CN109306516A - Material delivery system and crystal growth system - Google Patents
Material delivery system and crystal growth system Download PDFInfo
- Publication number
- CN109306516A CN109306516A CN201710625399.6A CN201710625399A CN109306516A CN 109306516 A CN109306516 A CN 109306516A CN 201710625399 A CN201710625399 A CN 201710625399A CN 109306516 A CN109306516 A CN 109306516A
- Authority
- CN
- China
- Prior art keywords
- feeding
- access
- guide
- delivery system
- feed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 308
- 239000013078 crystal Substances 0.000 title claims abstract description 42
- 230000007246 mechanism Effects 0.000 claims abstract description 159
- 238000001816 cooling Methods 0.000 claims abstract description 7
- 230000008676 import Effects 0.000 claims abstract description 3
- 238000003032 molecular docking Methods 0.000 claims description 55
- 238000007599 discharging Methods 0.000 claims description 28
- 235000021050 feed intake Nutrition 0.000 claims description 20
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 14
- 229910052710 silicon Inorganic materials 0.000 abstract description 14
- 239000010703 silicon Substances 0.000 abstract description 14
- 230000008569 process Effects 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 24
- 239000007789 gas Substances 0.000 description 15
- 229910052786 argon Inorganic materials 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000010586 diagram Methods 0.000 description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 238000007664 blowing Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000002210 silicon-based material Substances 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000012840 feeding operation Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000011214 refractory ceramic Substances 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 238000013475 authorization Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000001755 vocal effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Material delivery system disclosed by the invention, for supplying material in the crucible to furnace interior, material delivery system includes feeding mechanism and at least one access that feeds intake, feeding mechanism has material from the feeding access of furnace body external input furnace interior, at least one access that feeds intake is located at furnace interior and opposite with crucible, feeding access docks at least one described access that feeds intake, and material imports at least one access and by least one access input crucible that feeds intake of feeding intake through feeding access.Crystal growth system disclosed by the invention, including furnace body；Crucible, crucible are arranged in furnace interior, for containing material；And material delivery system as described above, material delivery system are used to supply material to crucible.Present invention accomplishes the requirements of big feeding quantity, and the process of charging can be parallel with silicon single crystal rod cooling procedure, shorten feed time, improve the production efficiency of silicon single crystal rod, while improving the stability and safety of external charging.
Description
Technical field
The invention belongs to technical field of single crystal growth, are related to the ancillary equipment of crystal growth, and in particular to a kind of material confession
To device, a kind of crystal growth system with the material delivery system is further related to.
Background technique
Polysilicon is the main raw material(s) for producing photovoltaic product and semiconductor product.Mound carat Bielski
(Czochralski, referred to as Cz) method is one of most common preparation method of monocrystalline silicon, and high-purity solid polycrystalline silicon raw material is in crystalline substance
Body generates fusing in the crucible in furnace (single crystal growing furnace) and forms melt, and decline seed crystal makes itself and the melt contacts in rotation crucible, so
Afterwards, seed crystal is slowly pulled out, melt solidifies to form silicon single crystal rod around seed crystal.
Traditional Cz single crystal growing furnace needs the production for a new furnace to do many many and diverse after completing furnace raw material crystal pulling production
The processes such as preliminary preparation, including blowing out is cooling, furnace body is cleaned, stocked up, charging, vacuumizing, hunting leak, material.These early periods
Time-consuming and laborious process seriously restricts the production efficiency of Straight pull monocrystalline silicon.In addition, the polycrystalline silicon material (mostly block material) of filling
Volume-diminished after fusing, so that the utilization rate of crucible reduces.In order to improve the utilization rate of crucible, increases overall inventory, then need
Charging to be repeated several times into crucible.This is also one of the effective measures for reducing crystal pulling cost.Currently, Straight pull monocrystalline silicon growing
Mainstream feeding device be the built-in feeder of concubine.This feeder since single charge amount is small (being usually no more than 30kg),
Need to carry out multiplicating charging, manual operation is many and diverse and inefficiency；And vacuumize process will be carried out after charging every time, it must
The isolation of palpus frequent progress concubine and purification, time waste seriously, also increase the risk of material pollution.
In order to meet the technological deficiency for increasing the requirement of overall inventory and making up built-in feeder, has patent disclosure
To the external feeding device of single crystal growing furnace conveying polycrystalline silicon material.Application publication number is that the patent application of CN1153230A provides a kind of furnace
The solid material delivery system of son, the feed pipe of the feeding system can selectively change feed pipe outlet relative to crucible
The radial position at top avoids splashing material, improves the utilization rate of thermal energy, but structure is complicated for feeding system, complicated operating mechanism is deposited
It is difficult to be precisely controlled in the positioning of the risk of feed blocking, and feed pipe outlet.Authorization Notice No. is CN102312285B's
Patent provides a kind of external continuous dosing mechanism for single crystal growing furnace, has blowing inner tube and blowing outer tube, polycrystalline silicon material is by putting
Material inner tube is delivered to blowing outer tube, and which limits the internal diameters of blowing inner tube, are not suitable for the biggish block material of partial size；In addition it throws
Expect that the whole height of mechanism is higher, is unfavorable for dosing operation, and increase operating safety risks.Application publication number is
The technological deficiency that the patent application of CN106400105A discloses external charging device is similar with patent CN102312285B, and
And the inventory and rate of feeding of polycrystalline silicon material are difficult to effectively control.
Therefore, in order to increase overall inventory, crystal pulling cost is reduced, single crystal growing furnace furnace external feeding device is as the overall throwing of raising
The main auxiliary tool of doses, optimizes it and improvement is particularly important.
Summary of the invention
The present invention is difficult to the technological deficiency of continuous charging for existing single crystal growing furnace furnace external feeding device, provides a kind of material confession
To device.This material delivery system can realize having for polycrystalline silicon material rate of feeding and inventory with single crystal growing furnace Dock With Precision Position
Effect control, can reduce the whole height of material delivery system, be easy to feeding operation, improve the safety and just of feeding operation
Benefit saves operator and the accounting that curtails the feeding hours, and reduces manufacturing cost.
The present invention also provides a kind of crystal growth systems with above-mentioned material delivery system.
A kind of scheme of the present invention is: material delivery system, for supplying material in the crucible to furnace interior,
The material delivery system includes feeding mechanism and at least one access that feeds intake, and the feeding mechanism has material outside furnace body
Portion input furnace interior feeding access, at least one described access that feeds intake be located at the furnace interior and with the crucible phase
Right, the feeding access docks at least one described access that feeds intake, material through the feeding access import at least one feed intake it is logical
Road is simultaneously inputted in the crucible by least one described access that feeds intake.
Further, there is opening, the feeding mechanism docks the opening, and the feeding access can phase on the furnace body
For it is described at least one feed intake access extend or recall, the feeding access in extended position pass through it is described opening and with institute
The access that feeds intake is stated to be connected.
Further, the feeding mechanism further includes feeding receiving portion, and the feeding receiving portion is set to outside the furnace body
Portion, the feeding access are contained in the feeding receiving portion in withdrawn position.
One of preferred embodiment as technical solution of the present invention offers blow vent in the feeding receiving portion.?
In implementation of the invention, the blow vent, which includes at least, evacuates port, argon gas port and leak detection port.The evacuation port connection
Pumped vacuum systems, pumped vacuum systems is extracted out the air inside the material delivery system by evacuating port, so that material supplies
Certain vacuum degree is kept to device inside.The argon gas port is connected to argon gas feed system, and argon gas feed system passes through argon gas
Port is to providing argon gas inside material delivery system.The leak detection port connects gas leakage hunting apparatus, for detecting material supply
The air-tightness of device.
Further, the feeding mechanism further includes that length can be opened with the feeding pars contractilis of telescopic variation, the furnace body
There is isolating valve, the feeding pars contractilis is sealedly attached between the feeding receiving portion and the isolating valve at mouthful.
One of preferred embodiment as technical solution of the present invention, the isolating valve connection is for cooling down the isolating valve
Water circulation system.
Further, the feeding mechanism further includes the feeding driver for being mechanically connected to the feeding access, described to feed
Material driver is set to the side of the feeding receiving portion, for driving the feeding access to extend or recalling.
The upstream end of one of preferred embodiment as technical solution of the present invention, the feeding access is arranged for receiving
The outside of the blanking funnel of material, the feeding access has feeding fixing sleeve, and the feeding fixing sleeve is connected by feeding sliding block
Connect the feeding driver.
One of preferred embodiment as technical solution of the present invention, the feeding via sidewall outside and feeding fixing sleeve
Between at least partly region in fill buffer layer.
Further, the access that feeds intake includes opposite feed intake entrance and the outlet that feeds intake, and described feed intake exports close to institute
Crucible is stated, the inlet that feeds intake has the funnel that feeds intake, and the feeding access passes through funnel and the access that feeds intake of feeding intake
Docking.
The fixation that feeds intake is arranged in the base portion of one of preferred embodiment as technical solution of the present invention, the funnel that feeds intake
The access that feeds intake is maintained at furnace interior and makes feed intake access and the crucible phase by block, the fixed block that feeds intake
It is right.
Further, the material delivery system further includes material guide mechanism, and the material guide mechanism is by the material transmission
To the feeding mechanism.
Further, the feeding mechanism further includes feeding docking section, and the feeding docking section is set to the feeding and holds
Receive the side in portion, the feeding receiving portion is connected to the feeding docking section, and the feeding docking section is docked with the material guide mechanism.
One of preferred embodiment as technical solution of the present invention, the material guide mechanism include that the guide being connected accommodates
Portion and guide docking section, the guide docking section are set to the side of the guide receiving portion, and the guide receiving portion docks institute
State feeding docking section.
One of preferred embodiment as technical solution of the present invention, the guide receiving portion include guide access and guide
Driving device, the guide driving device connect the guide access, and the guide access is built in the guide receiving portion, institute
Guide driving device is stated for driving the guide access to dock the feeding access and being withdrawn into the interior of the guide receiving portion
Portion.
One of preferred embodiment as technical solution of the present invention, the guide access include guide pan feeding portion and guide
Discharging portion, guide pan feeding portion open up guide feeding inlet, and drop guide funnel is arranged at guide feeding inlet, drive in the guide
Under the action of device, the guide access drives the drop guide funnel to be moved to the lower section of guide docking section, the guide discharging
Dock the feeding access in portion.
One of preferred embodiment as technical solution of the present invention, the material delivery system further include material controlling system,
The material controlling mechanism includes barrel and helixes feed equipment, and the discharge port of the barrel is connected to the helixes feed equipment, described
Helixes feed equipment is used to supply material to the guide docking section.
One of preferred embodiment as technical solution of the present invention, the helixes feed equipment include feed portion and feed
Driving portion, the feed driving portion drive the feed portion to rotate, and the feed portion is quantitative to guide docking section aliment
Material, the barrel are connected to the feed portion.
One of preferred embodiment as technical solution of the present invention, the feed portion have feed entrance and are fed out
Mouthful, the feed entrance docks the discharge port of the barrel, and the feed-stock outlet docks the guide docking section, the feed portion
Feeding screw rod is arranged in inside, and arrangement feed screw thread on feeding screw rod, the barrel is by feed screw thread quantitatively to the guide pair
Socket part supplies material.
Further, the material delivery system further includes mobile platform, and the mobile platform is at least used to carry institute
It states material controlling mechanism and pacifies and change the position that the relatively described furnace body is pacified by the material controlling mechanism.
Another technical solution of the present invention is crystal growth system, comprising: furnace body；Crucible, the crucible are set
It sets in furnace interior, for containing material；And the material delivery system, the material delivery system are used to supply to crucible
Material.
Compared with existing feeding device, material delivery system of the present invention is at least had the following beneficial effects.
Material delivery system of the present invention includes feeding mechanism, material guide mechanism, material controlling mechanism and is set in advance in furnace body
The internal access that feeds intake.Feeding mechanism is fixedly mounted on outside furnace body, and is docked with material guide mechanism.Material guide mechanism, material controlling mechanism
Installation on a mobile platform, may be implemented to dock with the feeding mechanism on multiple furnace bodies.Material controlling mechanism passes through helixes feed equipment
External material dosing is delivered to material guide mechanism.It the guide access of material guide mechanism, the feeding access of feeding mechanism and presets
The access that feeds intake above crucible forms external material carrying path, and the external material transmission in material controlling mechanism is intracorporal to furnace
In crucible.In addition, the setting of isolating valve, to protect the atmosphere of furnace interior unaffected.The present invention can not need blowing out
Under the conditions of realize and convey external material into crucible, production efficiency greatly improved without isolation, purification in furnace body concubine, shortens
Charging accounting time, while the utilization rate of quartz glass crucibles is also improved, reduce the cost of charging link.
Furthermore feeding is shortened so that the length of feeding access shortens by fixed feeding area access preparatory on guide shell
Stroke of the access between upper limit, lower limit reduces the height of feeding mechanism outside bell, reduces the weight of feeding mechanism
Heart position.It is docked in this way with material guide mechanism in lower station convenient for feeding mechanism, is more advantageous to and improves material of the present invention
The stability and safety of feedway operation.In addition, compared with the material delivery system for not presetting the access that feeds intake, this hair
It is bright to be not necessarily to drive silicon single crystal rod to go upward to higher position until pulling apparatus, external object can be added into quartz glass crucibles
Material, significantly shortens the waiting time, improves the production efficiency of silicon single crystal rod.
In short, material delivery system of the present invention meets the requirement of big feeding quantity, single charge amount be can achieve
150kg or more；Meanwhile the defect of the built-in feeder of concubine is compensated for, feed primary completion, in the premise for meeting big feeding quantity
Under, isolation and purification number can be reduced to the maximum extent, and furnace inner environment caused by being isolated repeatedly is avoided to pollute.It is of the present invention
The purification of material delivery system, charging process and silicon single crystal rod is cooling or pulling process can be parallel, consumption is significantly when the process that feeds
It reduces.
Detailed description of the invention
Fig. 1 is the synoptic diagram that the material delivery system for the access that feeds intake is arranged in furnace body.
Fig. 2 is that the feed alley of feeding mechanism is in the synoptic diagram of extension state.
Fig. 3 is that the synoptic diagram for the access that feeds intake is docked in the feed alley of feeding mechanism.
Fig. 4 is the synoptic diagram of the feeding driver of feeding mechanism.
Fig. 5 is that the guide access of material guide mechanism is in the synoptic diagram for accepting external material position.
Fig. 6 is the synoptic diagram of the helixes feed equipment of material controlling mechanism.
Fig. 7 is the synoptic diagram that access is mounted on inside guide shell that feeds intake.
Fig. 8 is the synoptic diagram that access is arranged on the outside of guide shell that feeds intake.
Description of symbols:
1. feeding mechanism；101. feeding access；1011. feeding discharging portion；1012. feeding pan feeding portions；1013. feeding is fixed
Set；1014. buffer layer；1015. blanking funnel；102. feeding receiving portion；103. feeding docking section；104. feeding driver；
1041. feeding sliding block；1042. feeding driving motor；1043. feeding screw rod；1044. feeding guide rail；105. feeding pars contractilis；
2. feed intake access；201. feed intake pan feeding portion；202. feed intake discharging portion；203. feed intake funnel；204. feed intake fixed block；
3. material guide mechanism；301. guide docking sections；302. guide receiving portions；303. guide accesses；304. guides driving dress
It sets；3031. drop guide funnel；3032. guide pan feeding portions；3033. guide discharging portion；3034. guide feeding inlet.
4. furnace body；41. opening；42. pedestal；43. isolating valve；44. bell；45. furnace tube；
5. crucible；
6. material controlling mechanism；61. barrel；62. helixes feed equipment；621. feed portions；622. feed driving portions；6211. giving
Expect entrance；6212. feed-stock outlet；6213. feeding screw rod；6214. being fed screw thread；63. cover；
7. mobile platform；9. WidFin mechanism；10. guide shell；11. heater；12. silicon single crystal rod；13. lifting dress
It sets；14. guide observation window；15. feeding observation window.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.For saying for the direction in verbal description
Bright, " upper and lower " refers to that on the basis of present invention up and down direction shown in the drawings, " upstream, downstream " refers to the moving direction with material
On the basis of.In addition, " inside and outside " refer to furnace body, feeding access etc. constitute component internal-external spatial position on the basis of.But this
Invention is not construed as limited in such a way that the direction illustrates.
Embodiment 1
Material delivery system described in the present embodiment, for being thrown from outside furnace body 4 into the crucible 5 being arranged inside furnace body 4
Add material.In the present embodiment, in case of no particular description, furnace body 4 refers to can be lifted from crucible 5 using Cz method
The single crystal growing furnace of silicon single crystal rod 12 out.This single crystal growing furnace has the diameter lesser elongate cylindrical shape pair cooling for silicon single crystal rod 12
Room is equipped with the pulling apparatus 13 for upward pulling single crystal silicon rod 12 in the concubine.In addition, this single crystal growing furnace further includes setting
Set the bell 44 and furnace tube 45 below concubine.
Bell 44 connects concubine and the lower section of concubine is arranged in, and usually has certain crooked radian.Described in the present embodiment
The part-structure of material delivery system, such as feeding mechanism 1, are fixed on bell 44.Bell 44 is generally arranged in view of concubine
Center at, and position is relatively fixed, and the feeding mechanism 1 is preferably mounted at the side of bell 44.In order to which external material is led to
It crosses feeding mechanism 1 to be sent into inside furnace body 4, more precisely, material is fallen into the crucible 5 inside furnace body 4, in 44 side of bell
Suitable location offer opening 41, the feeding access 101 of feeding mechanism 1 can protrude into inside furnace body 4.As for opening 41 in furnace
Open up number on lid 44, it is preferable that an opening 41 can be at least set on bell 44.In addition, being installed at opening 41
There is pedestal 42, so that feeding mechanism 1 is relatively firmly mounted on pedestal 42.Due to needing to keep special gas inside furnace body 4
Atmosphere, in order not to destroy 4 internal atmosphere of furnace body, prevents air from entering furnace generally to inert gas, such as argon gas etc. is passed through inside it
Body 4 causes the pollution of furnace body 4, and isolating valve 43 is also installed at opening 41.The setting of isolating valve 43 can control opening for opening 41
It closes, and obstructs 4 internal atmosphere of furnace body and external environment.In view of 5 zone melting material of crucible, higher temperature is needed, and is open
Often containing the gasket of rubber material in pedestal 42, isolating valve 43 near 41, gasket is heated in order to prevent is easy to aging cause
Make do not have satisfactory high leakproofness, pedestal 42, isolating valve 43 are respectively communicated with water circulation system, drop to play to it
The effect of temperature.
The lower section of bell 44 is arranged in furnace tube 45, and part more than working face is the cylindrical body being relatively large in diameter, in furnace tube 45
Be internally provided with crucible 5, for heating crucible 5 with the heater 11 of 5 materials inside of fusion crucible, and in the top of crucible 5
Guide shell 10.The crucible 5 typically refers to quartz glass crucibles, and for accepting external material, external material melts in crucible 5
Turn to liquid material.
As shown in Figure 1, it includes material controlling mechanism 6, material guide mechanism 3, feeding mechanism 1 that the main body of this material delivery system, which is constituted,
With the access 2 that feeds intake being embedded in inside furnace body 4.In addition, it may further comprise mobile platform 7.Material controlling mechanism 6 and material guide mechanism 3 can be with
It is mounted on mobile platform 7, with mobile platform 7 close to or far from furnace body 4, to change the position of opposite furnace body 4.Feeding mechanism 1
It is fixed at outside furnace body 4, opening 41 is provided on corresponding bell 44, the feeding access 101 in feeding mechanism 1 can be through
Opening 41 stretches to inside furnace body 4, and docks with the access 2 that feeds intake.For the function of constituting from above-mentioned each main body is realized, material controlling machine
Structure 6 can temporarily store material, and material is quantitatively conveyed external material to material guide mechanism 3 in a controlled manner.Material guide mechanism 3 is used
It in the quantitative material that undertaking material controlling mechanism 6 inputs, and is docked with feeding mechanism 1, by material transmission to feeding mechanism 1.Feeder
Structure 1 is for realizing material to 4 delivered inside of furnace body.The access 2 that feeds intake is arranged inside furnace body 4, docks with feeding mechanism 1 and by object
Material is further transmitted into crucible 5, completes charging operation.
Material controlling mechanism
Material controlling mechanism 6 includes barrel 61, and the helixes feed equipment 62 below barrel 61 is arranged in.Barrel 61 is in material
Material can be temporarily accommodated in the transported time, and barrel 61 can be divided into columned main part and be located at below main part
Cone portion.Certainly, barrel 61 can also be designed as other shapes according to practical situations.The discharge port of barrel 61 is provided with
The lower end of cone portion, and its feeding inlet is opposite with its discharge port, and the upper end of main part is arranged in.Barrel 61 has mutually fits therewith
The cover 63 matched, and the upper end of main part is arranged in cover 63.For the ease of loading material into barrel 61, the cover 63
Set-up mode is preferably fast disassembly type, while can rapidly realize the sealing of barrel 61, avoids the material in barrel 61 by week
The pollution in collarette border.When conveying material to material guide mechanism 3, cover 63 can keep airtight conditions relative to outer gas.
Barrel 61 and cover 63 can be selected stainless steel metal and be made, in order to avoid the material into barrel 61 introduces metal
Impurity is provided with liner on the inner surface of barrel 61 and cover 63, is connect with obstructing material with barrel 61,63 surface of cover
Touching.The liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can be by way of bonding
The inner surface of barrel 61 and cover 63 is set.
In addition, evacuation port can be offered on barrel 61, port connection vacuum evacuation device (not indicating in figure) is evacuated,
Normally, vacuum valve is installed on the vacuum-pumping tube road that connection evacuates port, to control the vacuum degree inside barrel 61.To material
The purpose that cylinder 61 vacuumizes is, so that material controlling mechanism 6 keeps certain vacuum degree, prevents air from entering furnace body 4 and destroying furnace
Atmosphere inside body 4.
Material is fallen inside barrel 61 by gravity naturally, and material enters helixes feed equipment 62.Fig. 6 gives one
The structural schematic diagram of the preferred helixes feed equipment 62 of kind.Helixes feed equipment 62 includes feed portion 621 and feed driving portion
622.Feed portion 621 is cavity type structure, including feed entrance 6211 and feed-stock outlet 6212.It is fed entrance 6211 and barrel 61
Discharge port docking, the mode about docking, it is preferable that sealed at docking by flange.It is fed entrance 6211 and material
The discharge port docking of cylinder 61 can also be in such a way that other may be implemented, for example be bolted, or welding etc..In barrel 61
Material by feed entrance 6211 enter feed portion 621 the cavity in.In practical applications, feed entrance 6211 is preferred
For tubular structure, the top of cavity described in feed portion 621 is set.And the chamber described in feed portion 621 is arranged in feed-stock outlet 6212
The lower part of body is sent to material guide mechanism 3 through feed-stock outlet 6212 into the material in cavity described in feed portion 621.It is corresponding preferred
Ground, feed-stock outlet 6212 are preferably tubular structure.Feed portion 621 also can be selected stainless steel material and be made.Referring to the interior of barrel 61
Portion's set-up mode, the cavity described in feed portion 621, feed entrance 6211, feed-stock outlet 6212 interior surface on liner is set,
The liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can be set by way of bonding
Set the interior surface of the cavity described in feed portion 621, feed entrance 6211, feed-stock outlet 6212.
One feeding screw rod 6213 is installed, feed is distributed in the surface of feeding screw rod 6213 in the cavity described in feed portion 621
Screw thread 6214.It, should be according to the form of material and straight about feed screw thread 6214 in the arragement direction and density of feeding screw rod 6213
Diameter size, at the same be also contemplated that material controlling amount number determined.In general, feeding screw rod 6213 and feed screw thread thereon
6214 cross section is circle, i.e. distance of the outer rim of feed screw thread 6214 apart from cavity inner surface described in feed portion 621 is minimum.
There is the possibility to get stuck in the outer rim of feed screw thread 6214, influences the normal operation of feeding screw rod 6213.In order to avoid material card
In the gap for connecing the cavity inner surface described in the outer rim of feed screw thread 6214 and feed portion 621, in practical applications, need to consider
The diameter and shape of material.In this embodiment, it is preferred that the material is cobbing, regular particulate material or powder materials
Especially suitable helixes feed equipment 62 gives accurate material controlling.
It is fed driving portion 622 and connects feeding screw rod 6213, the rotation for feeding screw rod 6213 provides external impetus.Feed drives
Dynamic portion 622, it is preferable that private can be selected to take the driving device of motor or synchronous motor or other realization identical functions.?
It is fed under the action of driving portion 622, feeding screw rod 6213 can be by rotating clockwise or counterclockwise, and feeding screw rod 6213 turns
Speed is equally controlled by feed driving portion 622.As specific preferred embodiment, there is control in feed driving portion 622
The controller of its working condition, for example it can be precisely controlled the revolving speed of feeding screw rod 6213, the start by set date of feeding screw rod 6213
Deng.Quantitative transmission of the material to material guide mechanism 3 is realized by the revolving speed of feeding screw rod 6213 in this way, to reach the mesh of accurate material controlling
's.In order to the material in cavity described in feed portion 621 to be timely discharged, material heap in the cavity described in feed portion 621 is avoided
Product squeezes, as shown in fig. 6, feed entrance 6211, feed-stock outlet 6212 are arranged along the long axis direction interval of feeding screw rod 6213,
That is after material is by the suitable stroke of the movement of feed entrance 6211, arrival is fed out under the action of feeding screw rod 6213
Mouthfuls 6212 position, through feed-stock outlet 6212 by material transmission to material guide mechanism 3.It follows that being fed entrance 6211, giving
The setting of 6212 relative positions of material outlet, has great importance to the realization of accurate material controlling purpose.
Material guide mechanism
Material guide mechanism 3 is docked with feed-stock outlet 6212, for accepting the quantitative material of the discharge of helixes feed equipment 62.Guide
Mechanism 3 includes guide docking section 301 and guide receiving portion 302.Wherein, guide receiving portion 302 is arranged in guide docking section 301
Side is connected with guide receiving portion 302.Guide docking section 301 is docked with feed-stock outlet 6212, and feed-stock outlet 6212 is discharged
Material guide receiving portion 302 is led by guide docking section 301.Being fed entrance 6211 is preferably tubular structure, meanwhile,
Liner is arranged in inner surface in guide docking section 301, and the liner can select quartz glass or other ceramic-like materials to be made,
Preferably, the interior surface of guide docking section 301 can be arranged in liner by way of bonding.Guide receiving portion 302 is one
Kind cavity type structural member, one end are docked with feeding mechanism 1, realize that material is transmitted to feeding mechanism 1.
In order to realize transmission of the material in guide receiving portion 302, as shown in Figure 1, being set in the inside of guide docking section 302
A guide access 303 is set, while guide driving device 304 is set in guide receiving portion 302.In guide driving device 304
Under the action of, guide access 303 does linear movement in guide receiving portion 302.In the present embodiment, guide driving device 304
Preferably cylinder or servo motor etc. or other the driving device of 303 linear movement of guide access may be implemented.Guide
Access 303 can give guide access 303 along the axial-movement of guide receiving portion 302, Fig. 5 and be in undertaking external material position
Schematic diagram.
Guide access 303 can choose metal material and be made, such as stainless steel, can be preferably provided on surface inside it
Liner, the liner can select quartz glass or other ceramic-like materials to be made, it is preferable that liner can pass through the side of bonding
The interior surface of guide access 303 is arranged in formula.As another preferred embodiment, guide access 303 can be selected directly
It is made of quartz glass or other ceramic-like materials, can not have to that the liner is arranged in 303 interior surface in this way.
Guide access 303 is arranged in guide receiving portion 302, including guide pan feeding portion 3032 and guide discharging portion 3033.
Guide pan feeding portion 3032 is located at the head (or saying it is upstream) of guide access 303, offers guide in guide pan feeding portion 3032 and enters
Material mouth 3034, when guide access 303, which is moved to, accepts external material position, material can enter guide feeding inlet 3034 and then fall
Enter in guide access 303.In order to preferably carry material, prevent from falling into the guide receiving portion 302 outside guide access 303
The cavity, it is preferable that drop guide funnel 3031, and the external profile diameter of drop guide funnel 3031 are set at guide feeding inlet 3034
Not less than the interior diameter of guide docking section 301.In addition, the interconnecting piece in guide docking section 301 and guide receiving portion 302, setting
One can observe the guide observation window 14 of 3031 shift position of drop guide funnel, and the work of material guide mechanism 3 is controlled convenient for operator
Make state.Guide discharging portion 3033 is located at the tail portion (or saying it is downstream) of guide access 303, when the feeding access of feeding mechanism 1
101 be in lower limit when, guide discharging portion 3033 is docked with feeding access 101.
As a preferred embodiment, as shown in Figure 1, material guide mechanism 3 is obliquely installed, material is in guide access 303
It is slid naturally by gravity.It needs as the tilt angle of material guide mechanism 3, especially guide access 303 in suitable range
Interior selection.If the tilt angle of guide access 303 is larger, material obtains biggish slip velocity, material in guide access 303
Will certainly the feeding access 101 to downstream cause certain impact；If the tilt angle of guide access 303 is smaller, material is being led
Expect that the slip velocity in access 303 is smaller, the time of charging may be extended to complete charging operation.Meanwhile holding in view of guide
The feeding docking section 103 of feeding mechanism 1 will also be docked by receiving portion 302.Therefore, the tilt angle selection of guide access 303 is a need
It wants comprehensive to consider the problems of, tilt angle shown in FIG. 1 is only the signal of embodiment, is not represented to the tilt angle
It is practical to limit.
Feeding mechanism
Feeding mechanism 1 is docked with the opening 41 on bell 44, and is fixedly mounted on pedestal 42, is used for material guide mechanism 3
Material be delivered to inside furnace body 4.Feeding mechanism 1 includes feeding receiving portion 102 and feeding docking section 103.Feeding receiving portion 102
It is the main part of feeding mechanism 1, is mounted on pedestal 42, and is docked with the fixation of opening 41.Pacify the inside of feeding receiving portion 102
External material can be delivered to the feeding access 101 inside furnace body 4 by dress.Feeding docking section 103 is arranged in the feeding receiving portion
102 side is connected with feeding receiving portion 102, and docks with guide receiving portion 301, and guide access 303 is movable to feeding
Docking section 103.As for the docking mode of feeding docking section 103 and guide receiving portion 301, preferably docked using flange, it can also
Using other docking modes, but regardless of which kind of docking mode, the leakproofness of docking should ensure that.
Feeding receiving portion 102 and feeding docking section 103 together constitute the Y-shaped structure of feeding mechanism 1.As shown in Fig. 2,
The center line of feeding receiving portion 102 is C1, and the center line of feeding docking section 103 is C2, has certain angle between C1 and C2
α.Angle α and the tilt angle of above-mentioned material guide mechanism 3 have it is certain be associated with, similarly, the value range of angle α there is still a need for
Comprehensively consider many factors.
Feeding mechanism 1 further includes feeding driver 104, specifically, feeding driver 104 is mounted on feeding receiving portion
On 102.Feeding driver 104 can drive feeding access 101 to move in feeding receiving portion 102.It should be noted that feeding
The movement of access 101 can be achieved using the prior art.Fig. 4 gives a kind of composition schematic diagram of feeding driver 104.
Feeding driver 104 includes the feeding driving motor 1042 for being mounted on 102 top of feeding receiving portion, and setting is accommodated in feeding
The feeding screw rod 1043 and feeding guide rail 1044 of 102 inner space of portion.It is arranged on feeding screw rod 1043 and feeding guide rail 1044
One feeding sliding block 1041, feeding sliding block 1041 can be moved synchronously along feeding screw rod 1043 and the realization of feeding guide rail 1044.It is feeding
Expect that there is screw thread on screw rod 1043, feeding driving motor 1042 drives feeding screw rod 1043 to rotate, while feeding sliding block 1041 has
Have threaded hole and be socketed on feeding screw rod 1043, feeding screw rod 1043 be changed into feeding sliding block 1041 on move down
It is dynamic.Since feeding access 101 is fixed on feeding sliding block 1041, feeding access 101 may be implemented same with feeding sliding block 1041
Moved further.
Movement of the feeding access 101 in feeding receiving portion 102 has the restriction of position, i.e., feeding access 101 is in feeding
The telescopic moving between upper limit, lower limit under the action of driver 104.The telescopic moving of this part includes feeding access 101
Extension and feeding access 101 recall.There is opening 41 on furnace body 4 as described above, the feeding mechanism 1 docks the opening
41, the feeding access 101 can extend or recall relative to the access 2 that feeds intake, and the feeding access 101 is in extended position
It is connected across opening 41 and with the access 2 that feeds intake.Here upper limit, which refers to that feeding access 101 is lifted up, to be reached
Extreme position, i.e. the extreme position recalled of feeding access 101.When feeding access 101 is in upper limit, feeding access 101
Lower end, or say it is feeding discharging portion 1011, the closing of the top in isolating valve 43, isolating valve 43 can obstruct in furnace body 4
Portion's atmosphere and external environment.Here lower limit refers to the extreme position that feeding access 101 can extremely be reached to decline (extension),
Position when i.e. feeding access 101 protrudes into 4 inside range of furnace body.When feeding access 101 is in lower limit, guide access
303 guide discharging portion 3033, which can move, extends to feeding receiving portion 102, and guide discharging portion 3033 is fed with feeding access 101
Expect that pan feeding portion 1012 is docked, the feeding discharging portion 1011 of feeding access 101 docks the pan feeding portion 201 that feeds intake for the access 2 that feeds intake.Separately
Outside, when feeding access 101 is in lower limit, the feeding pan feeding portion 1012 of feeding access 101 is in 103 center of feeding docking section
The lower section of line C2, the guide access 303 of material guide mechanism 3, the feeding access 101 of feeding mechanism 1 and is set in advance in the top of crucible 5
The access 2 that feeds intake form external material carrying path.External material in material controlling mechanism 6 can be sent to by the carrying path
In crucible 5 in furnace body 4.As a preferred embodiment, the appropriate site in feeding receiving portion 102 opens up feeding observation
Window 15 can observe guide discharging portion 3033 by feeding observation window 15 and dock with the feeding pan feeding portion 1012 of feeding access 101
The material transmission situation of situation and material at blanking funnel 1015.
Feeding access 101 includes feeding pan feeding portion 1012 and feeding discharging portion 1011.Feeding pan feeding portion 1012 and guide are logical
The guide discharging portion 3033 on road 303 docks.In feeding pan feeding portion 1012, blanking funnel 1015 is set.Outside 1015 edge of blanking funnel
Diameter is not less than the internal diameter of guide discharging portion 3033.Meanwhile the setting of blanking funnel 1015, to what is dropped out from guide discharging portion 3033
Material has certain blocking and buffer function, changes the motion path of material, prevents material from flying out locating for blanking funnel 1015
Region.In general, feeding access 101 is selected, quartz material is made or other refractory ceramics class materials are made.
In base portion (or saying it is lower section) setting feeding fixing sleeve 1013 of blanking funnel 1015, meanwhile, feeding fixing sleeve
1013 are in the outside in feeding pan feeding portion 1012.Feeding fixing sleeve 1013 connects the feeding driver by feeding sliding block 1041
104, under the action of feeding driver 104, the feeding access 101 carries out linear movement in feeding receiving portion 102.
In practical applications, feeding fixing sleeve 1013 can extend to certain length along the axis direction of feeding access 101, and feeding is fixed
Set 1013 can be used for protecting the feeding access 101 on the inside of it.Further, feeding fixing sleeve 1013 and feeding access 101 it
Between at least partly space fill buffer layer 1014, can be with filling flexible material, to provide better protection against feeding in buffer layer 1014
Access 101.
When feeding docking section 103 is docked with guide receiving portion 301, one inevitably is carried out to feeding receiving portion 102
Determine the extruding and collision of degree, and increases the load of feeding receiving portion 102.In order to alleviate this load, rigid active force is avoided
Damage to feeding mechanism 1 and furnace body 4, and also to better Butt sealing, in feeding receiving portion 102 close to pedestal 42
Position feeding pars contractilis 105 is set, i.e. feeding pars contractilis 105 is sealedly attached to the feeding receiving portion 102 and is isolated with described
Between valve 43.This feeding pars contractilis 105 has certain flexible ability, and can realize stretching for its length according to specific operating condition
Contracting variation, it is preferable that feeding pars contractilis 105 can be along 102 circumference of feeding receiving portion setting bellows or other play
The elastic device of identical effect.
In addition, as shown in Figure 1, opening up several in feeding receiving portion 102 and acting on different has blow vent.For example, opening
If blow vent include at least evacuate port, argon gas port and leak detection port.Evacuation port and barrel in feeding receiving portion 102
Evacuation port series connection on 61, and is connected with pumped vacuum systems, can make material delivery system described in the present embodiment to
When furnace body 4 is fed, certain vacuum degree is kept.Argon gas port is connected to argon gas feed system, by argon gas port to the material
Feedway is filled with certain argon gas, so that the atmosphere inside furnace body 4 is identical as in the material delivery system.It should be readily appreciated that
Ground, leak detection port is for detecting the leakproofness docked between each component of the material delivery system.
Feed intake access
The access 2 that feeds intake is embedded in inside furnace body 4, for accept feeding access 101 conveying material, and by material add to
In crucible 5.About installation site of the access 2 inside furnace body 4 that feed intake, this part provides three kinds of preferred embodiments.
As an implementation, as shown in figures 1 and 3, the access 2 that feeds intake is mounted on the inside of guide shell 10.It can from Fig. 3
To find out, region that the access 2 that feeds intake is arranged between silicon single crystal rod 12 and guide shell 10.In general, guide shell 10 is annular
Structural member has interior screen and external screen.The inside of guide shell 10 described in this part, that is, the inside that the access 2 that feeds intake setting is shielded inside.
Feed intake second of preferred embodiment of access 2, as shown in fig. 7, the access 2 that feeds intake is inserted into inside the guide shell 10
And running through the side wall of the guide shell 10, and extend to the top of the crucible 5, that is, the access 2 that feeds intake setting is shielded inside and external screen
Between.In other words, the access 2 that feeds intake is embedded inside guide shell 10, and extends to the earthenware along the 10 elongatedness direction of guide shell
The top of crucible 5.It is easy-to-understand to, the mounting means of this cross-linking, needing to open up in advance in 10 inside of guide shell allows to feed intake
The through-hole that access 2 is inserted into, lower edge of the through-hole from 10 top edge of guide shell to 10 internal stretch of guide shell to guide shell 10,
The access 5 that feeds intake is inserted and secured in the through-hole.
Fig. 8 gives the third the preferred mounting means for the access 2 that feeds intake.Shown in Fig. 8, the access 2 that feeds intake setting is led described
The outside of flow cartridge 10, and the material in the access 2 that feeds intake is fallen through the region between 10 outside of guide shell and 5 inside sidewalls of the crucible
Enter in the crucible 5.
Specifically, the access 2 that feeds intake includes feed intake pan feeding portion 201 and the discharging portion 202 that feeds intake.The pan feeding portion 201 that feeds intake is located at
Feed intake the upper end of access 2, docks with the feeding discharging portion 1011 of feeding access 101, receives the material in feeding access 101.It throws
Material access 2 is docked with feeding access 101, referring to Fig. 3.The discharging portion 202 that feeds intake extends along the length direction for the access 2 that feeds intake, and prolongs
Extend to the top of crucible 5.In general, the selection quartz material of access 2 that feeds intake is made or other refractory ceramics class material systems
At.
There is the funnel 203 that feeds intake, feeding discharging portion 1011 can extend to the leakage that feeds intake at the feeding inlet in pan feeding portion 201 that feeds intake
The inside of bucket 203, so that material is entirely fallen in the funnel 203 that feeds intake.The access 2 that feeds intake is fixed on by the fixed block 204 that feeds intake
The surface of guide shell 10, and extend to the bottom of guide shell 10.Specifically, the fixed block 204 that feeds intake is arranged in the funnel 203 that feeds intake
Base portion, and be fixed on the top of guide shell 10.The material discharging portion 202 that fed intake is fallen into crucible 5, in order to reduce rushing for material
Amount, prevents the spillage of the melting materialss in crucible 5, and the discharging portion 202 that feeds intake has with certain corner design, that is, feed intake discharging portion
The 202 at least upper half is to the bending of the long axis direction of the access 2 that feeds intake in an angle β.Meanwhile about the discharging portion that feeds intake
202 extended position should be advisable with the growth and cooling that do not influence silicon single crystal rod 12.
The material delivery system is previously provided with the access 2 that feeds intake in furnace body 4.It is easy to know by Fig. 1, to specification
When identical furnace body 4 conveys material, the stroke of feeding access 101 can be shortened, that is to say, that use shorter feeding access
101 can be realized material transmission to the access 2 that feeds intake.The advantages of material delivery system is it will be apparent that at least can be with
Shorten the longitudinal length of feeding receiving portion 102, this also means that the overall weight for the feeding mechanism 1 being arranged on bell 44 can be with
Mitigate, and reduce the center of gravity of feeding mechanism 1, and then is easy to dock with moveable material guide mechanism 3, it is often more important that,
Improve the safety and reliability that material adds operation.
Mobile platform
In the present embodiment, as shown in Figure 1, the material delivery system can also further comprise mobile platform 7.It is mobile
Platform 7 is for carrying material controlling mechanism 6 and material guide mechanism 3, and relative to furnace body 4, so that material controlling mechanism 6 and material guide mechanism 3 are to leaning on
Direction of the near and far from furnace body 4 is mobile.In order to carry, material controlling mechanism 6, material guide mechanism 3 will be comparatively safe, is securely disposed at shifting
On moving platform 7, suitable support frame or fixed frame are installed on mobile platform 7.It is easy-to-understand to, in the base portion of support frame
Multiple wheels are installed, neatly to change the position of the opposite furnace body 4 of material controlling mechanism 6, material guide mechanism 3, meanwhile, it is also multiple
Furnace body shares a set of material controlling mechanism 6, material guide mechanism 3 and mobile platform 7 and provides possibility, it can realizes in batches to multiple furnaces
Body 4 supplies external material.
Lifting drive is installed on mobile platform 7, for moving material controlling mechanism 6 and material guide mechanism 3 along the vertical direction
Position.This lifting drive, which can be adopted, moves up and down material controlling mechanism 6 and material guide mechanism 3, but
It can also be using the device of the driving methods such as motor.In addition, mobile platform 7 further includes WidFin mechanism 9, it to be used for feeder
When structure 1 and material guide mechanism 3 dock, mutual relative distance can be adjusted by a small margin.In the present embodiment, WidFin machine
Structure 9 has the handle operated for operating personnel, by rotational handle, material controlling mechanism 6, material guide mechanism 3 is driven to generate by a small margin
Displacement.Material controlling mechanism 6, the position change of material guide mechanism 3 in the horizontal direction may be implemented in WidFin mechanism 9 as a result, so that
Material guide mechanism 3 is in suitable position, convenient for being docked with the sealing of feeding mechanism 1, meanwhile, reduction material guide mechanism 3 as much as possible is right
Feeding mechanism 1 squeezes and collision, improves the safety and convenience of butt-joint operation.
Other variations
Above with respect to specific structure of the invention, however it is not limited to which above embodiment and variation are not departing from the present invention
Various modifications can be carried out in the range of purport.
It is that the material delivery system realizes the crucial behave of its function first is that be installed in 10 inside of guide shell, outside and its
The internal access 2 that feeds intake, as main component outside furnace body 4, such as feeding mechanism 1, material guide mechanism 3 and material controlling mechanism 6 etc.,
Its structure can make the Optimal improvements different from present embodiment.In another embodiment, material controlling mechanism 6 can not include
Helixes feed equipment 62, or evade the accurate material controlling mode for being designed to other forms, for example, barrel 61 can also carry realization
Control the mechanism of blanking amount.The height of material controlling mechanism 6 can be at least reduced in this way.
Doper is installed in the suitable position of the guide receiving portion 302 of material guide mechanism 3, which can pass through conjunction
Dopant is placed in guide access 303 by the mode of reason, and dopant is transferred into inside furnace body 4 together in company with external material.
In addition, the structure and function of material guide mechanism 3, it is also possible to which other modes are achieved, for example, being filled using conveyer belt, vibrator etc.
It sets realization and material is delivered to feeding mechanism 1, while being precisely controlled for blanking amount also may be implemented.
Intelligent control system is installed on mobile platform 7, by intelligent control system, may be implemented material guide mechanism 3 with
The adaptive docking of feeding mechanism 1, and can realize long-range control, inspiration thinking is provided for single crystal growing furnace intelligence charging.
The material delivery system could be applicable to different 4 internal structures of furnace body, refer in particular to the different crucible of structure
5.Crucible 5 shown in FIG. 1 is commonly referred to as common crucible, and using common crucible as shown in Figure 1, silicon single crystal rod 12 can only mentioned
When drawing device 13 is promoted to appropriate location A, the material delivery system could be used to feed, there is no realize real meaning
On continuous crystal-pulling.It if changing common crucible into double crucibles, or is the quartz glass crucibles with weir body structure, and to described
Material delivery system carries out structure improvement appropriate, for example, adjustment feeds intake, the setting position of access 2 or structure, also should belong to this
The protection scope of invention.
In addition to the isolating valve 43 outside bell 44, at material guide mechanism 3 and material controlling mechanism 6 and docking, resistance can also be added
The gate valve that material is discharged in blocking cylinder 61, conducive to material is loaded into barrel 61 in advance.
Embodiment 2
The present embodiment is provided using above-mentioned material delivery system, material delivery system especially shown in FIG. 1, to furnace body 4
The method of material is supplied in internal crucible 5.Its specific operating process is as follows:
The relative mounting location of material guide mechanism 3 and material controlling mechanism 6 on mobile platform 7 is adjusted, and completes 3 He of material guide mechanism
The sealing of material controlling mechanism 6 is docked.It drives mobile platform 7 close to the direction of feeding mechanism, completes material guide mechanism 3 and feeding mechanism
1 sealing docking.Later, at least the material delivery system being located at outside bell 44 vacuumized, hunted leak.If in furnace body 4
Portion has the silicon single crystal rod 12 of 5 liquid level of draw-out crucible, when silicon single crystal rod 12 is promoted by pulling apparatus 13 and is higher than location A, material
It just can transport to feeding access 101.
Isolating valve 43 is opened, feeding access 101 is moved to the lower limit, and docks with the access 2 that feeds intake.Drop guide funnel
3031 are moved to splicing position, meanwhile, guide discharging portion 3033 is docked with the feeding pan feeding portion 1012 of feeding access 101.In this way, leading
Material access 303, feeding access 101 and the access 2 that feeds intake form external material carrying path, and material controlling mechanism 6 is with controllable speed
External material is supplied to the carrying path, external material is fallen into the crucible 5 inside furnace body 4, sustainable supply material, until plus
Expect that operation is completed.
Embodiment 3
The present embodiment provides a kind of crystal growth system, includes at least furnace body 4, and be mounted on the crucible inside furnace body 4
5.For crucible 5 as described above for installing external material, external material is fused into liquid in crucible 5.Particularly, this crystal is raw
Long system further includes above-mentioned material delivery system, and generally speaking, the material delivery system is outer to crucible transmission controlled amounts
Portion's material.
Claims (21)
1. material delivery system, which is characterized in that for supplying material into the internal crucible (5) of furnace body (4), the material is supplied
It include feeding mechanism (1) and at least one access that feeds intake (2) to device, the feeding mechanism (1) has material from furnace body (4)
The internal feeding access (101) of external input furnace body (4), it is internal that at least one described access that feeds intake (2) is located at the furnace body (4)
And relatively with the crucible (5), the feeding access (101) docks at least one described access that feeds intake (2), and material is fed through described
Material access (101) imports at least one access that feeds intake (2) and inputs the crucible (5) by least one described access that feeds intake (2)
In.
2. material delivery system according to claim 1, which is characterized in that have opening (41), institute on the furnace body (4)
It states feeding mechanism (1) and docks the opening (41), the feeding access (101) can be relative at least one described access that feeds intake
(2) extend or recall, the feeding access (101) in extended position pass through the opening (41) and with the access that feeds intake
(2) it is connected.
3. material delivery system according to claim 2, which is characterized in that the feeding mechanism (1) further includes that feeding holds
It receives portion (102), the feeding receiving portion (102) is set to the furnace body (4) outside, and the feeding access (101) is recalling position
The feeding receiving portion (102) is contained in when setting.
4. material delivery system according to claim 3, which is characterized in that offered on the feeding receiving portion (102)
Blow vent.
5. material delivery system according to claim 3, which is characterized in that the feeding mechanism (1) further includes that length can
With the feeding pars contractilis (105) of telescopic variation, there are isolating valve (43) at the opening (41) of the furnace body (4), the feeding is stretched
Contracting portion (105) is sealedly attached between the feeding receiving portion (102) and the isolating valve (43).
6. material delivery system according to claim 5, which is characterized in that isolating valve (43) connection is for cooling down
State the water circulation system of isolating valve (43).
7. material delivery system according to any one of claim 3 to 6, which is characterized in that the feeding mechanism (1) is also
Feeding driver (104) including being mechanically connected to the feeding access (101), the feeding driver (104) are set to institute
The side for stating feeding receiving portion (102), for driving the feeding access (101) to extend or recalling.
8. material delivery system according to claim 7, which is characterized in that the upstream end of the feeding access (101) is set
The blanking funnel (1015) for receiving material is set, the outside of the feeding access (101) has feeding fixing sleeve (1013), institute
It states feeding fixing sleeve (1013) and connects the feeding driver (104) by feeding sliding block (1041).
9. material delivery system according to claim 8, which is characterized in that outside feeding access (101) side wall with
Buffer layer (1014) are filled at least partly region between feeding fixing sleeve (1013).
10. material delivery system according to claim 1 or 2, which is characterized in that the access that feeds intake (2) includes opposite
Feed intake and entrance and feed intake outlet, described feed intake exports close to the crucible (5), and the inlet that feeds intake is with the funnel that feeds intake
(203), the feeding access (101) is docked by the funnel (203) that feeds intake with the access that feeds intake (2).
11. material delivery system according to claim 10, which is characterized in that the base portion of the funnel that feeds intake (203) is set
It sets the fixed block that feeds intake (204), the access that feeds intake (2) is maintained at furnace body (4) inside and made by the fixed block that feeds intake (204)
The access that feeds intake (2) and the crucible (5) are opposite.
12. material delivery system according to claim 3, which is characterized in that further include material guide mechanism (3), the guide
Mechanism (3) is by the material transmission to the feeding mechanism (1).
13. material delivery system according to claim 12, which is characterized in that the feeding mechanism (1) further includes feeding
Docking section (103), the feeding docking section (103) are set to the side of the feeding receiving portion (102), the feeding receiving portion
(102) it is connected to the feeding docking section (103), the feeding docking section (103) is docked with the material guide mechanism (3).
14. material delivery system according to claim 13, which is characterized in that the material guide mechanism (3) includes being connected
Guide receiving portion (302) and guide docking section (301), the guide docking section (301) be set to the guide receiving portion
(302) side, the guide receiving portion (302) dock the feeding docking section (103).
15. material delivery system according to claim 14, which is characterized in that the guide receiving portion (302) includes leading
Expect access (303) and guide driving device (304), the guide driving device (304) connects the guide access (303), institute
It states guide access (303) and is built in the guide receiving portion (302), the guide driving device (304) is for driving described lead
Material access (303) docks the feeding access (101) and the inside for being withdrawn into the guide receiving portion (302).
16. material delivery system according to claim 15, which is characterized in that the guide access (303) includes guide
Pan feeding portion (3032) and guide discharging portion (3033), guide pan feeding portion (3032) open up guide feeding inlet (3034), are leading
Expect that drop guide funnel (3031) are arranged at feeding inlet (3034), under the action of guide driving device (304), the guide is logical
Road (303) the drive drop guide funnel (3031) is moved to the lower section of guide docking section (301), the guide discharging portion (3033)
Dock the feeding access (101).
17. material delivery system according to claim 14, which is characterized in that further include material controlling mechanism (6), the material controlling
Mechanism (6) includes barrel (61) and helixes feed equipment (62), and the discharge port of the barrel (61) is connected to the screw feeder dress
It sets (62), the helixes feed equipment (62) is used to supply material to the guide docking section (301).
18. material delivery system according to claim 17, which is characterized in that the helixes feed equipment (62) includes giving
Material portion (621) and feed driving portion (622), the feed driving portion (622) drives the feed portion (621) to rotate, described to give
Material portion (621) is quantitative to supply material to the guide docking section (301), and the barrel (61) is connected to the feed portion (621).
19. material delivery system according to claim 18, which is characterized in that the feed portion (621), which has, to be fed into
Mouth (6211) and feed-stock outlet (6212), feed entrance (6211) dock the discharge port of the barrel (61), the feed
It exports (6212) and docks the guide docking section (301), feeding screw rod (6213) are set inside the feed portion (621), it is described
Arrangement feed screw thread (6214) on feeding screw rod (6213), the barrel (61) are led by the way that feed screw thread (6214) is quantitative to described
Expect that docking section (301) supply material.
20. material delivery system according to claim 12, which is characterized in that further include mobile platform (7), the movement
Platform (7) is at least used to carry the material controlling mechanism (6) and changes the position of the relatively described furnace body (4) of the material controlling mechanism (6).
21. crystal growth system characterized by comprising
Furnace body (4)；
Crucible (5), crucible (5) setting is internal in the furnace body (4), for containing material；And
Material delivery system as described in any one of claims 1 to 20, the material delivery system are used to supply to crucible
Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710625399.6A CN109306516A (en) | 2017-07-27 | 2017-07-27 | Material delivery system and crystal growth system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710625399.6A CN109306516A (en) | 2017-07-27 | 2017-07-27 | Material delivery system and crystal growth system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109306516A true CN109306516A (en) | 2019-02-05 |
Family
ID=65202625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710625399.6A Pending CN109306516A (en) | 2017-07-27 | 2017-07-27 | Material delivery system and crystal growth system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109306516A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112126974A (en) * | 2020-11-02 | 2020-12-25 | 西安邦泰电子技术有限公司 | Feeding equipment for single crystal furnace |
| CN113061978A (en) * | 2021-03-22 | 2021-07-02 | 上海引万光电科技有限公司 | Molten silicon feeder for continuous Czochralski single crystal pulling |
| CN113248114A (en) * | 2021-06-21 | 2021-08-13 | 中国原子能科学研究院 | Crucible, cover body for cavity of crucible and material processing equipment |
| EP4006472A1 (en) * | 2020-11-30 | 2022-06-01 | Jinko Solar Co., Ltd | Single crystal furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09175883A (en) * | 1995-12-26 | 1997-07-08 | Shin Etsu Handotai Co Ltd | Single crystal pull-up apparatus |
| JPH11207744A (en) * | 1998-01-23 | 1999-08-03 | Shinko Sellbick:Kk | Method for supplying material and material supply apparatus |
| JP2003002779A (en) * | 2001-06-20 | 2003-01-08 | Komatsu Electronic Metals Co Ltd | Raw material feeding device for single crystal pulling vessel and method for feeding raw material |
| CN204057048U (en) * | 2014-08-05 | 2014-12-31 | 深圳市杰曼科技股份有限公司 | Helixes feed equipment |
-
2017
- 2017-07-27 CN CN201710625399.6A patent/CN109306516A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09175883A (en) * | 1995-12-26 | 1997-07-08 | Shin Etsu Handotai Co Ltd | Single crystal pull-up apparatus |
| JPH11207744A (en) * | 1998-01-23 | 1999-08-03 | Shinko Sellbick:Kk | Method for supplying material and material supply apparatus |
| JP2003002779A (en) * | 2001-06-20 | 2003-01-08 | Komatsu Electronic Metals Co Ltd | Raw material feeding device for single crystal pulling vessel and method for feeding raw material |
| CN204057048U (en) * | 2014-08-05 | 2014-12-31 | 深圳市杰曼科技股份有限公司 | Helixes feed equipment |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112126974A (en) * | 2020-11-02 | 2020-12-25 | 西安邦泰电子技术有限公司 | Feeding equipment for single crystal furnace |
| EP4006472A1 (en) * | 2020-11-30 | 2022-06-01 | Jinko Solar Co., Ltd | Single crystal furnace |
| US20220170177A1 (en) * | 2020-11-30 | 2022-06-02 | Jinko Solar Co., Ltd. | Single Crystal Furnace |
| US11795570B2 (en) * | 2020-11-30 | 2023-10-24 | Jinko Solar Co., Ltd. | Single crystal furnace |
| CN113061978A (en) * | 2021-03-22 | 2021-07-02 | 上海引万光电科技有限公司 | Molten silicon feeder for continuous Czochralski single crystal pulling |
| CN113248114A (en) * | 2021-06-21 | 2021-08-13 | 中国原子能科学研究院 | Crucible, cover body for cavity of crucible and material processing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109306515A (en) | Material delivery system and crystal growth system | |
| CN109306513A (en) | Material delivery system and crystal growth system | |
| CN109306516A (en) | Material delivery system and crystal growth system | |
| CN207091548U (en) | A kind of material delivery system and crystal growth system | |
| CN109183140B (en) | Single crystal furnace and continuous feeding device thereof | |
| US3693812A (en) | Furnace charging apparatus | |
| EP2699716B1 (en) | Side feed system for czochralski growth of silicon ingots | |
| US20110036860A1 (en) | Single-crystal growth apparatus and raw-material supply method | |
| CN207091546U (en) | Material supply arrangement and crystal growth system | |
| CN207091550U (en) | A kind of material delivery system and crystal growth system | |
| CN109306510A (en) | Material carrying path, material delivery system and crystal growth system | |
| CN214881924U (en) | External feeding machine device of single crystal furnace | |
| CN110408998B (en) | Silicon carbide single crystal continuous growth device and growth method thereof | |
| CN208201168U (en) | Single crystal growing furnace continuous feeding | |
| CN110344118A (en) | A kind of more crucible semi continuous silicon carbide crystal growing devices | |
| CN207435581U (en) | A kind of material delivery system and crystal growth system | |
| CN104947186A (en) | Mobile secondary feeding device for polycrystalline ingot furnace | |
| CN109306514A (en) | Material delivery system and crystal growth system | |
| CN113699584A (en) | Czochralski silicon microwave rapid material supplementing continuous production system and production method thereof | |
| CN207091547U (en) | A kind of material carrying path, material delivery system and crystal growth system | |
| CN204174307U (en) | A kind of outside charging structure | |
| US3960503A (en) | Particulate material feeder for high temperature vacuum system | |
| CN207435580U (en) | A kind of material delivery system and crystal growth system | |
| CN106119953B (en) | Straight pull type single crystal furnace silicon material throws device again | |
| CN217077856U (en) | External device of throwing again |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190205 |
|
| RJ01 | Rejection of invention patent application after publication |