CN207091546U - Material supply arrangement and crystal growth system - Google Patents

Abstract

Material supply arrangement disclosed in the utility model, for supplying material in the crucible to furnace interior, material supply arrangement includes feeding mechanism and at least one path that feeds intake, feeding mechanism has the feeding path by material from body of heater outside input furnace interior, at least one path that feeds intake is located at furnace interior and relative with crucible, feeding path docks at least one path that feeds intake, and material imports at least one path and by least one path input crucible that feeds intake of feeding intake through feeding path.Crystal growth system disclosed in the utility model, including body of heater；Crucible, crucible are arranged on furnace interior, for containing material；And material supply arrangement as described above, material supply arrangement are used to supply material to crucible.The utility model meets the requirement of big feeding quantity, and charging process can be parallel with silicon single crystal rod cooling procedure, shortens feed time, improves the production efficiency of silicon single crystal rod, while improves the stability and security of outside charging.

Description

Material supply arrangement and crystal growth system

Technical field

The utility model belongs to technical field of single crystal growth, is related to the auxiliary equipment of crystal growth, and in particular to a kind of thing Expect supply arrangement, further relate to a kind of crystal growth system with the material supply arrangement.

Background technology

Polysilicon is the main raw material(s) for producing photovoltaic product and semiconductor product.Mound carat Bielski (Czochralski, referred to as Cz) method is one of the most frequently used preparation method of monocrystalline silicon, and high-purity solid polycrystalline silicon raw material is in crystalline substance Fusing forms melt in crucible in body generation stove (single crystal growing furnace), and declining seed crystal makes itself and the melt contacts in rotation crucible, so Afterwards, seed crystal is slowly pulled out, melt solidifies to form silicon single crystal rod around seed crystal.

Traditional Cz single crystal growing furnaces complete a stove raw material crystal pulling production after, it is necessary to for a new stove production do much it is numerous and diverse Preliminary preparation, including the process such as blowing out cooling, body of heater are cleaned, stocked up, feeding, vacuumizing, hunting leak, material.These early stages Process wastes time and energy, and seriously governs the production efficiency of Straight pull monocrystalline silicon.In addition, the polycrystalline silicon material (being mostly block material) of filling Volume-diminished after fusing so that the utilization rate of crucible reduces.In order to improve the utilization rate of crucible, increase overall inventory, then need Charging to be repeated several times into crucible.This is also one of effective measures for reducing crystal pulling cost.At present, Straight pull monocrystalline silicon growing Main flow feeding device be the built-in feeder of concubine.This feeder because single charge amount is small (being usually no more than 30kg), Need to carry out multiplicating charging, manual operation is numerous and diverse and efficiency is low；And vacuumize process will be carried out after charging every time, must Concubine isolation and purification must be frequently carried out, the time wastes the risk for seriously, also increasing material pollution.

In order to meet to increase the requirement of overall inventory and make up the technological deficiency of built-in feeder, existing patent discloses To the outside feeding device of single crystal growing furnace conveying polycrystalline silicon material.Application publication number is that CN1153230A patent application provides a kind of stove The solid material delivery system of son, the feed pipe of the feeding system can selectively change feed pipe and export relative to crucible The radial position at top, avoid splashing material, improve the utilization rate of heat energy, but feeding system is complicated, and complicated operating mechanism is deposited It is difficult to be precisely controlled in the positioning of the risk of feed blocking, and feed pipe outlet.Authorization Notice No. is CN102312285B's Patent provides a kind of outside continuous dosing mechanism for single crystal growing furnace, has blowing inner tube and blowing outer tube, polycrystalline silicon material is by putting Material inner tube is delivered to blowing outer tube, and which limits the internal diameter of blowing inner tube, is not suitable for the larger block material of particle diameter；Throw in addition Expect that the whole height of mechanism is higher, be unfavorable for dosing operation, and add operating safety risks.Application publication number is The technological deficiency that CN106400105A patent application discloses external charging device is similar with patent CN102312285B, and And the inventory and rate of feeding of polycrystalline silicon material are difficult to effectively control.

Therefore, in order to increase overall inventory, crystal pulling cost is reduced, single crystal growing furnace stove external feeding device is as the overall throwing of raising The main aid of doses, is optimized to it and improvement is particularly important.

Utility model content

The utility model is difficult to the technological deficiency of continuous charging for existing single crystal growing furnace stove external feeding device, there is provided a kind of thing Expect supply arrangement.This material supply arrangement can realize polycrystalline silicon material rate of feeding and inventory with single crystal growing furnace Dock With Precision Position Effective control, the whole height of material supply arrangement can be reduced, be easy to feeding operation, improve the security of feeding operation And convenience, operating personnel and the accounting that curtails the feeding hours are saved, reduces manufacturing cost.

The utility model additionally provides a kind of crystal growth system with above-mentioned material supply arrangement.

A kind of scheme is used by the utility model：Material supply arrangement, for being supplied in the crucible to furnace interior Material, the material supply arrangement include feeding mechanism and at least one path that feeds intake, the feeding mechanism have by material from The feeding path of body of heater outside input furnace interior, at least one path that feeds intake be located at the furnace interior and with the earthenware Crucible is relative, and the feeding path docks at least one path that feeds intake, and material imports at least one throwing through the feeding path Material path is simultaneously inputted in the crucible by least one path that feeds intake.

Further, there is opening, the feeding mechanism docks the opening, and the feeding path can phase on the body of heater For it is described it is at least one feed intake path extension or recall, the feeding path in extended position through it is described opening and with institute The path that feeds intake is stated to be connected.

Further, the feeding mechanism also includes feeding receiving portion, and the feeding receiving portion is arranged at outside the body of heater Portion, the feeding path are contained in the feeding receiving portion in withdrawn position.

One of preferred embodiment as technical solutions of the utility model, ventilation is offered in the feeding receiving portion Mouthful.In implementation of the present utility model, the blow vent, which comprises at least, evacuates port, argon gas port and leak detection port.It is described to take out Empty port connects pumped vacuum systems, and pumped vacuum systems is extracted out the air inside the material supply arrangement by evacuating port, So that certain vacuum is kept inside material supply arrangement.The argon gas port connects argon gas feed system, argon gas feed system System is by argon gas port to providing argon gas inside material supply arrangement.The leak detection port connection gas leakage hunting apparatus, for examining Survey the air-tightness of material supply arrangement.

Further, the feeding mechanism, which also includes length, to be opened with the feeding pars contractilis of telescopic variation, the body of heater There is isolating valve at mouthful, the feeding pars contractilis is sealedly attached between the feeding receiving portion and the isolating valve.

One of preferred embodiment as technical solutions of the utility model, the isolating valve connect for cool down it is described every From the water circulation system of valve.

Further, the feeding mechanism also includes the feeding driver for being mechanically connected to the feeding path, described to feed Material driver is arranged at the side of the feeding receiving portion, for driving the feeding path to extend or recalling.

One of preferred embodiment as technical solutions of the utility model, the upstream end of the feeding path are provided for The blanking funnel of material is received, the outside of the feeding path has feeding fixed cover, and the feeding fixed cover is slided by feeding Block connects the feeding driver.

One of preferred embodiment as technical solutions of the utility model, the feeding via sidewall outside are consolidated with feeding Cushion is filled at least part region between fixed set.

Further, the path that feeds intake includes relative feed intake entrance and the outlet that feeds intake, and the outlet that feeds intake is close to institute Crucible is stated, the porch that feeds intake has the funnel that feeds intake, and the feeding path passes through funnel and the path that feeds intake of feeding intake Docking.

One of preferred embodiment as technical solutions of the utility model, the base portion of the funnel that feeds intake, which is set, to feed intake admittedly Determine block, the path that feeds intake is maintained at furnace interior and so that feed intake path and the crucible phase by the fixed block that feeds intake It is right.

Further, described material supply arrangement also includes material guide mechanism, and the material guide mechanism is by the material transmission To the feeding mechanism.

Further, the feeding mechanism also includes feeding docking section, and the feeding docking section is arranged at the feeding and held Receive the sidepiece in portion, the feeding receiving portion connects the feeding docking section, and the feeding docking section is docked with the material guide mechanism.

One of preferred embodiment as technical solutions of the utility model, the material guide mechanism include the guide being connected Receiving portion and guide docking section, the guide docking section are arranged at the sidepiece of the guide receiving portion, the guide receiving portion pair Connect the feeding docking section.

One of preferred embodiment as technical solutions of the utility model, the guide receiving portion include guide path and Guide drive device, the guide drive device connect the guide path, and the guide path is built in the guide and accommodated Portion, the guide drive device are used to drive the guide path to dock the feeding path and be withdrawn into the guide receiving portion Inside.

One of preferred embodiment as technical solutions of the utility model, the guide path include guide pan feeding portion and Guide discharging portion, the guide pan feeding portion open up guide feeding mouth, drop guide funnel are set at guide feeding mouth, in the guide In the presence of drive device, the guide path drive drop guide funnel is moved to the lower section of guide docking section, the guide Discharging portion docks the feeding path.

One of preferred embodiment as technical solutions of the utility model, the material supply arrangement also include material controlling system System, the material controlling mechanism include barrel and helixes feed equipment, and the discharging opening of the barrel connects the helixes feed equipment, institute Helixes feed equipment is stated to be used to supply material to the guide docking section.

One of preferred embodiment as technical solutions of the utility model, the helixes feed equipment include feed portion and Drive division is fed, the feed drive division drives the feed portion to rotate, and the feed portion is quantitative to be supplied to the guide docking section To material, the barrel connects the feed portion.

One of preferred embodiment as technical solutions of the utility model, the feed portion have feed entrance and feed Outlet, the feed entrance dock the discharging opening of the barrel, and the feed-stock outlet docks the guide docking section, the feed Feeding screw rod is set inside portion, and feed screw thread of being arranged on feeding screw rod, the barrel is quantified to the guide by being fed screw thread Docking section supplies material.

Further, described material supply arrangement also includes mobile platform, and the mobile platform is at least used to carry institute State material controlling mechanism and pacify and change the position that relatively described body of heater is pacified by the material controlling mechanism.

Another technical solution is crystal growth system used by the utility model, including：Body of heater；Crucible, the earthenware Crucible is arranged on furnace interior, for containing material；And the material supply arrangement, the material supply arrangement are used for crucible Supply material.

Compared with existing feeding device, material supply arrangement described in the utility model at least has following beneficial effects.

Material supply arrangement described in the utility model includes feeding mechanism, material guide mechanism, material controlling mechanism and is set in advance in The path that feeds intake of furnace interior.Feeding mechanism is fixedly mounted on outside body of heater, and is docked with material guide mechanism.Material guide mechanism, material controlling Mechanism is installed on a mobile platform, it is possible to achieve is docked with the feeding mechanism on multiple bodies of heater.Material controlling mechanism passes through screw feeder Outside material dosing is delivered to material guide mechanism by device.The guide path of material guide mechanism, the feeding path of feeding mechanism and in advance It is arranged on the path that feeds intake above crucible and forms outside material carrying path, by the outside material transmission in material controlling mechanism to body of heater In interior crucible.In addition, the setting of isolating valve, to protect the atmosphere of furnace interior unaffected.The utility model can be not required to Want to realize the outside material of conveying into crucible under conditions of blowing out, body of heater concubine greatly improved without isolation, purification and produce effect Rate, the charging accounting time is shortened, while also improve the utilization rate of quartz glass crucibles, reduce the cost of charging link.

Furthermore pass through the advance fixed feeding area path on guide shell so that the contraction in length of feeding path, shorten feeding Stroke of the path between upper limit, lower limit, the height of feeding mechanism outside bell is reduced, reduce the weight of feeding mechanism Heart position.So it is easy to feeding mechanism to be docked with material guide mechanism in relatively low station, is more beneficial for improving described in the utility model The stability and security of material supply arrangement operation.Further, compared with the material supply arrangement for not pre-setting the path that feeds intake, The utility model need not drive silicon single crystal rod to go upward to higher position when pulling apparatus, you can be added into quartz glass crucibles Outside material, significantly shorten the stand-by period, improve the production efficiency of silicon single crystal rod.

In a word, material supply arrangement described in the utility model meets the requirement of big feeding quantity, and single charge amount can reach To more than 150kg；Meanwhile the defects of compensate for concubine built-in feeder, charging is once completed, before big feeding quantity is met Put, isolation and purification number can be reduced to greatest extent, avoid furnace inner environment caused by isolating repeatedly from polluting.This practicality is new The purification of material supply arrangement described in type, charging process is cooled down with silicon single crystal rod or pulling process can be parallel, during charging process Consumption significantly reduces.

Brief description of the drawings

Fig. 1 is the synoptic diagram for the material supply arrangement that the path that feeds intake is set in body of heater.

Fig. 2 is that the feed alley of feeding mechanism is in the synoptic diagram of extension state.

Fig. 3 is that the synoptic diagram for the path that feeds intake is docked in the feed alley of feeding mechanism.

Fig. 4 is the synoptic diagram of the feeding driver of feeding mechanism.

Fig. 5 is that the guide path of material guide mechanism is in the synoptic diagram for accepting outside material position.

Fig. 6 is the synoptic diagram of the helixes feed equipment of material controlling mechanism.

Fig. 7 is synoptic diagram of the path inside guide shell that feed intake.

Fig. 8 is the synoptic diagram that path is arranged on the outside of guide shell that feeds intake.

Description of reference numerals：

1. feeding mechanism；101. feeding path；1011. feeding discharging portion；1012. feeding pan feeding portions；1013. feeding is fixed Set；1014. cushion；1015. blanking funnel；102. feeding receiving portion；103. feeding docking section；104. feeding driver； 1041. feeding sliding block；1042. feeding motor；1043. feeding screw mandrel；1044. feeding guide rail；105. feeding pars contractilis；

2. feed intake path；201. feed intake pan feeding portion；202. feed intake discharging portion；203. feed intake funnel；204. feed intake fixed block；

3. material guide mechanism；301. guide docking sections；302. guide receiving portions；303. guide paths；304. guides driving dress Put；3031. drop guide funnel；3032. guide pan feeding portions；3033. guide discharging portion；3034. guide feeding mouth.

4. body of heater；41. opening；42. pedestal；43. isolating valve；44. bell；45. furnace tube；

5. crucible；

6. material controlling mechanism；61. barrel；62. helixes feed equipment；621. feed portions；622. feed drive divisions；6211. give Expect entrance；6212. feed-stock outlet；6213. feeding screw rod；6214. it is fed screw thread；63. cover；

7. mobile platform；9. WidFin mechanism；10. guide shell；11. heater；12. silicon single crystal rod；13. lifting dress Put；14. guide observation window；15. feeding observation window.

Embodiment

The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.For the direction in word description Explanation, " upper and lower " refers on the basis of the utility model above-below direction shown in the drawings, and " upstream, downstream " refers to material On the basis of moving direction.In addition, " inside and outside " refers to that the internal-external locus of the constituent components such as body of heater, feeding path is base It is accurate.But the utility model is not construed as limited in a manner of the direction illustrates.

Embodiment 1

Material supply arrangement described in the present embodiment, for being thrown from outside body of heater 4 into the crucible 5 set inside body of heater 4 Add material.In the present embodiment, in case of no particular description, body of heater 4 refers to lift from crucible 5 using Cz methods Go out the single crystal growing furnace of silicon single crystal rod 12.This single crystal growing furnace has the less elongate cylindrical shape pair of diameter for being available for silicon single crystal rod 12 to cool down Room, the pulling apparatus 13 for upward pulling single crystal silicon rod 12 is installed in the concubine.In addition, this single crystal growing furnace also includes setting Put the bell 44 and furnace tube 45 below concubine.

Bell 44 connects concubine and is arranged on the lower section of concubine, generally with certain crooked radian.Described in the present embodiment The part-structure of material supply arrangement, such as feeding mechanism 1, are fixed on bell 44.In view of concubine is generally arranged at bell 44 Center at, and position is relatively fixed, and the feeding mechanism 1 is preferably mounted at the sidepiece of bell 44.In order to which outside material is led to Cross feeding mechanism 1 to be sent into inside body of heater 4, more precisely, material is fallen into the crucible 5 inside body of heater 4, in the sidepiece of bell 44 Suitable location offer opening 41, the feeding path 101 of feeding mechanism 1 can be stretched into inside body of heater 4.As for opening 41 in stove Number is opened up on lid 44, it is preferable that can be on bell 44 at least provided with an opening 41.In addition, installed at opening 41 There is pedestal 42, so that feeding mechanism 1 is relatively firmly arranged on pedestal 42.Due to needing to keep special gas inside body of heater 4 Atmosphere, inert gas, such as argon gas etc. typically are passed through to its inside, in order to not destroy the internal atmosphere of body of heater 4, prevent air from entering stove Body 4 causes the pollution of body of heater 4, and isolating valve 43 is also installed at opening 41.The setting of isolating valve 43, opening for opening 41 can be controlled Close, and obstruct the internal atmosphere of body of heater 4 and external environment condition.In view of the zone melting material of crucible 5 is, it is necessary to higher temperature, and it is open The normal sealing gasket containing quality of rubber materials in pedestal 42, isolating valve 43 near 41, in order to prevent sealing gasket is heated to be easy to aging and cause Make do not have satisfactory high leakproofness, pedestal 42, isolating valve 43 are respectively communicated with water circulation system, it dropped to play The effect of temperature.

Furnace tube 45 is arranged on the lower section of bell 44, and part more than working face is the cylinder being relatively large in diameter, in furnace tube 45 Be internally provided with crucible 5, for heating crucible 5 with the heater 11 of the materials inside of fusion crucible 5, and above crucible 5 Guide shell 10.The crucible 5 typically refers to quartz glass crucibles, and for accepting outside material, outside material melts in crucible 5 Turn to liquid material.

As shown in figure 1, the main body of this material supply arrangement, which is formed, includes material controlling mechanism 6, material guide mechanism 3, feeding mechanism 1 With the path 2 that feeds intake being embedded in inside body of heater 4.In addition, it may further comprise mobile platform 7.Material controlling mechanism 6 and material guide mechanism 3 can be with On mobile platform 7, with mobile platform 7 closer or far from body of heater 4, to change the position of relative body of heater 4.Feeding mechanism 1 It is fixedly installed on outside body of heater 4, is provided with opening 41 on corresponding bell 44, the feeding path 101 in feeding mechanism 1 can be through Opening 41 is stretched to inside body of heater 4, and is docked with the path 2 that feeds intake.For the function of being formed from above-mentioned each main body is realized, material controlling machine Structure 6 can store material temporarily, and material is quantified to material guide mechanism 3 in a controlled manner and conveys outside material.Material guide mechanism 3 is used In the quantitative material of the input of undertaking material controlling mechanism 6, and docked with feeding mechanism 1, by material transmission to feeding mechanism 1.Feeding machine Structure 1 is used to realize material to the delivered inside of body of heater 4.The path 2 that feeds intake is arranged on inside body of heater 4, is docked with feeding mechanism 1 and by thing Material is further sent in crucible 5, completes charging operation.

Material controlling mechanism

Material controlling mechanism 6 includes barrel 61, and is arranged on the helixes feed equipment 62 of the lower section of barrel 61.Barrel 61 is in material Material can be temporarily accommodated in the time conveyed, and barrel 61 can be divided into columned main part and below main part Cone portion.Certainly, barrel 61 can also be designed as other shapes according to practical situations.The discharging opening of barrel 61 is opened in The lower end of cone portion, and its feeding mouth is relative with its discharging opening, and it is arranged on the upper end of main part.Barrel 61 has mutually fits therewith The cover 63 matched somebody with somebody, and cover 63 is arranged on the upper end of main part.For the ease of loading material into barrel 61, the cover 63 Set-up mode is preferably fast disassembly type, while can rapidly realize the sealing of barrel 61, avoids the material in barrel 61 by week The pollution in collarette border.When conveying material to material guide mechanism 3, cover 63 can keep airtight conditions relative to outer gas.

Barrel 61 and cover 63 can be selected stainless steel metal and be made, in order to avoid the material into barrel 61 introduces metal Impurity, liner is provided with the inner surface of barrel 61 and cover 63, is connect with obstructing material with barrel 61, the surface of cover 63 Touch.The liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can pass through cohesive mode It is arranged on the inner surface of barrel 61 and cover 63.

Further, evacuation port can be offered on barrel 61, evacuates port connection vacuum extractor (not indicated in figure), Normally, evacuated in connection and vacuum valve is installed in the vacuum-pumping pipeline of port, to control the vacuum inside barrel 61.To material The purpose that cylinder 61 vacuumizes is so that material controlling mechanism 6 keeps certain vacuum, prevents air from entering body of heater 4 and destroying stove Atmosphere inside body 4.

Material is fallen naturally inside barrel 61 by Action of Gravity Field, and material enters helixes feed equipment 62.Fig. 6 gives one The structural representation of the preferable helixes feed equipment 62 of kind.Helixes feed equipment 62 includes feed portion 621 and feed drive division 622.Feed portion 621 is cavity type structure, including feed entrance 6211 and feed-stock outlet 6212.It is fed entrance 6211 and barrel 61 Discharging opening docking, the mode on docking, it is preferable that sealed in joint by flange.It is fed entrance 6211 and material The discharging opening docking of cylinder 61 can also be using other can be realized by the way of, such as bolt connection, or weld etc..In barrel 61 Material entered by being fed entrance 6211 in the cavity in feed portion 621.In actual applications, it is preferred to be fed entrance 6211 For tubular structure, the top of cavity described in feed portion 621 is arranged on.And feed-stock outlet 6212 is arranged on chamber described in feed portion 621 The bottom of body, material guide mechanism 3 is sent to through feed-stock outlet 6212 into the material in cavity described in feed portion 621.It is corresponding preferred Ground, feed-stock outlet 6212 are preferably tubular structure.Feed portion 621 also can be selected stainless steel and be made.With reference to the interior of barrel 61 Portion's set-up mode, liner is being set in the interior surface of cavity, feed entrance 6211, feed-stock outlet 6212 described in feed portion 621, The liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can be set by cohesive mode Put the interior surface in cavity, feed entrance 6211, feed-stock outlet 6212 described in feed portion 621.

One feeding screw rod 6213 is installed in cavity described in feed portion 621, the surface distributed of feeding screw rod 6213 has feed Screw thread 6214., should be according to the form of material and straight on feed screw thread 6214 in the arragement direction and density of feeding screw rod 6213 Footpath size, at the same be also contemplated that material controlling amount number determined.In general, feeding screw rod 6213 and feed screw thread thereon 6214 cross section is circle, that is, the outer rim for being fed screw thread 6214 is minimum apart from the distance of cavity inner surface described in feed portion 621. The possibility to get stuck in the outer rim of feed screw thread 6214 be present, influence the normal operation of feeding screw rod 6213.In order to avoid material card It is connected in the outer rim of feed screw thread 6214 and the space of cavity inner surface described in feed portion 621, in actual applications, it is necessary to consider The diameter and shape of material.In this embodiment, it is preferred that the material is cobbing, regular particulate material or powder materials Especially suitable helixes feed equipment 62 gives accurate material controlling.

It is fed drive division 622 and connects feeding screw rod 6213, the rotation for feeding screw rod 6213 provides external impetus.Feed drives Dynamic portion 622, it is preferable that motor or synchronous motor can be taken from private, or other realize the drive device of identical function. It is fed in the presence of drive division 622, feeding screw rod 6213 can be by rotating clockwise or counterclockwise, and feeding screw rod 6213 turns Speed is equally controlled by feed drive division 622.As specific preferred embodiment, there is control in feed drive division 622 The controller of its working condition, for example the rotating speed of feeding screw rod 6213 can be precisely controlled, the start by set date of feeding screw rod 6213 Deng.Quantitative transmission of the material to material guide mechanism 3 is so realized by the rotating speed of feeding screw rod 6213, to reach the mesh of accurate material controlling 's.In order to which the material in cavity described in feed portion 621 is timely discharged, material heap in cavity described in feed portion 621 is avoided Product extruding, as shown in fig. 6, feed entrance 6211, long axis direction of the feed-stock outlet 6212 along feeding screw rod 6213 are arranged at intervals, That is in the presence of feeding screw rod 6213, after material is moved suitable stroke by feed entrance 6211, arrival is fed out Mouthfuls 6212 position, through feed-stock outlet 6212 by material transmission to material guide mechanism 3.It follows that it is fed entrance 6211, gives The setting of 6212 relative positions of material outlet, the realization to accurate material controlling purpose have great importance.

Material guide mechanism

Material guide mechanism 3 docks with feed-stock outlet 6212, for accepting the quantitative material of the discharge of helixes feed equipment 62.Guide Mechanism 3 includes guide docking section 301 and guide receiving portion 302.Wherein, guide docking section 301 is arranged on guide receiving portion 302 Sidepiece, it is connected with guide receiving portion 302.Guide docking section 301 is docked with feed-stock outlet 6212, and feed-stock outlet 6212 is discharged Material guide receiving portion 302 is led into by guide docking section 301.It is preferably tubular structure to be fed entrance 6211, meanwhile, Inner surface setting liner in guide docking section 301, the liner can select quartz glass or other ceramic-like materials to be made, Preferably, liner can be arranged on the interior surface of guide docking section 301 by cohesive mode.Guide receiving portion 302 is one Kind cavity type structural member, its one end are docked with feeding mechanism 1, realize that material transmits to feeding mechanism 1.

In order to realize transmission of the material in guide receiving portion 302, as shown in figure 1, being set in the inside of guide docking section 302 A guide path 303 is put, while guide drive device 304 is set in guide receiving portion 302.In guide drive device 304 In the presence of, guide path 303 does linear movement in guide receiving portion 302.In the present embodiment, guide drive device 304 Preferably cylinder, or servomotor etc., or other can realize the drive device of the linear movement of guide path 303.Guide Path 303 can be along the axial-movement of guide receiving portion 302, and Fig. 5 gives guide path 303 and is in the outside material position of undertaking Schematic diagram.

Guide path 303 can select metal material to be made, such as stainless steel, can be preferably provided with interior surface thereof Liner, the liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can pass through cohesive side Formula is arranged on the interior surface of guide path 303.As another preferred embodiment, guide path 303 can be selected directly It is made of quartz glass or other ceramic-like materials, can so have to set the liner in 303 interior surface.

Guide path 303 is arranged in guide receiving portion 302, including guide pan feeding portion 3032 and guide discharging portion 3033. Guide pan feeding portion 3032 is located at the head (or saying it is upstream) of guide path 303, offers guide in guide pan feeding portion 3032 and enters Material mouth 3034, when guide path 303, which is moved to, accepts outside material position, material can enter guide feeding mouth 3034 and then fall Enter in guide path 303.In order to preferably carry material, prevent from falling into the guide receiving portion 302 outside guide path 303 The cavity, it is preferable that drop guide funnel 3031, and the external profile diameter of drop guide funnel 3031 are set at guide feeding mouth 3034 Not less than the interior diameter of guide docking section 301.In addition, in guide docking section 301 and the connecting portion of guide receiving portion 302, set One guide observation window 14 that can observe the shift position of drop guide funnel 3031, the work of personnel control material guide mechanism 3 easy to operation Make state.Guide discharging portion 3033 is located at the afterbody (or saying it is downstream) of guide path 303, when the feeding path of feeding mechanism 1 101 when being in lower limit, and guide discharging portion 3033 docks with feeding path 101.

As a preferred embodiment, as shown in figure 1, material guide mechanism 3 is obliquely installed, material is in guide path 303 Slid naturally by Action of Gravity Field.Needed as the angle of inclination of material guide mechanism 3, especially guide path 303 in suitable scope Interior selection.If the angle of inclination of guide path 303 is larger, material obtains larger slip velocity, material in guide path 303 Certain impact will certainly be caused to the feeding path 101 in downstream；If the angle of inclination of guide path 303 is smaller, material is being led Expect that the slip velocity in path 303 is smaller, time of charging may be extended to complete the operation that feeds.Meanwhile in view of guide holds The feeding docking section 103 of feeding mechanism 1 will also be docked by receiving portion 302.Therefore, the angle of inclination selection of guide path 303 is a need The problem of wanting comprehensive consideration, the angle of inclination shown in Fig. 1 are only the signals of embodiment, are not represented to the angle of inclination It is actual to limit.

Feeding mechanism

Feeding mechanism 1 docks with the opening 41 on bell 44, and is fixedly mounted on pedestal 42, for by material guide mechanism 3 Material be delivered to inside body of heater 4.Feeding mechanism 1 includes feeding receiving portion 102 and feeding docking section 103.Feeding receiving portion 102 It is the main part of feeding mechanism 1, on pedestal 42, and fixes and dock with opening 41.The inside peace of feeding receiving portion 102 Outside material can be delivered to the feeding path 101 inside body of heater 4 by dress.Feeding docking section 103 is arranged on the feeding receiving portion 102 sidepiece, it is connected with feeding receiving portion 102, and is docked with guide receiving portion 301, guide path 303 is movable to feeding Docking section 103.As for feeding docking section 103 and the docking mode of guide receiving portion 301, preferably docked using flange, also may be used Using other docking modes, but no matter which kind of docking mode, should ensure that the sealing of docking.

Feeding receiving portion 102 and feeding docking section 103 together constitute the Y-shaped structure of feeding mechanism 1.As shown in Fig. 2 The center line of feeding receiving portion 102 is C1, and the center line of feeding docking section 103 is C2, has certain angle between C1 and C2 α.Angle α and the angle of inclination of above-mentioned material guide mechanism 3 have it is certain associate, similarly, the span of angle α stills need Comprehensively consider many factors.

Feeding mechanism 1 also includes feeding driver 104, and specifically, feeding driver 104 is arranged on feeding receiving portion On 102.Feeding driver 104 can drive feeding path 101 to be moved in feeding receiving portion 102.It should be noted that feeding The movement of path 101 can be achieved using prior art.Fig. 4 gives a kind of composition schematic diagram of feeding driver 104. Feeding driver 104 includes the feeding motor 1042 installed in the top of feeding receiving portion 102, and is arranged on feeding receiving The feeding screw mandrel 1043 and feeding guide rail 1044 of the inner space of portion 102.Set on feeding screw mandrel 1043 and feeding guide rail 1044 One feeding sliding block 1041, feeding sliding block 1041 can be realized along feeding screw mandrel 1043 and feeding guide rail 1044 and be synchronized with the movement.Feeding There is screw thread, feeding motor 1042 drives feeding screw mandrel 1043 to rotate, while feeding sliding block 1041 has on material screw mandrel 1043 Have screwed hole and be socketed on feeding screw mandrel 1043, feeding screw mandrel 1043 be changed into feeding sliding block 1041 on move down It is dynamic.Because feeding path 101 is fixed on feeding sliding block 1041, feeding path 101 can be realized same with feeding sliding block 1041 Moved further.

Movement of the feeding path 101 in feeding receiving portion 102 has the restriction of position, i.e., feeding path 101 is in feeding The telescopic moving between upper limit, lower limit in the presence of driver 104.The telescopic moving of this part includes feeding path 101 Extension and feeding path 101 recall.There is opening 41 on body of heater 4 as described above, the feeding mechanism 1 docks the opening 41, the feeding path 101 can extend or recall relative to the path 2 that feeds intake, and the feeding path 101 is in extended position It is connected through opening 41 and with the path 2 that feeds intake.Here upper limit refers to that feeding path 101 is lifted up reaching Extreme position, i.e., the extreme position that feeding path 101 is recalled.When feeding path 101 is in upper limit, feeding path 101 Lower end, or say it is feeding discharging portion 1011, in the top of isolating valve 43, the closing of isolating valve 43 can be obstructed in body of heater 4 Portion's atmosphere and external environment condition.Here lower limit refers to the extreme position that feeding path 101 can extremely reach to decline (extension), Position when i.e. feeding path 101 stretches into 4 inside range of body of heater.When feeding path 101 is in lower limit, guide path 303 guide discharging portion 3033, which can move, extends feeding receiving portion 102, and guide discharging portion 3033 is fed with feeding path 101 Material pan feeding portion 1012 is docked, and the feeding discharging portion 1011 of feeding path 101 docks the pan feeding portion 201 that feeds intake for the path 2 that feeds intake.Separately Outside, when feeding path 101 is in lower limit, the feeding pan feeding portion 1012 of feeding path 101 is in the center of feeding docking section 103 Line C2 lower section, the guide path 303 of material guide mechanism 3, the feeding path 101 of feeding mechanism 1 and is set in advance in the top of crucible 5 The path 2 that feeds intake form outside material carrying path.Outside material in material controlling mechanism 6 can be sent to by the carrying path In crucible 5 in body of heater 4.As a preferred embodiment, the appropriate site in feeding receiving portion 102 opens up feeding observation Window 15, guide discharging portion 3033 can be observed by feeding observation window 15 and docked with the feeding pan feeding portion 1012 of feeding path 101 Situation, and material transmission situation of the material at blanking funnel 1015.

Feeding path 101 includes feeding pan feeding portion 1012 and feeding discharging portion 1011.Feeding pan feeding portion 1012 leads to guide The guide discharging portion 3033 on road 303 docks.In feeding pan feeding portion 1012, blanking funnel 1015 is set.Outside the edge of blanking funnel 1015 Footpath is not less than the internal diameter of guide discharging portion 3033.Meanwhile the setting of blanking funnel 1015, to what is dropped out from guide discharging portion 3033 Material has certain stop and cushioning effect, changes the motion path of material, prevents material from flying out residing for blanking funnel 1015 Region.In general, feeding path 101 is made from quartz material, or other refractory ceramics class materials are made.

In the base portion (or saying it is lower section) of blanking funnel 1015, feeding fixed cover 1013 is set, meanwhile, feeding fixed cover 1013 are in the outside in feeding pan feeding portion 1012.Feeding fixed cover 1013 connects the feeding driver by feeding sliding block 1041 104, in the presence of the feeding driver 104, the feeding path 101 is linearly moved in feeding receiving portion 102. In actual applications, feeding fixed cover 1013 can extend to certain length along the axis direction of feeding path 101, and feeding is fixed Set 1013 can be used for protecting the feeding path 101 on the inside of it.Further, feeding fixed cover 1013 and feeding path 101 it Between at least part space filling cushion 1014, can be with filling flexible material, to provide better protection against feeding in cushion 1014 Path 101.

When feeding docking section 103 is docked with guide receiving portion 301, one inevitably is carried out to feeding receiving portion 102 Determine the extruding and collision of degree, and increase the load of feeding receiving portion 102.In order to alleviate this load, rigid active force is avoided Damage to feeding mechanism 1 and body of heater 4, and also to more preferable Butt sealing, in feeding receiving portion 102 close to pedestal 42 Position feeding pars contractilis 105 is set, i.e. feeding pars contractilis 105 is sealedly attached to the feeding receiving portion 102 and isolated with described Between valve 43.This feeding pars contractilis 105 has certain flexible ability, and can realize stretching for its length according to specific operating mode Contracting change, it is preferable that feeding pars contractilis 105 can be the bellows set along the circumference of feeding receiving portion 102, or other are played The elastic device of identical effect.

In addition, as shown in figure 1, several are opened up in feeding receiving portion 102 and is acted on different has blow vent.For example open If blow vent comprise at least evacuate port, argon gas port and leak detection port.Evacuation port and barrel in feeding receiving portion 102 Evacuation port series connection on 61, and is connected with pumped vacuum systems, can cause material supply arrangement described in the present embodiment to When body of heater 4 is fed, certain vacuum is kept.Argon gas port connects argon gas feed system, by argon gas port to the material Supply arrangement is filled with certain argon gas so that the atmosphere inside body of heater 4 is identical with the material supply arrangement.It should be readily appreciated that Ground, leak detection port are used to detect the sealing docked between each component of material supply arrangement.

Feed intake path

The path 2 that feeds intake is embedded in inside body of heater 4, for accept feeding path 101 conveying material, and by material add to In crucible 5.On installation site of the path 2 inside body of heater 4 that feed intake, this part provides three kinds of preferred embodiments.

As a kind of embodiment, as shown in figures 1 and 3, the path 2 that feeds intake is arranged on the inner side of guide shell 10.Can from Fig. 3 To find out, feed intake the region that path 2 is arranged between silicon single crystal rod 12 and guide shell 10.In general, guide shell 10 is annular Structural member, there is interior screen and external screen.The inner side of guide shell 10 described in this part, that is, the path 2 that feeds intake are arranged on the inner side of interior screen.

Feed intake second of preferred embodiment of path 2, as shown in fig. 7, the path 2 that feeds intake is inserted inside the guide shell 10 And through the side wall of the guide shell 10, and extending to the top of the crucible 5, that is, the path 2 that feeds intake is arranged on interior screen and external screen Between.In other words, the path 2 that feeds intake is embedded inside guide shell 10, and extends the earthenware along the elongatedness direction of guide shell 10 The top of crucible 5.It is easy-to-understand to, the mounting means of this cross-linking is, it is necessary to which being opened up in advance in the inside of guide shell 10 allows to feed intake The through hole that path 2 inserts, the through hole from the top edge of guide shell 10 to guide shell 10 inside extend to the lower edge of guide shell 10, The path 5 that feeds intake is inserted and secured in the through hole.

Fig. 8 gives the third the preferred mounting means for the path 2 that feeds intake.Shown in Fig. 8, the path 2 that feeds intake is arranged on described lead The outside of flow cartridge 10, and the material in the path 2 that feeds intake falls through the region between the outside of guide shell 10 and the inside sidewalls of the crucible 5 Enter in the crucible 5.

Specifically, the path 2 that feeds intake includes feed intake pan feeding portion 201 and the discharging portion 202 that feeds intake.The pan feeding portion 201 that feeds intake is located at Feed intake the upper end of path 2, is docked with the feeding discharging portion 1011 of feeding path 101, receives the material in feeding path 101.Throw Material path 2 docks with feeding path 101, referring to Fig. 3.Feed intake length direction extension of the discharging portion 202 along the path 2 that feeds intake, and prolongs Extend the top of crucible 5.In general, the path 2 that feeds intake is made from quartz material, or other refractory ceramics class material systems Into.

Feeding intake has the funnel 203 that feeds intake at the feeding mouth in pan feeding portion 201, and feeding discharging portion 1011 can be extended to and fed intake Lou The inside of bucket 203, material to entirely fall in feed intake in funnel 203.The path 2 that feeds intake is fixed on by the fixed block 204 that feeds intake The surface of guide shell 10, and extend to the bottom of guide shell 10.Specifically, the fixed block 204 that feeds intake is arranged on the funnel 203 that feeds intake Base portion, and be fixed on the top of guide shell 10.Material is fallen into crucible 5 through the discharging portion 202 that feeds intake, in order to reduce rushing for material Amount, prevents spilling for the melting materialss in crucible 5, and the discharging portion 202 that feeds intake has with certain corner design, that is, feed intake discharging portion Long axis direction bending of the 202 at least first half to the path 2 that feeds intake is in an angle β.Meanwhile on the discharging portion that feeds intake 202 extended position, it should be advisable with not influenceing the growth of silicon single crystal rod 12 and cooling.

The material supply arrangement is previously provided with the path 2 that feeds intake in body of heater 4.It is easy to know by Fig. 1, to specification When identical body of heater 4 conveys material, the stroke of feeding path 101 can be shortened, that is to say, that use shorter feeding path 101 can be achieved material transmission to the path 2 that feeds intake.The advantages of material supply arrangement is it will be apparent that at least can be with Shorten the longitudinal length of feeding receiving portion 102, this also means that the overall weight for the feeding mechanism 1 being arranged on bell 44 can be with Mitigate, and reduce the center of gravity of feeding mechanism 1, and then be easy to dock with moveable material guide mechanism 3, it is often more important that, Improve the safety and reliability that material adds operation.

Mobile platform

In the present embodiment, as shown in figure 1, the material supply arrangement can also further comprise mobile platform 7.It is mobile Platform 7 is used to carry material controlling mechanism 6 and material guide mechanism 3, and relative to body of heater 4 so that material controlling mechanism 6 and material guide mechanism 3 to by Near and far moves from the direction of body of heater 4.In order to which by carrying material controlling mechanism 6, material guide mechanism 3 is comparatively safe, is securely disposed at shifting On moving platform 7, suitable support frame or fixed mount are installed on mobile platform 7.It is easy-to-understand to, in the base portion of support frame Multiple wheels are installed, neatly to change the position of the relative body of heater 4 of material controlling mechanism 6, material guide mechanism 3, meanwhile, also to be multiple Body of heater shares a set of material controlling mechanism 6, material guide mechanism 3 and mobile platform 7 and provides possibility, you can to realize in batches to multiple stoves Body 4 supplies outside material.

Lifting drive is installed on mobile platform 7, for moving material controlling mechanism 6 and material guide mechanism 3 along the vertical direction Position.This lifting drive can adopt manually so that material controlling mechanism 6 and material guide mechanism 3 move up and down, but The device of the type of drive such as motor can also be used.In addition, mobile platform 7 also includes WidFin mechanism 9, for feeding machine When structure 1 and material guide mechanism 3 dock, mutual relative distance can be adjusted by a small margin.In the present embodiment, WidFin machine Structure 9 has the handle for being made for industry human users, by rotational handle, drives material controlling mechanism 6, material guide mechanism 3 to produce by a small margin Displacement.Thus, WidFin mechanism 9 can realize that the position of material controlling mechanism 6, material guide mechanism 3 in the horizontal direction changes so that Material guide mechanism 3 is in suitable position, is easy to dock with the sealing of feeding mechanism 1, meanwhile, it is right that material guide mechanism 3 is reduced as much as possible Feeding mechanism 1 is extruded and collided, and improves the security and convenience of butt-joint operation.

Other variations

Above with respect to concrete structure of the present utility model, however it is not limited to above-mentioned embodiment and variation, do not departing from this Various modifications can be carried out in the range of utility model purport.

The material supply arrangement realize one of crucial behave of its function be installed in the inner side of guide shell 10, outside and its The internal path 2 that feeds intake, as the main component outside body of heater 4, such as feeding mechanism 1, material guide mechanism 3 and material controlling mechanism 6 etc., Its structure can make the Optimal improvements different from present embodiment.In another embodiment, material controlling mechanism 6 can not include Helixes feed equipment 62, or evade the accurate material controlling mode for being designed to other forms, such as, barrel 61 can also carry realization Control the mechanism of blanking amount.It so can at least reduce the height of material controlling mechanism 6.

Doper is installed in the suitable position of the guide receiving portion 302 of material guide mechanism 3, the doper can pass through conjunction Dopant is positioned in guide path 303 by the mode of reason, and dopant is together transferred into inside body of heater 4 in company with outside material. In addition, the structure and function of material guide mechanism 3, it is also possible to other modes are achieved, such as, filled using conveyer belt, vibrator etc. Put realization and material is delivered to feeding mechanism 1, while being precisely controlled for blanking amount can also be realized.

Intelligent control system is installed on mobile platform 7, passes through intelligent control system, it is possible to achieve material guide mechanism 3 with The adaptive docking of feeding mechanism 1, and long-range control can be realized, provided for the intelligent charging of single crystal growing furnace and inspire thinking.

The material supply arrangement could be applicable to the different internal structures of body of heater 4, refer in particular to the different crucible of structure 5.Crucible 5 shown in Fig. 1 is commonly referred to as common crucible, and using common crucible as shown in Figure 1, silicon single crystal rod 12 can only carried When drawing device 13 is promoted to appropriate location A, the material supply arrangement could be used to be fed, do not realize real meaning On continuous crystal-pulling.If changing common crucible into double crucibles, or it is the quartz glass crucibles with weir body structure, and to described Material supply arrangement carries out appropriate structure and improved, such as, the set location or structure of the path 2 that feeds intake are adjusted, should also belong to this The protection domain of utility model.

In addition to the isolating valve 43 outside bell 44, in material guide mechanism 3 and material controlling mechanism 6 and joint, resistance can also be added The gate valve that material is discharged in blocking cylinder 61, beneficial to loading material into barrel 61 in advance.

Embodiment 2

The present embodiment is provided using above-mentioned material supply arrangement, the material supply arrangement especially shown in Fig. 1, to body of heater 4 The method that material is supplied in internal crucible 5.Its specific operating process is as follows：

The relative installation of material guide mechanism 3 and material controlling mechanism 6 on mobile platform 7 is adjusted, and completes the He of material guide mechanism 3 The sealing docking of material controlling mechanism 6.Drive mobile platform 7 close to the direction of feeding mechanism, complete material guide mechanism 3 and feeding mechanism 1 sealing docking.Afterwards, the material supply arrangement outside bell 44 is at least pointed to be vacuumized, hunted leak.If in body of heater 4 The silicon single crystal rod 12 of the existing liquid level of draw-out crucible 5 in portion, when silicon single crystal rod 12 is lifted higher than location A by pulling apparatus 13, material Feeding path 101 can be just delivered to.

Isolating valve 43 is opened, feeding path 101 is moved to the lower limit, and is docked with the path 2 that feeds intake.Drop guide funnel 3031 are moved to splicing position, meanwhile, guide discharging portion 3033 docks with the feeding pan feeding portion 1012 of feeding path 101.So, lead Material path 303, feeding path 101 and the path 2 that feeds intake form outside material carrying path, and material controlling mechanism 6 is with controllable speed Outside material is supplied to the carrying path, outside material is fallen into the crucible 5 inside body of heater 4, sustainable supply material, until plus Expect that operation is completed.

Embodiment 3

The present embodiment provides a kind of crystal growth system, including at least body of heater 4, and the crucible inside body of heater 4 5.Crucible 5 as described above is used to take up outside material, and outside material is fused into liquid in crucible 5.Especially, this crystal life Long system also includes above-mentioned material supply arrangement, and generally speaking, the material supply arrangement transmits the outer of controlled amounts to crucible Portion's material.

Claims (21)

1. material supply arrangement, it is characterised in that for the supply material into body of heater (4) internal crucible (5), the material confession Include feeding mechanism (1) and at least one path that feeds intake (2) to equipment, the feeding mechanism (1) has material from body of heater (4) The internal feeding path (101) of outside input body of heater (4), it is internal that at least one path that feeds intake (2) is located at the body of heater (4) And, the feeding path (101) docks at least one path that feeds intake (2) with the crucible (5) relatively, material warp is described to feed Expect that path (101) imports at least one path that feeds intake (2) and inputs the crucible (5) by least one path that feeds intake (2) In.

2. material supply arrangement according to claim 1, it is characterised in that there is opening (41), institute on the body of heater (4) Feeding mechanism (1) the docking opening (41) is stated, the feeding path (101) can be relative at least one path that feeds intake (2) extend or recall, the feeding path (101) in extended position through it is described opening (41) and with the path that feeds intake (2) it is connected.

3. material supply arrangement according to claim 2, it is characterised in that the feeding mechanism (1) also includes feeding and held Receive portion (102), the feeding receiving portion (102) is arranged at that the body of heater (4) is outside, and the feeding path (101) is recalling position The feeding receiving portion (102) is contained in when putting.

4. material supply arrangement according to claim 3, it is characterised in that offered on the feeding receiving portion (102) Blow vent.

5. material supply arrangement according to claim 3, it is characterised in that the feeding mechanism (1) can also including length With the feeding pars contractilis (105) of telescopic variation, opening (41) place of the body of heater (4) has isolating valve (43), and the feeding is stretched Contracting portion (105) is sealedly attached between the feeding receiving portion (102) and the isolating valve (43).

6. material supply arrangement according to claim 5, it is characterised in that the isolating valve (43) is connected for cooling down institute State the water circulation system of isolating valve (43).

7. the material supply arrangement according to any one of claim 3 to 6, it is characterised in that the feeding mechanism (1) is also Feeding driver (104) including being mechanically connected to the feeding path (101), the feeding driver (104) are arranged at institute The side of feeding receiving portion (102) is stated, for driving the feeding path (101) to extend or recalling.

8. material supply arrangement according to claim 7, it is characterised in that the upstream end of the feeding path (101) is set The blanking funnel (1015) for receiving material is put, the outside of the feeding path (101) has feeding fixed cover (1013), institute State feeding fixed cover (1013) and the feeding driver (104) is connected by feeding sliding block (1041).

9. material supply arrangement according to claim 8, it is characterised in that outside feeding path (101) side wall with Cushion (1014) is filled at least part region between feeding fixed cover (1013).

10. material supply arrangement according to claim 1 or 2, it is characterised in that the path that feeds intake (2) includes relative Feed intake and entrance and feed intake outlet, the outlet that feeds intake is close to the crucible (5), and the porch that feeds intake is with the funnel that feeds intake (203), the feeding path (101) is docked by the funnel that feeds intake (203) with the path that feeds intake (2).

11. material supply arrangement according to claim 10, it is characterised in that the base portion of the funnel that feeds intake (203) is set The fixed block that feeds intake (204) is put, the path that feeds intake (2) is maintained at body of heater (4) inside and caused by the fixed block that feeds intake (204) The path that feeds intake (2) is relative with the crucible (5).

12. material supply arrangement according to claim 3, it is characterised in that also including material guide mechanism (3), the guide Mechanism (3) is by the material transmission to the feeding mechanism (1).

13. material supply arrangement according to claim 12, it is characterised in that the feeding mechanism (1) also includes feeding Docking section (103), the feeding docking section (103) are arranged at the sidepiece of the feeding receiving portion (102), the feeding receiving portion (102) the feeding docking section (103) is connected, the feeding docking section (103) is docked with the material guide mechanism (3).

14. material supply arrangement according to claim 13, it is characterised in that the material guide mechanism (3) includes being connected Guide receiving portion (302) and guide docking section (301), the guide docking section (301) be arranged at the guide receiving portion (302) sidepiece, the guide receiving portion (302) dock the feeding docking section (103).

15. material supply arrangement according to claim 14, it is characterised in that the guide receiving portion (302) includes leading Expect path (303) and guide drive device (304), the guide drive device (304) connects the guide path (303), institute State guide path (303) and be built in the guide receiving portion (302), the guide drive device (304) is used to drive described lead Material path (303) docks the feeding path (101) and is withdrawn into the inside of the guide receiving portion (302).

16. material supply arrangement according to claim 15, it is characterised in that the guide path (303) includes guide Pan feeding portion (3032) and guide discharging portion (3033), the guide pan feeding portion (3032) open up guide feeding mouth (3034), led Expect that feeding mouth (3034) place sets drop guide funnel (3031), in the presence of the guide drive device (304), the guide leads to Road (303) the drive drop guide funnel (3031) is moved to the lower section of guide docking section (301), the guide discharging portion (3033) Dock the feeding path (101).

17. material supply arrangement according to claim 14, it is characterised in that also including material controlling mechanism (6), the material controlling Mechanism (6) includes barrel (61) and helixes feed equipment (62), and the discharging opening of the barrel (61) connects the screw feeder dress Put (62), the helixes feed equipment (62) is used to supply material to the guide docking section (301).

18. material supply arrangement according to claim 17, it is characterised in that the helixes feed equipment (62) includes giving Material portion (621) and feed drive division (622), the feed drive division (622) drives the feed portion (621) to rotate, described to give Material portion (621) is quantitative to supply material to the guide docking section (301), and the barrel (61) connects the feed portion (621).

19. material supply arrangement according to claim 18, it is characterised in that the feed portion (621), which has, to be fed into Mouth (6211) and feed-stock outlet (6212), the feed entrance (6211) dock the discharging opening of the barrel (61), the feed Export (6212) and dock the guide docking section (301), feeding screw rod (6213) is set inside the feed portion (621), it is described Arrangement feed screw thread (6214) on feeding screw rod (6213), by being fed, screw thread (6214) is quantitative to lead the barrel (61) to described Expect docking section (301) supply material.

20. material supply arrangement according to claim 12, it is characterised in that also including mobile platform (7), the movement Platform (7) is at least used to carry the material controlling mechanism (6) and changes the position of the relatively described body of heater (4) of the material controlling mechanism (6).

21. crystal growth system, it is characterised in that including：

Body of heater (4)；

Crucible (5), the crucible (5) is arranged on the body of heater (4) inside, for containing material；And

Material supply arrangement as any one of claim 1 to 20, the material supply arrangement are used to supply to crucible Material.