CN202131400U - Combined continuous feeder - Google Patents
Combined continuous feeder Download PDFInfo
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- CN202131400U CN202131400U CN201120201283U CN201120201283U CN202131400U CN 202131400 U CN202131400 U CN 202131400U CN 201120201283 U CN201120201283 U CN 201120201283U CN 201120201283 U CN201120201283 U CN 201120201283U CN 202131400 U CN202131400 U CN 202131400U
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- feeder
- combined type
- type continuous
- charging device
- continuous charging
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Abstract
The utility model relates to a combined continuous feeder, which is arranged on a growing furnace and comprises a main feeder and an auxiliary feeder. The main feeder comprises a feeding cavity, a material containing device and a lifting mechanism. A plurality of material bodies are contained in the material containing device. The lifting mechanism is connected with the feeding cavity and the material containing device respectively and enables the material containing device to perform lifting work in the feeding cavity. The auxiliary feeder comprises a material placing container, a buffer discharger and a discharging guiding pipe. A plurality of material bodies are arranged in the material placing container, and the buffer discharger is arranged at the outlet end of the material placing container to receive the plurality of material bodies output by the material placing container and discharged to the growing furnace through the discharging guiding pipe. By means of arrangement of the main feeder and the auxiliary feeder, the combined continuous feeder can simultaneously be applied to the growing furnace of single polysilicon and can effectively control discharging quantity and discharging speed.
Description
Technical field
The utility model relates to a kind of growth stove feeder, particularly a kind of combined type continuous charging device that is applied to crystal growth.
Background technology
Flourish along with unicircuit grows with each passing day to the demand of semi-conductor electronic component, and semi-conductive main raw " silicon " then is after must refining through high temperature, just can reach the required purity of semi-conductor.And in general, the refinement of silicon can be divided into silicon single crystal and polysilicon, and the quality requirements of silicon single crystal is strict; Processing procedure speed is slow but lattice arrangement is consistent, does not have grain boundary defects, and polysilicon is because production rate is fast, processing requirement is lower; Thereby has a price advantage; But relative, its lattice arrangement is also inconsistent, and has grain boundary defects.
And in order to cooperate monocrystalline or polycrystalline to grow up, the crystal growth stove that it adopted just is not quite similar.Like TaiWan, China patent announcement M344347 number " monocrystalline growth stove blanking device ", it is mainly used in monocrystalline grows up, and can stably control blanking velocity and weight, but relative, its production rate is slower.And " the polycrystalline growth stove continuous charging device " of TaiWan, China patent announcement M343913 number; It discloses a kind of structure and charging process of continuous charging device; In polycrystalline growth system; It selects disposable blanking, through a filling tube majority material article is fallen in the crucible so that carry out the preparation technology of polysilicon after its fusion.Its advantage is that he crosses filling tube and can carry out a large amount of disposable blankings; And the filler action of repeatability can carried out after this filling tube retracted; But the secondary filler has still been wasted the time of filler after all; And if in a small amount during filler, more highlight the time waste and the space waste of its filler process.Therefore,, its shortcoming is arranged all, become industry and need improved target badly no matter be any cutting mode.
The utility model content
The main purpose of the utility model; Be to provide a kind of combined type continuous charging device; This combined type continuous charging device not only can solve silicon single crystal and the polysilicon problem that its special blanking device separately uses of must arranging in pairs or groups, and can also solve the polycrystalline growth continuous charging time of device when secondary stuff-assignment and the problem of space waste of prior art.
For reaching above-mentioned purpose, the utility model has been taked following technical scheme.
A kind of combined type continuous charging device; Be arranged on the growth stove; This combined type continuous charging device includes: the main feeder that is connected with this growth stove, have a charging cavity, a capacity feeder and a hoisting appliance, and this charging cavity is connected with this growth stove; This capacity feeder is equipped with most material bodies, and this hoisting appliance is connected with this charging cavity and this capacity feeder respectively; And the secondary feeder that is connected with this growth stove; Have the material container of putting, a buffering blanking device and a blanking guide wire; This is put material container and is equipped with most these material bodies; This buffering blanking device is arranged at this exit end of putting material container, and this blanking guide wire cushions feed opening and is communicated to this charging cavity cushioning one of blanking device.
Further, but this hoisting appliance is the hoisting appliance of a torsion line formula, but its have a line concentration tube and and be wound in the torsion line on this line concentration tube, this concentrator is fixedly connected with this charging cavity, but and should be connected with this capacity feeder by torsion line.
Further; This charging cavity has a positioning block; And this capacity feeder has the hollow housing of this material body of ccontaining majority, the outlet opening of most these material bodies of an output, the locating slot that this preset pieces card of cooperation ends; And one and this outlet opening assembly end the material plug, it is outer and be connected with this hollow housing that this locating slot is arranged at this hollow housing.
Further, only the material plug being arranged in this capacity feeder, should end and expect that plug has a coupling end and and ends the material end, is connected with this coupling end through this capacity feeder but be somebody's turn to do torsion line, holds the shape that cooperates this outlet opening and should end material.
Further, should end the material plug and be arcuation, and this outlet opening should end the material plug relatively and have a neck and opening end.
Further, this charging cavity and this growth stove junction are provided with a segregaion valve, and this segregaion valve has the valve that a translation track and cooperates with this translation track, and the sense of displacement of this translation track is perpendicular to the travel direction of this capacity feeder.
Further, this buffering blanking device has stop section and this buffering feed opening that the supporting part, of accepting most these material bodies prevents that most these material body drains from going out, and this buffering feed opening is connected with this supporting part and this stop section.
Further, this pair feeder has the open-and-shut controller that is connected with this supporting part and fixing this put the fixed frame of the position of material container, this open-and-shut controller and this buffering blanking device.
Further, this buffering blanking device also has one and is fixed on this fixed frame and the articulated section that is connected with this supporting part.
Further, this open-and-shut controller has the wire that a swing arm and is connected with this swing arm, and this wire puts material container through this and this exit end is connected with this supporting part.
Further, this supporting part and this stop section are connected to form an accommodation space.
Hence one can see that, and the utility model provides a kind of combined type continuous charging device, and it is arranged on the growth stove, and this combined type continuous charging device includes the main feeder that is connected with this growth stove, and the secondary feeder that is connected with this growth stove.
This main feeder has a charging cavity, a capacity feeder and a hoisting appliance; This charging cavity is connected with this growth stove; This capacity feeder is equipped with most material bodies, and this hoisting appliance is connected with this charging cavity and this capacity feeder respectively, supplies this capacity feeder in this charging cavity, to carry out lift work.This pair feeder has the material container of putting, a buffering blanking device and a blanking guide wire; This is put material container and is equipped with most these material bodies; This buffering blanking device is arranged at this exit end of putting material container; To accept this material body of majority of being put material container output by this, this blanking guide wire cushions feed opening and is communicated to this charging cavity cushioning one of blanking device.
Can know by above-mentioned explanation,, the utlity model has following characteristics compared to prior art:
One, can reach the ability of quick blanking through this main feeder with cooperating of this pair feeder, therefore avoid causing whole blanking waste of time because of the filler waiting time.
Two, the utility model can carry out the main blanking of single through this main feeder, and adds blanking by this pair feeder, thereby can carry out the fine adjustments blanking, to control the blanking quantity of most these material bodies.
Three, this main feeder and should also can carry out blanking action respectively by the pair feeder can be applicable to polycrystalline manufacturing and monocrystalline manufacturing simultaneously.
Description of drawings
Fig. 1 is the unitized construction synoptic diagram of the utility model one preferred embodiment.
Fig. 2 is main feeder first working state schematic representation of the utility model one preferred embodiment.
Fig. 3 is main feeder second working state schematic representation of the utility model one preferred embodiment.
Fig. 4 is the secondary feeder working state schematic representation of the utility model one preferred embodiment.
Embodiment
Detailed description of relevant the utility model and technology contents, following conjunction with figs. is explained as follows:
See also shown in Figure 1; It is the unitized construction synoptic diagram of the utility model one preferred embodiment; As shown in the figure: the utility model is a kind of combined type continuous charging device; It is arranged on the growth stove 10, and this combined type continuous charging device includes the main feeder 20 that is connected with this growth stove 10, and the secondary feeder 30 that is connected with this growth stove 10.
This main feeder 20 has a charging cavity 21, a capacity feeder 22 and a hoisting appliance 23; This charging cavity 21 is connected with this growth stove 10; This capacity feeder 22 is equipped with most material bodies 40; This hoisting appliance 23 is connected with this charging cavity 21 and this capacity feeder 22 respectively, supplies this capacity feeder 22 in this charging cavity 21, to carry out lift work.Further; But this hoisting appliance 23 is the hoisting appliance 23 of a torsion line formula; But it has a line concentration tube 231 and and is wound in the torsion line 232 on this line concentration tube 231, and this line concentration tube 231 is fixedly connected with this charging cavity 21, but and should torsion line 232 be connected with this capacity feeder 22; Therefore, but should torsion line 232 can carry out lift work through 231 pairs of these capacity feeders 22 of this line concentration tube.This charging cavity 21 has a positioning block 211; And this capacity feeder 22 has the hollow housing 221 of this material body 40 of ccontaining majority, the outlet opening 222, of most these material bodies 40 of an output cooperates these preset pieces 211 cards locating slot 223 only; And one and these outlet opening 222 assembly end material plug 224; This locating slot 223 is arranged at the outside surface of this hollow housing 221 and is connected with this hollow housing 221, and this locating slot 223 ends to limit moving of this capacity feeder 22 with these preset pieces 211 cards, should end material plug 224 switches as this outlet opening 222; In order to control the output of most these material bodies 40; Wherein, only material plug 224 is arranged in this capacity feeder 22, should end and expect that plug 224 has a coupling end 225 and and ends material end 226; But should be connected with this coupling end 225 through this capacity feeder 22 by torsion line 232, expected that end 226 cooperated the shape of this outlet opening 222 and is limited to this outlet opening 222 and should end.And in present embodiment; Should end material plug 224 and be arcuation, and this outlet opening 222 should end material plug 224 relatively and have a neck 222a and an opening end 222b, thus; But should end material plug 224 driving fits ground is connected with this outlet opening 222; And in the time should ending material plug 224 and separated with this outlet opening 222, let most this material bodies 40 by the ramp structure landing of arcuate shape to this growth stove 10, reduce most this material bodies 40 and adhere to this and only expect the situation on 224 of filling in.
In addition; This charging cavity 21 is provided with a segregaion valve 24 with these growth stove 10 junctions; These preset pieces 211 adjacent these segregaion valves 24 are provided with; This segregaion valve 24 has the valve 242 that a translation track 241 and cooperates with this translation track 241, and the travel direction of vertical this capacity feeder 22 of the sense of displacement of this translation track 241.Through such design, the problem of the increase whole height that causes because of the switch that must cooperate valve body in the time of can avoiding the use of the valve body structure of pivot joint form.As stated, but present embodiment has used the hoisting appliance 23 of torsion line formula, must increase the outer height of charging cavity 21 during compared with the hard tube structure of using the oil-pressurized elevator structure, but this hoisting appliance 23 of torsion line formula can reach the purpose that reduces whole height.
This pair feeder 30 has the material container of putting 31, a buffering blanking device 32, a blanking guide wire 33, an open-and-shut controller 34 and a fixed frame 35; This material of putting material container 31 can be quartz, metal; And should expect body 40 in order to ccontaining majority; This buffering blanking device 32 is arranged at this exit end 311 of putting material container 31; To accept this material body 40 of majority of being put material container 31 outputs by this, 33 pairs of this blanking guide wires should cushion a buffering feed opening 321 of blanking device 32 and be communicated to this charging cavity 21.Further; This buffering blanking device 32 has stop section 323, this buffering feed opening 321 that the supporting part 322, of accepting most these material bodies 40 prevents that most these material bodies 40 from spilling; And the articulated section 324 of this supporting part 322 of connection, this buffering feed opening 321 is connected with this supporting part 322 and this stop section 323.This supporting part 322 is connected to form an accommodation space with this stop section 323, and this accommodation space should material body 40 in order to ccontaining majority by these exit end 311 outputs.This fixed frame 35 is put the position of material container 31, this open-and-shut controller 34 and this buffering blanking device 32 in order to fixing this, and this articulated section 324 is connected with this fixed frame 35, and can make this supporting part 322 articulate rotation.This open-and-shut controller 34 has the wire 342 that a swing arm 341 and is connected with this swing arm 341; This open-and-shut controller 34 is arranged at this and puts material container 31 tops and be connected with this fixed frame 35; This wire 342 puts material container 31 through this and this exit end 311 is connected with this supporting part 322, controls the distance of this supporting part 322 and this exit end 311 through this swing arm 341 drives these wires 342.
First working order and second working state schematic representation that please cooperate the main feeder 20 of consulting Fig. 2 and the utility model one preferred embodiment shown in Figure 3; As shown in the figure, in loaded most this material bodies 40 in this capacity feeder 22 after, the valve 242 in this segregaion valve 24 is opened connection this charging cavity 21 and this growth stove 10 through these translation track 241 translation glidings; This capacity feeder 22 is descended by this charging cavity 21; Till this locating slot 223 and these preset pieces 211 cards ended, at this moment, this capacity feeder 22 was fixed; And but but the torsion line 232 on the hoisting appliance 23 that should torsion line formula continues to descend; Then as shown in Figure 3, but continue to descend owing to being somebody's turn to do torsion line 232, thereby only material plug 224 continuation declines are somebody's turn to do in drive; Cause this to end material plug 224 and opened in 222 minutes, carry out the smelting process flow process and let most these material bodies 40 fall in this growth stove 10 by this outlet opening 222 with outlet opening.
When this main feeder 20 feed in raw material finish after, this material body 40 of majority that is positioned at this capacity feeder 22 just can drop down onto a crucible of growth stove 10 fully.Then, please cooperate and consult shown in Figure 4ly, secondary feeder 30 begins to carry out blanking action; Accept this material body 40 of majority that this puts material container 31 outputs by this buffering blanking device 32 in advance; And these open-and-shut controller 34 these swing arms 341 of control are put down this wire 342 and this supporting part 322 are tilted, and separate with this exit end 311, and most these material bodies 40 are dropped out; Be somebody's turn to do material bodies 40 to this blanking guide wire 33 through these buffering feed opening 321 output majorities again, and then fall into crucible.Thus, in main feeder 20 carry out single reinforced after, secondary feeder 30 can replenish reinforced action, and does not need main feeder 20 is passed through these hoisting appliance 23 pull-ups, carries out filler again and moves blanking again.Thereby can save the blanking time.
Except above-mentioned blanking flow process, the utility model this main feeder 20 also capable of using or the action of should pair feeder 30 feeding in raw material respectively.Illustrate another reinforced flow process more for example at this: same earlier by the action of feeding in raw material of this main feeder 20, and after blanking finishes, by this hoisting appliance 23 with these capacity feeder 22 pull-ups; Then do not close this segregaion valve 24, directly carry out blanking by this pair feeder 30, main simultaneously feeder 20 carries out the action of casting resin body 40; And after main feeder 20 fillings finished, secondary feeder 30 stopped blanking, fell this capacity feeder 22 by this hoisting appliance 23; To continue secondary stuff-assignment, through such cutting mode, can be when main feeder 20 carries out the filler action; Continue to carry out blanking action by this pair feeder 30, thereby can effectively increase the speed of blanking.Above-mentioned this main feeder 20 removes the blanking that can be applicable to material body 40 and does out of tradely, also can be applicable to crystal pulling and crystal purifying, and the crystal of its use can be sapphire, silicon single crystal or polysilicon etc.
In sum; Because the utility model can reach the effect of quick blanking with cooperating of this pair feeder 30 through this main feeder 20; Therefore avoided causing whole blanking waste of time, and the utility model can carry out the main blanking of single through this main feeder 20, and add blanking by this pair feeder 30 because of the filler waiting time; Thereby can carry out the fine adjustments blanking, to control the blanking quantity of most these material bodies 40.In addition, this main feeder 20 and should also can carry out blanking action respectively by pair feeder 30 can be suitable for polycrystalline manufacturing and monocrystalline manufacturing simultaneously.In addition, but the main feeder 20 of the utility model uses the hoisting appliance 23 of torsion line formula, cooperates the translation design of this segregaion valve 24, can significantly reduce whole height.In addition, the mode of the buffering vibration blanking of this pair feeder 30, have simple in structure, and the problem that can prevent the detent plug material.
Claims (11)
1. a combined type continuous charging device is arranged on the growth stove (10), it is characterized in that this combined type continuous charging device includes:
The one main feeder (20) that is connected with this growth stove (10); Have a charging cavity (21), a capacity feeder (22) and a hoisting appliance (23); This charging cavity (21) is connected with this growth stove (10); This capacity feeder (22) is equipped with most material bodies (40), and this hoisting appliance (23) is connected with this charging cavity (21) and this capacity feeder (22) respectively; And
The one secondary feeder (30) that is connected with this growth stove (10); Have the material container of putting (31), a buffering blanking device (32) and a blanking guide wire (33); This is put material container (31) and is equipped with most these material bodies (40); This buffering blanking device (32) is arranged at this exit end (311) of putting material container (31), and this blanking guide wire (33) cushions feed opening (321) and is communicated to this charging cavity (21) cushioning one of blanking device (32).
2. combined type continuous charging device as claimed in claim 1; It is characterized in that this hoisting appliance (23) but be the hoisting appliance (23) of a torsion line (232) formula; It has that a line concentration tube (231) and is wound in this line concentration tube (231) but on torsion line (232); This concentrator is fixedly connected with this charging cavity (21), but and should be connected with this capacity feeder (22) by torsion line (232).
3. combined type continuous charging device as claimed in claim 1; It is characterized in that this charging cavity (21) has a positioning block (211); And this capacity feeder (22) has the hollow housing (221) of this material body (40) of a ccontaining majority, the outlet opening (222), of most these material bodies (40) of an output cooperates this preset pieces (211) card locating slot (223) only; And one and this outlet opening (222) assembly end material plug (224), it is outer and be connected with this hollow housing (221) that this locating slot (223) is arranged at this hollow housing (221).
4. combined type continuous charging device as claimed in claim 3; It is characterized in that this ends material plug (224) and is arranged in this capacity feeder (22); Should end material plug (224) and have only material end (226) of a coupling end (225) and; But should be connected with this coupling end (225) through this capacity feeder (22) by torsion line (232), and should end the shape that material end (226) cooperates this outlet opening (222).
5. combined type continuous charging device as claimed in claim 4 it is characterized in that this ends material plug (224) and is arcuation, and this outlet opening (222) should end material plug (224) relatively and have a neck (222a) and opening end (222b).
6. combined type continuous charging device as claimed in claim 1; It is characterized in that this charging cavity (21) and this growth stove (10) junction are provided with a segregaion valve (24); This segregaion valve (24) has the valve (242) that a translation track (241) and cooperates with this translation track (241), and the sense of displacement of this translation track (241) is perpendicular to the travel direction of this capacity feeder (22).
7. combined type continuous charging device as claimed in claim 1; It is characterized in that this buffering blanking device (32) has stop section (323) and this buffering feed opening (321) that the supporting part (322), of accepting most these material bodies (40) prevents that most these material bodies (40) from spilling, this buffering feed opening (321) is connected with this supporting part (322) and this stop section (323).
8. combined type continuous charging device as claimed in claim 7 is characterized in that this pair feeder (30) has the open-and-shut controller (34) that is connected with this supporting part (322) and fixing this put the fixed frame (35) of the position of material container (31), this open-and-shut controller (34) and this buffering blanking device (32).
9. combined type continuous charging device as claimed in claim 8 is characterized in that this buffering blanking device (32) also has one and is fixed on the articulated section (324) that this fixed frame (35) is gone up and is connected with this supporting part (322).
10. combined type continuous charging device as claimed in claim 9; It is characterized in that this open-and-shut controller (34) has the wire (342) that a swing arm (341) and is connected with this swing arm (341), this wire (342) puts material container (31) through this and this exit end (311) is connected with this supporting part (322).
11. combined type continuous charging device as claimed in claim 7 is characterized in that this supporting part (322) and this stop section (323) are connected to form an accommodation space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120201283U CN202131400U (en) | 2011-06-10 | 2011-06-10 | Combined continuous feeder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120201283U CN202131400U (en) | 2011-06-10 | 2011-06-10 | Combined continuous feeder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202131400U true CN202131400U (en) | 2012-02-01 |
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ID=45520176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201120201283U Expired - Fee Related CN202131400U (en) | 2011-06-10 | 2011-06-10 | Combined continuous feeder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202131400U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105951180A (en) * | 2016-06-01 | 2016-09-21 | 江苏协鑫硅材料科技发展有限公司 | Secondary feeding device for polysilicon ingot furnace and polycrystalline ingot casting system |
| CN106591945A (en) * | 2016-11-30 | 2017-04-26 | 安徽电气集团股份有限公司 | Polycrystalline silicon re-feeding method |
| CN113046823A (en) * | 2021-02-07 | 2021-06-29 | 宇泽半导体(云南)有限公司 | Single crystal feeding method |
-
2011
- 2011-06-10 CN CN201120201283U patent/CN202131400U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105951180A (en) * | 2016-06-01 | 2016-09-21 | 江苏协鑫硅材料科技发展有限公司 | Secondary feeding device for polysilicon ingot furnace and polycrystalline ingot casting system |
| CN105951180B (en) * | 2016-06-01 | 2019-03-15 | 江苏协鑫硅材料科技发展有限公司 | Polycrystalline silicon ingot or purifying furnace secondary charging device and polycrystalline cast ingot system |
| CN106591945A (en) * | 2016-11-30 | 2017-04-26 | 安徽电气集团股份有限公司 | Polycrystalline silicon re-feeding method |
| CN106591945B (en) * | 2016-11-30 | 2019-03-19 | 安徽电气集团股份有限公司 | A kind of polysilicon throws method again |
| CN113046823A (en) * | 2021-02-07 | 2021-06-29 | 宇泽半导体(云南)有限公司 | Single crystal feeding method |
| CN113046823B (en) * | 2021-02-07 | 2023-10-17 | 宇泽半导体(云南)有限公司 | Single crystal feeding method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120201 Termination date: 20190610 |