CN109306514A - Material delivery system and crystal growth system - Google Patents
Material delivery system and crystal growth system Download PDFInfo
- Publication number
- CN109306514A CN109306514A CN201710624492.5A CN201710624492A CN109306514A CN 109306514 A CN109306514 A CN 109306514A CN 201710624492 A CN201710624492 A CN 201710624492A CN 109306514 A CN109306514 A CN 109306514A
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- Prior art keywords
- access
- feeding
- barrel
- delivery system
- docking
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Material delivery system disclosed by the invention, for supplying material in the crucible to furnace interior, material delivery system includes material storage mechanism, feeding mechanism and the access that feeds intake, material storage mechanism includes barrel and material controlling body, barrel is for accommodating material and having discharge port, material controlling body is set to the barrel, and it can be mobile relative to barrel discharge port, the material being contained in barrel leaves barrel from the gap of barrel discharge port and material controlling body, feeding mechanism has material from the feeding access of furnace body external input furnace interior, the access that feeds intake is located at furnace interior and opposite with crucible, feeding access docks the access that feeds intake, material through feeding access importing feed intake access and by feed intake access input crucible in.Crystal growth system disclosed by the invention, including furnace body are set in furnace body for containing the crucible and material delivery system as described above of material.The present invention improves the production efficiency of silicon single crystal rod, while improving the stability and safety of external charging.
Description
Technical field
The invention belongs to technical field of single crystal growth, are related to the ancillary equipment of crystal growth, and in particular to a kind of material confession
To device, a kind of crystal growth system with the material delivery system is further related to.
Background technique
Polysilicon is the main raw material(s) for producing photovoltaic product and semiconductor product.Mound carat Bielski
(Czochralski, referred to as Cz) method is one of most common preparation method of monocrystalline silicon, and high-purity solid polycrystalline silicon raw material is in crystalline substance
Body generates fusing in the crucible in furnace (single crystal growing furnace) and forms melt, and decline seed crystal makes itself and the melt contacts in rotation crucible, so
Afterwards, seed crystal is slowly pulled out, melt solidifies to form silicon single crystal rod around seed crystal.
Traditional Cz single crystal growing furnace needs the production for a new furnace to do many many and diverse after completing furnace raw material crystal pulling production
The processes such as preliminary preparation, including blowing out is cooling, furnace body is cleaned, stocked up, charging, vacuumizing, hunting leak, material.These early periods
Time-consuming and laborious process seriously restricts the production efficiency of Straight pull monocrystalline silicon.In addition, the polycrystalline silicon material (mostly block material) of filling
Volume-diminished after fusing, so that the utilization rate of crucible reduces.In order to improve the utilization rate of crucible, increases overall inventory, then need
Charging to be repeated several times into crucible.This is also one of the effective measures for reducing crystal pulling cost.Currently, Straight pull monocrystalline silicon growing
Mainstream feeding device be the built-in feeder of concubine.This feeder since single charge amount is small (being usually no more than 30kg),
Need to carry out multiplicating charging, manual operation is many and diverse and inefficiency；And vacuumize process will be carried out after charging every time, it must
The isolation of palpus frequent progress concubine and purification, time waste seriously, also increase the risk of material pollution.
In order to meet the technological deficiency for increasing the requirement of overall inventory and making up built-in feeder, has patent disclosure
To the external feeding device of single crystal growing furnace conveying polycrystalline silicon material.Application publication number is that the patent application of CN1153230A provides a kind of furnace
The solid material delivery system of son, the feed pipe of the feeding system can selectively change feed pipe outlet relative to crucible
The radial position at top avoids splashing material, improves the utilization rate of thermal energy, but structure is complicated for feeding system, complicated operating mechanism is deposited
It is difficult to be precisely controlled in the positioning of the risk of feed blocking, and feed pipe outlet.Authorization Notice No. is CN102312285B's
Patent provides a kind of external continuous dosing mechanism for single crystal growing furnace, has blowing inner tube and blowing outer tube, polycrystalline silicon material is by putting
Material inner tube is delivered to blowing outer tube, and which limits the internal diameters of blowing inner tube, are not suitable for the biggish block material of partial size；In addition it throws
Expect that the whole height of mechanism is higher, is unfavorable for dosing operation, and increase operating safety risks.Application publication number is
The technological deficiency that the patent application of CN106400105A discloses external charging device is similar with patent CN102312285B, and
And the inventory and rate of feeding of polycrystalline silicon material are difficult to effectively control.
Therefore, in order to increase overall inventory, crystal pulling cost is reduced, single crystal growing furnace furnace external feeding device is as the overall throwing of raising
The main auxiliary tool of doses, optimizes it and improvement is particularly important.
Summary of the invention
The present invention is directed to the technological deficiency of existing single crystal growing furnace furnace external feeding device, provides a kind of material that single crystal growing furnace is external confession
To device.This material delivery system can realize having for polycrystalline silicon material rate of feeding and inventory with single crystal growing furnace Dock With Precision Position
Effect control, can reduce the whole height of material delivery system, be easy to feeding operation, improve the safety and just of feeding operation
Benefit saves operator and the accounting that curtails the feeding hours, and reduces manufacturing cost.
The present invention also provides a kind of crystal growth systems with above-mentioned material delivery system.
A kind of scheme of the present invention is: material delivery system, for supplying material in the crucible to furnace interior,
The material delivery system includes material storage mechanism, feeding mechanism and the access that feeds intake, and the material storage mechanism includes barrel and material controlling body,
For accommodating material and having discharge port, the material controlling body is set to the barrel and can be relative to the barrel barrel
Discharge port is mobile, and the material being contained in the barrel leaves barrel from the gap of the barrel discharge port and the material controlling body,
The feeding mechanism has material from the feeding access of furnace body external input furnace interior, and the access that feeds intake is located at the furnace
Internal portion and opposite with the crucible, feed intake access described in the feeding access docking, and material is imported through the feeding access and thrown
Material access is simultaneously inputted in the crucible by the access that feeds intake.
One of preferred embodiment as technical solution of the present invention, the material controlling body are suspended in the discharge port of the barrel
Place, and can be bonded and far from the barrel discharge port；The material controlling body is matched with the shape of the discharge port of the barrel, and
The bed-plate dimension of the material controlling body is not less than the size of the barrel discharge port.
One of preferred embodiment as technical solution of the present invention, the material controlling body connect drag rope, the traction
Rope passes through barrel and connect with the traction power portion being installed on outside the barrel.
One of preferred embodiment as technical solution of the present invention, the material controlling body are cone or rotary table, the material
The discharge port of cylinder be it is cylindric, the basal diameter of the cone or rotary table is not less than the diameter of the barrel discharge port.
Further, the furnace interior also has guide shell, and the guide shell is installed on the top of the crucible, described
The access that feeds intake is arranged in inside the inner or outer side of the guide shell, or the insertion guide shell and extends to the upper of the crucible
Side.
One of preferred embodiment as technical solution of the present invention, the access that feeds intake are set to the interior of the guide shell
Side, the access that feeds intake are maintained at the surface of the guide shell by the fixed block that feeds intake.
One of preferred embodiment as technical solution of the present invention, the access that feeds intake include feeding intake for trip disposed thereon
Feed intake funnel, the feeding access and institute is arranged in the inlet that feeds intake of the access that feeds intake in the outlet that feeds intake of entrance and downstream
The funnel docking that feeds intake is stated, feeding intake for the access that feeds intake is exported close to the crucible.
Further, there is opening, the feeding access is connected by the opening with furnace body, described on the furnace body
Feeding access includes opposite upstream end and downstream, and the upstream end is located at outside the furnace body and is provided with isolating valve, institute
It states downstream and extends or recall in the furnace interior, the isolating valve makes the feeding access and furnace body keep airtight shape
State.
One of preferred embodiment as technical solution of the present invention, the feeding mechanism are mounted on the outside of the furnace body
And the open butt joint with the furnace body, part of the feeding access outside the furnace body are accommodated in the feeding mechanism.
Bellows, institute is arranged in the open outside of one of preferred embodiment as technical solution of the present invention, the furnace body
State the open butt joint that feeding mechanism passes through bellows and the furnace body.
Further, the feeding mechanism has feeding lifting device, and the feeding lifting device is fed for realizing described
Access is expected relative to the extension of the access that feeds intake or is recalled.
The external setting feeding access of one of preferred embodiment as technical solution of the present invention, the feeding access is solid
Fixed set, the feeding access fixing sleeve connect the feeding lifting device, the feeding access and the fixing sleeve companion of feeding access
The feeding lifting device is mobile.
Further, the material delivery system further includes material guide mechanism, and the material guide mechanism is arranged in the storing
Between mechanism and feeding mechanism, for the material in the material storage mechanism to be imported feeding for the feeding mechanism under airtight conditions
Expect in access.
One of preferred embodiment as technical solution of the present invention, the material guide mechanism includes guide access, described to lead
Material access is a tubular passageway being obliquely installed, and the material in guide access shifts to feeding mechanism by material self weight.
One of preferred embodiment as technical solution of the present invention, the material guide mechanism further includes feed tube, described to lead
The discharge port that barrel is mounted on the lower section of the barrel and at least described barrel protrudes into the inside of the feed tube, and the guide is logical
Road is connected to the feed tube and is in the downstream of the feed tube.
One of preferred embodiment as technical solution of the present invention is opened in the junction of the barrel and the feed tube
If several ventholes.
Further, the material delivery system further includes docking mechanism, and the docking mechanism is arranged in the guide
Between access and feeding mechanism, for the material in the guide access to be imported feeding for the feeding mechanism under airtight conditions
Expect in access.
One of preferred embodiment as technical solution of the present invention, the docking mechanism include being sequentially connected and being connected
Docking passage, butt-joint corrugated pipe, the docking passage is located at the upstream of butt-joint corrugated pipe, described to dock the upper of passage
It swims end and docks the guide access, the downstream of the butt-joint corrugated pipe connects the isolating valve at feeding circuit upstream end.
One of preferred embodiment as technical solution of the present invention, in the docking passage, butt-joint corrugated pipe
The guide access is docked in portion's setting docking feeder pipe, the upstream end of the docking feeder pipe, and the downstream for docking feeder pipe can
The feeding access is connected to across the isolating valve.
One of preferred embodiment as technical solution of the present invention, the docking mechanism further include docking limiting device,
The docking limiting device is mounted on the outside of the docking passage, butt-joint corrugated pipe, for limiting the butt-joint corrugated pipe
Retractable variable.
Further, the material delivery system further includes mobile lifting platform, and the mobile lifting platform is at least used
In carrying the material storage mechanism and change the position of the relatively described furnace body of the material storage mechanism.
Another technical solution of the present invention is: crystal growth system, comprising: furnace body；Crucible, the crucible are set
It sets in furnace interior, for containing material；And the material delivery system, the material delivery system can to crucible transmission
The material of control amount.
Compared with existing feeding device, material delivery system of the present invention is at least had the following beneficial effects.
Material delivery system of the present invention includes material storage mechanism, guide access, docking mechanism, feeding mechanism and sets in advance
Set the access that feeds intake above crucible.Feeding mechanism, docking mechanism are fixedly mounted on outside furnace body, and are docked with guide access.
Material storage mechanism, guide access are mounted on mobile lifting platform, may be implemented to dock with the feeding mechanism on multiple furnace bodies.Storing
External material dosing is delivered to guide access by material controlling body by mechanism.Docking feeder pipe in guide access, docking mechanism is fed
The access that feeds intake expecting the feeding access of mechanism and being set in advance in above crucible forms external material carrying path, by material storage mechanism
In external material transmission into the intracorporal crucible of furnace.In addition, isolating valve is arranged in the upstream end of feeding mechanism, to protect furnace body
Internal atmosphere is unaffected.The present invention can realize under conditions of not needing blowing out conveys external material, furnace body into crucible
Production efficiency greatly improved without isolation, purification in concubine, shortens the charging accounting time, while also improving quartz glass
The utilization rate of crucible reduces the cost of charging link.
Furthermore feeding is shortened so that the length of feeding access shortens by fixed feeding area access preparatory on guide shell
The stroke of access reduces the height of feeding mechanism outside bell, reduces the position of centre of gravity of feeding mechanism.It is convenient for feeding in this way
Mechanism is docked with material guide mechanism in lower station, is more advantageous to the stability for improving material delivery system operation of the present invention
And safety.In addition, the present invention is not necessarily to wait until pulling apparatus band compared with the material delivery system for not presetting the access that feeds intake
Dynamic silicon single crystal rod goes upward to higher position, and external material can be added into quartz glass crucibles, significantly shortens the waiting time,
Improve the production efficiency of silicon single crystal rod.
In short, material delivery system of the present invention meets the requirement of big feeding quantity, single charge amount be can achieve
150kg or more；Meanwhile the defect of the built-in feeder of concubine is compensated for, feed primary completion, in the premise for meeting big feeding quantity
Under, isolation and purification number can be reduced to greatest extent, and furnace inner environment caused by being isolated repeatedly is avoided to pollute.It is of the present invention
The purification of material delivery system, charging process and silicon single crystal rod cooling procedure can be parallel, consumption significant decrease when the process that feeds.
Detailed description of the invention
Fig. 1 is the synoptic diagram of material delivery system of the present invention；
Fig. 2 be the material storage mechanism of material delivery system of the present invention material controlling body be in limiter stream discharge barrel state it is general
Scheme；
Fig. 3 is that the material controlling body of the material storage mechanism of material delivery system of the present invention is general in the state for allowing material to flow out barrel
Scheme；
Fig. 4 is the synoptic diagram of the docking mechanism of material delivery system of the present invention and the installation relation of feeding mechanism；
Fig. 5 is that the feeding access of material delivery system of the present invention docks the status summary figure for the access that feeds intake；
Fig. 6 is that the access that feeds intake of material delivery system of the present invention is mounted on the synoptic diagram inside guide shell；
Fig. 7 is that the synoptic diagram on the outside of guide shell is arranged in the access that feeds intake of material delivery system of the present invention.
Description of symbols:
1. material storage mechanism；101. barrel；102. barrel lid；103. material controlling lifting device；1031. traction power portion；1032.
Drag rope；1033. material controlling body；104. feed tube；105. venthole；1051. evacuating mouth；1052. mouth of hunting leak；1053. flowing argon
Mouthful；
2. guide access；21. guide feeding pipe；22. guide conveying pipeline；23. guide discharge nozzle；
3. docking mechanism；31. butt-joint corrugated pipe；32. docking limiting device；33. docking feeder pipe；34. docking the first method
It is blue；35. docking passage；36. docking second flange；
4. feeding mechanism；41. feeding funnel；42. feeding access fixing sleeve；43. feeding access；44. feeding bellows；
45. feeding lifting device；451. handwheel；452. feeding hoisting frames；453. feeding enhancing screws；454. feeding lift rails；
455. sliding block；
5. feed intake access；51. feed intake pan feeding portion；52. feed intake discharging portion；53. feed intake funnel；54. feed intake fixed block；
6. mobile lifting platform；61. going up and down driving portion；62. movable lifting frame；63. movable supporting frame；631. lifting silks
Bar；632. guiding polished rods；64. WidFin mechanism；
7. furnace body；71. bell；72. furnace tube；
8. pulling apparatus；9. silicon single crystal rod；10. guide shell；11. crucible；12. heater；13. isolating valve；14. pedestal.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.For saying for the direction in verbal description
Bright, " upper and lower " refers on the basis of up and down direction shown in FIG. 1.In addition, " inside and outside " refers to the internal-external spatial position of furnace body
On the basis of.But the present invention is not construed as limited in such a way that the direction illustrates.
Embodiment 1
Material delivery system described in the present embodiment, for being added from outside furnace body 7 into the crucible 11 being arranged inside furnace body 7
External material.In the present embodiment, in case of no particular description, furnace body 7, which refers to, to use Cz method from crucible 11
Lift out the single crystal growing furnace of silicon single crystal rod 9.This single crystal growing furnace has the diameter lesser elongate cylinder cooling for silicon single crystal rod 11
Shape concubine is equipped with the pulling apparatus 8 for upward pulling single crystal silicon rod 11 in the concubine.
The single crystal growing furnace further includes the bell 71 and furnace tube 72 being arranged in below concubine.Bell 71 connects concubine and is arranged
The lower section of concubine usually has certain crooked radian.The part-structure of material delivery system described in the present embodiment, such as feeding
Mechanism 4 is fixed on bell 71.It is generally arranged in view of concubine at the center of bell 71, and position is relatively fixed, the feeding
Mechanism 4 is preferably mounted at the side of bell 71.In order to which external material to be sent into inside furnace body 7 by feeding mechanism 4, more accurately
Saying is, material is fallen into the crucible 11 inside furnace body 7, and the suitable location in 71 side of bell offers opening, feeding mechanism 4
Feeding access 43 can protrude into inside furnace body 7.Number is opened up on bell 71 as opening, it is preferable that can be in bell 71
On an opening is at least set.
For being mounted on 4 relative securement of feeding mechanism on bell 71, as shown in Figure 1, in opening installation pedestal 14,
Feeding mechanism 4 is mounted on the pedestal 14.Due to needing to keep special atmosphere inside furnace body 7, generally to being passed through inside it
Inert gas, such as argon gas etc. in order not to destroy 7 internal atmosphere of furnace body need that air is prevented to enter furnace body 7 and cause furnace body 7
Pollution, isolating valve 43 is also installed in opening.The setting of isolating valve 43, can control the opening and closing of opening, and obstruct in furnace body 4
Portion's atmosphere and external environment.Melting materialss are used in view of crucible 11, need higher temperature, and in the pedestal 14 near being open often
Gasket containing rubber material, gasket is heated in order to prevent is easy to aging and causes do not have satisfactory high leakproofness,
The preferred connection water circulation system of pedestal 14, to play the effect to cool down to it.
The lower section of bell 71 is arranged in furnace tube 72, and part more than working face is the cylindrical body being relatively large in diameter, in furnace tube 72
Be internally provided with crucible 11, for heating crucible 11 with the heater 12 of 11 materials inside of fusion crucible, and be in crucible 11
The guide shell 10 of top.In the present embodiment, the crucible 11 typically refers to quartz glass crucibles, for containing external material,
External material is molten into liquid material in crucible 11.
As shown in Figure 1, it includes material storage mechanism 1, guide access 2, docking mechanism that the main body of this material delivery system, which is constituted,
3, feeding mechanism 4 and the access 5 that feeds intake being embedded in inside furnace body 7.As the further preferred of material delivery system, the material
Feedway may also include mobile lifting platform 6.
Material storage mechanism 1, guide access 2 are mounted on mobile lifting platform 6, with mobile lifting platform 6 close to or far from furnace
Body 7, to change the position of opposite furnace body 7.Docking mechanism 3, feeding mechanism 4 are fixed at outside furnace body 4, specifically, feeding
Material mechanism 4 is fixed on the pedestal 14 of the open outside, and docking mechanism 3 is in the top of feeding mechanism 4 and docking shape
At the access conveyed for material.Feeding access 43 in feeding mechanism 4 can stretch to inside furnace body 7 through opening, and logical with feeding intake
It docks on road 5.For the function of constituting from above-mentioned each main body is realized, material storage mechanism 1 can store material, and by material with controllable side
Formula is quantitative to convey external material to guide access 2.Guide access 2 be used for access material storage mechanism 1 input quantitative material, and with it is right
Connection mechanism 3 docks, by material transmission to docking mechanism 3.Docking mechanism 3 uses material transmission to feeding mechanism 4, feeding mechanism 4
In realizing material to 7 delivered inside of furnace body.The access 5 that feeds intake is arranged inside furnace body 7, right with the feeding access 43 of feeding mechanism 4
It connects and material is further transmitted into crucible 11, complete charging operation.
Material storage mechanism
The main structure of material storage mechanism 1 is barrel 101.Barrel 101 can be accommodated temporarily within the material transported time
Material, and barrel 101 can be divided into columned main part and the cone portion below main part.Certainly, barrel 101 may be used also
To be designed as other shapes according to practical situations.The discharge port of barrel 101 is provided with the lower end of cone portion, and its feeding inlet
It is opposite with its discharge port, and the upper end of main part is set.Barrel 101 has compatible barrel lid 102, and barrel lid therewith
102 are arranged in the upper end of main part.For the ease of loading material into barrel 101, the set-up mode of the cover 63 is preferably
Fast disassembly type, while can rapidly realize the sealing of barrel 101, avoid the material in barrel 101 by the pollution of ambient enviroment.
When conveying material to the feed tube 104 below barrel 101, barrel lid 102 can keep airtight conditions relative to outside atmosphere.
Barrel 101 and barrel lid 102 can be used stainless steel metal and be made.In order to avoid the material in barrel 101 introduces
Metal impurities are provided with liner on the inner surface of barrel 101 and barrel lid 102, to obstruct material and barrel 101 and barrel
The surface of lid 102 contacts.
Mouth 1051 is evacuated in addition, can offer on barrel 101, as shown in Figure 1, evacuating mouth 1051 is provided with barrel
Close to the appropriate location of barrel lid 102 on 101 main parts.It evacuates mouth 1051 and is connected to vacuum evacuation device (not indicating in figure), usually
Ground is equipped with vacuum valve on the vacuum-pumping tube road that connection evacuates mouth 1051, to control the vacuum degree inside barrel 101.To material
The purpose that cylinder 101 vacuumizes is, so that material storage mechanism 1 keeps certain vacuum degree, prevents air from entering furnace body 7 and destroying furnace
Atmosphere inside body 7.
Material is fallen inside barrel 101 by gravity naturally.Material quantitatively is discharged from barrel discharge port in order to realize,
In barrel discharge port, one material controlling body 1033 is set.The geometry of material controlling body 1033 is adapted with barrel discharge port.As one
The status of preferred embodiment, material controlling body 1033 is coniform for geometry, for example is cone or rotary table, and barrel discharge port is excellent
It is selected as tubulose (cylindric) structure, the section of barrel discharge port is circle, and barrel discharge port edge can be with material controlling body 1033
Surface fits closely.By the cooperation of material controlling body 1033 and barrel discharge port, the control of load may be implemented.In order to realize control
The closed butt joint of Material 1033 and barrel discharge port, is easy-to-understand to, and the diameter of 1033 bottom surface of material controlling body is not less than the barrel
The diameter of discharge port.So set, material will not just be arranged from barrel 101 when material controlling body 1033 is docked with barrel discharge port
Out.
As a preferred embodiment, material controlling body 1033 is controlled up and down through traction power portion 1031,
Traction power portion 1031 can be understood as traction electric machine.Traction power portion 1031 connects material controlling body by drag rope 1032
1033, drag rope 1032 is drawn by traction power portion 1031, protrudes into the inside of barrel 101, and traction power portion 1031 can be with
It is mounted on the barrel lid 102, or is installed on the outside of the barrel 101.The working principle of material controlling body 1033 can retouch
It states are as follows: traction power portion 1031 acts on material controlling body 1033 by drag rope 1032, so that material controlling body 1033 is relative to barrel
Discharge port is promoted or landing；If material controlling body 1033 moves down, far from the barrel discharge port, barrel discharge port is open, barrel
Material in 101 falls into the feed tube 104；Material controlling body 1033 is lifted up, and close to the barrel discharge port, material controlling body
1033 bottom surface is bonded the barrel discharge port, and the barrel discharge port is closed.
The effect of material controlling cone material controlling body 1033 is not only as described above, its work for also playing shunting and buffering to material
With.In 101 discharge of barrel, material controlling body 1033 hangs on the lower section of the barrel discharge port, in view of the circular cone of material controlling body 1033
Shape structure, most of materials can be contacted first with material controlling body 1033, and change original vertical falling direction, so that material edge is led
The circumferencial direction of barrel 104 disperses, and avoids material in the discharge port of feed tube 104 and forms coniform accumulation.Also it is conducive in this way
Material is discharged into the guide access 2 from feed tube 104.
Using material controlling body 1033 material storage mechanism 1 with to material have wider applicability.It is, this storing
Mechanism 1 can be adapted for bulk material, cobbing, regular particulate material or powder materials.Meanwhile this material storage mechanism 1 is also eliminated
Other material controlling charging gears, for example, helixes feed equipment applicable material limitation the drawbacks of.
Material guide mechanism
Here guide access is expressed with wide significance, and it is that the material that material storage mechanism 1 is discharged passes that function, which is realized,
It send to the docking mechanism 3 in downstream.As for the shape and structure of the guide access, corresponding change can be made, i.e. this function
It can be achieved in several ways, for example pass through the side of material self weight or conveyer belt material transfer or oscillating plate material transfer
Formula.The present embodiment is to the function implementation of the guide access and is not construed as limiting, below the description in relation to guide access only make
For a kind of specific preferred embodiment.
In this part, material guide mechanism includes the feed tube 104 being connected and guide access 2.As shown in Figure 1 to Figure 3, guide
The lower section of barrel 101 is arranged in cylinder 104.The geometric shape of feed tube 104 is similar with barrel 101 or is consistent, it is preferable that leads
Barrel 104 can be divided into columned main part and the cone portion below main part.Referring to the inside setting side of barrel 101
Liner is arranged in the interior surface of feed tube 104 in formula, it is preferable that feed tube can be arranged in liner by way of bonding
104 interior surface.
As a preferred embodiment, the main part diameter of feed tube 104 should be less than main part diameter, barrel discharge port
The inside of feed tube 104 is protruded into, and the top edge of feed tube 104 is connect with the cone portion of barrel 101, and feed tube 104
Discharge port is connected to the guide access 2.As the preferred of connection type, the top edge of feed tube 104 and the cone portion of barrel 101
Welding.Material controlling body 1033 hangs on the inside of feed tube 104, it may also be said to, material controlling body 1033 is in the inside of feed tube 104 to material
Region between cylinder discharge port is mobile, it is preferable that material controlling body 1033 can be moved along the center line of barrel 101.
In addition, as shown in Figure 1 to Figure 3, being opened in the junction or the close junction of barrel 101 and feed tube 104
If several ventholes 105.The effect of these ventholes 105 is different, for example, the venthole 105 opened up, which includes at least, evacuates mouth
1051, argon mouth 1053 and leak detection mouth 1052 are flowed.Preferably, meanwhile, may be used also on the main part of barrel lid 102 in barrel 101
Mouth 1051 is evacuated to open up at least one.The series connection of evacuation mouth 1051 for evacuating mouth 1051 and feed tube 104 on barrel 101, and
It is connected with pumped vacuum systems, material delivery system described in the present embodiment can be made when being fed to furnace body 7, keep certain
Vacuum degree.It flows argon mouth 1053 and is connected to argon gas feed system, be filled with by stream argon mouth 1053 to the material delivery system certain
Argon gas, so that the atmosphere inside furnace body 7 is identical as in the material delivery system.It is easy-to-understand to, leak detection mouth 1052 is used for
Detect the leakproofness docked between each component of the material delivery system.
As shown in Figure 1, the tubular passageway that guide access 2 selects the main part of connection to be obliquely installed.Material is in guide access 2
In by material self weight shift to docking mechanism 3.Specifically, guide access 2 includes the guide feeding pipe 21 communicated, guide conveying
Pipe 22 and guide discharge nozzle 23.Guide feeding pipe 21 is in the upstream end of the guide access 2 and docks the feed tube 104
Discharge port.Preferably, guide feeding pipe 21 docks vertically with the discharge port of feed tube 104, i.e. the feed tube of barrel 101 and lower section
104 and guide feeding pipe 21 centerline collineation.Guide conveying pipeline 22 is the main part of guide access 2, is entered in the material
Between expects pipe 21, guide discharge nozzle 23.Guide conveying pipeline 22 is obliquely installed, and material is self-possessed in guide conveying pipeline 22 by material
Shift to guide discharge nozzle 23.Guide discharge nozzle 23 is in the downstream of the guide access 2, and docks the docking mechanism 3.
As shown in Figure 1, guide conveying pipeline 22 is obliquely installed, material is naturally sliding by gravity in guide conveying pipeline 22
It falls.As for guide access 2, the tilt angle of especially guide conveying pipeline 22 needs to select within the appropriate range.If guide is defeated
The tilt angle of expects pipe 22 is larger, and material obtains biggish slip velocity in guide conveying pipeline 22, and material will certainly be to downstream
Docking mechanism 3 cause certain impact；If the tilt angle of guide conveying pipeline 22 is smaller, material is in guide conveying pipeline 22
Slip velocity is smaller, may extend the time of charging to complete charging operation.Therefore, the tilt angle choosing of guide conveying pipeline 22
Select be need it is comprehensive consider the problems of, tilt angle shown in FIG. 1 is only the signal of embodiment, does not represent and inclines to this
The practical restriction of rake angle.
Guide access 2 can choose metal material and be made, such as stainless steel, can be preferably provided on surface inside it interior
Lining, it is preferable that the interior surface of guide access 2 can be arranged in liner by way of bonding.As to this guide access 2
Protection, can its outer surface be arranged metal material made of protective casing.
Docking mechanism
The downstream of the guide access 2 is arranged in the docking mechanism 3, the object for the input of guide access 2 described in access
Material, and the feeding mechanism 4 that the material transmission is extremely connected to the furnace body.Docking mechanism 3 is mounted on the upper of feeding mechanism 4
Side, and is fixed at the outside of furnace body 7, relative to furnace body 7, docking mechanism 3, feeding mechanism 4 position do not change usually
Become.One isolating valve 13 is set in the junction of docking mechanism 3, feeding mechanism 4, in other words, isolating valve 13 is mounted on docking machine
Between structure 3, feeding mechanism 4.The effect of isolating valve 13 is, is that the feeding mechanism being connected 4 and furnace body 7 is made to keep airtight shape
State.Isolating valve 13 is opened, and docking mechanism 3,4 inside of feeding mechanism are identical, and the material from guide access 2 is through docking mechanism 3
Feeding mechanism 4 can be entered.
About the structure setting of docking mechanism 3, as shown in figure 4, as a preferred embodiment, docking mechanism 3 wraps
Include the docking passage 35 and butt-joint corrugated pipe 31 that are sequentially connected and are connected.Docking passage 35 is in the upper of docking mechanism 3
Trip, docking passage 35 is for the material in access guide discharge nozzle 23.Passage 35 is docked to connect by docking second flange 36
Connect the upstream end of butt-joint corrugated pipe 31.The downstream of butt-joint corrugated pipe 31 connects isolating valve 13 by docking first flange 34.?
A docking feeder pipe 33 is fixedly installed in the inner space of docking mechanism 3.The upstream end for docking feeder pipe 33 is preferably funnel-form,
And the inside in docking passage 35, convenient for the material in preferably access guide discharge nozzle 23；Docking feeder pipe 33 removes
Outside upstream end funnel-shaped, remaining part is tubular structure, docks the downstream end of feeder pipe 33 in butt-joint corrugated pipe 31
Inner space, and the downstream for docking feeder pipe 33 may pass through isolating valve 13 and dock with feeding mechanism 4, extremely by material transmission
The feeding mechanism 4.
As shown in figure 4, the docking mechanism 3 further includes docking limiting device 32.Docking limiting device 32 is mounted on described
The outside for docking passage 35, butt-joint corrugated pipe 31, for limiting the retractable variable of the butt-joint corrugated pipe 31.In docking machine
Structure 3 is docked with the completion of guide access 2, and material is conveyed into docking mechanism 3, and docking mechanism 3 will receive squeezing for guide access 2
Pressure, so that certain deformation occurs for docking mechanism 3, correspondingly, butt-joint corrugated pipe 31 is compressed, the docking inside docking mechanism 3
Feeder pipe 33 also can be to close to the movement of the direction of feeding mechanism 4.But the compressive deformation of butt-joint corrugated pipe 31 has certain limit,
Docking passage 35 and 31 junction of butt-joint corrugated pipe docking second flange 36 outer can with dock under limiting device 32
End in contact, to prevent the further compression of butt-joint corrugated pipe 31.It cancels in external pressure, is usually completed in charging operation
Afterwards, butt-joint corrugated pipe 31 restores deformation and extends, and the docking feeder pipe 33 inside docking mechanism 3 is also therewith to far from feeding mechanism
4 direction is mobile.Dock second flange 36 outer can with dock the upper-end contact of limiting device 32, thus prevent dock ripple
Pipe 31 is further stretched.It can thus be seen that docking limiting device 32 setting can be very good protection docking mechanism 3 and
Feeding mechanism 4 downstream.
About the structure of docking limiting device 32, the present embodiment does not provide detailed structure qualification, but its function is
It limits the retractable variable of the butt-joint corrugated pipe 31, and then protects docking mechanism 3 and feeding mechanism 4 downstream.Any reality
The structure of the docking limiting device 32 of this existing function, is regarded as the specific embodiment of the present embodiment, can be from this reality
It applies in the function description of example by technical inspiration, and further structure optimization can be made with this.
Feeding mechanism
Open butt joint on feeding mechanism 4 and bell 71, and being fixedly mounted on pedestal 14, for by docking mechanism 3
Material is delivered to inside furnace body 7.Feeding mechanism 4 includes feeding bellows 44, and be mounted on feeding bellows 44 feeding it is logical
Road 43.Feeding bellows 44 and the open butt joint, end is fixed on pedestal 14 downstream, and end is connected to feeding downstream
The lower section of lifting device 45.
Feeding access 43 is used to for external material being sent into inside furnace body 7, and docks with the access 5 that feeds intake inside furnace body 7.
Feeding access fixing sleeve 42 is arranged in external in the feeding access 43, and the feeding access fixing sleeve 42 is along the feeding access
43 axis direction extends, and is fixedly mounted on the inside of the feeding bellows 44.Feeding access fixing sleeve 42 is preferably managed
The outer surface of feeding access 43 is arranged in shape structural member, and feeding access fixing sleeve 42 is fixed at feeding bellows 44
Inner surface.So set, feeding access fixing sleeve 42 can not only play protective action to feeding access 43, but also logical to feeding
Guiding is played the role of in the movement on road 43.
In the upstream end of feeding access 43, feeding funnel 41 is set.It is moved in docking feeder pipe 33 to the direction close to furnace body 7
When dynamic, docking feeder pipe 33 can be docked with feeding funnel 41, by material transmission to feeding funnel 41.In order to avoid material is being fed
It is overflowed at funnel 41, the internal diameter of feeding funnel 41 is not less than the internal diameter for docking feeder pipe 33.Meanwhile feeding funnel 41 is set
It sets, there is certain blocking and buffer function to the material dropped out from docking feeder pipe 33, change the motion path of material, prevent
Material flies out region locating for feeding funnel 41.In general, the selection quartz material of feeding access 43 is made or other resistance to height
Warm ceramic-like materials are made.
The downstream of feeding access 43 is docked with the access 5 that feeds intake to be achieved by feeding lifting device 45, and feeding
Lifting device 45 can realize the position of the relatively described furnace body 7 of synchronous change feeding bellows 44, feeding access 43.The feeding mentions
Existing apparatus or structure can be used by rising device 45, it is preferable that as shown in figure 4, including sliding block 455, feeding promotion driving portion
451, feeding hoisting frame 452 and the feeding enhancing screw 453 and feeding lift rail that are mounted on the feeding hoisting frame 452
454.Feeding hoisting frame 452 is fixed at the pedestal 14.Sliding block 455 is socketed in 453 He of feeding enhancing screw respectively
In feeding lift rail 454, under the action of feeding promotes driving portion 451, sliding block 455 may be implemented to move up and down.Meanwhile it is sliding
The movement of block 455 can drive flexible and the relatively described furnace body 7 of feeding access 43 the position of feeding bellows 44.Feeding wave
The upstream end of line pipe 44 is fixed at the lower surface of sliding block 455, and the inside of sliding block 455 offers cavity, and described
Feeding funnel 41 or the cavity can be accommodated in cavity can be passed through by docking feeder pipe 33.The feeding promotes driving portion
451 can be motor, be also possible to handwheel as shown in Figure 4, and feeding promotes driving portion 451 and acts on the feeding enhancing screw
453, and then drive the movement of the sliding block 455 of connection feeding bellows 44.
Need add material into the crucible 11 furnace body 7 inside when, feeding promoted driving portion 451 driving sliding block 455 to
It is mobile close to the direction of furnace body 7, while feeding bellows 44 is compressed, the feeding that the compression of feeding bellows 44 drives it internal
Crucible 11 of the access 4 inside furnace body 7, and docked with the completion of access 5 that feeds intake.It should be noted that since isolating valve 13 is pacified
Mounted in the upper end of feeding mechanism 4, it is connected inside the feeding access 4 and furnace body 7 of feeding bellows 44 and its inside, feeding access
4 part can be retained in inside furnace body 7, and after the completion of feeding work, feeding access 4 is not necessarily required all to be promoted to furnace body
7 outside.In this way, length needed for feeding access 4 not only can be shortened, but also the stroke needed for it can be shortened.
Feed intake access
The access 5 that feeds intake is embedded in inside furnace body 7, for access feeding access 43 convey material, and by material add to
In crucible 11.About installation site of the access 5 inside furnace body 7 that feed intake, this part provides three kinds of preferred embodiments.
As an implementation, as shown in Figure 1 and Figure 5, the access 5 that feeds intake is mounted on the inside of guide shell 10.It can from Fig. 5
To find out, region that the access 5 that feeds intake is arranged between silicon single crystal rod 9 and guide shell 10.In general, guide shell 10 is ring junction
Component has interior screen and external screen.The inside of guide shell 10 described in this part, that is, the inside that the access 5 that feeds intake setting is shielded inside.
Feed intake second of preferred embodiment of access 5, as shown in fig. 6, the access 5 that feeds intake is inserted into inside the guide shell 10
And running through the side wall of the guide shell 10, and extend to the top of the crucible 11, that is, the access 5 that feeds intake setting is shielded inside and external screen
Between.In other words, the access 5 that feeds intake is embedded inside guide shell 10, and extends to the earthenware along the 10 elongatedness direction of guide shell
The top of crucible 11.It is easy-to-understand to, the mounting means of this cross-linking, needing to open up in advance in 10 inside of guide shell allows to feed intake
The through-hole that access 5 is inserted into, lower edge of the through-hole from 10 top edge of guide shell to 10 internal stretch of guide shell to guide shell 10,
The access 5 that feeds intake is inserted and secured in the through-hole.
Fig. 7 gives the third the preferred mounting means for the access 5 that feeds intake.Shown in Fig. 7, the access 5 that feeds intake setting is led described
The outside of flow cartridge 10, and the material in the access 5 that feeds intake is through the region between 10 outside of guide shell and 11 inside sidewalls of the crucible
It falls into the crucible 11.
Specifically, the access 5 that feeds intake includes feed intake pan feeding portion 51 and the discharging portion 52 that feeds intake.Feed intake pan feeding portion 51 be located at feed intake
The upper end of access 5 is docked with feeding access 43, receives the material in feeding access 43.Feed intake pair of access 5 and feeding access 43
It connects, referring to Fig. 5.The discharging portion 52 that feeds intake extends along the length direction for the access 5 that feeds intake, and extends to the top of crucible 11.In general,
The access 5 that feeds intake selection quartz material is made or other refractory ceramics class materials are made.
There is the funnel 53 that feeds intake, feeding access 43 can extend to the funnel 53 that feeds intake at the feeding inlet in pan feeding portion 51 that feeds intake
Inside, so that material is entirely fallen in the funnel 53 that feeds intake.The access 5 that feeds intake by the fixed block 54 that feeds intake is fixed on guide shell 10
Surface, and extend to the bottom of guide shell 10.Specifically, the base portion for the funnel 53 that feeds intake is arranged in the fixed block 54 that feeds intake, and solid
Due to the top of guide shell 10.The material discharging portion 52 that fed intake is fallen into crucible 11, in order to reduce the momentum of material, prevents crucible
The spillage of melting materialss in 11, the discharging portion 52 that feeds intake have with certain corner design, that is, the discharging portion 52 that feeds intake at least on
Half portion is to the bending of the long axis direction of the access 5 that feeds intake in an angle.Feed intake the corner design of discharging portion 52, first is that changing
The material moving direction to feed intake in access 5, first is that avoiding the silicon single crystal rod 9 of material interference fusion silicon liquid level or more.Meanwhile about throwing
Expect the extended position of discharging portion 52, should be advisable with the growth and cooling that do not influence silicon single crystal rod 9.
Above-mentioned material delivery system is previously provided with the access 5 that feeds intake in furnace body 7.It is conveyed to the identical furnace body 7 of specification
When material, the stroke of feeding access 4 can be shortened using the material delivery system, that is to say, that use shorter feeding
Access 4 can be realized material transmission to the access 5 that feeds intake.The advantages of material delivery system is it will be apparent that at least may be used
To shorten the longitudinal length of feeding bellows 44, this also means that the overall weight for the feeding mechanism 4 being arranged on bell 71 can
To mitigate, and the center of gravity of feeding mechanism 4 is reduced, and then is easy to dock with moveable guide access 2, it is prior
It is the safety and reliability for improving material and adding operation.
Mobile platform
In the present embodiment, as shown in Figure 1, the material delivery system can also further comprise mobile lifting platform 6.
Mobile lifting platform 6 is used to carry material storage mechanism 1 and guide access 2, and relative to furnace body 7, so that material storage mechanism 1 and guide are logical
Road 2 is mobile to the direction close to and far from furnace body 7.
In order to material storage mechanism 1 and guide access 2 is comparatively safe, be securely disposed on mobile lifting platform 6, in movement
Suitable support frame or fixed frame are installed on hoistable platform 6.Specifically, mobile lifting platform 6 includes movable lifting frame
62, movable supporting frame 63 and moving lifting driving portion 61.The material storage mechanism 1 and guide access 2 are mounted on the moving lifting
On frame 62, under the action of moving lifting driving portion 61, the relatively described movable supporting frame 63 of movable lifting frame 62 is gone up and down.Mobile branch
Support 63 is placed on working face, has the elevating screw 631 for acting on movable lifting frame 62 and guiding polished rod 632.It is mobile to rise
Drop driving portion 61 is typically mounted on movable supporting frame 63, it is preferable that moving lifting driving portion 61 is lifting motor.Moving lifting
Driving portion 61 acts on elevating screw 631, and elevating screw 631 goes up and down movable lifting frame 62 along guiding polished rod 632, so as to
Adjust the position of material storage mechanism 1 and guide access 2 with respect to furnace body 7.
It is easy-to-understand to, multiple wheels is installed in the base portion of movable supporting frame 63, neatly to change material storage mechanism 1
Position with guide access 2 with respect to furnace body 7, meanwhile, also a set of material storage mechanism 1, guide access 2 and movement are shared for multiple furnace bodies
Hoistable platform 6 provides possibility, it can realization supplies external material to multiple furnace bodies 7 in batches.
In addition, mobile lifting platform 6 further includes WidFin mechanism 64.When guide access 2 and docking mechanism 3 dock,
WidFin mechanism 64 can adjust mutual relative distance by a small margin.In the present embodiment, WidFin mechanism 64 has
There is the handle for operating personnel's operation, by rotational handle, drives the displacement of guide access 2 and the generation of material storage mechanism 1 by a small margin.
The position change of guide access 2 and material storage mechanism 1 in the horizontal direction may be implemented in WidFin mechanism 64 as a result, so that leading
Expect that access 2 is in suitable position, convenient for dock with the sealing of docking mechanism 3, meanwhile, reduce as much as possible guide access 2 with it is right
Extruding and collision between connection mechanism 3 improve the safety and convenience of butt-joint operation.
Other variations
Above with respect to specific structure of the invention, however it is not limited to which above embodiment and variation are not departing from the present invention
Various modifications can be carried out in the range of purport.
It is that the material delivery system realizes the crucial behave of its function first is that be installed in feeding intake for 10 surface of guide shell logical
Road 5, as main component outside furnace body 7, such as feeding mechanism 4, guide access 2 and material storage mechanism 1 etc., structure can be done
The Optimal improvements different from present embodiment out.In another embodiment, material storage mechanism 1 can not include material controlling body 1033,
Or evade the accurate material controlling mode for being designed to other forms, for example, barrel 101 can also carry the machine for realizing control blanking amount
Structure.The height of material storage mechanism 1 can be at least reduced in this way.
Doper is installed in the suitable position of guide access 2, which can will adulterate by reasonable manner
Agent is placed in guide access 2, and dopant is transferred into inside furnace body 7 together in company with external material.In addition, guide access 2
Structure and function, it is also possible to which other modes are achieved, and convey material for example, being realized using devices such as conveyer belt, vibrators
To docking mechanism 3, while being precisely controlled for blanking amount also may be implemented.
Intelligent control system is installed on mobile lifting platform 6, by intelligent control system, guide access may be implemented
2 and docking mechanism 3 adaptive docking, and can realize long-range control, provide inspiration thinking for single crystal growing furnace intelligence charging.
The material delivery system could be applicable to different 7 internal structures of furnace body, refer in particular to the different crucible of structure
11.Crucible 11 shown in fig. 5 is commonly referred to as common crucible, and using common crucible as shown in Figure 5, silicon single crystal rod 9 can only be in quilt
When pulling apparatus 8 is promoted to appropriate location A, the material delivery system could be used to feed, there is no realize really meaning
Continuous crystal-pulling in justice.It if changing common crucible into double crucibles, or is the quartz glass crucibles with weir body structure, and to institute
It states material delivery system and carries out structure improvement appropriate, the setting position of access 5 or structure, also should belong to for example, adjustment feeds intake
Protection scope of the present invention.
Embodiment 2
The present embodiment provides a kind of crystal growth system, includes at least furnace body 7, and be mounted on the crucible inside furnace body 7
11.For crucible 11 as described above for installing external material, external material is fused into liquid in crucible 11.Particularly, this crystalline substance
Body growing system further includes above-mentioned material delivery system, and generally speaking, the material delivery system transmits controllably to crucible 11
The external material of amount.
Claims (22)
1. material delivery system, which is characterized in that for supplying material, the material into the internal crucible (11) of furnace body (7)
Feedway includes material storage mechanism (1), feeding mechanism (4) and the access that feeds intake (5), and the material storage mechanism (1) includes barrel (101)
With material controlling body (1033), for the barrel (101) for accommodating material and having discharge port, the material controlling body (1033) is set to institute
It states barrel (101) and can be mobile relative to the barrel (101) discharge port, is contained in material in the barrel (101) from institute
The gap of the discharge port and the material controlling body (1033) of stating barrel (101) is left barrel (101), and the feeding mechanism (4) has
By the material feeding access (43) internal from furnace body (7) external input furnace body (7), the access that feeds intake (5) is located at the furnace body
(7) internal and with the crucible (11) relatively, feed intake access (5) described in feeding access (43) docking, material is fed through described
Material access (43) is imported to feed intake and access (5) and be inputted in the crucible (11) by the access that feeds intake (5).
2. material delivery system according to claim 1, which is characterized in that the material controlling body (1033) is suspended in the material
Cylinder (101) discharge outlet, and can be bonded and far from the barrel (101) discharge port；The material controlling body (1033) with it is described
The shape of the discharge port of barrel (101) matches, and the bed-plate dimension of the material controlling body (1033) is not less than the barrel (101)
The size of discharge port.
3. material delivery system according to claim 2, which is characterized in that the material controlling body (1033) connects drag rope
(1032), the drag rope (1032) passes through barrel (101) and the traction power portion external with the barrel (101) is installed on
(1031) it connects.
4. material delivery system according to claim 3, which is characterized in that the material controlling body (1033) is cone or circle
Platform, the discharge port of the barrel (101) be it is cylindric, the basal diameter of the cone or rotary table is not less than the barrel
(101) diameter of discharge port.
5. material delivery system according to claim 1, which is characterized in that the furnace body (7) is internal also to have guide shell
(10), the guide shell (10) is installed on the top of the crucible (11), and the access that feeds intake (5) is arranged in the guide shell
(10) inner or outer side, or the insertion guide shell (10) is internal and extends to the top of the crucible (11).
6. material delivery system according to claim 5, which is characterized in that the access that feeds intake (5) is set to described lead
The inside of flow cartridge (10), the access that feeds intake (5) are maintained at the surface of the guide shell (10) by the fixed block that feeds intake (54).
7. material delivery system according to claim 5 or 6, which is characterized in that the access that feeds intake (5) includes being located at it
The outlet that feeds intake in feed intake entrance and the downstream of upstream feeds intake funnel (53) in the inlet setting that feeds intake of the access that feeds intake (5),
The feeding access (43) is docked with the funnel that feeds intake (53), and feeding intake for the access that feeds intake (5) is exported close to the crucible
(11)。
8. material delivery system according to claim 1, which is characterized in that there is opening on the furnace body (7), it is described to feed
Material access (43) is connected by the opening with furnace body (7), and the feeding access (43) includes opposite upstream end and downstream
End, the upstream end are located at the furnace body (7) outside and are provided with isolating valve (13), and the downstream is in the furnace body (7)
Portion extends or recalls, and the isolating valve (13) makes the feeding access (43) and furnace body (7) keep airtight conditions.
9. material delivery system according to claim 8, which is characterized in that the feeding mechanism (4) is mounted on the furnace
The outside of body (7) and open butt joint with the furnace body (7), the feeding access (43) part external in the furnace body (7)
It is accommodated in the feeding mechanism (4).
10. material delivery system according to claim 9, which is characterized in that wave is arranged in the open outside of the furnace body (7)
Line pipe, the feeding mechanism (4) pass through the open butt joint of bellows and the furnace body (7).
11. material delivery system according to claim 10, which is characterized in that the feeding mechanism (4) mentions with feeding
It rises device (45), the feeding lifting device (45) is for realizing the feeding access (43) relative to the access that feeds intake (5)
Extension or recall.
12. material delivery system according to claim 11, which is characterized in that the external setting of the feeding access (43)
Feeding access fixing sleeve (42), the feeding access fixing sleeve (42) connect the feeding lifting device (45), and the feeding is logical
Road (43) and feeding access fixing sleeve (42) are mobile in company with the feeding lifting device (45).
13. material delivery system according to claim 8, which is characterized in that it further include material guide mechanism, the material guide mechanism
It is arranged between the material storage mechanism (1) and feeding mechanism (4), being used for will be in the material storage mechanism (1) under airtight conditions
Material imports in the feeding access (43) of the feeding mechanism.
14. material delivery system according to claim 13, which is characterized in that the material guide mechanism includes guide access
(2), the guide access (2) is a tubular passageway being obliquely installed, and the material in guide access (2) is shifted to by material self weight
The feeding mechanism (4).
15. material delivery system according to claim 14, which is characterized in that the material guide mechanism further includes feed tube
(104), the feed tube (104) is mounted on the lower section of the barrel (101) and the discharge port of at least described barrel (101) protrudes into
The inside of the feed tube (104), the guide access (2) are connected to the feed tube (104) and are in the feed tube (104)
Downstream.
16. material delivery system according to claim 15, which is characterized in that in the barrel (101) and the guide
The junction of cylinder (104) opens up several ventholes (105).
17. material delivery system according to claim 14, which is characterized in that further include docking mechanism (3), the docking
Mechanism (3) is arranged between the guide access (2) and feeding mechanism (4), is used for the guide access under airtight conditions
(2) material in imports in the feeding access (43) of the feeding mechanism (4).
18. material delivery system according to claim 17, which is characterized in that the docking mechanism (3) includes successively connecting
The docking passage (35) and butt-joint corrugated pipe (31) for connecing and being connected, the docking passage (35) are located at butt-joint corrugated pipe
(31) the guide access (2) is docked in the upstream end of upstream, docking passage (35), the butt-joint corrugated pipe (31)
Downstream connects the isolating valve (13) of feeding access (43) upstream end.
19. material delivery system according to claim 18, which is characterized in that the docking passage (35), docking wave
Line pipe (31) is internally provided with docking feeder pipe (33), and the guide access is docked in the upstream end of docking feeder pipe (33)
(2), the downstream of docking feeder pipe (33) may pass through the isolating valve (13) and be connected to the feeding access (43).
20. material delivery system according to claim 18, which is characterized in that the docking mechanism (3) further includes docking
Limiting device (32), docking limiting device (32) be mounted on docking passage (35), butt-joint corrugated pipe (31) it is outer
Portion, for limiting the retractable variable of the butt-joint corrugated pipe (31).
21. material delivery system according to claim 1 further includes mobile lifting platform (6), which is characterized in that institute
Mobile lifting platform (6) is stated at least for carrying the material storage mechanism (1) and changing the relatively described furnace body of the material storage mechanism (1)
(7) position.
22. crystal growth system characterized by comprising
Furnace body (7)；
Crucible (11), crucible (11) setting is internal in furnace body (7), for containing material；And
Material delivery system described in any one of claim 1 to 21, the material delivery system can to crucible (11) transmission
The material of control amount.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959874A (en) * | 2022-04-24 | 2022-08-30 | 杭州中欣晶圆半导体股份有限公司 | System and method for improving RRG value of radial crystal bar by using pull rate |
| CN117684253A (en) * | 2023-12-07 | 2024-03-12 | 连城凯克斯科技有限公司 | Feeding equipment of monocrystalline furnace for producing crystalline silicon |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| CN103026160A (en) * | 2011-03-09 | 2013-04-03 | 昕芙旎雅有限公司 | Device for introducing object to be processed, pipe unit for device for introducing object to be processed, and pipe used in this pipe unit |
| CN203462173U (en) * | 2013-08-29 | 2014-03-05 | 河北晶龙阳光设备有限公司 | Continuous feeding device for single crystal furnace |
| US20160060787A1 (en) * | 2013-05-16 | 2016-03-03 | S-Tech Co., Ltd. | Ingot raw material supply system |
-
2017
- 2017-07-27 CN CN201710624492.5A patent/CN109306514B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103026160A (en) * | 2011-03-09 | 2013-04-03 | 昕芙旎雅有限公司 | Device for introducing object to be processed, pipe unit for device for introducing object to be processed, and pipe used in this pipe unit |
| CN102677156A (en) * | 2012-06-11 | 2012-09-19 | 曾泽斌 | Massive polycrystalline silicon charging device for Czochralski silicon single crystal furnace |
| US20160060787A1 (en) * | 2013-05-16 | 2016-03-03 | S-Tech Co., Ltd. | Ingot raw material supply system |
| CN203462173U (en) * | 2013-08-29 | 2014-03-05 | 河北晶龙阳光设备有限公司 | Continuous feeding device for single crystal furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114959874A (en) * | 2022-04-24 | 2022-08-30 | 杭州中欣晶圆半导体股份有限公司 | System and method for improving RRG value of radial crystal bar by using pull rate |
| CN114959874B (en) * | 2022-04-24 | 2024-04-23 | 杭州中欣晶圆半导体股份有限公司 | System and method for improving RRG value of radial crystal bar by using pull speed |
| CN117684253A (en) * | 2023-12-07 | 2024-03-12 | 连城凯克斯科技有限公司 | Feeding equipment of monocrystalline furnace for producing crystalline silicon |
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