CN217499491U - Seed crystal rod lifting mechanism and crystal growth furnace - Google Patents
Seed crystal rod lifting mechanism and crystal growth furnace Download PDFInfo
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- CN217499491U CN217499491U CN202221118252.0U CN202221118252U CN217499491U CN 217499491 U CN217499491 U CN 217499491U CN 202221118252 U CN202221118252 U CN 202221118252U CN 217499491 U CN217499491 U CN 217499491U
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Abstract
The application provides a seed crystal pole lifting mechanism and crystal growth furnace relates to semiconductor technical field. The seed crystal rod lifting mechanism comprises a support frame, a lifting device and a base; the support frame rotates to be connected in the base, and elevating gear locates on the support frame, and the one end drive of crane is connected in elevating gear, and the other end of crane is connected in the seed rod. The technical scheme of this application, drive seed crystal pole through the elevating gear on the support frame and go up and down, be connected and provide the support with the support frame through the base, and the support frame can rotate for the base to can adjust the axial position of seed crystal pole, the seed crystal or the crystal of being convenient for take, in order to solve the inconvenient problem of operation among the prior art.
Description
Technical Field
The application relates to the technical field of semiconductors, in particular to a seed crystal rod lifting mechanism and a crystal growth furnace.
Background
Sapphire crystal is an excellent single crystal material and is widely applied to the fields of a plurality of semiconductors such as substrate substrates, laser substrates, optical elements and the like. Sapphire crystals can be prepared by various methods, such as a pulling method, and the specific process is as follows: the raw material is heated in the crucible to be molten to form a melt, the seed crystal is contacted with the melt, and when the temperature difference exists between the solid-liquid interface of the seed crystal and the melt (the temperature of the seed crystal is lower than that of the melt), the melt is overcooled to start to solidify on the surface of the seed crystal, and a single crystal with the same crystal structure as the seed crystal is grown, namely, the crystal is grown. The crystal grows to the periphery, the seed crystal needs to be slowly pulled upwards to provide space for the crystal growth, the crystal rotates at a certain rotating speed, the melt is gradually solidified on a solid-liquid interface of the seed crystal, and the crystal is not contacted with the crucible wall all the time in the growth process.
In the prior art, a seed rod capable of rotating and lifting is usually arranged above a crucible, and a seed crystal is arranged at the bottom end of the seed rod. Because the seed crystal or the crystal cannot contact with the crucible wall in the crystal growth process, the seed crystal rod is usually arranged at the center of the crucible, and therefore, the seed crystal or the crystal is very inconvenient to take and place; in addition, the seed rod is usually driven by a motor arranged at the top of the seed rod to rotate or lift, and after the crystal growth is finished, the motor drives the seed rod to descend slowly, so that the production efficiency is influenced.
Therefore, a pulling mechanism is needed to solve the problems of inconvenient operation when taking and placing the seed crystal or the crystal and slow descending process of the seed crystal rod after the crystal growth is finished.
SUMMERY OF THE UTILITY MODEL
The main objective of the present application is to provide a seed rod pulling mechanism and a crystal growth furnace, so as to at least solve one of the problems of inconvenient operation when taking and placing seed crystals or crystals and slow descending process of the seed rod after the crystal growth is finished.
In order to solve the above technical problem, the embodiments of the present application provide the following technical solutions:
on one hand, the application provides a seed crystal rod lifting mechanism which comprises a support frame, a lifting device and a base; wherein the content of the first and second substances,
the support frame rotate connect in the base, elevating gear locates on the support frame, the one end drive of crane connect in elevating gear, the other end of crane connects in the seed rod.
Preferably, the support frame comprises a support plate, a top plate, and at least one upright and at least one guide rail plate arranged between the support plate and the top plate;
the supporting plate is located under the top plate, at least one guide rail plate is located at one end of the supporting plate, a guide rail is arranged on the guide rail plate, and the lifting frame is connected to the guide rail in a sliding mode.
Preferably, the lifting device comprises an electric lifting assembly, and the electric lifting assembly comprises a lead screw, a first transmission device and a motor; wherein, the first and the second end of the pipe are connected with each other,
the top and the bottom of lead screw rotate respectively connect in the roof with the backup pad, just the lead screw with guide rail parallel arrangement, first transmission connect respectively in the motor with the bottom of lead screw, motor drive first transmission motion so that the lead screw rotates.
Preferably, the first transmission device comprises a worm wheel and a worm, an output shaft of the motor is connected with one end of the worm, the worm is meshed with the worm wheel, the worm wheel is sleeved on the lead screw, and the motor drives the lead screw to rotate through the first transmission device.
Preferably, the first transmission device further comprises a speed reducer, an output shaft of the motor is connected to an input end of the speed reducer, and an output end of the speed reducer is connected to the one end of the worm.
Preferably, the lifting device further comprises a manual lifting assembly, the manual lifting assembly comprises a hand wheel, a hand wheel shaft and a second transmission device, the hand wheel is connected to the hand wheel shaft, the second transmission device is respectively connected to the bottom of the lead screw and the hand wheel shaft, and the hand wheel can be driven to rotate by rotation of the hand wheel so as to drive the lead screw to rotate through the second transmission device.
Preferably, the second transmission device comprises a driving gear, a driven gear and a gear shaft, the driving gear is connected to one end of the gear shaft, the other end of the gear shaft is connected with the hand wheel shaft through a first coupler, the driven gear is meshed with the driving gear, and the axial direction of the driven gear is perpendicular to the axial direction of the driving gear;
the driven gear is sleeved at the bottom of the lead screw.
Preferably, the lifting device further comprises a clutch, the clutch comprises a movable disc and an armature, the movable disc is connected with the lead screw, the armature is connected with the worm wheel, and the movable disc and the armature can be attracted when being electrified so that the worm wheel drives the lead screw to synchronously rotate.
Preferably, the lifting frame is provided with a sliding block matched with the guide rail, a threaded hole is formed in one end of the lifting frame, the lifting frame is connected to the lead screw through the threaded hole in a threaded mode, and the sliding block is slidably clamped in the guide rail;
the base is provided with a vertically arranged base shaft, the other end of the supporting plate is provided with a connecting hole, and the connecting hole is rotatably connected with the top end of the base shaft through a first bearing.
In another aspect, the present application provides a crystal growing furnace, including a seed rod, a crucible, and the above seed rod pulling mechanism, wherein the seed rod pulling mechanism drives the seed rod mechanism to move up and down along an axial direction of the crucible or rotate to deviate from the axial direction of the crucible.
Compare in prior art, the seed rod pulling mechanism that this application provided has following beneficial effect at least: this application drives the seed crystal pole through the elevating gear on the support frame and goes up and down, is connected and provides the support with the support frame through the base, and the support frame can rotate for the base to can adjust the axial position of seed crystal pole, be convenient for take seed crystal or crystal, with the problem of solving among the prior art inconvenient operation.
The foregoing description is only an overview of the technical solutions of the present application, and in order to make the technical solutions of the present application more clear and clear, and to implement the technical solutions according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present application and the accompanying drawings.
Drawings
The above and other objects, features and advantages of exemplary embodiments of the present application will become readily apparent from the following detailed description read in conjunction with the accompanying drawings. Several embodiments of the present application are illustrated by way of example and not by way of limitation in the figures of the accompanying drawings and in which like reference numerals refer to similar or corresponding parts and in which:
FIG. 1 illustrates a schematic structural view of a seed rod pull mechanism of an exemplary embodiment of the present application;
FIG. 2 illustrates a side view of a seed rod pulling mechanism of an exemplary embodiment of the present application;
FIG. 3 illustrates a front view of a seed rod pull mechanism of an exemplary embodiment of the present application;
fig. 4 is a schematic structural view showing a lifting device of a seed rod pulling mechanism according to an exemplary embodiment of the present application.
The reference numbers illustrate:
the device comprises a support frame 1, a lifting frame 2, a lead screw 3, a support plate 4, a base shaft 5, a worm gear box 6, a guide rail 7, a seed rod 8, a motor 9, a reducer 10, a worm 11, a driving gear 12, a first coupler 13, a hand wheel shaft 14, a hand wheel 15, a second coupler 16, a worm wheel fixing shaft 17, an armature fixing plate 18, an armature 19, a clutch body 20, a clutch fixing plate 21, a top plate 22 and an upright post 23.
Detailed Description
Exemplary embodiments of the present application will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which this application belongs.
Example one
As shown in fig. 1 to 4, in order to solve the problems existing in the prior art, an embodiment of the present application provides a seed rod lifting mechanism, which is used for driving a seed rod 8 to lift, and includes a support frame 1, a lifting frame 2, a lifting device and a base; wherein, the first and the second end of the pipe are connected with each other,
The application relates to a seed rod draws mechanism, drives seed rod 8 through the elevating gear on the support frame 1 and goes up and down, is connected and provides the support with support frame 1 through the base, and support frame 1 can rotate for the base to can be according to actual demand adjustment seed rod 8's axial position, be convenient for take seed crystal or crystal, with the inconvenient problem of operation among the solution prior art.
As shown in fig. 1, the supporting frame 1 comprises a supporting plate 4, a top plate 22, and at least one upright 23 and at least one guide rail plate arranged between the supporting plate 4 and the top plate 22;
the supporting plate 4 is positioned below the top plate 22, at least one guide rail plate is positioned at one end of the supporting plate 4, a guide rail 7 is arranged on the guide rail plate, and the lifting frame 2 is connected to the guide rail 7 in a sliding manner.
In the crystal growing furnace, a rotating mechanism can be arranged on the seed rod 8, and the other end of the lifting frame 2 can be connected with the rotating mechanism. In order to connect the crane 2 with the rotating structure, the other end of the crane 2 may have a mounting structure adapted to the rotating structure, for example, the other end of the crane 2 extends out of a pair of connecting plates, which are respectively disposed at both sides of the rotating structure and connected with the rotating structure through bolts.
In other embodiments of the application, the other end of the crane 2 can also be directly connected with the seed rod 8. In order to connect the crane 2 with the seed rod 8, the other end of the crane 2 may be provided with a mounting structure adapted to the seed rod 8, for example, the other end of the crane 2 is provided with a mounting hole, by inserting the seed rod 8 into the mounting hole, and fixing the mounting hole with the seed rod 8.
Alternatively, other means customary in the art can be used to achieve a fixed connection between the crane 2 and the seed rod.
The guide rail 7 is arranged on the guide rail plate for guiding the lifting of the lifting frame 2, and in order to make the movement more stable, a pair of guide rail plates can be arranged, so that both sides of the lifting frame 2 are connected with the guide rail 7 in a sliding way.
The lifting frame 2 is provided with a slide block matched with the guide rail 7, and the slide block can be slidably clamped on the guide rail 7. The lifting frame 2 is connected with the guide rail 7 in a sliding way through a sliding block.
Preferably, as shown in fig. 1, the lifting frame 2 is disposed between a pair of guide rail plates, and the slider is protruded and slidably connected to the guide rail 7. The cooperation of the slider and the guide rail 7 is prior art and will not be described in detail.
In order to make the structure more stable, the upright 23 may be a pair, and a pair of upright 23 and a pair of rail plates are symmetrically disposed at four corners of the supporting plate 4 and the top plate 22, respectively, to form a supporting frame.
Preferably, as shown in fig. 1, a base shaft 5 is provided on the base in a vertical direction, and the other end of the support plate 4 is provided with a connection hole which is rotatably connected to the top end of the base shaft 5 through a first bearing. When needed, the supporting plate 4 can be pushed and pulled manually, so that the whole lifting mechanism rotates to a required position relative to the base shaft 5, and seed crystals or grown crystals can be taken and placed conveniently.
The susceptor may be a mounting plate on which a crucible of a crystal growth furnace is mounted, and the base shaft 5 is provided on the mounting plate, thereby enabling a wide range of rotation. Meanwhile, the axial distance between the base shaft 5 and the seed rod 8 is larger than the radius of the crucible, so that the seed rod 8 is aligned with the axial direction of the crucible when in use.
As a preferred embodiment of the present application, as shown in fig. 1 to 3, the lifting device includes an electric lifting assembly including a lead screw 3, a first transmission device, and a motor 9, wherein,
the top and the bottom of lead screw 3 rotate respectively and connect in roof 22 and backup pad 4, and lead screw 3 and guide rail 7 parallel arrangement, and first transmission connects respectively in motor 9 and lead screw 3, and the motion of first transmission of motor 9 drive to messenger lead screw 3 rotates.
The top of the screw rod 3 is rotatably connected to the top plate 22 through a second bearing, and the bottom of the screw rod 3 passes through the support plate 4 and is rotatably connected with the support plate 4 through a third bearing. Bearing seats are respectively arranged on the top plate 22 and the support plate 4 for mounting a second bearing and a third bearing.
The one end of crane 2 is equipped with the screw hole, and crane 2 passes through screw hole threaded connection on lead screw 3, and when lead screw 3 rotated, crane 2 goes up and down along lead screw 3's axial through the cooperation of screw hole and lead screw 3.
As the preferred embodiment of this application, first transmission includes worm wheel and worm 11, and the output shaft of motor 9 is connected with the one end of worm 11, and worm 11 is connected with the worm wheel meshing, and the lead screw 3 is located to the worm wheel cover, and motor 9 drives lead screw 3 through first transmission and rotates.
As shown in figure 1, the worm wheel and the worm 11 can be fixed below the support plate 4 through the worm gear box 6, as shown in figure 4, the worm wheel and the worm 11 are vertical to each other in the axial direction, the worm 11 is fixedly connected with the output end of the motor 9, when the motor 9 drives the worm 11 to rotate, the worm wheel is meshed with the worm 11 to synchronously rotate with the worm 11, so that the screw rod 3 is driven to synchronously rotate, and the rotating motion of the motor 9 is converted into the lifting motion of the lifting frame 2.
Preferably, the first transmission device further comprises a speed reducer 10, an output shaft of the motor 9 is connected to an input end of the speed reducer 10, and an output end of the speed reducer 10 is connected to one end of the worm 11, so as to protect the worm wheel and the worm 11. The reducer 10 is a conventional product, and the detailed structure and the working principle are not described in detail.
As the preferred embodiment of this application, elevating gear still includes manual lifting unit, and manual lifting unit includes hand wheel 15, hand wheel axle 14 and second transmission, and hand wheel 15 connects in hand wheel axle 14, and second transmission connects respectively in the bottom of lead screw 3 and hand wheel axle 14, and hand wheel 15 rotates and can drive hand wheel axle 14 and rotate to drive lead screw 3 through second transmission and rotate.
The axial of hand wheel axle 14 and the axial parallel arrangement of worm 11 drive lead screw 3 through hand wheel 15 and rotate to can make crane 2 go up and down, and the lifting speed is faster than the electric lift subassembly. Because need slowly carry when crystal grows, can drive crane 2 through electric lift subassembly and slowly go up and down this moment, and the precision is higher, and after crystal growth, can make crane 2 go up and down fast in order to get and put the crystal through manual lift subassembly, further improved production efficiency.
Preferably, the second transmission device comprises a driving gear 12, a driven gear and a gear shaft, the driving gear 12 is connected to one end of the gear shaft, the other end of the gear shaft is connected with the hand wheel shaft 14 through a first coupler 13, the driven gear is meshed with the driving gear 12, and the axial direction of the driven gear is perpendicular to the axial direction of the driving gear 12; the driven gear is sleeved at the bottom of the screw rod 3, and the hand wheel 15 is rotated to enable the gear shaft to synchronously rotate so as to drive the driving gear 12 to rotate, so that the driven gear meshed with the driving gear synchronously rotates, and the screw rod 3 rotates.
The driven gear is fixedly connected with a driven gear shaft which is connected with the bottom of the screw rod 3 through a second coupling 16. A hollow worm wheel fixing shaft 17 is arranged below the worm wheel, and the worm wheel fixing shaft 17 is sleeved outside the second coupling 16.
In this application, can select to use electric lift subassembly or manual lift subassembly according to actual demand, with the rising and the decline of drive crane 2, set up the parameter of motor 9 in the computer according to sapphire crystal growth characteristic, thereby control the rate of rotation of lead screw 3 through motor 9 or rotation hand wheel 15 and control the rising or the rate of decline of crane 2, the rate of rise of general rotation hand wheel 15 control will be faster than the rate of rise of motor 9, when sapphire crystal grows to certain volume, can manually drive and carry out the mechanism and propose the crystal, remove the crystal removal by the manual work again.
As the preferred scheme, the lifting device further comprises a clutch, the clutch comprises a movable disc and an armature 19, the movable disc is connected with the lead screw 3, the armature 19 is connected with a worm wheel, and the movable disc and the armature 19 can be attracted when being electrified so that the worm wheel drives the lead screw 3 to synchronously rotate.
As shown in fig. 4, the clutch is a conventional product, and may be a dry single-plate electromagnetic clutch, and further includes a clutch main body 20 fixed in the worm gear case 6 through a clutch fixing plate 21, a coil is provided in the clutch main body 20, the driving plate is sleeved on the lead screw 3, and the armature 19 is connected to the worm gear through an armature fixing plate 18.
The dry type single-disc electromagnetic clutch operates as follows: when the coil is electrified, magnetic force is generated, under the action of electromagnetic force, the spring piece of the armature 19 is deformed, the movable disc and the armature 19 are attracted together, the clutch is in a joint state, and the lead screw 3 can be driven by the worm wheel to rotate; when the coil is powered off, the magnetic force disappears, the armature 19 rebounds under the action of the elastic force of the spring piece, the clutch is in a separation state, and the lead screw 3 can be driven by the hand wheel 15 to rotate, so that the worm wheel is prevented from being influenced.
The application relates to a seed rod lifting mechanism, which is a combined structure motion scheme provided under the specific requirements of a crystal growth furnace, the lifting mechanism has the advantages of high running precision, high stability, flexible running mode, strong controllability and the like, and is an effective solution for controlling the crystal growth in crystal growth furnace equipment.
Example two
The application provides a crystal growth furnace, including seed rod 8, crucible and embodiment one seed rod lifting mechanism, seed rod lifting mechanism drive seed rod 8 along the axial lift of crucible, or rotate to the axial of deviating from the crucible, the outside of crucible can be located to seed rod lifting mechanism, and the axial distance of base shaft 5 and seed rod 8 is greater than the radius of crucible to guarantee that seed rod 8 aligns with the axial direction of crucible when using.
It will be appreciated that the relevant features of the devices described above may be referred to one another. In addition, "first", "second", and the like in the above embodiments are for distinguishing the embodiments, and do not represent merits of the embodiments.
In the description provided herein, numerous specific details are set forth. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A seed crystal rod lifting mechanism is characterized by comprising a support frame, a lifting device and a base; wherein the content of the first and second substances,
the support frame rotate connect in the base, elevating gear locates on the support frame, the one end drive of crane connect in elevating gear, the other end of crane connects in the seed rod.
2. The seed rod pulling mechanism of claim 1, wherein the support frame comprises a support plate, a top plate, and at least one upright and at least one rail plate disposed between the support plate and the top plate;
the backup pad is located roof below, at least one the guide rail board is located the one end of backup pad, be equipped with the guide rail on the guide rail board, crane sliding connection in the guide rail.
3. The seed rod pulling mechanism of claim 2, wherein the lifting device comprises a motorized lift assembly comprising a lead screw, a first transmission, and a motor; wherein the content of the first and second substances,
the top and the bottom of lead screw rotate respectively connect in the roof with the backup pad, just the lead screw with guide rail parallel arrangement, first transmission connect respectively in the motor with the lead screw, motor drive first transmission motion, so that the lead screw rotates.
4. The seed rod lifting mechanism according to claim 3, wherein the first transmission device comprises a worm wheel and a worm, an output shaft of the motor is connected with one end of the worm, the worm is meshed with the worm wheel, the worm wheel is sleeved on the lead screw, and the motor drives the lead screw to rotate through the first transmission device.
5. The seed rod pulling mechanism according to claim 4, wherein the first transmission further comprises a speed reducer, an output shaft of the motor is connected to an input end of the speed reducer, and an output end of the speed reducer is connected to the one end of the worm.
6. The seed rod lifting mechanism according to claim 4, wherein the lifting device further comprises a manual lifting assembly, the manual lifting assembly comprises a hand wheel, a hand wheel shaft and a second transmission device, the hand wheel is connected to the hand wheel shaft, the second transmission device is respectively connected to the bottom of the lead screw and the hand wheel shaft, and the hand wheel can rotate to drive the hand wheel shaft to rotate through the second transmission device.
7. The seed rod pulling mechanism according to claim 6, wherein the second transmission means includes a driving gear, a driven gear, and a gear shaft, the driving gear is connected to one end of the gear shaft, the other end of the gear shaft is connected to the hand wheel shaft through a first coupling, the driven gear is engaged with the driving gear, and an axial direction of the driven gear is perpendicular to an axial direction of the driving gear;
the driven gear is sleeved at the bottom of the lead screw.
8. The seed rod pulling mechanism according to claim 6, wherein the lifting device further comprises a clutch, the clutch comprises a movable plate and an armature, the movable plate is connected with the lead screw, the armature is connected with the worm gear, and the movable plate and the armature can be attracted when being electrified so that the worm gear drives the lead screw to synchronously rotate.
9. The seed rod lifting mechanism according to claim 3, wherein a slider adapted to the guide rail is arranged on the lifting frame, a threaded hole is formed in one end of the lifting frame, the lifting frame is connected to the screw rod through the threaded hole, and the slider is slidably clamped to the guide rail;
the base is provided with a vertically arranged base shaft, the other end of the supporting plate is provided with a connecting hole, and the connecting hole is rotatably connected with the top end of the base shaft through a first bearing.
10. A crystal growing furnace comprising a seed rod, a crucible, and the seed rod pulling mechanism according to any one of claims 1 to 9, wherein the seed rod pulling mechanism drives the seed rod to be raised and lowered in an axial direction of the crucible or to be rotated to be deviated from the axial direction of the crucible.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221118252.0U CN217499491U (en) | 2022-05-11 | 2022-05-11 | Seed crystal rod lifting mechanism and crystal growth furnace |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202221118252.0U CN217499491U (en) | 2022-05-11 | 2022-05-11 | Seed crystal rod lifting mechanism and crystal growth furnace |
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| CN217499491U true CN217499491U (en) | 2022-09-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117187944A (en) * | 2022-10-25 | 2023-12-08 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
| CN117187944B (en) * | 2022-10-25 | 2024-04-19 | 浙江晶盛机电股份有限公司 | Adjusting mechanism and single crystal furnace |
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