CN210657215U - Single crystal furnace thermal field cooling device - Google Patents
Single crystal furnace thermal field cooling device Download PDFInfo
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- CN210657215U CN210657215U CN201921411027.4U CN201921411027U CN210657215U CN 210657215 U CN210657215 U CN 210657215U CN 201921411027 U CN201921411027 U CN 201921411027U CN 210657215 U CN210657215 U CN 210657215U
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Abstract
The utility model discloses a single crystal furnace thermal field cooling device, which comprises a transverse heat-preservation support ring and at least two cooling lifting devices, wherein each cooling lifting device comprises a supporting plate, a support connecting rod, a corrugated hose and a lifting base; the transverse heat-insulating support ring is arranged between the middle carbon-based heat-insulating cylinder and the lower carbon-based heat-insulating cylinder and is connected with the bottom of the middle heat-insulating support cylinder; one end of the supporting plate is connected with the transverse heat-preservation supporting ring, and the other end of the supporting plate is connected with the top end of the supporting connecting rod; the supporting connecting rod is positioned in a vacuum cavity between the carbon-based heat-insulating cylinder and the furnace cylinder, and the other end of the supporting connecting rod penetrates out of the furnace bottom plate and is connected with the lifting base; the corrugated hose is sleeved on the periphery of the support connecting rod; the inside of the corrugated hose is in a vacuum state; the length of corrugated hose can stretch out and draw back, and the height of lift base can go up and down. The cooling time of the thermal field can be shortened by more than 50%, the temperature of the thermal field can be controlled to be 100-200 ℃ when the furnace is disassembled, the oxidation of the thermal field is weakened, the service life of the graphite piece is prolonged, and the production cost is reduced.
Description
Technical Field
The invention relates to the photovoltaic manufacturing industry, in particular to a thermal field cooling device of a single crystal furnace.
Background
After the production of the existing single crystal furnace is finished, the thermal field needs to be cooled, cleaned and put into the furnace again. However, the existing cooling method has the following disadvantages to be solved:
1. in the existing single crystal thermal field, the whole thermal field structure is completely coated by carbon-based heat-insulating materials, so that the heat loss in the whole production process is ensured to be as small as possible, and the temperature of the whole thermal field environment is ensured to be constant. After the furnace is shut down and the heating body is closed, the waste heat in the thermal field component can be transferred and radiated to the furnace bottom plate, the furnace cylinder, the furnace cover, the auxiliary chamber and the like only by the natural heat of the heat-insulating material, and then the heat on the surfaces of the furnace bottom plate, the furnace cylinder, the furnace cover, the auxiliary chamber and the like is taken away by circulating water, so that the heat is slowly dissipated, the natural cooling is needed for 6-12 hours, the cooling waiting time is long, and the production efficiency is low.
2. After natural cooling for 6-12 hours, the temperature of the thermal field is still high and is about 300-400 degrees. When the furnace is disassembled, the thermal field component is easy to generate local oxidation due to high temperature, the thermal field aging speed is high, the service life of the graphite piece is short, and the production cost is high.
Disclosure of Invention
The invention aims to solve the technical problem of the prior art and provides a single crystal furnace thermal field cooling device, which can shorten the cooling time of a thermal field by more than 50 percent, control the temperature of the thermal field at 100-200 ℃ when the furnace is removed, weaken the oxidation of the thermal field, prolong the service life of a graphite piece and reduce the production cost.
In order to solve the technical problems, the invention adopts the technical scheme that:
a single crystal furnace thermal field cooling device comprises a transverse heat-preservation support ring and at least two cooling lifting devices, wherein each cooling lifting device comprises a supporting plate, a support connecting rod, a corrugated hose and a lifting base.
The Czochralski single crystal furnace comprises a furnace cylinder, a furnace cover, a furnace bottom plate, a carbon-based heat preservation cylinder and a carbon-based support cylinder.
The furnace cover is arranged at the top of the furnace cylinder, the furnace bottom plate is arranged at the bottom of the furnace cylinder, and the furnace cylinder, the furnace cover and the furnace bottom plate are enclosed together to form a closed vacuum cavity.
The carbon-based heat-insulating cylinder is coaxially sleeved on the inner side of the furnace cylinder and sequentially comprises an upper carbon-based heat-insulating cylinder, a middle carbon-based heat-insulating cylinder and a lower carbon-based heat-insulating cylinder from top to bottom.
The carbon-based supporting cylinder is coaxially arranged on the inner side of the carbon-based heat-insulating cylinder, and sequentially comprises an upper heat-insulating supporting cylinder, a middle heat-insulating supporting cylinder and a lower heat-insulating supporting cylinder from top to bottom, and is respectively used for supporting the upper carbon-based heat-insulating cylinder, the middle carbon-based heat-insulating cylinder and the lower carbon-based heat-insulating cylinder.
The transverse heat-preservation support ring is arranged at the bottom of the middle carbon-based heat-preservation cylinder and is connected with the bottom of the middle heat-preservation support cylinder. One end of the supporting plate is connected with the transverse heat-preservation supporting ring, and the other end of the supporting plate is connected with the top end of the supporting connecting rod. The support connecting rod is vertically arranged and is positioned in a vacuum cavity between the carbon-based heat-insulating cylinder and the furnace cylinder, and the other end of the support connecting rod penetrates out of the furnace bottom plate and is connected with the lifting base.
The corrugated hose is sleeved on the periphery of the support connecting rod between the furnace bottom plate and the lifting base, the top of the corrugated hose is in sealing connection with the furnace bottom plate, and the bottom of the corrugated hose is in sealing connection with the lifting base. The corrugated hose is in a vacuum state.
The length of corrugated hose can stretch out and draw back, and the height of lift base can go up and down.
The layer board is connected for crisscross overlapping with horizontal heat preservation support ring, and lower part carbon base heat preservation section of thick bamboo top is provided with the layer board standing groove, and the layer board can be placed in the layer board standing groove.
The corrugated hose is a welded corrugated hose.
The maximum stretched length of the corrugated hose is greater than 300mm and the minimum compressed length of the corrugated hose is less than 100 mm.
The supporting plate is horizontally arranged.
The lifting base is driven by the lifting driving device to realize height lifting, the lifting driving device is a screw rod driving device and comprises a screw rod, a screw rod sleeve and a motor, the top end of the screw rod is installed at the bottom of the furnace bottom plate, the screw rod sleeve is sleeved on the screw rod in a threaded mode, the screw rod sleeve is fixedly connected with the lifting base, and the motor drives the screw rod to rotate.
The invention has the following beneficial effects:
1. the middle carbon-based heat preservation cylinder is lifted upwards, so that heat in the thermal field is directly radiated to the furnace cylinder, the temperature of the thermal field is reduced at an accelerated speed, the cooling time of the thermal field can be shortened by over 50 percent, and when the furnace is disassembled, the temperature of the thermal field can be controlled to be 100-200 ℃ and lower than that of the thermal field under natural cooling, the oxidation of the thermal field is weakened, the service life of a graphite piece is prolonged, and the production cost is reduced.
2. The corrugated hose can ensure that the supporting connecting rod is always in a vacuum environment in the lifting process, so that the gas such as air containing oxygen outside is prevented from entering a vacuum cavity of the Czochralski single crystal furnace by virtue of the supporting connecting rod; thereby avoiding thermal field oxidation, prolonging the service life of the graphite piece and reducing the production cost.
Drawings
FIG. 1 is a schematic diagram of a single crystal furnace thermal field cooling device (without a lifting driving device) before jacking.
FIG. 2 is a schematic diagram of a single crystal furnace thermal field cooling device (without a lifting driving device) after being lifted.
Fig. 3 shows a schematic diagram of a specific example of the elevating driving device.
Among them are:
10. a carbon-based heat-insulating cylinder; 11. an upper carbon-based heat-insulating cylinder; 12. a middle carbon-based heat preservation cylinder; 13. a lower carbon-based heat-insulating cylinder;
20. a carbon-based support cylinder; 21. an upper carbon-based support cylinder; 22. a middle carbon-based support cylinder; 23. a lower carbon-based support cylinder;
31. a vertical heating element; 32. a lateral heating element;
40. a cooling lifting device;
41. a transverse heat-preserving support ring; 42. a support plate; 43. a support link; 44. a corrugated hose; 45. a lifting base;
50. a lift drive; 51. mounting a plate; 52. a fixing plate; 53. a screw rod; 531. an angular contact bearing; 532. a bearing fixing seat; 54. a screw rod sleeve; 55. a worm gear reducer; 56. a motor;
60. a vacuum chamber; 61. a furnace barrel; 62. a furnace floor; 63. a furnace cover;
70. a crucible; 71. a middle shaft;
80. a guide shell.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific preferred embodiments.
In the description of the present invention, it is to be understood that the terms "left side", "right side", "upper part", "lower part", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and that "first", "second", etc., do not represent an important degree of the component parts, and thus are not to be construed as limiting the present invention. The specific dimensions used in the present example are only for illustrating the technical solution and do not limit the scope of protection of the present invention.
As shown in FIGS. 1 and 2, the Czochralski single crystal furnace comprises a furnace cylinder 61, a furnace cover 63, a furnace bottom plate 62, a carbon-based heat preservation cylinder 10, a carbon-based support cylinder 20, a heating body, a thermal field rapid cooling device, a crucible 70 and a guide cylinder 80.
The furnace cover is arranged at the top of the furnace cylinder, the furnace bottom plate is arranged at the bottom of the furnace cylinder, and the furnace cylinder, the furnace cover and the furnace bottom plate are enclosed together to form a closed vacuum cavity 60.
In the process of producing the single crystal, the vacuum cavity is evacuated through a vacuum pump arranged at the bottom, protective gas is introduced into the top end of the vacuum cavity, and the whole process is finished under the negative pressure state with the protective gas. The setting of the vacuum pump and the vacuum pumping process are mature prior art.
The furnace bottom plate is used for supporting the whole thermal field component to keep coaxial, and the furnace barrel, the furnace bottom plate and the outer side of the furnace cover are preferably provided with a circulating water cooling device.
The carbon-based heat-preserving cylinder is coaxially sleeved on the inner side of the furnace cylinder and sequentially comprises an upper carbon-based heat-preserving cylinder 11, a middle carbon-based heat-preserving cylinder 12 and a lower carbon-based heat-preserving cylinder 13 from top to bottom, and a supporting plate placing groove 131 is formed in the top of the lower carbon-based heat-preserving cylinder. The outer wall surface of the carbon-based heat-insulating cylinder is preferably wrapped with a carbon-based heat-insulating soft felt.
The upper carbon-based heat-insulating cylinder 11, the middle carbon-based heat-insulating cylinder 12 and the lower carbon-based heat-insulating cylinder 13 are all carbon-based heat-insulating materials, and particularly preferably PAN-based graphite felt or viscose-based high-efficiency felt, so that heat loss in the whole single crystal production process is reduced as little as possible, and the temperature constancy of the whole thermal field environment is ensured.
The carbon-based supporting cylinder is coaxially arranged on the inner side of the carbon-based heat-insulating cylinder, and comprises an upper heat-insulating supporting cylinder 21, a middle heat-insulating supporting cylinder 22 and a lower heat-insulating supporting cylinder 23 from top to bottom if the inner wall surface is arranged on the inner side of the carbon-based heat-insulating cylinder, and the upper heat-insulating supporting cylinder, the middle heat-insulating supporting cylinder and the lower heat-insulating supporting cylinder are respectively used for supporting the.
The materials of the upper heat-insulating support cylinder 21, the middle heat-insulating support cylinder 22 and the lower heat-insulating support cylinder 23 are preferably isostatic graphite or carbon/carbon composite materials.
The bottom of the crucible 70 is connected with a central shaft 71.
The heating bodies comprise vertical heating bodies 31 and horizontal heating bodies 32, the vertical heating bodies are uniformly distributed on the outer side of the circumference of the crucible, and the horizontal emitting bodies are arranged on the horizontal plane at the bottom of the crucible. The specific arrangement mode of the heating element is mature prior art, and is not described herein again.
In the process of producing the single crystal, the vertical heating element 31 and the horizontal heating element 32 are respectively started, the output power of the heating elements is adjusted to enable the surface temperature of the melt to be close to the freezing point, then a seed crystal with a fixed crystal orientation is contacted to enable the melt to be directionally crystallized, and the seed crystal is given a speed vertical to the crystallization surface to be pulled upwards, so that the single crystal with a certain crystal orientation is produced.
As shown in figures 1 and 2, the single crystal furnace thermal field cooling device comprises a transverse heat-preservation support ring 41 and at least two cooling lifting devices 40.
In the present application, the cooling lifting device is preferably two and symmetrically arranged. Alternatively, three, four or more may be used, all of which are within the scope of the present application.
Each cooling lift device includes a pallet 42, a support link 43, a bellows 44, a lift base 45, and a lift drive 50.
The horizontal heat preservation support ring sets up the bottom at middle part carbon back heat preservation section of thick bamboo to be connected with middle part heat preservation support bobbin base portion, the internal diameter of horizontal heat preservation support ring equals with the internal diameter of middle part carbon back heat preservation section of thick bamboo, and the external diameter of horizontal heat preservation support ring is preferred to be less than the external diameter of middle part carbon back heat preservation section of thick bamboo, and further preferred is 1/2~2/3 of middle part carbon back heat preservation section of thick bamboo external diameter. This prevents the pallet or the like from being melted by the high temperature of the thermal field.
Further, the transverse heat-insulating support ring is preferably integrally arranged with the middle heat-insulating support barrel.
The supporting plate is preferably horizontally arranged and can be placed in the supporting plate placing groove. During the generation process of the single crystal, the connecting parts of the middle heat-preservation supporting cylinder 22 and the lower heat-preservation supporting cylinder 23 can be mutually attached, so that the precision of the temperature of the thermal field is not influenced.
One end of the supporting plate is connected with the transverse heat-preservation supporting ring, preferably in a staggered and overlapped connection; the other end is connected with the top end of the supporting connecting rod. The support connecting rod is vertically arranged and is positioned in a vacuum cavity between the carbon-based heat-insulating cylinder and the furnace cylinder, and the other end of the support connecting rod penetrates out of the furnace bottom plate and is connected with the lifting base.
The corrugated hose is sleeved on the periphery of the support connecting rod between the furnace bottom plate and the lifting base, the top of the corrugated hose is in sealing connection with the furnace bottom plate, and the bottom of the corrugated hose is in sealing connection with the lifting base.
The corrugated hose is in a vacuum state.
The evacuation of the bellows is preferably carried out in two preferred ways:
1. the supporting connecting rod is connected with the furnace bottom plate in a sealing and sliding mode, the vacuum cavities in the corrugated hoses are not communicated with the vacuum cavity 60, each corrugated hose is provided with a vacuum interface, and vacuumizing is performed through a vacuum pump.
2. The support connecting rod is connected with the furnace bottom plate in a sliding mode, a gap is formed between the support connecting rod and the furnace bottom plate, the vacuum cavities in the corrugated hoses are communicated with the vacuum cavity 60, and the vacuum cavities 60 are vacuumized to achieve vacuumizing in the corrugated hoses.
Further, the corrugated tube is preferably a welded corrugated tube. The length of the corrugated hose can be telescopic, the maximum stretching length of the corrugated hose is preferably more than 300mm, and the minimum compression length of the corrugated hose is preferably less than 100 mm.
The lifting bases are preferably driven by the lifting driving device 50 to realize height lifting, and the number of the lifting driving devices 50 can be one or equal to that of the lifting bases.
As shown in fig. 3, the elevation driving means is preferably a lead screw driving means, and includes a lead screw 53, a lead screw sleeve 54, and a motor 56.
The top end of the screw rod is preferably arranged at the bottom of the furnace bottom plate through a mounting plate 51, a screw rod sleeve is sleeved on the screw rod in a threaded mode, a screw rod sleeve is preferably a screw rod copper sleeve, and the screw rod sleeve is fixedly connected with the lifting base.
The motor drive lead screw rotates, and concrete connected mode does: the top end of the screw rod is mounted on the mounting plate or the furnace bottom plate through an angular contact bearing 531, the bottom end of the screw rod is mounted on a bearing fixing seat 532 through the angular contact bearing 531, and the bearing fixing seat is preferably hung at the bottom of the furnace bottom plate through a fixing plate.
The motor is preferably a worm gear motor, the motor 56 and the worm gear reducer 55 are preferably mounted on the fixing plate, an output shaft of the motor is connected with the worm gear reducer 55, and the worm gear reducer 55 drives the screw rod to rotate.
Further, in this application, lift drive 50 only sets up one, and the lift base among all cooling elevating gear all is connected through the shaft coupling, and like this, the lead screw will drive all corrugated hose synchronous stretching or compression, and all support connecting rods go up and down in step.
Of course, the lifting driving device 50 may alternatively be a cylinder drive or a hydraulic drive, etc. in the prior art, and is within the scope of the present application.
In the normal production process of single crystals, the corrugated hose is in a stretched state, as shown in fig. 1, the transverse heat-insulating support ring is positioned between the middle carbon-based heat-insulating cylinder and the lower carbon-based heat-insulating cylinder, so that the temperature of the whole thermal field environment is ensured to be constant in the production process.
When the production is finished and the thermal field needs to be cooled, the following cooling method is adopted to carry out rapid cooling on the thermal field.
A method for rapidly cooling a thermal field of a Czochralski single crystal furnace comprises the following steps.
Step 1, vacuumizing a corrugated hose: and vacuumizing each corrugated hose so that each support connecting rod is completely in a vacuum environment.
Step 2, jacking the middle carbon-based heat-insulating cylinder: the lifting driving device works to drive the lifting base and the supporting connecting rod to move upwards synchronously, and the supporting plate and the transverse heat-insulating supporting ring drive the middle carbon-based heat-insulating cylinder and the upper carbon-based heat-insulating cylinder which are positioned above the supporting plate to lift upwards under the jacking of the supporting connecting rod. At this time, the bellows tube is gradually compressed as shown in fig. 2.
The synchronous rising of support connecting rod and layer board because the layer board links to each other with horizontal heat preservation support ring for horizontal heat preservation support ring synchronous jacking, the carbon base that the synchronous motion above keeps warm and a carbon base support section of thick bamboo rises, makes the inside thermal field part heat that still is in high temperature state can direct radiation to a stove section of thick bamboo, with higher speed thermal field temperature decline.
Step 3, determining the jacking height of the middle carbon-based heat-insulating cylinder: according to the temperature and the radius of a thermal field in a Czochralski method single crystal furnace, the lifting speed and the lifting height of a lifting driving device are determined, and further the jacking height of the middle carbon-based heat-insulating cylinder is determined.
In the step 3, the jacking height of the middle carbon-based heat-insulating cylinder is preferably 200-400 mm.
Further, after the middle carbon-based heat preservation cylinder is jacked to a determined height, the temperature of the thermal field is reduced to 100-200 ℃ within 3-6 h.
Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the details of the embodiments, and various equivalent modifications can be made within the technical spirit of the present invention, and the scope of the present invention is also within the scope of the present invention.
Claims (6)
1. A single crystal furnace thermal field cooling device is characterized in that: the cooling device comprises a transverse heat-preservation support ring and at least two cooling lifting devices, wherein each cooling lifting device comprises a supporting plate, a support connecting rod, a corrugated hose and a lifting base;
the Czochralski method single crystal furnace comprises a furnace cylinder, a furnace cover, a furnace bottom plate, a carbon-based heat preservation cylinder and a carbon-based support cylinder;
the furnace cover is arranged at the top of the furnace cylinder, the furnace bottom plate is positioned at the bottom of the furnace cylinder, and the furnace cylinder, the furnace cover and the furnace bottom plate are enclosed together to form a closed vacuum cavity;
the carbon-based heat-insulating cylinder is coaxially sleeved on the inner side of the furnace cylinder and sequentially comprises an upper carbon-based heat-insulating cylinder, a middle carbon-based heat-insulating cylinder and a lower carbon-based heat-insulating cylinder from top to bottom;
the carbon-based supporting cylinder is coaxially arranged on the inner side of the carbon-based heat-insulating cylinder, and sequentially comprises an upper heat-insulating supporting cylinder, a middle heat-insulating supporting cylinder and a lower heat-insulating supporting cylinder from top to bottom, and is respectively used for supporting the upper carbon-based heat-insulating cylinder, the middle carbon-based heat-insulating cylinder and the lower carbon-based heat-insulating cylinder;
the transverse heat-preservation support ring is arranged at the bottom of the middle carbon-based heat-preservation cylinder and is connected with the bottom of the middle heat-preservation support cylinder; one end of the supporting plate is connected with the transverse heat-preservation supporting ring, and the other end of the supporting plate is connected with the top end of the supporting connecting rod; the supporting connecting rod is vertically arranged and is positioned in a vacuum cavity between the carbon-based heat-insulating cylinder and the furnace cylinder, and the other end of the supporting connecting rod penetrates out of the furnace bottom plate and is connected with the lifting base;
the corrugated hose is sleeved on the periphery of the support connecting rod between the furnace bottom plate and the lifting base, the top of the corrugated hose is hermetically connected with the furnace bottom plate, and the bottom of the corrugated hose is hermetically connected with the lifting base; the inside of the corrugated hose is in a vacuum state;
the length of corrugated hose can stretch out and draw back, and the height of lift base can go up and down.
2. The single crystal furnace thermal field cooling device of claim 1, characterized in that: the layer board is connected for crisscross overlapping with horizontal heat preservation support ring, and lower part carbon base heat preservation section of thick bamboo top is provided with the layer board standing groove, and the layer board can be placed in the layer board standing groove.
3. The single crystal furnace thermal field cooling device of claim 1, characterized in that: the corrugated hose is a welded corrugated hose.
4. The single crystal furnace thermal field cooling device according to claim 1 or 3, characterized in that: the maximum stretched length of the corrugated hose is greater than 300mm and the minimum compressed length of the corrugated hose is less than 100 mm.
5. The single crystal furnace thermal field cooling device of claim 1, characterized in that: the supporting plate is horizontally arranged.
6. The single crystal furnace thermal field cooling device of claim 1, characterized in that: the lifting base is driven by the lifting driving device to realize height lifting, the lifting driving device is a screw rod driving device and comprises a screw rod, a screw rod sleeve and a motor, the top end of the screw rod is installed at the bottom of the furnace bottom plate, the screw rod sleeve is sleeved on the screw rod in a threaded mode, the screw rod sleeve is fixedly connected with the lifting base, and the motor drives the screw rod to rotate.
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| CN201921411027.4U CN210657215U (en) | 2019-08-28 | 2019-08-28 | Single crystal furnace thermal field cooling device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111996586A (en) * | 2020-07-16 | 2020-11-27 | 大同新成新材料股份有限公司 | Semiconductor graphite thermal field of cylinder type single crystal furnace |
| CN112030223A (en) * | 2020-07-13 | 2020-12-04 | 大同新成新材料股份有限公司 | Semiconductor graphite crucible for thermal field of single crystal furnace and use method thereof |
| CN115305564A (en) * | 2022-08-01 | 2022-11-08 | 晶澳太阳能有限公司 | Single crystal furnace and monocrystalline silicon preparation method |
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2019
- 2019-08-28 CN CN201921411027.4U patent/CN210657215U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030223A (en) * | 2020-07-13 | 2020-12-04 | 大同新成新材料股份有限公司 | Semiconductor graphite crucible for thermal field of single crystal furnace and use method thereof |
| CN111996586A (en) * | 2020-07-16 | 2020-11-27 | 大同新成新材料股份有限公司 | Semiconductor graphite thermal field of cylinder type single crystal furnace |
| CN115305564A (en) * | 2022-08-01 | 2022-11-08 | 晶澳太阳能有限公司 | Single crystal furnace and monocrystalline silicon preparation method |
| CN115305564B (en) * | 2022-08-01 | 2023-09-01 | 晶澳太阳能有限公司 | Single crystal furnace and single crystal silicon preparation method |
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