CN217535814U

CN217535814U - Automatic welding device for indium phosphide single-crystal quartz tube

Info

Publication number: CN217535814U
Application number: CN202220734296.XU
Authority: CN
Inventors: 胡昌勇; 李勇; 王亮
Original assignee: Weike Saile Microelectronics Co Ltd
Current assignee: Weike Saile Microelectronics Co Ltd
Priority date: 2022-03-31
Filing date: 2022-03-31
Publication date: 2022-10-04
Anticipated expiration: 2032-03-31

Abstract

The utility model relates to a semiconductor production technical field discloses an automatic welding set of indium phosphide single crystal quartz capsule, including frame, evacuation unit and welder, fixed mounting has the quartz capsule support frame in the frame, evacuation unit intercommunication has the sealed lid of quartz capsule, fixed mounting has initiative slewing mechanism and driven slewing mechanism in the frame, initiative slewing mechanism and driven slewing mechanism transmission are connected, initiative slewing mechanism electricity is connected with the controller, welder's quantity is for being greater than a plurality of 1, and is a plurality of welder equidistant installs on driven slewing mechanism, the equal directional same center of every welder. The utility model discloses can be automatic weld the quartz capsule to promote welding quality.

Description

Automatic welding device for indium phosphide single-crystal quartz tube

Technical Field

The utility model relates to a semiconductor production technical field especially relates to an automatic welding set of indium phosphide single crystal quartz capsule.

Background

With the progress of the times and the rapid development of information technology, semiconductor materials such as indium phosphide and gallium arsenide are rapidly developed; at present, gallium arsenide and indium phosphide are mainly used for growing single crystals by a vertical temperature gradient solidification (VGF), in the process of growing single crystals, in order to prevent the contamination of materials and the decomposition of polycrystalline materials, particularly the growth of indium phosphide needs to maintain the high pressure release required by growth in a quartz tube, so the materials need to be put into a boron nitride crucible, then the boron nitride crucible is put into the quartz crucible with one open end and one closed end, a hemispherical quartz sealing cap is used at the open end, the quartz tube is vacuumized and then sintered with the quartz sealing cap and the quartz tube through oxyhydrogen flame, high-purity quartz is softened and then fused together, the purpose of completely vacuum sealing the materials into the quartz crucible is achieved, then the materials are put into a hearth of a single crystal furnace for heating, and the single crystals grow after the materials are melted.

At present, polycrystal materials, boron oxide, seed crystals and the like are welded into a boron nitride crucible from an opening end, a semicircular sealing cap is placed at the other end of the boron nitride crucible to a proper position, the boron nitride crucible is horizontally placed on a baking furnace, the opening end is connected with a vacuum unit, the quartz tube is vacuumized, two welding guns are respectively taken from two sides of the vacuum unit after the vacuum degree reaches the standard, the fire power of the welding guns is adjusted to be consistent initially, then a welding gun opening is placed on the opposite side of the welding position of the quartz tube, the two welding guns continuously move up and down around the circumference of the welding position of the quartz tube, the quartz tube is preheated, after the preheating effect is achieved, two welding gun valves are synchronously and gradually increased, the fire power is increased gradually, the two welding guns continuously and rapidly do semicircular motion around the quartz tube, after the quartz tube is softened, the outer softened quartz tube is pressed onto the quartz cap by large air pressure due to the inner part is in a vacuum state, the softened quartz tube is integrated with the quartz cap, and after the whole circumference is finished, the quartz tube is tightly combined with the quartz tube, a complete welding path is formed until the materials are sealed and the vacuum effect of the materials is achieved.

However, in the current process, because manual welding is adopted, the operation requirement on personnel is very high, two persons are required to cooperate with each other, the moving speed of the welding gun around the quartz tube is controlled to be consistent with the firepower of the welding gun by extremely high tacit degree, and even for skilled old staff, the welding cannot reach 100 percent of qualification. Therefore, the current welding mode and welding device mainly have the following three disadvantages: 1. the quartz tube can not be ensured to be softened simultaneously in the welding process, and great stress exists around the welding bead after welding, so that the quartz tube is cracked in the welding process, or cracks appear around the welding bead of the quartz tube after the quartz tube is placed for a period of time, and the quartz tube is cracked even after being placed into a single crystal furnace, thereby causing great loss to equipment and raw materials. 2. The welding gun needs to be manually held in the welding process, the welding temperature is about 1200 ℃, the temperature of heat radiation to the periphery of a human body is about 100 ℃, and even if high-temperature-resistant labor protection products are worn, the radiation temperature of the human body is very high, so that the human body can be adversely affected by long-time welding. 3. Because the welding is carried out horizontally, the quartz cap is tightly attached to the lower edge of the quartz tube when the quartz cap is placed horizontally, the distance between the quartz cap and the upper edge is large, a deep welding bead is easily formed on the upper part in the welding process, and the lower part of the quartz cap may not have a sunken welding bead.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model aims at providing an indium phosphide single crystal quartz capsule automation of welding device, can be automatic weld the quartz capsule to promote the welding quality of quartz capsule.

The utility model discloses an above-mentioned technical problem is solved to following technical means:

the utility model provides an automatic welding set of indium phosphide single crystal quartz capsule, includes frame, evacuation unit and welder, fixed mounting has the quartz capsule support frame in the frame, evacuation unit intercommunication has the sealed lid of quartz capsule, fixed mounting has initiative slewing mechanism and driven slewing mechanism in the frame, initiative slewing mechanism and driven slewing mechanism transmission are connected, initiative slewing mechanism electricity is connected with the controller, welder's quantity is for being greater than a plurality of 1, and is a plurality of welder equidistant installs on driven slewing mechanism, the equal directional same center in every welder's export.

Further, the active transmission mechanism comprises a servo motor, the servo motor is fixedly installed on the rack and electrically connected with the controller, and a gear is fixedly installed on an output shaft of the servo motor; the driven rotating mechanism comprises a rolling bearing, gear teeth are arranged on an inner ring of the rolling bearing and are meshed with the gear, an outer ring of the rolling bearing is fixedly connected with the rack, and the welding gun is fixedly connected to an inner ring of the rolling bearing. So, when using, the controller control servo motor is rotatory, and servo motor rethread gear drives antifriction bearing's inner circle rotatory, and then drives welder rotatory, and welder is rotating automatic welds the quartz capsule, and whole process automation operates, need not personnel rotatory welder.

Further, a temperature thermocouple is installed on a muzzle of the welding gun, the welding gun is communicated with an air supply mechanism through an air supply pipe, an electromagnetic valve is installed on the air supply pipe in a communicated mode, and the temperature thermocouple and the electromagnetic valve are electrically connected through a controller. The temperature thermocouple can measure the welding temperature of the welding torch, and can feed back to the controller when the temperature is too high or too low, and the controller controls the opening and closing size of the electromagnetic valve, so that the accurate control of the welding temperature is realized.

Furthermore, a fluorine rubber sealing ring is arranged on the inner wall of the quartz tube sealing cover. After the quartz tube sealing cover covers the quartz tube, the fluororubber sealing ring is arranged between the quartz tube sealing cover and the quartz tube sealing cover, so that the sealing effect is better.

Furthermore, the number of the welding guns is four, and the length of the gear teeth of the inner ring of the rolling bearing is one fourth of the total circumference of the inner ring of the rolling bearing. So, when the welding, can utilize servo motor at the uniform velocity quarter circular motion, the reciprocal welding constantly guarantees the homogeneity of welding quartz capsule circumference, and four welder weld the quartz capsule simultaneously, also can promote welding efficiency.

Furthermore, a soft vacuum tube is communicated between the vacuum pumping unit and the quartz tube sealing cover. The soft vacuum-pumping tube is arranged, so that quartz tubes with different heights can be covered and sealed.

Furthermore, a first through hole and a second through hole are formed in the quartz tube supporting frame, the second through hole is located below the first through hole, and the diameter of the first through hole is larger than that of the first through hole. Because the end of the quartz tube is in a funnel shape, the quartz tube can be stably placed on the quartz tube support frame due to the arrangement of the first through hole and the second through hole.

Furthermore, a support plate is arranged on the machine frame, and the servo motor is vertically and fixedly installed on the support plate. So can with carry out stable support to servo motor, the gear meshing of the last gear of servo motor and the interior ring gear tooth of antifriction bearing of also being convenient for.

The utility model has the advantages that:

1. the utility model discloses a servo motor drives welder and is reciprocating motion in the circumference of quartz capsule, and welder when welding the quartz capsule, can be so that the homogeneity that quartz capsule welding circumference was heated to make quartz capsule soften simultaneously everywhere, welding quality is better.

2. The utility model discloses an automatic reciprocal spin welding of controller control servo motor utilizes the temperature thermocouple to detect the temperature of welder tip for the temperature is stable during the welding, realizes welded automation.

3. The utility model discloses a quartz capsule can be vertical places and welds on the quartz capsule support frame to equipment vibration may cause the problem that the material falls out the crucible when having avoided evacuation and welding, has also avoided the inhomogeneous problem in gap between quartz cap and the quartz capsule, makes quartz capsule stress distribution even, has reduced the probability of quartz capsule split pipe.

Drawings

FIG. 1 is a schematic structural view of an automated welding device for an indium phosphide single-crystal quartz tube according to the present invention;

fig. 2 is a sectional view of the rolling bearing of fig. 1.

The device comprises a frame 1, a vacuum pump 2, a welding gun 3, a quartz tube support frame 4, a first through hole 5, a second through hole 6, a quartz tube sealing cover 7, a fluorine rubber sealing ring 8, a vacuum tube 9, a servo motor 10, a gas pipe 11, a controller 12, a gear 13, a rolling bearing 14, a gear tooth 15, a temperature thermocouple 16, a gas supply tank 17, an electromagnetic valve 18, a quartz tube 19 and a quartz cap 20.

Detailed Description

The present invention will be described in detail below with reference to the accompanying drawings:

as shown in fig. 1 to 2: the utility model provides an automatic welding set of indium phosphide single crystal quartz capsule, includes frame 1, evacuation pump 2 and four welder 3, fixed mounting has quartz capsule support frame 4 on the bottom of frame 1, is provided with first through-hole 5 and second through-hole 6 on the quartz capsule support frame 4, and second through-hole 6 is located the below of first through-hole 5, and the diameter of first through-hole 5 is greater than the diameter of first through-hole 5.

The vacuum-pumping pump 2 is communicated with a quartz tube sealing cover 7, a nut for fastening is arranged on the quartz tube sealing cover 7, a fluorine rubber sealing ring 8 is arranged on the inner wall of the quartz tube sealing cover 7 in a cushioning manner, a soft vacuum-pumping pipe 9 is communicated between the vacuum-pumping pump 2 and the quartz tube sealing cover 7, the frame 1 is fixedly provided with a driving rotating mechanism and a driven rotating mechanism, the four welding guns 3 are arranged on the driven rotating mechanism at equal intervals, and the four welding guns 3 point to the quartz tube 19 at equal distances.

The driving transmission mechanism comprises a servo motor 10, a support plate is arranged on the rack 1, the servo motor 10 is vertically and fixedly arranged on the support plate, the servo motor 10 is electrically connected with a controller 12, and a gear 13 is fixedly arranged on an output shaft of the servo motor 10; the driven rotating mechanism comprises a rolling bearing 14, gear teeth 15 are arranged on an inner ring of the rolling bearing 14, the length of the gear teeth 15 is one fourth of the total circumference of the inner ring of the rolling bearing 14, the gear teeth 15 are meshed with a gear 13, an outer ring of the rolling bearing 14 is fixedly connected with the rack 1, and the welding gun 3 is fixedly connected to an inner ring of the rolling bearing 14.

A temperature thermocouple 16 is arranged on the muzzle of the welding gun 3, the welding gun 3 is communicated with an air supply tank 17 through an air pipe 11, an electromagnetic valve 18 is communicated and arranged on the air pipe, and the temperature thermocouple 16 and the electromagnetic valve 18 are both electrically connected with the controller 12.

The utility model discloses a use method as follows:

before welding, polycrystalline materials, boron oxide, red phosphorus and the like are firstly put into a boron nitride crucible, then the boron nitride crucible is entirely put into a quartz tube 19, a quartz cap 20 is put on the quartz tube 19, the boron nitride crucible is placed in a first through hole 5 and a second through hole 6 on a quartz tube support frame 4, the quartz tube 19 is vertical, the open end of the quartz tube 19 faces upwards, then a quartz tube sealing cover 7 is covered on the quartz tube 19, and after the nut is fastened, vacuumizing is started. The welding time and temperature of the quartz tube 19 are set by the controller 12, the preheating, welding, annealing and temperature of the welding process are set on the controller 12, the connection status of the temperature thermocouple 16 and the electromagnetic valve 18 is checked after the setting is finished, and the welding is prepared after the confirmation of no error.

In the preheating stage, the controller 12 controls to start the servo motor 10, the gear 13 on the servo motor 10 is meshed with the gear teeth 15 to drive the rolling bearing 14 to do one-fourth of circular reciprocating motion, so that the muzzle of the welding gun 3 is driven to do one-fourth of circular reciprocating motion around the quartz tube 19, the muzzle of the welding gun 3 is ignited by using an external igniter, the quartz tube 19 needs to be gradually heated up along with the increase of time, the firepower of the welding gun 3 is gradually increased, and the preheating process is ended; in the welding stage, the firepower of the welding gun 3 is kept unchanged, after a period of time, the quartz tube 19 begins to glow red and turns white from red, the quartz tube 19 is softened, the quartz tube 19 is in a vacuum state, the outside is atmospheric pressure, the quartz tube 19 is softened and then is extruded by atmospheric pressure, the softened quartz tube is sunken inwards to form a welding path with the depth of about 1-2 mm, and the high temperature is kept for a period of time after the welding path is formed, so that the thermal stress of the welding path is released. During annealing, after a welding bead is completely sealed, the firepower of the welding gun 3 is gradually reduced along with time, the temperature of the quartz tube 19 is slowly reduced, the stress of the quartz tube 19 is gradually released, the quartz tube 19 is moved away after the temperature is reduced to a certain temperature, the quartz tube 19 is placed in a heat preservation chamber for heat preservation for ten hours, and after cooling, the whole welding process is finished after the quartz tube 19 is checked to be free of abnormity.

Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art will understand that the present invention can be modified or replaced with other embodiments without departing from the spirit and scope of the present invention, which should be construed as limited only by the appended claims. The technology, shape and construction parts which are not described in detail in the present invention are all known technology.

Claims

1. The utility model provides an automatic welding set of indium phosphide single crystal quartz capsule, includes frame, evacuation unit and welder, fixed mounting has quartz capsule support frame, its characterized in that in the frame: vacuumizing unit intercommunication has the sealed lid of quartz capsule, fixed mounting has initiative slewing mechanism and driven slewing mechanism in the frame, initiative slewing mechanism and driven slewing mechanism transmission are connected, the initiative slewing mechanism electricity is connected with the controller, welder's quantity is for being greater than a plurality of 1, and is a plurality of the equidistant installation of welder is on driven slewing mechanism, and every welder's export is directional same center all.

2. The automatic welding device for the indium phosphide single-crystal quartz tube according to claim 1, characterized in that: the driving rotating mechanism comprises a servo motor, the servo motor is fixedly arranged on the rack and electrically connected with the controller, and a gear is fixedly arranged on an output shaft of the servo motor; the driven rotating mechanism comprises a rolling bearing, gear teeth are arranged on an inner ring of the rolling bearing and are meshed with the gear, an outer ring of the rolling bearing is fixedly connected with the rack, and the welding gun is fixedly connected to an inner ring of the rolling bearing.

3. The automatic welding device of the indium phosphide single-crystal quartz tube according to claim 1, characterized in that: the welding gun is characterized in that a temperature thermocouple is installed on a gun mouth of the welding gun, the welding gun is communicated with an air supply mechanism through an air supply pipe, an electromagnetic valve is installed on the air supply pipe in a communicated mode, and the temperature thermocouple and the electromagnetic valve are both electrically connected with the controller.

4. The automated welding device for the indium phosphide single-crystal quartz tube as set forth in any one of claims 1 to 3, wherein: and a fluororubber sealing ring is arranged on the inner wall of the quartz tube sealing cover.

5. The automatic welding device of the indium phosphide single-crystal quartz tube according to claim 2, characterized in that: the number of the welding guns is four, and the length of the gear teeth of the inner ring of the rolling bearing is one fourth of the total circumference of the inner ring of the rolling bearing.

6. The automatic welding device of the indium phosphide single-crystal quartz tube according to claim 5, characterized in that: and a soft vacuumizing pipe is communicated between the vacuumizing unit and the quartz tube sealing cover.

7. The automatic welding device of the indium phosphide single-crystal quartz tube according to claim 1, characterized in that: the quartz tube support frame is provided with a first through hole and a second through hole, the second through hole is located below the first through hole, and the diameter of the first through hole is larger than that of the second through hole.

8. The automatic welding device for the indium phosphide single-crystal quartz tube according to claim 2, characterized in that: the rack is provided with a support plate, and the servo motor is vertically and fixedly installed on the support plate.