CN219195219U - Crystal growth furnace - Google Patents
Crystal growth furnace Download PDFInfo
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- CN219195219U CN219195219U CN202223492535.4U CN202223492535U CN219195219U CN 219195219 U CN219195219 U CN 219195219U CN 202223492535 U CN202223492535 U CN 202223492535U CN 219195219 U CN219195219 U CN 219195219U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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Abstract
The utility model discloses a crystal growing furnace, which comprises a furnace body, a thermal field, an induction coil, a large furnace cover, a small furnace cover and a lifting module, wherein the furnace body is fixed on a frame, the thermal field is placed on a thermal field support column, the thermal field support column is placed on the small furnace cover and can move along with the small furnace cover, the induction coil is fixed on the coil support column, the coil support column is placed on the large furnace cover, and an electrode is led out from the large furnace cover and can move along with the large furnace cover. The big furnace cover is fixed with the furnace body by connecting screws, and the lifting module is fixed with the frame. When loading and unloading, the lifting module drives the small furnace cover to realize the reciprocating motion of the small furnace cover and the thermal field. When the induction coil is overhauled, the connecting screw can be loosened, so that the large furnace cover moves along with the small furnace cover.
Description
Technical Field
The utility model relates to the technical field of crystal growth, in particular to a crystal growth furnace.
Background
The induction furnace is widely applied to the field of crystal growth, and the main structure of the induction furnace comprises a furnace body, a furnace cover, an induction power supply, a vacuum system, a gas system and a cooling system. Wherein the furnace body comprises a thermal field and an induction coil, and the thermal field comprises raw materials required by crystal growth.
The existing induction furnace is used for discharging the upper hand tool, and the upper furnace cover is required to be opened for discharging the rear hand tool when the induction furnace is used, so that the induction furnace has the defects that the taking and the discharging are difficult, meanwhile, the invalid design space can be increased by manually taking and discharging structures, and the utilization rate of the space in the furnace is reduced. On the other hand, the induction coil electrode of the existing induction furnace is led out from the side surface of the furnace body, the connection between the induction coil and the induction coil electrode is required to be disconnected during maintenance, and then the induction coil is lifted from the upper part to the outside of the furnace for maintenance.
Aiming at the problems of difficult material taking and discharging and difficult coil maintenance of the crystal growth furnace, a new crystal growth furnace needs to be designed.
Disclosure of Invention
The utility model aims to provide a crystal growth furnace, which adopts a large-small cover discharging type induction furnace, solves the problem of difficult material taking and discharging through a small lifting furnace cover, and improves the maintenance convenience of an induction coil by leading out an induction coil electrode from the lower part of the large furnace cover through the large furnace cover which can be lifted along with the small furnace cover simultaneously and designing the induction coil electrode to move along with the large furnace cover under the condition of not being separated from the induction coil electrode.
In order to achieve the above object, the present utility model provides the following solutions: the utility model provides a crystal growth furnace, which comprises
The furnace body is detachably arranged on the frame, and a thermal field and an induction coil are arranged in the furnace body; and
the thermal field is arranged on the thermal field supporting column, and raw materials required by crystal growth are placed in the thermal field; and
the thermal field support column is arranged on the small furnace cover; and
the induction coil is arranged on the periphery of the thermal field, is arranged on a coil supporting column, and an induction coil electrode is connected with the induction coil; and
the coil support column is arranged on the large furnace cover, and the induction coil electrode is led out from the large furnace cover; and
the lifting module is used for driving the large furnace cover and the small furnace cover to move up and down between the furnace body and the frame.
The furnace body is fixed on the frame, and the thermal field is placed on the thermal field support column, and the thermal field support column is placed on the little bell, can remove along with little bell, and induction coil is fixed on the coil support column, and the coil support column is placed on big bell, and the electrode is drawn forth by big bell, can remove along with big bell. The big furnace cover is fixed with the furnace body by a connecting screw. The lifting module is fixed with the frame.
When loading and unloading, the lifting module drives the small furnace cover to realize the reciprocating motion of the small furnace cover and the thermal field.
When the induction coil is overhauled, the connecting screw can be loosened, so that the large furnace cover moves along with the small furnace cover.
In one embodiment, the top of the large furnace cover is detachably arranged at the bottom of the furnace body through a connecting screw.
In one embodiment, the small furnace cover is arranged at the bottom of the large furnace cover, and the outer diameter of the small furnace cover is larger than the inner diameter of the large furnace cover and smaller than the outer diameter of the large furnace cover.
In one embodiment, a sealing O-shaped ring I is arranged on the small furnace cover at a position contacted with the bottom of the large furnace cover.
In one embodiment, the outer diameter of the large furnace cover is larger than the diameter of the inner cavity of the furnace body, and a second sealing O-shaped ring is arranged at the position, which is in contact with the bottom edge of the furnace body, of the large furnace cover.
In one embodiment, the lifting module comprises a bracket, a linear guide rail, a transmission screw and a lifting motor, wherein the linear guide rail comprises a guide rail and a sliding block, the transmission screw comprises a screw and a nut, the bracket is fixedly connected with the sliding block of the linear guide rail and the nut of the transmission screw, the linear guide rail and the transmission screw are fixedly connected on the frame, and the transmission screw is in power connection with the lifting motor. The rotary motion of the lifting motor is converted into linear motion of the transmission screw nut through the transmission screw rod, so that the bracket is driven to move up and down.
When loading and unloading, the lifting module drives the small furnace cover to drop to the lowest position. At the moment, the thermal field can be removed from the small furnace cover through a tool or manually.
When the induction coil is overhauled, the connecting screw is required to be loosened, so that the big furnace cover is lowered to the bottommost position along with the small furnace cover. Checking whether the coil surface coating is peeled off or damaged, and if so, repairing the coil surface coating on line by using a repairing agent. When the induction coil needs to be repaired, the induction coil is disconnected from the induction coil electrode, and the induction coil can be removed from the large cover for repair through a tool or manually.
Compared with the prior art, the utility model has the following beneficial technical effects:
the utility model relates to a crystal growth furnace, which comprises a furnace body, a thermal field, an induction coil, a large furnace cover, a small furnace cover and a lifting module, wherein the furnace body is fixed on a frame, the thermal field is placed on a thermal field support column, the thermal field support column is placed on the small furnace cover and can move along with the small furnace cover, the induction coil is fixed on the coil support column, the coil support column is placed on the large furnace cover, and an electrode is led out from the large furnace cover and can move along with the large furnace cover. The big furnace cover is fixed with the furnace body by connecting screws, and the lifting module is fixed with the frame. When loading and unloading, the lifting module drives the small furnace cover to realize the reciprocating motion of the small furnace cover and the thermal field. When the induction coil is overhauled, the connecting screw can be loosened, so that the large furnace cover moves along with the small furnace cover.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a prior art crystal growth furnace;
FIG. 2 is a schematic view showing the overall structure of a crystal growing furnace according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram showing the small furnace cover and the thermal field reciprocating motion realized by the small furnace cover driven by the lifting module during loading and unloading;
FIG. 4 is a schematic diagram showing the large furnace cover moving simultaneously with the small furnace cover by loosening the connecting screw when the induction coil is overhauled;
wherein, 1 a frame; 2, lifting the module; sealing the first O-shaped ring; sealing the second O-shaped ring; 5, connecting a screw; a furnace body 6; an induction coil electrode; 8, a thermal field; 9, an induction coil; 10 coil support posts; 11 thermal field support columns; a 12-furnace cover; 13 small furnace covers; 14 an upper furnace cover lifting mechanism; 15, feeding a furnace cover; 16 sealing rings; 17 a material taking platform; 18 brackets; 19 linear guide rails; 20, driving a screw rod; 21 lifting motor.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model aims to provide a crystal growth furnace, which adopts a large-small cover discharging type induction furnace, solves the problem of difficult material taking and discharging through a small lifting furnace cover, and improves the maintenance convenience of an induction coil by leading out an induction coil electrode from the lower part of the large furnace cover through the large furnace cover which can be lifted along with the small furnace cover simultaneously and designing the induction coil electrode to move along with the large furnace cover under the condition of not being separated from the induction coil electrode.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
As shown in FIGS. 2-4, the present utility model provides a crystal growth furnace comprising
The furnace body 6, the furnace body 6 is detachably installed on the frame 1, and a thermal field 8 and an induction coil 9 are arranged in the furnace body 6; and
a thermal field 8, the thermal field 8 is installed on a thermal field supporting column 11, and raw materials required by crystal growth are placed in the thermal field 8; and
a small furnace cover 13, and a thermal field support column 11 is arranged on the small furnace cover 13; and
the induction coil 9 is arranged on the periphery of the thermal field 8, the induction coil 9 is arranged on a coil support column 10, and the induction coil electrode 7 is connected with the induction coil 9; and
a large furnace cover 12, a coil support column 10 is arranged on the large furnace cover 12, and an induction coil electrode 7 is led out from the large furnace cover 12; and
the lifting module 2, the big furnace cover 12 and the small furnace cover 13 are movably arranged on the lifting module 2, and the lifting module 2 is used for driving the big furnace cover 12 and the small furnace cover 13 to move up and down between the furnace body 6 and the frame 1.
The furnace body 6 is fixed on the frame 1, the thermal field 8 is placed on the thermal field support column 11, the thermal field support column 11 is placed on the small furnace cover 13 and can move along with the small furnace cover 13, the induction coil 9 is fixed on the coil support column 10, the coil support column 10 is placed on the large furnace cover 12, and the induction coil electrode 7 is led out from the large furnace cover 12 and can move along with the large furnace cover 12. The big furnace cover 12 is fixed with the furnace body 6 by connecting screws. The lifting module 2 is fixed with the frame 1.
During loading and unloading, the lifting module 2 drives the small furnace cover 13 to realize reciprocating motion of the small furnace cover 13 and the thermal field 8.
When the induction coil 9 is overhauled, the connecting screw 5 can be loosened, so that the large furnace cover 12 moves along with the small furnace cover 13.
In one embodiment, the top of the large furnace cover 12 is detachably mounted at the bottom of the furnace body 6 through a connecting screw 5. The small furnace cover 13 is arranged at the bottom of the large furnace cover 12, and the outer diameter of the small furnace cover 13 is larger than the inner diameter of the large furnace cover 12 and smaller than the outer diameter of the large furnace cover 12. The small furnace cover 13 is provided with a sealing O-shaped ring I3 at a position contacted with the bottom of the large furnace cover 12. The outer diameter of the large furnace cover 12 is larger than the diameter of the inner cavity of the furnace body 6, and a sealing O-shaped ring II 4 is arranged on the large furnace cover 12 at a position contacted with the bottom edge of the furnace body 6.
In one embodiment, the lifting module comprises a bracket 18, a linear guide 19, a transmission screw 20 and a lifting motor 21, the linear guide 19 comprises a guide rail and a sliding block, the transmission screw 20 comprises a screw and a nut, the bracket 18 is fixedly connected with the sliding block of the linear guide 19 and the nut of the transmission screw 20, the linear guide 19 and the transmission screw 20 are fixedly connected on the frame 1, and the transmission screw 20 is in power connection with the lifting motor 21. The rotary motion of the elevating motor 21 is converted into linear motion of the driving screw nut by the driving screw 20, thereby driving the bracket 18 to move up and down.
When loading and unloading, the lifting module 2 drives the small furnace cover 13 to be lowered to the lowest position. At this time, the thermal field 8 can be removed from the small furnace cover 13 by a tool or by a person.
When the induction coil 9 is overhauled, the connecting screw 5 can be loosened, so that the big furnace cover 12 is lowered to the bottommost position along with the small furnace cover 13. Checking whether the coil surface coating is peeled off or damaged, and if so, repairing the coil surface coating on line by using a repairing agent. When the induction coil 9 needs to be repaired, the induction coil 9 is disconnected from the induction coil electrode 7, and the induction coil 9 can be removed from the large furnace cover 12 for repair by a tool or manually.
The crystal growth furnace has the following characteristics:
(1) Aiming at the problems of high unloading working strength and low efficiency of hand tools, the utility model improves the loading and unloading efficiency and the repeated loading and unloading precision by utilizing an automatic feeding mechanism. The small furnace cover 13 is used for repeatedly loading and unloading materials and is an automatic lifting structure.
(2) Aiming at the problem that the existing induction coil 9 needs to be separated from the induction coil electrode 7 during maintenance to cause difficult maintenance, the induction coil electrode 7 is led out from the lower part of the large furnace cover 12, and the large furnace cover 12 is used for maintaining the induction coil 9, so that the induction coil 9 and the induction coil electrode 7 are lifted along with the large furnace cover 12, the disassembly and assembly procedures are reduced, and the maintenance convenience of a mechanism is improved.
It should be noted that it will be apparent to those skilled in the art that the present utility model is not limited to the details of the above-described exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
The principles and embodiments of the present utility model have been described in detail with reference to specific examples, which are provided to facilitate understanding of the method and core ideas of the present utility model; also, it is within the scope of the present utility model to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the utility model.
Claims (6)
1. A crystal growing furnace, characterized in that: comprising
The furnace body is detachably arranged on the frame, and a thermal field and an induction coil are arranged in the furnace body; and
the thermal field is arranged on the thermal field supporting column, and raw materials required by crystal growth are placed in the thermal field; and
the thermal field support column is arranged on the small furnace cover; and
the induction coil is arranged on the periphery of the thermal field, is arranged on a coil supporting column, and an induction coil electrode is connected with the induction coil; and
the coil support column is arranged on the large furnace cover, and the induction coil electrode is led out from the large furnace cover; and
the lifting module is used for driving the large furnace cover and the small furnace cover to move up and down between the furnace body and the frame.
2. The crystal growth furnace according to claim 1, wherein: the top of the big furnace cover is detachably arranged at the bottom of the furnace body through a connecting screw.
3. The crystal growth furnace according to claim 1, wherein: the small furnace cover is arranged at the bottom of the large furnace cover, and the outer diameter of the small furnace cover is larger than the inner diameter of the large furnace cover and smaller than the outer diameter of the large furnace cover.
4. A crystal growth furnace according to claim 3, wherein: and a sealing O-shaped ring I is arranged at the position, which is contacted with the bottom of the large furnace cover, on the small furnace cover.
5. The crystal growth furnace according to claim 1, wherein: the outer diameter of the large furnace cover is larger than the diameter of the inner cavity of the furnace body, and a second sealing O-shaped ring is arranged at the position, which is in contact with the bottom edge of the furnace body, of the large furnace cover.
6. The crystal growth furnace according to claim 1, wherein: the lifting module comprises a bracket, a linear guide rail, a transmission screw and a lifting motor, wherein the linear guide rail comprises a guide rail and a sliding block, the transmission screw comprises a screw and a nut, the bracket is fixedly connected with the sliding block of the linear guide rail and the nut of the transmission screw, the linear guide rail and the transmission screw are fixedly connected on a frame, and the transmission screw is in power connection with the lifting motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223492535.4U CN219195219U (en) | 2022-12-27 | 2022-12-27 | Crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223492535.4U CN219195219U (en) | 2022-12-27 | 2022-12-27 | Crystal growth furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219195219U true CN219195219U (en) | 2023-06-16 |
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ID=86710644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223492535.4U Active CN219195219U (en) | 2022-12-27 | 2022-12-27 | Crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219195219U (en) |
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2022
- 2022-12-27 CN CN202223492535.4U patent/CN219195219U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 365, Xinxing 1st Road, Cixi hi tech Industrial Development Zone, Ningbo City, Zhejiang Province, 315300 Patentee after: Ningbo Hengpu Technology Co.,Ltd. Address before: No. 365, Xinxing 1st Road, Cixi hi tech Industrial Development Zone, Ningbo City, Zhejiang Province, 315300 Patentee before: Ningbo Hengpu Vacuum Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |