the like is less shifted. Further, if the weight of the wire winding wheel 230, the total weight of the weight member 260 and the first nut 250 are configured according to the principle of center of gravity calculation, the center of gravity of the wire winding wheel assembly 200 can be hardly shifted, and the center of gravity is not shifted or slightly shifted, which is favorable for the tungsten wire rope 108 wound on the wire winding wheel 230 not to shake, thereby reducing the shake of monocrystalline silicon during the pulling process and reducing the probability of dislocation of the monocrystalline silicon.
It should be noted that, in the embodiment of the present application, the weight member 260 and the first nut 250 may be integrally provided, and the present application does not limit the specific forms of the first nut 250 and the lead screw 240, and the weight member may be a standard member or a non-standard member; the function of the screw nut pair can be realized.
In some embodiments of the present application, in order to prevent the first nut 250, the lead screw 240 and other components from being exposed to the outside, the wire winding wheel assembly 200 further includes a cover 211, the cover 211 is connected to the housing 210, the cover 211 and the housing 210 enclose the second cavity 202, and the lead screw 240, the first nut 250, the weight 260 and the guide rod 270 are all located in the second cavity 202.
In this embodiment, the second cavity 202 is communicated with the first sealed cavity 201, and the second cavity 202 is also a sealed cavity; in other words, the lead screw 240, the first nut 250, the weight 260, the guide rod 270, and the wire winding wheel 230 are all located in a sealed cavity.
It is understood that in other embodiments of the present application, the second cavity 202 may not be a sealed cavity. For example, the rotating shaft 220 is connected with the housing 210 through a rotary seal, and one end of the rotating shaft 220 away from the linear driving assembly 109 extends out of the first seal cavity 201 and is connected with the screw rod 240; alternatively, one end of the screw 240 extends into the first sealing cavity 201 to connect with the rotating shaft 220, and the screw 240 is connected with the housing 210 through a rotary sealing member, for example, the rotary sealing member may be a magnetic fluid or an oil seal.
It is understood that the second cavity 202 may be provided as a sealed cavity, and the second cavity 202 is provided separately from the first sealed cavity 201; alternatively, the screw 240, the first nut 250, the weight 260, and the guide rod 270 may all be located in the second unsealed cavity 202, so that when the components in the second cavity 202 are repaired, the atmosphere in the first sealed cavity 201 is not affected, and in addition, the requirement on the pressure resistance of the cover 211 may be reduced, and the cost may be reduced. It is further noted that for embodiments where the second cavity 202 is not sealed, the cover 211 is not necessary and the cover 211 may not be provided.
It can be understood that, for the embodiment that the second cavity 202 is communicated with the first sealed cavity 201, and the second cavity 202 is also a sealed cavity, the aforementioned rotary sealing element may not be provided, so as to avoid the influence of the rotary sealing element on the service life of the device.
Referring to fig. 2 again, in the present embodiment, the wire reel assembly 200 includes a plurality of guide rods 270, the plurality of guide rods 270 are parallel to each other, the plurality of guide rods 270 are distributed at intervals along the circumferential direction of the screw 240, and the weight member 260 can slide relative to the axial direction of each guide rod 270. The plurality of guide rods 270 may increase the stability of the weight member 260 when moving relative to the lead screw 240; it is understood that in other embodiments of the present application, the wire reel assembly 200 may be provided with only one guide rod 270.
Further, in order to make the movement of the weight member 260 relative to the guide rod 270 smoother, the wire winding wheel assembly 200 for the single crystal guiding furnace further includes a guide sleeve 271, the guide sleeve 271 is slidably sleeved outside the guide rod 270, and the guide sleeve 271 is connected with the weight member 260. The guide sleeve 271 can reduce the friction coefficient between the weight 260 and the guide rod 270, increase the smoothness, and avoid local temperature rise caused by large friction between the weight 260 and the guide rod 270. The material of the guide sleeve 271 may be, for example, an alloy, and the guide sleeve 271 may be selected according to the material of the guide rod 270, and the material having a small friction with the guide rod 270 may be selected.
Note that, in the present application, the shape of the guide rod 270 is not limited, and for example, the guide rod 270 may be a circular column, a square column, or the like; accordingly, the shape of the guide sleeve 271 is not limited in the present application. In the present application, the guide sleeve 271 is not essential, and in some embodiments, the guide sleeve 271 may not be provided.
Fig. 5 shows an enlarged schematic view at C in fig. 2. As mentioned above, the linear driving assembly 109 includes the motor 111 and the speed reducer 112 connected in a transmission manner, and the speed reducer 112 is connected to the rotating shaft 220.
Specifically, in the present embodiment, the linear driving assembly 109 includes a motor 111, a reducer 112 and a coupler 113, the motor 111 is connected to the reducer 112, the reducer 112 is connected to the rotating shaft 220, an end of the rotating shaft 220 away from the lead screw 240 is connected to the coupler 113, the reducer 112 can drive the rotating shaft 220 to rotate synchronously with the coupler 113, and the insulating portion 1121 of the coupler 113 is connected to the encoder 106.
In the actual working process, the encoder 106 detects the displacement of the wire winding wheel 230 along the axis of the rotating shaft 220 by detecting the angular displacement of the coupler 113, so as to detect the lifting height of the tungsten wire 108; the encoder 106 needs to collect the above information and convert it into an electrical signal; the electrical signal is then passed to the PLC. In order to increase the accuracy of the encoder 106 in detecting the lifting distance of the tungsten wire 108 and avoid the interference of the current on the coupler 113 on the electrical signal, the encoder 106 is connected to the insulating part 1121 of the coupler 113; preventing current on the coupling 113 from being conducted to the encoder 106.
The coupler 113 has a driving end and a driven end, the driving end of the coupler 113 is connected to the rotating shaft 220, the driven end is connected to the encoder 106, and the driving end and the driven end of the coupler 113 are connected through an insulating portion 1121, in this embodiment, the encoder 106 is connected to the insulating portion 1121, the insulating portion 1121 is made of engineering plastics, for example, and the insulating portion 1121 can prevent the current on the driving end of the coupler 113 from being conducted to the encoder 106. Because the tungsten wire 108 has current, the insulating portion 1121 can isolate the current on the tungsten wire 108, the rotating shaft 220 and other parts from being transmitted to the encoder 106, so as to avoid the interference of the interference current on the electrical signal detected by the encoder 106, and increase the accuracy of the encoder 106 in detecting the lifting distance of the tungsten wire 108.
In the present embodiment, the encoder 106 is further supported by a decelerator 112, and the decelerator 112 is connected to the encoder 106 by a bracket 114; an insulator 115 is provided between the bracket 114 and the decelerator 112, and in the present application, the shape of the insulator 115 is not limited; the insulator 115 prevents the current or the like of the decelerator 112 from being conducted to the bracket 114 and thus to the encoder 106.
In the embodiment, the bracket 114 is connected with the reducer 112 through a bolt, and an insulating sleeve 116 is arranged between the bolt and the bracket 114; in other words, the insulating sleeve 116 is sleeved outside the bolt, and then the bolt is connected to the bracket 114, and the insulating sleeve 116 insulates the bolt from the bracket 114, thereby insulating the bracket 114 from the reducer 112. In some embodiments, the support 114 may be made of an insulating material.
Alternatively, in other embodiments of the present application, the reducer 112 and the encoder 106 may be connected by other insulating connection, and accordingly, the coupling 113 and the encoder 106 may be connected by other insulating connection. It will be appreciated that in some embodiments of the present application, the insulating sleeve 116 and the insulating member 115 may not be provided if the insulation requirements for the encoder 106 are not high.
It is understood that in other embodiments of the present application, the encoder 106 may not be supported by the decelerator 112, and accordingly, the encoder 106 may not be connected to the decelerator 112 through the aforementioned bracket 114; for example, the encoder 106 may be supported by the support plate 104.
The wire wheel winding assembly 200 provided by the embodiment of the application has at least the following advantages:
through the arrangement of the screw 240, the first nut 250, the weight 260 and the guide rod 270, when the rotating shaft 220 rotates, the moving direction of the wire winding wheel 230 is opposite to the moving direction of the first nut 250 and the weight 260, so that the wire winding wheel 230, the first nut 250 and the weight 260 synchronously approach to or depart from each other, in the process, the center of gravity of the wire winding wheel 230, the weight 260, the first nut 250, the screw 240, the rotating shaft 220 and other parts is less in shift, even the center of gravity is hardly shifted, the problem that the tungsten wire rope 108 is shifted due to large center of gravity shift is greatly avoided, and therefore the monocrystalline silicon is shifted in the pulling process, and the probability of dislocation of the monocrystalline silicon is reduced.
Further, for the embodiment in which the insulating portion 1121 of the coupler 113 is connected to the encoder 106, the insulating portion 1121 may isolate the current on the tungsten wire rope 108, the rotating shaft 220, and the like from being transmitted to the encoder 106, so as to avoid the interference of the interference current on the electrical signal detected by the encoder 106, and increase the accuracy of the detection of the lifting distance of the tungsten wire rope 108 by the encoder 106.
The filament winding wheel assembly 200 for the single crystal furnace, which is provided by the embodiment of the application, has all the advantages of the filament winding wheel assembly 200, and the probability of dislocation of single crystal silicon can be reduced; accordingly, in some embodiments, the interference of the currents on the tungsten wire 108 and the motor 111 to the encoder 106 can be reduced, and the accuracy of the encoder 106 in detecting the lifting distance of the tungsten wire 108 can be increased.
Referring to fig. 2 to 5, the present application further provides a wire winding wheel assembly 200, where the wire winding wheel assembly 200 includes a rotating shaft 220, a wire winding wheel 230, a lead screw 240, a first nut 250, a weight member 260, and a guide rod 270; please refer to the description of the wire wheel assembly 200 for the single crystal furnace, which is not repeated herein, and it should be noted that, in the present application, the wire wheel assembly 200 is not limited to be used in the single crystal furnace, and can be used in other positions where the wire wheel 230 needs to be disposed, and accordingly, the first sealing chamber 201 may not be disposed. Whether or not the corresponding accessories such as the encoder 106 need to be provided can be determined according to the use scene of the wire winding wheel 230.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. A wire wheel winding assembly for a single crystal furnace is characterized by comprising:
a housing having a first sealed cavity;
the rotating shaft extends into the first sealing cavity and is connected with the shell in a rotating mode;
the wire winding wheel is positioned in the first sealing cavity, the wire winding wheel is connected with the rotating shaft and is connected with the shell through a first thread, and the wire winding wheel can move along the axial direction of the rotating shaft when the rotating shaft rotates;
the screw rod is connected with the rotating shaft and is provided with a second thread with the opposite rotation direction to the first thread;
the first nut is connected with the screw rod through the second thread;
the weight part is connected with the first nut; and
the guide rod is connected with the shell, and the first nut or the counterweight is in sliding connection with the guide rod.
2. The wire winding wheel assembly for the single crystal furnace according to claim 1, further comprising a cover body, wherein the cover body is connected with the housing, the cover body and the housing enclose a second cavity, and the lead screw, the first nut, the weight member and the guide rod are all located in the second cavity.
3. The wire wheel assembly for the single crystal furnace according to claim 2, wherein the second chamber is a sealed chamber;
optionally, the second cavity is communicated with the first sealed cavity;
optionally, the cover is integral with the housing.
4. The wire wheel assembly for the single crystal furnace according to claim 1, wherein the wire wheel assembly for the single crystal furnace further comprises a guide sleeve, the guide sleeve is slidably sleeved outside the guide rod, and the guide sleeve is connected with the weight member.
5. The wire wheel assembly for the single crystal furnace according to claim 1, further comprising a second nut coupled to the housing and positioned within the first sealed chamber, the second nut being threadedly coupled to the wire wheel via the first threads.
6. The wire wheel assembly for the single crystal furnace according to any one of claims 1 to 5, wherein the wire wheel assembly for the single crystal furnace further comprises a speed reducer, a coupling and an encoder;
the speed reducer with the rotation axis connection, the one end that the lead screw was kept away from to the axis of rotation with the coupling joint, the insulating part of coupling joint with the encoder is connected.
7. The wire wheel assembly for the single crystal furnace according to claim 6, wherein the encoder is connected to the decelerator in an insulated manner.
8. The wire wheel assembly for the single crystal furnace according to claim 7, wherein the speed reducer is connected to a support in an insulated manner, and the encoder is mounted to the support;
optionally, the bracket is connected with the speed reducer through a bolt, and an insulating sleeve is arranged between the bolt and the bracket;
optionally, an insulating gasket is arranged between the speed reducer and the bracket.
9. A single crystal furnace crystal growth lifting device is characterized by comprising:
a base;
the supporting plate is rotatably connected with the base;
the wire wheel assembly for a single crystal furnace of any one of claims 1 to 8, which is mounted to the support plate; and
and the rotary driving assembly is used for driving the supporting disk and the wire wheel winding assembly for the single crystal furnace to rotate.
10. A wire wheel assembly, comprising:
a mounting frame is arranged on the base plate,
the rotating shaft is rotatably connected with the mounting frame;
the wire winding wheel is connected with the rotating shaft through a first thread and can move along the axial direction of the rotating shaft when the rotating shaft rotates;
the screw rod is connected with the rotating shaft and is provided with a second thread with the opposite rotation direction to the first thread;
the nut is connected with the screw rod through the second threads;
the weight part is connected with the nut; and
the guide rod is connected with the mounting frame, and the nut or the counterweight is connected with the guide rod in a sliding manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210088981.4A CN114411244A (en) | 2022-01-25 | 2022-01-25 | Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210088981.4A CN114411244A (en) | 2022-01-25 | 2022-01-25 | Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114411244A true CN114411244A (en) | 2022-04-29 |
Family
ID=81276957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210088981.4A Pending CN114411244A (en) | 2022-01-25 | 2022-01-25 | Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114411244A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09249487A (en) * | 1996-03-14 | 1997-09-22 | Mitsubishi Materials Corp | Upper shaft support structure for single crystal pulling-up apparatus |
| CN1840744A (en) * | 2005-03-28 | 2006-10-04 | 荀建华 | Crystal lifting device |
| CN107034515A (en) * | 2015-10-14 | 2017-08-11 | 胜高股份有限公司 | Single-crystal production apparatus and manufacture method |
| CN208455107U (en) * | 2018-06-25 | 2019-02-01 | 西安创联新能源设备有限公司 | Transmission system on a kind of single crystal growing furnace self-balancing type |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
| CN112442733A (en) * | 2020-12-09 | 2021-03-05 | 连城凯克斯科技有限公司 | Seed crystal lifting device without unbalance loading |
-
2022
- 2022-01-25 CN CN202210088981.4A patent/CN114411244A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09249487A (en) * | 1996-03-14 | 1997-09-22 | Mitsubishi Materials Corp | Upper shaft support structure for single crystal pulling-up apparatus |
| CN1840744A (en) * | 2005-03-28 | 2006-10-04 | 荀建华 | Crystal lifting device |
| CN107034515A (en) * | 2015-10-14 | 2017-08-11 | 胜高股份有限公司 | Single-crystal production apparatus and manufacture method |
| CN208455107U (en) * | 2018-06-25 | 2019-02-01 | 西安创联新能源设备有限公司 | Transmission system on a kind of single crystal growing furnace self-balancing type |
| CN110904499A (en) * | 2019-12-24 | 2020-03-24 | 大连连城数控机器股份有限公司 | Wire winding wheel transmission guide mechanism for single crystal furnace |
| CN112442733A (en) * | 2020-12-09 | 2021-03-05 | 连城凯克斯科技有限公司 | Seed crystal lifting device without unbalance loading |
Non-Patent Citations (1)
| Title |
|---|
| 舒亮等: "《Galfenol合金磁滞非线性模型与控制方法》", 31 January 2016, 国防工业出版社 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8347740B2 (en) | Systems for weighing a pulled object having a changing weight | |
| JP2012522250A5 (en) | ||
| CN114411244A (en) | Single crystal furnace crystal growth lifting device and wire winding wheel assembly for single crystal furnace | |
| CN106313492A (en) | Gantry type annular container winding machine | |
| CN219534285U (en) | Automatic insulating wrapping device for multi-layer multi-turn spiral coils of superconducting magnet of nuclear fusion device | |
| CN107972194A (en) | Buddha's warrior attendant wire cutting machine and its winding displacement control method | |
| CN110904499A (en) | Wire winding wheel transmission guide mechanism for single crystal furnace | |
| JP3606623B2 (en) | Semiconductor single crystal manufacturing equipment | |
| CN102798366A (en) | Tightening wire displacement sensor capable of separating measurement from winding | |
| CN213141230U (en) | Novel full-automatic cable arrangement device | |
| CN109244560A (en) | A kind of tension cache mechanism | |
| JPH07172980A (en) | Apparatus for producing semiconductor single crystal | |
| CN202021230U (en) | Self-compensation servo wiring device for water tank wire drawing machine | |
| CN209036570U (en) | A kind of structured automatical thread-arranging-winding machine structure for cable traction machine people | |
| CN210319067U (en) | Underground pipeline dive detection device | |
| JP2017165572A (en) | Button lifting device | |
| EP2803319B1 (en) | Elevating column and method of controlling elevation thereof | |
| CN114959883B (en) | Seed crystal lifting mechanism of semiconductor silicon single crystal furnace | |
| CN211198180U (en) | Cable winding device convenient to installation adjustment | |
| JP3250381B2 (en) | Conveyor for fiber winding | |
| CN217786081U (en) | Automatic calibration device for pull rope type sensor | |
| CN110792893A (en) | Track type inspection robot holder lifting device and working method thereof | |
| CN117589210B (en) | Measuring device and system of stay cord encoder | |
| CN220942598U (en) | Take-up device with constant take-up included angle | |
| CN212959730U (en) | Lead screw spline integrated multifunctional actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20220429 |
|
| RJ01 | Rejection of invention patent application after publication |