CN207998653U

CN207998653U - A kind of dual rotary pulling apparatus

Info

Publication number: CN207998653U
Application number: CN201721927053.3U
Authority: CN
Inventors: 袁玉平
Original assignee: JIANGSU BAIERTE OPTOELECTRONIC DEVICES Co Ltd
Current assignee: JIANGSU BAIERTE OPTOELECTRONIC DEVICES Co Ltd
Priority date: 2017-12-31
Filing date: 2017-12-31
Publication date: 2018-10-23
Anticipated expiration: 2027-12-31

Abstract

The utility model is related to a kind of dual rotary pulling apparatus, the device includes that first and second be each attached on column rotate and upgrade mechanism;First shift mechanism, the first attached cylinder, first support arm, first rotate and upgrade mechanism and column is sequentially connected, second shift mechanism, the second attached cylinder, second support arm, second rotate and upgrade mechanism and column is sequentially connected, and described first to rotate and upgrade mechanism be to enable to first support arm that the first attached cylinder is driven to rotate and upgrade the center axis thereof of mechanism around first when using and enable to first support arm the first attached cylinder of drive vertically to the mechanism of movement.It is to enable to second support arm that the second attached cylinder is driven to rotate and upgrade the center axis thereof of mechanism around second when using and second support arm is enabled to drive the second attached cylinder vertically to the mechanism of movement that described second, which rotates and upgrades mechanism then,.The dual rotary pulling apparatus of the utility model can help single crystal growing furnace to have the function of continuously lifting more monocrystal rods.

Description

A kind of dual rotary pulling apparatus

Technical field

The utility model is related to a kind of component of single crystal growing furnace, more particularly to the dual rotary pulling apparatus of a kind of single crystal growing furnace.

Background technology

Silicon materials can be divided into monocrystalline silicon, polysilicon and non-crystalline silicon according to crystal structure.Single crystal silicon material refers to that silicon atom exists The regular periodically uninterrupted arrangement of three dimensions, forms a complete crystalline material, what material character embodied be it is each to The opposite sex, i.e., various properties all have differences in different crystallographic directions.Polycrystalline silicon material refer to then by more than two sizes not The silicon materials of same monocrystalline silicon composition, what its material character embodied is isotropism.Amorphous silicon material refers to silicon atom short Apart from interior ordered arrangement, silicon materials disorderly arranged in long range, the property of material show isotropism.For polycrystalline For silicon, when the elemental silicon of melting solidifies under the conditions of supercooling, silicon atom with diamond lattice morphologic arrangement at many nucleus, such as These nucleus of fruit grow up to the different crystal grain of high preferred orientation, then these crystal grain combine, and crystallize into polysilicon.If the simple substance of melting For silicon in solidification, silicon atom is arranged in many nucleus with diamond lattice, if these nucleus grow up to the identical crystalline substance of high preferred orientation Grain, then these crystal grain it is parallel combine just crystallize into monocrystalline silicon.Monocrystalline silicon has metalloid physical property, there is weaker lead Electrically, conductivity increases with the raising of temperature, there is significant semiconduction.Ultrapure monocrystalline silicon is intrinsic semiconductor.

The method of currently manufactured monocrystalline silicon mainly has vertical pulling method, magnetic field Czochralski method, zone-melting process and double crucible crystal pulling methods.It is single Brilliant stove is one kind in inert gas(Based on nitrogen, helium)In environment, the polycrystalline materials such as polysilicon are melted with heater, with straight The equipment that daraf(reciprocal of farad) grows dislocation-free monocrystalline.Single crystal growing furnace is widely used in the silicon single crystal rod manufacture of solar energy power generating and partly leads monocrystalline The manufacture of silicon rod.Solar energy power generating is the generally acknowledged clean energy resource in the whole world, it is inexhaustible, is mankind's hair The ideal energy needed for exhibition, countries in the world are all being greatly developed.But development is limited by two bottlenecks, first, being limited by The photoelectric conversion efficiency of material especially disappears required for manufacture early period second is that solar photovoltaic electrification component manufacturing cost is higher The energy of consumption is relatively high, therefore overall applicability and spreading speed are unhappy.In terms of photoelectric conversion efficiency, although having one in recent years The cost of fixed raising, unit component also has decline, has pushed the development of photovoltaic industry.But since transfer efficiency has limit limit System, room for promotion is more and more narrow, and follow-up developments space is seldom, so that the factor of transfer efficiency is to follow-up fast-developing photovoltaic generation Kinetic energy it is smaller and smaller.

The improvement for reducing the energy consumption of manufacture monocrystalline silicon at present is carried out mainly around two aspects, first, changing the side to feed intake Blowing out is also fed intake and changes into not blowing out and feed intake by formula.Second is that changing pulling monocrystal silicon rod method, namely list is drawn by the method for fractional steps Crystalline silicon rod changes into continuity method pulling monocrystal silicon rod.

In terms of continuity method pulling monocrystal silicon rod, Chinese patent literature CN106544726A can refer to(Application No. is 201611076542.2 hereinafter referred to as document 1)It is disclosed that " a kind of crystal pulling, charging, material, separation impurity synchronize the company carried out The method of continuous pulling monocrystal silicon rod ".Document 1 is made a summary at it and is partly pointed out, this method " including feed in crucible;Heat material; Crystal pulling, charging, material, separation impurity are synchronized and are carried out;Specific length or certain is pulled by a lifting head on pulling apparatus The stick of length;By continuing crystal pulling, charging, material, separation impurity after converting another lifting head on pulling apparatus;It repeats to draw System until silicon rod quality because impurity effect is near the mark requirement, then blowing out, prepurging ".Document 1 is also in its specification[0014] Section point out, " in the utility model, by crystal pulling, charging, material, separation impurity synchronize carry out, save before charging, material, Crystal bar cooling, blowing out, prepurging time, the lifting head that can repeat switching by two, it is cooling, take stick all with the same stepping of crystal pulling Row, is greatly saved the time, master alloy is gradually added in pulling process, and consumption is consistent with additive amount, therefore with this practicality The monocrystal rod resistor head of novel method crystal pulling and tail portion are almost the same, substantially increase the quality of silicon rod, in crystal pulling due to Crystal quality and addition silicon material uniform quality are pulled out, because being constant in long brilliant liquid level position, the temperature fluctuation of long crystalline substance liquid level is just Very little, will be very stable when long brilliant, and there is no problem for ordinary circumstance material quality, and continuous drawing can be with one month or more ".But It is, since document 1 is process patent application, the concrete structure how two lifting heads switch over is not provided.Again due to To ensure that monocrystal rod resistor head and tail portion are almost the same, document 1 can only use blocky or granular feed way, and can not possibly Using rodlike disposable feed way.

Chinese patent literature CN202968745U(Application No. is 201220728065.4, hereinafter referred to as document 2)It is open A kind of double lifting chamber single crystal furnace structure documents 2 are in its specification the[0013]Segment description arrives:" ... innovation is, normal Increase by one on the column 21 of the single crystal growing furnace of rule and help lifting chamber, be formed on a single crystal growing furnace while two lifting chambers being installed Structure.Two lifting chambers replace being used cooperatively with monocrystalline furnace main body, and a lifting chamber carries out crystal growth in use, another One lifting chamber is used as charging;After the completion of charging, crystal growth is directly carried out, which becomes crystal growth again makes With, and the original lifting chamber used as crystal growth is loaded on raw material after removing crystal, is accordingly changed into charging and uses;Institute It is bar-like raw material to add raw material, and bar-like raw material is directly sent into crucible, not only quick but also reliable, thoroughly solves and adds in the prior art The problem of expecting time-consuming, easy clamping stagnation ".Seen from the above description, document 2 is the equipment for being exclusively used in bar-like raw material, and belongs to primary Property charging.In addition, document 2 is also in its specification[0002]It is explicitly pointed out in the background technology of section:" currently, common secondary Charging process be blocky or granular feedstock is not only increased by assisting charging bucket to feed to non-cutting time, and due to Blocky or granular feedstock in irregular shape, disunity, often will appear catching phenomenon, and charging is caused to fail, to cause compared with Big loss ".Again since document 1 can only use blocky or granular feed way, this explanation, those skilled in the art After reading document 2, the enlightenment that document 2 is incorporated into document 1 will not be obtained.

In terms of continuous dosing or charging, Chinese patent literature CN10231228A(Number of patent application is 201110186157.4) Disclose a kind of external continuous dosing mechanism for single crystal growing furnace, Chinese patent literature CN202936509U(Application No. is 201220637399.0)Disclose a kind of continuous charging silicon single crystal, the raw material employed in this two documents be it is blocky or Granular silicon material.

Utility model content

The purpose of this utility model is to provide a kind of dual rotary pulling apparatus for single crystal growing furnace.The device can help list The standby function of continuously lifting more monocrystal rods of brilliant stove.

Realizing the technical solution of above-mentioned purpose is:The dual rotary pulling apparatus of the utility model, including column, first Arm, the first attached cylinder, the first shift mechanism and control system.First shift mechanism be mounted on the first attached cylinder upper end, first Attached cylinder is fixedly connected in first support arm.It is structurally characterized in that:Further include second support arm, the second attached cylinder, the second pulling machine Structure, first rotate and upgrade mechanism and second and rotate and upgrade mechanism;First support arm is fixedly connected on first and rotates and upgrades in mechanism;The One, which rotates and upgrades mechanism, is fixedly connected on column.Second shift mechanism is mounted on the upper end of the second attached cylinder, the second attached cylinder It is fixedly connected in second support arm;Second support arm is fixedly connected on second and rotates and upgrades in mechanism;Second rotates and upgrades mechanism It is fixedly connected on column.It is to enable to first under control of the control system when using that described first, which rotates and upgrades mechanism, Support arm drives the first attached cylinder to rotate and upgrade the center axis thereof of mechanism around first and first support arm is enabled to drive The mechanism that first attached cylinder moves along the vertical direction relative to column;It is to be controlled when using that described second, which rotates and upgrades mechanism then, The central axis that second support arm drives the second attached cylinder to rotate and upgrade mechanism around second is enabled to turn under the control of system processed Mechanism that is dynamic and enabling to second support arm that the second attached cylinder is driven to be moved along the vertical direction relative to column.

In above-mentioned dual rotary pulling apparatus, the control system includes master controller.Master controller is equipped with corresponding Control signal output.It includes the first promotion motor, the first promotion reduction box, the first rotation that described first, which rotates and upgrades mechanism, Motor, the first rotational deceleration case, first bearing seat, the first rotary shaft, the first lead screw and the first mobile bearing.

The first promotion motor and the first electric rotating machine are equipped with control terminal.First promotes the control terminal of motor and the The control terminal of one electric rotating machine is connect with the electrical connection of the control signal output of master controller or wireless signal.

The first bearing seat has 2, is oppositely arranged above and below point, and be fixedly connected on column, described first Rotational deceleration case is fixedly connected on by its babinet on column, so that first rotates and upgrades mechanism 2 and be fixedly connected on column.

First electric rotating machine is fixedly connected by its engine base from below on the babinet of the first rotational deceleration case, and first The input shaft of the output shaft of electric rotating machine and the first rotational deceleration case is sequentially connected;2 first bearing seats are located at first The top of rotational deceleration case.;

The setting of first rotary shaft vertical namely the setting of center axis vertical, and the central axis is also first Rotate and upgrade the central axis of mechanism.First rotary shaft is rotatably connected on be located above by upper part by corresponding bearing On one bearing block.First rotary shaft is also rotatably connected on underlying first bearing seat by its underpart by corresponding bearing On, and the output shaft of the lower end of the first rotary shaft and the first rotational deceleration case is sequentially connected.

First mobile bearing has 2, is oppositely arranged above and below point, and between 2 first bearing seats, and It is slidably connected in the first rotary shaft.2 the first mobile bearings are also fixedly connected with first support arm, so that first Support arm is fixedly connected on first and rotates and upgrades in mechanism.The first mobile bearing being located above is additionally provided with spiral shell up and down Hole, or be fixedly connected there are one screw hole axis vertical be arranged nut.

The first promotion reduction box is fixedly connected on the upper end of the first rotary shaft by its babinet.Described first It promotes motor to be fixedly connected on by its engine base on the babinet of the first promotion reduction box, and the output shaft and first of the first promotion motor The input shaft for promoting reduction box is sequentially connected.

The first lead screw vertical is arranged, and end is fixedly connected with the output shaft of the first promotion reduction box thereon, and the One lead screw carries out screw thread by screw hole or nut with the first mobile bearing being located above and is flexibly connected.Therefore, the first rotation Motor drives the rotation of the first rotary shaft by the first rotational deceleration case, enables to the first lead screw in the first rotary shaft Mandrel line rotates, and then passes sequentially through the first mobile bearing being located above and first support arm and drive the first attached cylinder around the The central axis of one rotary shaft is rotated.And first promotes turn that motor promotes reduction box the first lead screw of drive by first It is dynamic, enable to the first mobile bearing being located above to be moved in the up-down direction relative to column, and then pass through the One support arm drives the movement of progress upward and downward therewith together of the first attached cylinder.

In use, the first attached cylinder is at different positions, including in matched with bell Crystal pulling position, leave bell and raised position right over the bell and leave in the up-down direction bell region and It is capable of the unloading position of safe discharging.Described first rotates and upgrades mechanism and enables to first support arm that the first attached cylinder is driven to enclose The rotation for the central axis for rotating and upgrading mechanism around first refers to so that the first attached cylinder is converted into raised position by unloading position Rotation, or be converted by raised position the rotation of unloading position;Described first rotates and upgrades mechanism and enables to One support arm drives movement of the first attached cylinder relative to column along the vertical direction, refers to so that the first attached cylinder is become by raised position Shift to the movement of crystal pulling position, or the movement by crystal pulling evolution to raised position.

Described second rotates and upgrades mechanism promotes motor, the second promotion reduction box, the second electric rotating machine, second including second Rotational deceleration case, second bearing seat, the second rotary shaft, the second lead screw and the second mobile bearing.

The second promotion motor and the second electric rotating machine are equipped with control terminal;Second promotes the control terminal of motor and the The control terminal of two electric rotating machines is connect with the electrical connection of the control signal output of master controller or wireless signal.

The second bearing seat has 2, is oppositely arranged above and below point, and be fixedly connected on column, described second Rotational deceleration case is fixedly connected on by its babinet on column, so that second rotates and upgrades mechanism 2 and be fixedly connected on column.

Second electric rotating machine is fixedly connected by its engine base from below on the babinet of the second rotational deceleration case, and second The input shaft of the output shaft of electric rotating machine and the second rotational deceleration case is sequentially connected;2 second bearing seats are located at second The top of rotational deceleration case.

The setting of second rotary shaft vertical namely the setting of center axis vertical, and the central axis is also second Rotate and upgrade the central axis of mechanism.Second rotary shaft is rotatably connected on be located above by upper part by corresponding bearing On two bearing bracket.Second rotary shaft is also rotatably connected on underlying second bearing seat by its underpart by corresponding bearing On, and the output shaft of the lower end of the second rotary shaft and the second rotational deceleration case is sequentially connected.

Second mobile bearing has 2, is oppositely arranged above and below point, and between 2 second bearing seats, and It is slidably connected in the second rotary shaft.2 the second mobile bearings are also fixedly connected with second support arm, so that second Support arm is fixedly connected on second and rotates and upgrades in mechanism.The second mobile bearing being located above is additionally provided with spiral shell up and down Hole, or be fixedly connected there are one screw hole axis vertical be arranged nut.

The second promotion reduction box is fixedly connected on the upper end of the second rotary shaft by its babinet.Described second It promotes motor to be fixedly connected on by its engine base on the babinet of the second promotion reduction box, and the output shaft and second of the second promotion motor The input shaft for promoting reduction box is sequentially connected.

The second lead screw vertical is arranged, and end is fixedly connected with the output shaft of the second promotion reduction box thereon, and the Two lead screws carry out screw thread by screw hole or nut with the second mobile bearing being located above and are flexibly connected.Therefore, the second rotation Motor drives the rotation of the second rotary shaft by the second rotational deceleration case, enables to the second lead screw in the second rotary shaft Mandrel line rotates, and then passes sequentially through the second mobile bearing being located above and second support arm and drive the second attached cylinder around the The central axis of two rotary shafts is rotated.And second promotes turn that motor promotes reduction box the second lead screw of drive by second It is dynamic, enable to the second mobile bearing being located above to be moved in the up-down direction relative to column, and then pass through the Two support arms drive the movement of progress upward and downward therewith together of the second attached cylinder.

In use, the second attached cylinder is also at different positions, including in being matched with bell Crystal pulling position, leave bell and raised position right over the bell and the region for leaving bell in the up-down direction And it is capable of the unloading position of safe discharging.Described second rotates and upgrades mechanism and second support arm is enabled to drive the second attached cylinder The rotation for the central axis for rotating and upgrading mechanism around second refers to so that the second attached cylinder is converted by unloading position promotes position The rotation set, or it is converted by raised position the rotation of unloading position.Described second rotates and upgrades mechanism and enables to Second support arm drives movement of the second attached cylinder relative to column along the vertical direction, refers to so that the second attached cylinder is by raised position It is converted into the movement of crystal pulling position, or the movement by crystal pulling evolution to raised position.

Described first rotates and upgrades mechanism and is arranged on the side of column, second rotate and upgrade mechanism be then arranged with its On the opposite other side.

In above-mentioned dual rotary pulling apparatus, column is rectangular open tubular column, and column is fixedly connected on fixation by its lower end On structural member.First, which rotates and upgrades mechanism, is arranged on a side of column namely main side, and second rotates and upgrades mechanism then It is arranged on another side opposite with the side namely trailing flank.

In above-mentioned dual rotary pulling apparatus, control system further includes close to switch and induction plate.

Described has 8 close to switch, is divided into 2 groups, every group 4;It is equipped with inductive signal output end close to switch;First group Close to switch include first close to switch, second close to switch, third close to switch and the 4th close to switch;Second group close to opening Pass include the 5th close to switch, the 6th close to switch, the 7th close to switch and the 8th close to switch.First group uses close to switch When rotate and upgrade mechanism with first and match.Second group rotates and upgrades mechanism with second when being used close to switch and matches.

First group close to switch on the main side of column.Wherein, first is located at lower section close to switch, and second is close Switch be located at first close to switch top, third close to switch be located at second close to switch top, the 4th close to switch and Third is located at close to switch on sustained height, and the 4th leaves third close to switch certain distance close to switch.

Second group is mounted on close to switch on the trailing flank of column, and the 5th approaches close to the location of switch and first Switch it is corresponding, the 6th close to switch the location of with second close to switch it is corresponding, the 7th close to switch location Corresponding close to switch with third, the 8th is corresponding close to switch with the 4th close to the location of switch.

Induction plate also has 8, and each induction plate and corresponding one close switch are corresponding.And the first induction plate It is each attached in underlying first mobile bearing with the second induction plate, and the second induction plate is located at the first tablet The top of part 42-1;Third incude plate and the 4th induction plate be each attached in the peripheral surface of the first rotary shaft, and with In place of third is located at sustained height close to switch, and this two induction plates are separated by certain radian each other.5th induction Plate and 6th sense answer plate to be each attached in underlying second mobile bearing, and 6th sense answers plate to be located at the 5th sense Answer the top of plate;7th induction plate and the 8th induction plate be each attached in the peripheral surface of the second rotary shaft, and with In place of 7th is located at sustained height close to switch, and this two induction plates are separated by certain radian each other.

Described each inductive signal output end close to switch with the induction plate position signal input terminal of master controller Electrical connection is connect with the induction plate position signal input terminal of master controller by wireless signal.

In above-mentioned dual rotary pulling apparatus, control system further includes pressuring rotating plate valve, argon inlet valve and weighing sensor.

First shift mechanism includes the first rope.Second shift mechanism includes the second rope.The weighing and sensing Device has 2, they are the first weighing sensor and the second weighing sensor.First weighing sensor is carried by its induction end and first Drawstring is connected, and the second weighing sensor is connected by its induction end with the second rope.It is defeated that each re-transmission sensor is equipped with weighing-up wave Outlet, which is electrically connected with the inductive signal input terminal of weighing of master controller or wireless signal connection.

The pressuring rotating plate valve has 3, is equipped with control terminal, and the pressuring rotating plate valve includes the first pressuring rotating plate valve, the second pressuring rotating plate valve With third pressuring rotating plate valve.First pressuring rotating plate valve is mounted on the lower end position of the first attached cylinder, and it is attached that the second pressuring rotating plate valve is mounted on second On the lower end position of cylinder, third pressuring rotating plate valve is mounted on bell, and third pressuring rotating plate valve is equipped with and vacuumizes interface, and this is vacuumized Interface is connected with the inner cavity of the external tapping of third pressuring rotating plate valve.The argon inlet valve has 3, is equipped with control terminal, and On column.

The argon inlet valve is equipped with control terminal, argon inlet valve include the first argon inlet valve, the second argon gas into Air valve and third argon inlet valve, they set, and there are one shared input ports, and the delivery outlet of the first argon inlet valve passes through phase The connecting tube answered and be connected with the argon gas access port of the upper-end part of driving positioned at the first attached cylinder, the output of the second argon inlet valve Mouth is connected by corresponding connecting tube with the argon gas access port of the upper-end part of driving positioned at the second attached cylinder, third argon inlet The delivery outlet of valve is connected by corresponding connecting tube with the argon gas access port on the bell of single crystal growing furnace.

The control terminal of each pressuring rotating plate valve and the control terminal of described three argon inlet valves are believed with the control of master controller The electrical connection of number output end is connected by wireless signal.

Above-mentioned dual rotary pulling apparatus further includes the first lock shaft block and the second lock shaft block.The first lock shaft block is at it One end of horizontal direction is equipped with mounting hole, and the other end is equipped with the circular hole for lead screw to be arranged.First lock shaft block is tight by its mounting hole Cooperation is fixed in the first rotary shaft, and is located between 2 the first mobile bearings in the up-down direction.The lower end of first lead screw Head passes through the circular hole for lead screw to be arranged of the first lock shaft block, and the two is slidably matched.

The second lock shaft block is equipped with mounting hole in one end of its horizontal direction, and the other end is equipped with the circle for lead screw to be arranged Hole.Second lock shaft block is fixed in by its mounting hole tight fit in the second rotary shaft, and is located at 2 second activities in the up-down direction Between bearing block.The lower end of second lead screw is across the second lock shaft block for lead screw other end circular hole, and the two sliding to be arranged Cooperation.

Above-mentioned dual rotary pulling apparatus, further includes first shaft coupling and second shaft coupling.Under first rotary shaft End is sequentially connected by the output shaft of first shaft coupling and the first rotational deceleration case.The lower end of second rotary shaft passes through Second shaft coupling and the output shaft of the second rotational deceleration case are sequentially connected.

The utility model has following good effect:(1)Due to the first rotation of the dual rotary pulling apparatus of the utility model Turning hoisting mechanism can make the first attached cylinder be in three crystal pulling, promotion and unloading different positions, the second rotating elevator Structure can then make the second attached cylinder be also at crystal pulling, promotion and unloading three different positions, and need to only make one it is attached It is constant that category cylinder is in unloading position, so that it may to operate another attached cylinder, and it be made to be become between three different positions It changes.Therefore, dual rotary pulling apparatus of the invention be actually one may make two attached cylinders that can rotate, be promoted and under The device of function drops.(2)The single crystal growing furnace of device with the utility model, then after coordinating corresponding continuous feeding, you can Has the function of continuously lifting more monocrystal rods.(3)It is being realized using the single crystal growing furnace of the dual rotary pulling apparatus of the utility model After the function of more monocrystal rods of continuous lifting, you can save a large amount of electric energy in pulling monocrystal stick, greatly improve production effect Rate, according to while crystal pulling and while the continuous charging mode that feeds, additionally it is possible to so that the quality of institute's pulled crystal stick is preferable.(4) The structure of the dual rotary pulling apparatus of the utility model is simple, reliable operation, and operation and maintenance is more convenient.

Description of the drawings

Fig. 1 is the stereoscopic schematic diagram of the single crystal growing furnace for the dual rotary pulling apparatus for using the utility model, and first in figure is attached Belong to cylinder and be in crystal pulling position, the second attached cylinder is in unloading position, and is not drawn into the second promotion motor in figure.

Fig. 2 is the stereoscopic schematic diagram of the dual rotary pulling apparatus of the utility model in Fig. 1, and what is shown in figure rotates and upgrades Mechanism is mainly second to rotate and upgrade mechanism.

Schematic diagram when Fig. 3 is from the left back of Fig. 2, the mechanism that rotates and upgrades shown in figure is mainly the first rotation Hoisting mechanism.

Fig. 4 is the close-up schematic view at the I of Fig. 3.

Fig. 5 is the A-A schematic cross-sectional views of Fig. 4.

Fig. 6 is the B-B schematic cross-sectional views of Fig. 3.

Fig. 7 is the D-D schematic cross-sectional views of Fig. 3.

Fig. 8 be column in Fig. 4, the first rotary shaft, the first mobile bearing, first close to switch, second close to switch, Third incudes plate, the second induction plate, third induction plate and the 4th tablet close to switch, the 4th close to switch, first The connection diagram of part.

Fig. 9 is the control principle drawing of the utility model.

Reference numeral in above-mentioned attached drawing is as follows:Column 1, first support arm 11, second support arm 12, the first attached cylinder 13, the Two attached cylinders 14, the first shift mechanism 15, the second shift mechanism 16, the first rope 17, the second rope 18, the first rotation carry Liter mechanism 2, the first promotion motor 20, the first promotion reduction box 21, the first electric rotating machine 22, the first rotational deceleration case 23, first Bearing block 24, the first rotary shaft 25, the first lock shaft block 26, the first lead screw 27, the first mobile bearing 28, first be located above Mobile bearing 28-1, underlying first mobile bearing 28-2, first shaft coupling 29, second rotates and upgrades mechanism 3, the Two promotion motors 30, the second promotion reduction box 31, the second electric rotating machine 32, the second rotational deceleration case 33, second bearing seat 34, the Two rotary shafts 35, the second lock shaft block 36, the second lead screw 37, the second mobile bearing 38, the second mobile bearing being located above 38-1, underlying second mobile bearing 38-2, second shaft coupling 39, control system 4, master controller 40, close to switch 41, first close to switch 41-1, and second close to switch 41-2, and third is close to switch 41-3, and the 4th close to switch 41-4, and the 5th connects Nearly switch 41-5, the 6th close switch 41-6, the 7th close switch 41-7, the 8th close switch 41-8, induction plate 42, first Incuding plate 42-1, the second induction plate 42-2, third incudes plate 42-3, the 4th induction plate 42-4, pressuring rotating plate valve 43, and first Pressuring rotating plate valve 43-1, the second pressuring rotating plate valve 43-2, third pressuring rotating plate valve 43-3, weighing sensor 44, the first weighing sensor 44-1, second Weighing sensor 44-2, the first argon inlet valve 45-1, the second argon inlet valve 45-2, third argon inlet valve 45-3, bell 100, furnace body 107.

Specific implementation mode

(embodiment 1)

See Fig. 1 to Fig. 5, the dual rotary pulling apparatus of the present embodiment, including column 1, first support arm 11, second support arm 12, First attached cylinder 13, the second attached cylinder 14, the first shift mechanism 15, the second shift mechanism 16, first rotate and upgrade mechanism 2, Two rotate and upgrade mechanism 3 and control system 4.First shift mechanism 15 is mounted on the upper end of the first attached cylinder 13, the first attached cylinder 13 are fixedly connected in first support arm 11, and first support arm 11 is fixedly connected on first and rotates and upgrades in mechanism 2.Second shift mechanism 16 are mounted on the upper end of the second attached cylinder 14, and the second attached cylinder 14 is fixedly connected in second support arm 12, and second support arm 12 is fixed Second is connected to rotate and upgrade in mechanism 3.First, which rotates and upgrades mechanism 2 and second, rotates and upgrades mechanism 3 and is fixedly connected with vertical On column 1, column 1 is fixedly connected on by its lower end in fixed structure piece.Column 1 is rectangular open tubular column, the first rotating elevator Structure 2 is arranged on one side, which can be described as the main side of column 1.Second rotate and upgrade mechanism 3 be then arranged with master On another opposite side of side, which can be described as trailing flank.First rotates and upgrades when mechanism 2 is use in control system The central axis that first support arm 11 drives the first attached cylinder 13 to rotate and upgrade mechanism 2 around first is enable to turn under 4 control Mechanism that is dynamic and moving along the vertical direction.It is to make under the control of control system 4 when using that second, which rotates and upgrades mechanism 3 then, Second support arm 12 can drive the second attached cylinder 14 around second rotate and upgrade mechanism 3 center axis thereof and vertically side To the mechanism of movement.

Fig. 1 is seen, in use, the first attached cylinder 13 is at different positions, including being in and bell Bell 100 is left and positioned at the raised position of 100 surface of bell and in the up-down direction in 100 matched crystal pulling positions It leaves the region of bell and is capable of the unloading position of safe discharging.Described first rotates and upgrades mechanism 2 and enables to first Arm 11 drives the first attached cylinder 13 to surround the rotation for the central axis that first rotates and upgrades mechanism 2, refers to so that the first attached cylinder 13 are converted into the rotation of raised position by unloading position, or the rotation of unloading position is converted by raised position.Described First, which rotates and upgrades mechanism 2, enables to first support arm 11 to drive fortune of the first attached cylinder 13 relative to column 1 along the vertical direction It is dynamic, refer to so that the first attached cylinder 13 is converted into the movement of crystal pulling position by raised position, or extremely by crystal pulling evolution The movement of raised position.

Still see Fig. 1, in use, the second attached cylinder 14 is also at different positions, including in Bell 100 is left and positioned at the raised position of 100 surface of bell and in upper and lower in 100 matched crystal pulling position of bell The region of upward out bell and the unloading position for capableing of safe discharging;Described second rotates and upgrades mechanism 3 and enables to Two support arms 12 drive the second attached cylinder 14 to surround the rotation for the central axis that second rotates and upgrades mechanism 3, refer to so that second is attached Belong to the rotation that cylinder 14 is converted into raised position by unloading position, or is converted into the rotation of unloading position by raised position;Institute Second stated rotate and upgrade mechanism 3 enable to second support arm 12 drive the second attached cylinder 14 relative to column 1 along the vertical direction Movement, refer to so that the second attached cylinder 14 is converted into the movement of crystal pulling position by raised position, or is become by crystal pulling position Shift to the movement of raised position.

See Fig. 3, Fig. 6 and Fig. 7, first shift mechanism, 15 and second shift mechanism 16 may each be to be driven by a motor One reduction box drives a shaft by reduction box, and a reel is fixed in the shaft, and reel is equipped with corresponding for promoting crystal bar Rope.The rope is the flexible axle that material is tungsten filament.The rope of first shift mechanism 15 is the first rope 17, The rope of second shift mechanism 16 is the second rope 18.

See Fig. 4 and Fig. 5, described first rotates and upgrades mechanism 2 promotes the promotion reduction box of motor 20, first including first 21, the first electric rotating machine 22, the first rotational deceleration case 23, first bearing seat 24, the first rotary shaft 25, the first lock shaft block 26, One lead screw 27, the first mobile bearing 28 and first shaft coupling 29.

Still see that Fig. 4 and Fig. 5, the first rotational deceleration case 23 are fixedly connected on by its babinet on column 1.Described One electric rotating machine 22 is fixedly connected by its engine base from below on the babinet of the first rotational deceleration case 23, and the first electric rotating machine 22 The input shaft of output shaft and the first rotational deceleration case 23 is sequentially connected.

Still see that Fig. 4 and Fig. 5, the first bearing seat 24 there are 2, be oppositely arranged above and below point, and is fixedly connected with vertical On column 1, and positioned at the top of the first rotational deceleration case 23.Each first bearing seat 24 is fixedly connected with column 1, with And the first above-mentioned rotational deceleration case 23 being fixedly connected by its babinet and column 1 so that first rotates and upgrades mechanism 2 and fix and connect It is connected on column 1.Each first bearing seat 24 is equipped with circular hole up and down, and a corresponding bearing is equipped at the circular hole. First rotary shaft, 25 vertical is arranged, and also vertical is arranged center axis, and the central axis is also first to rotate and upgrade mechanism 2 Central axis.First rotary shaft 25 is matched by upper part with the bearing in the first bearing seat 24 being located above, and thereon The bearing is stretched out in end upwards.First rotary shaft 25 is also matched by the bearing in its underpart and underlying first bearing seat 24 It closes, and its lower end extends downwardly the bearing, and the lower end of the first rotary shaft 25 is revolved by first shaft coupling 29 and first The output shaft for turning reduction box 23 is sequentially connected.In this way, after underlying first electric rotating machine 22 is powered and starts, can make The rotation for obtaining the output shaft of the first electric rotating machine 22 drives the first rotary shaft 25 to revolve after the deceleration of the first rotational deceleration case 23 Turn.

Still see that Fig. 4 and Fig. 5, first mobile bearing 28 there are 2, be oppositely arranged above and below point, and is located at 2 first Between bearing block 24, and it is slidably connected in the first rotary shaft 25.2 the first mobile bearings 28 are be located above One mobile bearing 28-1 and underlying first mobile bearing 28-2.This 2 the first mobile bearings 28 are also with One support arm 11 is fixedly connected, and is rotated and upgraded in mechanism 2 so that first support arm 11 is fixedly connected on first.Each first movable axis Bearing 28 is equipped with circular hole up and down in one end of its horizontal direction, for being sleeved on the first rotary shaft 25, and realizes above-mentioned Be slidably connected with first rotary shaft 25.The first mobile bearing 28-1 being located above is set in the other end of its horizontal direction Have screw hole up and down, or be fixedly connected there are one screw hole axis vertical be arranged nut.

Still see that Fig. 4 and Fig. 5, the first lock shaft block 26 are equipped with mounting hole in one end of its horizontal direction, the other end is set It is useful for the circular hole of setting lead screw.First lock shaft block 26 is fixed in by its mounting hole tight fit in the first rotary shaft 25, and upper Lower section is located between 2 the first mobile bearings 28 upwards.

Still see that Fig. 4 and Fig. 5, the described first promotion reduction box 21 are fixedly connected on the upper of the first rotary shaft 25 by its babinet End point.In this way, when the first rotary shaft 25 rotates, first promotes reduction box 21 rotates around the center of the first rotary shaft 25 together. The first promotion motor 20 is fixedly connected on by its engine base on the babinet of the first promotion reduction box 21, and first promotes motor The input shaft of 20 output shaft and the first promotion reduction box 21 is sequentially connected.

Still see that Fig. 4 and Fig. 5,27 vertical of the first lead screw are arranged, end promotes the defeated of reduction box 21 with first thereon Shaft is fixedly connected, and the first lead screw 27 carries out screw thread work with the first mobile bearing 28 being located above by screw hole or nut Dynamic connection.The lower end of first lead screw 27 passes through the circular hole for lead screw to be arranged of the first lock shaft block 26, and the two is slidably matched. In this way, the first lock shaft block 26 can be used for limiting the relative position between the first rotary shaft 25 and the first lead screw 27, make the first rotation Cooperation drives the first lead screw 27 around the center axis thereof of the first rotary shaft 25 when shaft 25 rotates, and the rotation is a kind of Any point of first lead screw 27 carries out the circumferential movement along circular trace with angle.Firstly, since the first lead screw 27 is upper End is fixedly connected with the output shaft of the first promotion reduction box 21, thus drives 25 turns of the first rotary shaft in the first electric rotating machine 22 In the state of dynamic, the babinet and corresponding output shaft of the first promotion reduction box 21 are then enclosed with the rotation of the first rotary shaft 25 Around the center axis thereof of the first rotary shaft 25, the first lead screw 27 then can surround the first rotary shaft 25 with corresponding output shaft Center axis thereof, " cooperation drive " of the first lock shaft block 26 above-mentioned is so that this movement of the first lead screw 27 is more flat Surely.At this point, the movement of the first lead screw 27 is a kind of rotation of the central axis around the first rotary shaft 25.Secondly, and due to first Lead screw 27 is threadedly coupled with the first mobile bearing 28-1 being located above, therefore the first lead screw 27 is in the first rotary shaft 25 The rotation of mandrel line can also drive the first mobile bearing 28-1 being located above to be followed by and surround the first rotary shaft 25 together Central axis is correspondingly rotated, to drive the first attached cylinder 13 in the first rotary shaft 25 by first support arm 11 Mandrel line is rotated.At this point, the movement of the first attached cylinder 13 is also a kind of its every bit all along respective corresponding one The movement of circular trace.Third when the first promotion motor 20 rotates, can pass through first and promote the first lead screw 27 of drive of reduction box 21 Rotation.In this way, the first mobile bearing 28-1 being located above will in the up-down direction be carried out along the axial direction of the first lead screw 27 Movement.Since first support arm 11 is fixedly connected in 2 the first mobile bearings 28, in this way, surrounding itself in the first lead screw 27 Under the drive of the rotation of axis, the first mobile bearing 28-1 being located above being flexibly connected with its screw thread is then along the first lead screw 27 axis and moved in the up-down direction, and then first support arm 11, first support arm 11 is driven then to drive the first attached cylinder 13 and underlying first mobile bearing 28-2 carries out the movement of the upward and downward relative to the first rotary shaft 25 therewith together. To realize the central axis that the first mobile bearing 28 can drive the first attached cylinder 13 to surround the first rotary shaft 25 indirectly It is rotated, and the first mobile bearing 28-1 being located above can also drive the first attached cylinder 13 relative to column 1 indirectly Carry out the function of the movement of upward and downward.

See Fig. 2 and Fig. 5, described second rotate and upgrade mechanism 3 include second promoted motor 30, second promoted reduction box 31, Second electric rotating machine 32, the second rotational deceleration case 33, second bearing seat 34, the second rotary shaft 35, the second lock shaft block 36, second Bar 37, the second mobile bearing 38 and second shaft coupling 39.

Still see that Fig. 2 and Fig. 5, the second rotational deceleration case 33 are fixedly connected on by its babinet on column 1.Described second Electric rotating machine 32 is fixedly connected by its engine base from below on the babinet of the second rotational deceleration case 33, and the second electric rotating machine 32 is defeated The input shaft of shaft and the second rotational deceleration case 33 is sequentially connected.

Still see that Fig. 2 and Fig. 5, the second bearing seat 34 there are 2, be oppositely arranged above and below point, and is fixedly connected with vertical On column 1, and positioned at the top of the second rotational deceleration case 33.Each second bearing seat 34 is fixedly connected with column 1, with And the second above-mentioned rotational deceleration case 33 being fixedly connected by its babinet and column 1 so that second rotates and upgrades mechanism 3 and fix and connect It is connected on column 1.Each second bearing seat 34 is equipped with circular hole up and down, and a corresponding bearing is equipped at the circular hole. Second rotary shaft, 35 vertical is arranged, and also vertical is arranged center axis, and the central axis is also second to rotate and upgrade mechanism 3 Central axis.Second rotary shaft 35 is matched by upper part with the bearing in the second bearing seat 34 being located above, and the upper end Head stretches out the bearing upwards.Second rotary shaft 35 is also matched by the bearing in its underpart and underlying second bearing seat 34 It closes, and its lower end extends downwardly the bearing, and the lower end of the second rotary shaft 35 is revolved by second shaft coupling 39 and second The output shaft for turning reduction box 33 is sequentially connected.In this way, after underlying second electric rotating machine 32 is powered and starts, can make The rotation for obtaining the output shaft of the second electric rotating machine 32 drives the second rotary shaft 35 after the deceleration of the second rotational deceleration case 33 Rotation.

Still see that Fig. 2 and Fig. 5, second mobile bearing 38 there are 2, be oppositely arranged above and below point, and is located at 2 second Between bearing block 34, and it is slidably connected in the second rotary shaft 35.2 the second mobile bearings 38 are be located above Two mobile bearing 38-1 and underlying second mobile bearing 38-2.This 2 the second mobile bearings 38 are also with Two support arms 12 are fixedly connected, and are rotated and upgraded in mechanism 3 so that second support arm 12 is fixedly connected on second.Each second movable axis Bearing 38 is equipped with circular hole up and down in one end of its horizontal direction, for being sleeved on the second rotary shaft 35, and realizes above-mentioned Be slidably connected with second rotary shaft 35.The second mobile bearing 38-1 being located above is set in the other end of its horizontal direction Have screw hole up and down, or be fixedly connected there are one screw hole axis vertical be arranged nut.

Still see that Fig. 2 and Fig. 5, the second lock shaft block 36 are equipped with mounting hole in one end of its horizontal direction, the other end is set It is useful for the circular hole of setting lead screw.Second lock shaft block 36 is fixed in by its mounting hole tight fit in the second rotary shaft 35, and upper Lower section is located between 2 the second mobile bearings 38 upwards.

Still see that Fig. 2 and Fig. 5, the described second promotion reduction box 31 are fixedly connected on the upper of the second rotary shaft 35 by its babinet End point.In this way, when the second rotary shaft 35 rotates, second promotes reduction box 31 rotates around the center of the second rotary shaft 35 together. The second promotion motor 30 is fixedly connected on by its engine base on the babinet of the second promotion reduction box 31, and second promotes motor The input shaft of 30 output shaft and the second promotion reduction box 31 is sequentially connected.

Still see that Fig. 2 and Fig. 5,37 vertical of the second lead screw are arranged, end promotes the defeated of reduction box 31 with second thereon Shaft is fixedly connected, and the second lead screw 37 carries out screw thread with the second mobile bearing 38-1 being located above by screw hole or nut The lower end of flexible connection, the second lead screw 37 passes through the circular hole for lead screw to be arranged of the second lock shaft block 36, and the two sliding is matched It closes.In this way, the second lock shaft block 36 can be used for limiting the relative position between the second rotary shaft 35 and the second lead screw 37, make second Cooperation drives the second lead screw 37 around the rotation of the central axis of the second rotary shaft 35 when rotary shaft 35 rotates, and the rotation is A kind of any point of second lead screw 37 carries out the circumferential movement along circular trace with angle.Firstly, since the second lead screw 37 Upper end with second promotion reduction box 31 output shaft be fixedly connected, thus the second electric rotating machine 32 drive the second rotary shaft In the state of 35 rotations, second promotes the babinet of reduction box 31 and corresponding output shaft then with the rotation of the second rotary shaft 35 And around the center axis thereof of the second rotary shaft 35, the second lead screw 37 then can be with corresponding output shaft and around the second rotation The center axis thereof of axis 35, " cooperation drives " of the second lock shaft block 36 above-mentioned is so that this movement of the second lead screw 37 is more Steadily.At this point, the movement of the second lead screw 37 is a kind of rotation of the central axis around the second rotary shaft 35.Secondly, and due to the Two lead screws 37 are threadedly coupled with the second mobile bearing 38-1 being located above, therefore the second lead screw 37 is around the second rotary shaft 35 The rotation of central axis can also drive the second mobile bearing 38-1 being located above to be followed by and surround the second rotary shaft 35 together Central axis correspondingly rotated, to drive the second attached cylinder 14 around the second rotary shaft 35 by second support arm 12 Central axis is rotated.At this point, the movement of the second attached cylinder 14 is also a kind of its every bit all along respective corresponding one The movement of a circular trace.Third when the second promotion motor 30 rotates, can pass through second and promote the second lead screw of drive of reduction box 31 37 rotations.In this way, the second mobile bearing 38-1 being located above will along the second lead screw 37 axial direction it is enterprising in above-below direction Row movement.Since second support arm 12 is fixedly connected in 2 the second mobile bearings 38, in this way, being surrounded certainly in the second lead screw 37 Under the drive of the rotation of body axis, the second mobile bearing 38-1 being located above being flexibly connected with its screw thread is then along second The axis of bar 37 and moved in the up-down direction, and then it is second attached to drive second support arm 12, second support arm 12 then to drive 14 and underlying second mobile bearing 38-2 of cylinder carries out the fortune of the upward and downward relative to the second rotary shaft 35 therewith together It is dynamic.To realize the central shaft that the second mobile bearing 38 can drive the second attached cylinder 14 to surround the second rotary shaft 35 indirectly Line is rotated, and the second mobile bearing 38-1 being located above can also drive the second attached cylinder 14 relative to column indirectly 1 carries out the function of the movement of upward and downward.

See that Fig. 9, control system 4 include master controller 40, close switch 41, induction plate 42, pressuring rotating plate valve 43, weighing and sensing Device 44 and argon inlet valve 45.Master controller 40 is PLC programmable logic controller (PLC)s, wherein used central processing unit is west 1215 C of CPU of door subsidiary production.Select the model PR18-8DP2's of Autonic company production close to switch 41 Close to switch, can also select other models close to switch, can be selected using inductance principle close to switch etc..Tablet 42 For steelwork.The valve for the model GCDb-320 that pressuring rotating plate valve 43 is produced using Shanghai vacuum valve Co., Ltd.Argon inlet Valve selects the valve of the model VXE2330M-03G-5G1 of Japanese SMC Corporation's manufacture.Weighing sensor 44 selects Mei Te Le-support benefit(Changzhou)The model TSH of Weight Equipment System Co., Ltd's sale, the weighing sensor that specification is 500kg.

See that Fig. 6 and Fig. 7, the re-transmission sensor 44 there are 2, they are the first weighing sensor 44-1 and the second weighing and sensing Device 44-2.First weighing sensor 44-1 is connected by its induction end with the first rope 17 of the first shift mechanism 15, and second claims Sensor 44-2 is retransmitted by its induction end to be connected with the second rope 18 of the second shift mechanism 16.It can accurately weigh up and carry in this way The real-time weight of crystal bar in drawing.

See Fig. 8 and Fig. 9, it is described to have 8 close to switch 41, it is divided into 2 groups, every group 4.Induction is equipped with close to switch 41 to believe Number output end.First group rotates and upgrades mechanism 2 with first when being used close to switch and matches, they are the first close switch 41- 1, the second close switch 41-2, the close switch 41-4 of the close switch 41-3 and the 4th of third.Second group close to switch use when with Second, which rotates and upgrades mechanism 3, matches, they are the 5th close switch 41-5, the 6th close switch 41-6, the 7th close switch The close switch 41-8 of 41-7 and the 8th.It is 5 millimeters to use inductance approach switch, distance of reaction close to switch 41.To this phase Correspondence, induction plate 42 also have 8, every 41 group, are divided into 2 groups, first group of induction plate 42 and first group approach switch 41 1 One corresponds to, and second group of induction plate 42 is then corresponded with second group close to switch 41.Incude plate 42 with close to switch 41 The size at the position being close is 2 square centimeters.

See Fig. 4 and Fig. 8, first group is installed in close to switch 41 on the main side of column 1.Wherein, the first close switch 41-1 is located at lower section, and second is located at first close to the top of switch 41-1 close to switch 41-2, and third is located at close to switch 41-3 Second is located at close to switch 41-3 on sustained height close to the top of switch 41-2, the 4th close to switch 41-4 and third, and the Four leave third close to switch 41-4 has certain distance close to switch 41-3(It is located at right side in figure).

See that Fig. 4, Fig. 8 and Fig. 9, induction plate 42 also there are 8, it is each to incude plate 42 and corresponding one close switch 41 It is corresponding, that is to say the first induction plate 42-1 with first close to switch 41-1 it is corresponding, second incude plate 42-2 and second Close switch 41-2 is corresponding, third induction plate 42-3 is corresponding close to switch 41-3 with third, the 4th induction plate 42-4 It is corresponding close to switch 41-4 with the 4th, and so on, until the 8th induction plate is corresponding close to switch 41-8 with the 8th.

See that Fig. 4 and Fig. 8, the first induction plate 42-1 and the second induction plate 42-2 are each attached to underlying first and live On moving axis bearing 28-2, and the second induction plate 42-2 is located at the top of the first induction plate 42-1.First induction plate 42-1 The determination of installation site on the first mobile bearing 28-2, with it as first mobile bearing 28-2 is downward When movement, the position of operating position when the first attached cylinder 13 follows first mobile bearing 28-2 to reach crystal pulling from the top down Subject to.The location of first attached cylinder 13 at this time is crystal pulling position.

See Fig. 4 and Fig. 8, peaces of the second induction plate 42-2 on the underlying first mobile bearing 28-2 The determination of holding position, when being moved upwards with first mobile bearing 28-2 with it, the first attached cylinder 13 follows first work Moving axis bearing 28, which rises to, to be reached subject to rational position.The location of first attached cylinder 13 at this time is raised position.

See that Fig. 4 and Fig. 8, the third inductions of induction plate 42-3 and the 4th plate 42-4 are each attached to the outer of the first rotary shaft 25 In perimeter surface, and it is located at sustained height place close to switch 41-3 with third, and the two is separated by certain radian each other (The 4th induction plate 42-4 is located at the right side of third induction plate 42-3 in figure).Third incudes plate 42-3 in the first rotary shaft The determination of 25 circumferential position, when being rotated with the first rotary shaft 25 with it, pass sequentially through the first promotion reduction box 21 babinet, First lead screw 27, the first mobile bearing 28 and second support arm 12 are so that the first attached cylinder 13 is rotated therewith to positioned at from top pair Subject to the position of operating position when quasi- crystal pulling.It is not located on bell 100 also since the first attached cylinder 13 at this time is in, institute The position at place that is to say raised position.

See Fig. 4 and Fig. 8, the determination of positions of the 4th induction plate 42-4 in the circumferential direction of the first rotary shaft 25, with its with When the rotation of the first rotary shaft 25, the first attached cylinder 13 is reached after leaving raised position and can be unloaded safely in the horizontal direction Position subject to.Namely the first attached cylinder 13 is in unloading position at this time.

Corresponding with the above-mentioned first group setting close to switch 41 referring to Fig. 4 and Fig. 8, second group of close switch 41 is then At the corresponding position being arranged on the trailing flank of column 1 namely the 5th is mounted on and the first close switch close to switch 41-5 At the corresponding positions 41-1, the 6th is mounted on close to switch 41-6 and is approached at the corresponding positions switch 41-2 with second, the Seven are mounted on close to switch 41-7 with third close at the corresponding positions switch 41-3, the 8th close switch 41-8 mounted on 4th close at the corresponding positions switch 41-4.Wherein, the 5th is located at lower section, the 6th close switch 41-6 close to switch 41-5 It is located at the 6th close to the top of switch 41-6 close to switch 41-7 close to the top of switch 41-5, the 7th positioned at the 5th, the 8th connects Nearly switch 41-8 and the 7th is located at sustained height close to switch 41-7.

Referring to Fig. 4 and Fig. 8, in second group of induction plate 42, the 5th, 6th sense answer plate to be arranged in the second of lower section On mobile bearing 38-2, and the 5th induction plate is located at the lower section that 6th sense answers plate, and the seven, the 8th induction plates are then arranged In the second rotary shaft 35, and the 8th induction plate is located at the left side of the 7th induction plate.

See that Fig. 1 and Fig. 9, the pressuring rotating plate valve 43 there are 3, is equipped with control terminal, described 3 pressuring rotating plate valves 43 are the first rotations Plate valve 43-1, the second pressuring rotating plate valve 43-2 and third pressuring rotating plate valve 43-3.First pressuring rotating plate valve 43-1 is mounted under the first attached cylinder 13 On the position of end, the second pressuring rotating plate valve 43-2 is mounted on the lower end position of the second attached cylinder 14, and third pressuring rotating plate valve 43-3 is mounted on stove On lid 100, and third pressuring rotating plate valve 43-3 is equipped with and vacuumizes interface, and this vacuumizes the external of interface and third pressuring rotating plate valve 43-3 The inner cavity of mouth is connected.The argon inlet valve has 3, is equipped with control terminal, and is installed on column 1.Described 3 Argon inlet valve is the first argon inlet valve 45-1, the second argon inlet valve 45-2 and third argon inlet valve 45-3, they set There are one shared input port, and the delivery outlet of the first argon inlet valve 45-1 by corresponding connecting tube with it is attached positioned at first The argon gas access port for belonging to the upper-end part of driving of cylinder 13 is connected, and the delivery outlet of the second argon inlet valve 45-2 then by connecting accordingly The argon gas access port that Guan Eryu is located at the upper-end part of driving of the second attached cylinder 14 is connected, the delivery outlet of third argon inlet valve 45-3 Then it is connected with the argon gas access port on the bell 100 of single crystal growing furnace by corresponding connecting tube.

See Fig. 9, described first promotes motor 20, the first electric rotating machine 22, second promotes motor 30 and the second electric rotating Machine 32 is equipped with control terminal.Described 8 are equipped with inductive signal output end close to switch 41.First promotes motor 20, second Promote motor 30, the respective control terminal of the first electric rotating machine 22 and the second electric rotating machine 32, the control terminal of each pressuring rotating plate valve 43, the One argon inlet valve 45-1, the second argon inlet valve 45-2, third argon inlet valve 45-3 control terminal with master controller 40 Control signal control terminal electrical connection or connect by wireless signal with the control signal control terminal of master controller.Each approach is opened The inductive signal output end of pass 41 is electrically connected with the induction plate position signal input terminal of master controller 40 or and main control The induction plate position signal input terminal of device 40 is connected by wireless signal.

See Fig. 8, when the operating position of the first rotary shaft 25 rotation to setting, first sends out accordingly close to switch 41-1 Inductive signal after master controller receives the signal, sends out control signal so that the first electric rotating machine 22 stops operating.When When two rotary shafts 35 rotation to the operating position set, the 5th sends out corresponding inductive signal close to switch, and master controller receives To after the signal, control signal is sent out so that the second electric rotating machine 32 stops operating.

In the prior art, using same principle, similar operation is also carried out to the bell of single crystal growing furnace 100 so that its In corresponding open position, raised position and crystal pulling position.The crystal pulling position is exactly 100 institute of bell in pulling operation The position at place(As shown in Figure 1), the raised position refers to then that bell 100 is moved upwards by crystal pulling position and is still aligned down The location of when the furnace body 107 of side.The open position refers to that bell 100 surrounds one along the horizontal plane by raised position The axis of external vertical setting rotates and is no longer aligned with furnace body 107 in the up-down direction, and bell 100 has been moved off furnace body 107 range.

See Fig. 1 to Fig. 5 and Fig. 8 and Fig. 9, it is generally the case that in the first attached cylinder 13 before crystal pulling position, The bell 100 of single crystal growing furnace has been in crystal pulling position.If the first attached cylinder 13 to be made to reach crystal pulling position at this time, namely arrive Up to the position docked.It need to only make the first electric rotating machine 22 connect and start, to drive the first attached cylinder 13 around the The center axis thereof of one rotary shaft 25, and raised position is turned to by unloading position, at this moment third is sent out close to switch 41-3 Inductive signal after master controller 40 receives and processes, then sends out control signal and the first electric rotating machine 22 is stopped operating, to So that the first attached cylinder 13 is circumferentially positioned very accurate.The first attached cylinder 13 is turned into raised position by unloading position herein Rotation as rotating forward, enable to the first attached cylinder 13 to turn to unloading position by raised position to which it is rotated backward It sets.

See Fig. 4, is moved downward along the first mobile bearing 28-1 that can be located above in the first promotion motor 20 Direction rotation when, the first lead screw 27 rotates together therewith, so that first mobile bearing 28 is attached together with first Belong to cylinder 13 and crystal pulling position is dropped to by the raised position being located above, is mounted on the first mobile bearing 28-2 of lower section The first induction plate 42-1 be close close to switch 41-1 with first, the two at a distance of 5 millimeters or so when, first close switchs 41-1 sends out inductive signal, and master controller 40, which receives the signal and then sends out control signal after handling, makes the first promotion motor 20 stop operating.This method for determining position can make the axially position of the first attached cylinder 13 very accurate.It is attached by first herein Belong to the first rotation conduct for promoting motor 20 during cylinder 13 drops to crystal pulling position by raised position to rotate forward, to it It rotates backward and the first attached cylinder 13 is enabled to rise to raised position by crystal pulling position.

Still see Fig. 4, when needing to change attached cylinder, under the control for being manually entered signal, first passing through master controller 40 makes It obtains the first promotion motor 20 to rotate backward, so that the first attached cylinder 13 follows the first mobile bearing 28-1 being located above It is raised above.When the second induction plate 42-2 is close to second close to switch 41-2 namely the first attached cylinder 13 is in and promotes position When setting, second sends out inductive signal immediately close to switch 41-2, and master controller 40 receives the signal and then sends out control after handling Signal makes the first promotion motor 20 stop operating.At this point, making under the control for being manually entered signal, then by master controller 40 The first electric rotating machine 22 rotate backward so that the first attached cylinder 13 follow the first rotary shaft 25 rotate together and by being promoted Position turns to unloading position.At this point, the 4th induction plate 42-4 is close to the 4th close switch 41-4.4th close switch 41-4 Inductive signal is sent out immediately, and master controller 40, which receives the signal and then sends out control signal after handling, makes the first electric rotating machine 22 It stops operating.

At this point, can accordingly be operated to the second attached cylinder 14, before this by being manually entered instruction so that the second rotation Rotating motor 32 is connected and is rotated forward, to the second mobile bearing 38-1 for passing sequentially through the second rotary shaft 35, being located above And second support arm 12 drives the second attached cylinder 14 around the center axis thereof of the second rotary shaft 35.When seven induction plates are close 7th close switch 41-7(5th induction plate is then close to the 5th close switch 41-5)Namely second attached cylinder 14 by unload position It sets when turning to raised position, the 7th sends out inductive signal immediately close to switch 41-7, after master controller 40 receives and processes, then Sending out control signal makes the second electric rotating machine 32 stop operating, and is turned to by unloading position to realize the second attached cylinder 14 The variation of raised position.Since the 5th also sends out inductive signal close to switch in the position, but control system is set it to When receiving the signal, it is necessary to forbid the second promotion motor 30 to rotate backward, and since the second promotion motor 30 is now in stopping State, therefore master controller 40 does not send out it control signal.

Then, then by being manually entered instruction so that the second promotion motor 30, which is connected, simultaneously to rotate forward, to pass sequentially through the Two, which promote reduction box 31, the second lead screw 37, the second mobile bearing 38-1 being located above and second support arm 12, drives second Attached cylinder 14 from top to bottom moves, when the 5th induction plate close to the 5th close to the attached cylinders of switch 41-5 namely second 14 by carrying Raise-position is set when dropping to crystal pulling position, and the 5th sends out inductive signal immediately close to switch 41-5, and master controller 40 receives and processes Afterwards, then sending out control signal makes the second promotion motor 30 stop operating, to realize the second attached cylinder 14 by raised position It is moved to the variation of crystal pulling position.

See Fig. 1, the above-mentioned dual rotary pulling apparatus that the present embodiment obtains used method when carrying out related switching, Before this method carries out, single crystal growing furnace has completed the drawing of a corresponding monocrystal rod under the protective atmosphere vacuumized, and It sets the completion pulled crystal stick to be located in furnace body 107, and it is the to be located at the attached cylinder on the bell 100 of single crystal growing furnace at this time One attached cylinder 13, in order to realize that the purpose of not blowing out continuous drawing, above-mentioned method include the following steps:

1. inputting operation instruction, under the control of master controller 40, the first rope 17 is passed through by the first shift mechanism 15 Monocrystal rod in furnace body 107 is promoted in the first attached cylinder 13.After promotion, continue to input operation instruction, closes first Argon inlet valve 45-1 and stop inputting argon gas into the first attached cylinder 13, and close the be arranged on the first attached cylinder 13 One pressuring rotating plate valve 43-1, and the second attached cylinder 14 is made to be in the closed state of negative pressure;Then third argon inlet valve 45- is opened again 3 and argon gas is passed through into furnace body 107, and continue to keep by pumped vacuum systems at this time by the way that the pumping in the bottom of furnace body 107 is arranged Vacuum interface vacuumizes the inner cavity of furnace body.

2. inputting operation instruction, under the control of master controller 40, the first promotion motor 20 obtains electric and starts, and first is promoted Motor 20 then drives the first lead screw 27 to rotate, and passes sequentially through the first mobile bearing 28-1 being located above and first support arm immediately 11 and make the first attached cylinder 13 raised position is risen to by crystal pulling position.Continue to input operation instruction, be controlled by master controller 40 It makes the first electric rotating machine 22 to obtain electric and start, the first electric rotating machine 22 then drives the first rotary shaft 25 to rotate, and passes sequentially through immediately The the first mobile bearing 28-1 and first support arm 11 that are located above and the first attached cylinder 13 is rotated by raised position to unloading Carry position.For the monocrystal rod being in the second attached cylinder 13, carry out unloading crystal bar operation after 3 to 5 hours of natural cooling.

3. inputting operation instruction, under the control of master controller 40, so that the second electric rotating machine 32 is obtained electric and start, by second Electric rotating machine 32 drives the rotation of the second rotary shaft 35, and then the second attached cylinder 14 is made to turn to raised position by unloading position.After It is continuous to input operation instruction, under the control of master controller 40, so that the second promotion motor 30 is obtained electric and start, second promotes motor 30 It then drives the second lead screw 37 to rotate, and then the second attached cylinder 14 is made to drop to crystal pulling position by raised position.At this moment, it is located at second Second pressuring rotating plate valve 43-2 of the bottom of attached cylinder 14 coincides with the third pressuring rotating plate valve 43-3 on bell 100.

4. inputting operation instruction, under the control of master controller 40, the second pressuring rotating plate valve 43-2 is opened, and alternately open phase The vacuum extractor and the second argon inlet valve 45-2 answered, and to form protective atmosphere in the second attached cylinder 14.Described Corresponding vacuum extractor refers to and the vacuum extractor for vacuumizing interface and communicating that is arranged on third pressuring rotating plate valve 43-3.It is described Alternating open corresponding vacuum extractor and the second argon inlet valve 45-2, refer to when being first evacuated to lower pressure(Such as 1000 pas), vacuum extractor is closed, the second argon inlet valve 45-2 is then turned on and so that internal pressure is slightly higher(Such as 10,000 pa).Again It closes the second argon inlet valve 45-2 and opens vacuum extractor, so cycle 3 to 5 times, until being formed in the second attached cylinder 14 Protective atmosphere keeps the unlatching of the second argon inlet valve 45-2 at this time.

5. inputting operation instruction, under the control of master controller 40, closes third argon inlet valve 45-3, opens third rotation Plate valve 43-3, and the inner cavity of the second attached cylinder 14 is communicated with the inner cavity of furnace body 107;Continue to input operation instruction, in master control Under the control of device 40 processed, the second shift mechanism 16 is started to work so that the seed crystal that accompanies positioned at the lower end of the second rope 18 Seed holder sequentially passes through downwards the second pressuring rotating plate valve 43-2 and third pressuring rotating plate valve 43-3, makes in seed crystal therein and crucible 104 Liquid silicon material proceeds by the operation of crystal pulling after being in contact, at the same time, synchronize feed intake and material, until crystal bar It draws and completes.

6. inputting operation instruction, under the control of master controller 40, the second shift mechanism 16 is started to work so that second carries Monocrystal rod in furnace body 107 is promoted in the second attached cylinder 14 by drawstring 18.After promotion, continue to input operation instruction, close It closes the second argon inlet valve 45-2 and stops inputting argon gas into the second attached cylinder 14, and close and be arranged in the second attached cylinder 14 On the second pressuring rotating plate valve 43-2, and make the second attached cylinder 14 be in negative pressure(It refer to less than one atmospheric pressure)Closed state; Then third argon inlet valve 45-3 is opened again and is passed through argon gas into furnace body 107, and continues to keep by pumped vacuum systems at this time The inner cavity of furnace body is vacuumized by the interface that vacuumizes for being arranged in the bottom of furnace body 107.

7. inputting operation instruction, under the control of master controller 40, the second promotion motor 30 obtains electric and starts, and second is promoted Motor 30 then drives the second lead screw 37 to rotate, and passes sequentially through the second mobile bearing 38-1 being located above and second support arm immediately 12 and make the second attached cylinder 14 raised position is risen to by crystal pulling position.Continue to input operation instruction, be controlled by master controller 40 It makes the second electric rotating machine 32 to obtain electric and start, the second electric rotating machine 32 then drives the second rotary shaft 35 to rotate, and passes sequentially through immediately The the second mobile bearing 38-1 and second support arm 12 that are located above and the second attached cylinder 14 is rotated by raised position to unloading Carry position.For the monocrystal rod being in the second attached cylinder 14, carry out unloading crystal bar operation after 3 to 5 hours of natural cooling.

8. inputting operation instruction, under the control of master controller 40, so that the first electric rotating machine 22 is obtained electric and start, the first rotation Rotating motor 22 then drives the first rotary shaft 25 to rotate, and then the first attached cylinder 13 is made to turn to raised position by unloading position.After It is continuous to input operation instruction, under the control of master controller 40, so that the first promotion motor 20 is obtained electric and start, first promotes motor 20 It then drives the first lead screw 27 to rotate, and then the first attached cylinder 13 is made to drop to crystal pulling position by raised position.At this moment it is located at first First pressuring rotating plate valve 43-1 of the bottom of attached cylinder 13 coincides with the third pressuring rotating plate valve 43-3 on bell 100.

9. inputting operation instruction, under the control of master controller 40, the first pressuring rotating plate valve 43-1 is opened, and alternately open phase The vacuum extractor and the first argon inlet valve 45-1 answered, and to form protective atmosphere in the first attached cylinder 13.Described Corresponding vacuum extractor refers to and the vacuum extractor for vacuumizing interface and communicating that is arranged on third pressuring rotating plate valve 43-3.It is described Alternating open corresponding vacuum extractor and the first argon inlet valve 45-1, refer to when being first evacuated to lower pressure(Such as 1000 pas), vacuum extractor is closed, the first argon inlet valve 45-1 is then turned on and so that internal pressure is higher(Such as 10,000 pa).Again It closes the first argon inlet valve 45-1 and opens vacuum extractor, so cycle 3 to 5 times, until being formed in the first attached cylinder 13 Protective atmosphere keeps the unlatching of the first argon inlet valve 45-1 at this time.

10. inputting operation instruction, under the control of master controller 40, closes third argon inlet valve 45-3, opens third rotation Plate valve 43-3, and the inner cavity of the first attached cylinder 13 is communicated with the inner cavity of furnace body 107;Continue to input operation instruction, in master control Under the control of device 40 processed, the first shift mechanism 15 is started to work so that the seed crystal that accompanies positioned at the lower end of the first rope 17 Seed holder sequentially passes through downwards the first pressuring rotating plate valve 43-1 and third pressuring rotating plate valve 43-3, makes in seed crystal therein and crucible 104 Liquid silicon material proceeds by the operation of crystal pulling after being in contact, at the same time, synchronize feed intake and material, until crystal bar It draws and completes.

Then operating procedure 1. to step 10., so recycle, realize the more lists such as several, more than ten or even tens of The continuous drawing of crystal bar.

In the above method, in relation to the particular content for feeding intake or feeding, may refer to the applicant's application application No. is 201711388259.8 " automatic feeding device and its operating method of single crystal growing furnace " and application No. is 201711387255.8 Single crystal growing furnace material buffer device.

Above example and its application are the explanations to specific embodiment of the present utility model, rather than to the utility model Limitation, person skilled in the relevant technique can also make in the case where not departing from the spirit and scope of the utility model Go out various transformation and variation obtains corresponding equivalent technical solution, therefore all equivalent technical solutions should be included into The scope of patent protection of the utility model.

Claims

1. a kind of dual rotary pulling apparatus, including column(1), first support arm(11), the first attached cylinder(13), the first shift mechanism (15)And control system(4);First shift mechanism(15)Mounted on the first attached cylinder(13)Upper end, the first attached cylinder(13)Gu Surely it is connected to first support arm(11)On;It is characterized in that:It further include second support arm(12), the second attached cylinder(14), second lifting Mechanism(16), first rotate and upgrade mechanism(2)Mechanism is rotated and upgraded with second(3);First support arm(11)It is fixedly connected on first Rotate and upgrade mechanism(2)On;First rotates and upgrades mechanism(2)It is fixedly connected on column(1)On;Second shift mechanism(16)Installation In the second attached cylinder(14)Upper end, the second attached cylinder(14)It is fixedly connected on second support arm(12)On;Second support arm(12)Gu Surely it is connected to second and rotates and upgrades mechanism(3)On;Second rotates and upgrades mechanism(3)Also it is fixedly connected on column(1)On;Described First rotates and upgrades mechanism(2)In control system when to use(4)Control under enable to first support arm(11)Drive first Attached cylinder(13)Mechanism is rotated and upgraded around first(2)Center axis thereof and enable to first support arm(11)Drive the One attached cylinder(13)Relative to column(1)The mechanism moved along the vertical direction;Described second rotates and upgrades mechanism(3)It is then to make Used time is in control system(4)Control under enable to second support arm(12)Drive the second attached cylinder(14)It is carried around the second rotation Rise mechanism(3)Center axis thereof and enable to second support arm(12)Drive the second attached cylinder(14)Relative to column (1)The mechanism moved along the vertical direction.

2. dual rotary pulling apparatus according to claim 1, it is characterised in that:The control system includes master controller (40);Master controller(40)Equipped with corresponding control signal output;Described first rotates and upgrades mechanism(2)It is carried including first Lifting motor(20), first promoted reduction box(21), the first electric rotating machine(22), the first rotational deceleration case(23), first bearing seat (24), the first rotary shaft(25), the first lead screw(27)With the first mobile bearing(28);

Described first promotes motor(20)With the first electric rotating machine(22)It is equipped with control terminal;First promotes motor(20)Control End processed and the first electric rotating machine(22)Control terminal and master controller(40)Control signal output electrical connection or wireless Signal connects;

The first bearing seat(24)There are 2, is oppositely arranged above and below point, and be fixedly connected in column(1)On, described One rotational deceleration case(23)Column is fixedly connected on by its babinet(1)On, so that first rotates and upgrades mechanism 2 and is fixedly connected In column(1)On;

First electric rotating machine(22)First rotational deceleration case is fixedly connected with by its engine base from below(23)Babinet on, and First electric rotating machine(22)Output shaft and the first rotational deceleration case(23)Input shaft be sequentially connected;2 first axles Bearing(24)Positioned at the first rotational deceleration case(23)Top;

First rotary shaft(25)Vertical is arranged namely the setting of center axis vertical, and the central axis is also first Rotate and upgrade mechanism(2)Central axis;First rotary shaft(25)It is rotatably connected on and is located at by corresponding bearing by upper part The first bearing seat of top(24)On;First rotary shaft(25)It is also rotatably connected on by corresponding bearing by its underpart under being located at The first bearing seat of side(24)On, and the first rotary shaft(25)Lower end and the first rotational deceleration case(23)Output shaft pass Dynamic connection;

First mobile bearing(28)There are 2, be oppositely arranged above and below point, and is located at 2 first bearing seats(24)Between, And it is slidably connected at the first rotary shaft(25)On;2 the first mobile bearings(28)Also and first support arm(11)It is fixed Connection, so that first support arm(11)It is fixedly connected on first and rotates and upgrades mechanism(2)On;The first movable axis being located above Bearing(28-1)Be additionally provided with screw hole up and down, or be fixedly connected there are one screw hole axis vertical be arranged nut;

Described first promotes reduction box(21)First rotary shaft is fixedly connected on by its babinet(25)Upper end at;Described First promotes motor(20)First promotion reduction box is fixedly connected on by its engine base(21)Babinet on, and first promoted motor (20)Output shaft and first promoted reduction box(21)Input shaft be sequentially connected;

First lead screw(27)Vertical is arranged, and end promotes reduction box with first thereon(21)Output shaft be fixedly connected, And first lead screw(27)With the first mobile bearing being located above(28-1)Screw thread flexible connection is carried out by screw hole or nut; Therefore, the first electric rotating machine(22)Pass through the first rotational deceleration case(23)Drive the first rotary shaft(25)Rotation, enable to First lead screw(27)Around the first rotary shaft(25)Center axis thereof, and then pass sequentially through the first movable axis being located above Bearing(28-1)And first support arm(11)Drive the first attached cylinder(13)Around the first rotary shaft(25)Central axis turned It is dynamic;And first promotes motor(20)Reduction box is promoted by first(21)Drive the first lead screw(27)Rotation, enable to position The first mobile bearing in top(28-1)Relative to column(1)It is moved in the up-down direction, and then passes through first Arm(11)Drive the first attached cylinder(13)Carry out the movement of upward and downward therewith together;

In use, the first attached cylinder(13)It is at different positions, including being in and bell(100)Match Bell is left in the crystal pulling position of conjunction(100)And it is located at bell(100)The raised position of surface and in the up-down direction from The region of blow-on lid and the unloading position for capableing of safe discharging;Described first rotates and upgrades mechanism(2)Enable to first Arm(11)Drive the first attached cylinder(13)Mechanism is rotated and upgraded around first(2)Central axis rotation, refer to so that first Attached cylinder(13)It is converted into the rotation of raised position by unloading position, or turning for unloading position is converted by raised position It is dynamic;Described first rotates and upgrades mechanism(2)Enable to first support arm(11)Drive the first attached cylinder(13)Relative to column (1)Movement along the vertical direction refers to so that the first attached cylinder(13)The movement of crystal pulling position is converted by raised position, or It is by the movement of crystal pulling evolution to raised position;

Described second rotates and upgrades mechanism(3)Motor is promoted including second(30), second promoted reduction box(31), the second electric rotating Machine(32), the second rotational deceleration case(33), second bearing seat(34), the second rotary shaft(35), the second lead screw(37)It lives with second Moving axis bearing(38);

Described second promotes motor(30)With the second electric rotating machine(32)It is equipped with control terminal;Second promotes motor(30)Control End processed and the second electric rotating machine(32)Control terminal and master controller(40)Control signal output electrical connection or wireless Signal connects;

The second bearing seat(34)There are 2, is oppositely arranged above and below point, and be fixedly connected in column(1)On, described Two rotational deceleration casees(33)Column is fixedly connected on by its babinet(1)On, so that second rotates and upgrades mechanism 2 and is fixedly connected In column(1)On;

Second electric rotating machine(32)Second rotational deceleration case is fixedly connected with by its engine base from below(33)Babinet on, and Second electric rotating machine(32)Output shaft and the second rotational deceleration case(33)Input shaft be sequentially connected;2 second axis Bearing(34)Positioned at the second rotational deceleration case(33)Top;

Second rotary shaft(35)Vertical is arranged namely the setting of center axis vertical, and the central axis is also second Rotate and upgrade mechanism(3)Central axis;Second rotary shaft(35)It is rotatably connected on and is located at by corresponding bearing by upper part The second bearing seat of top(34)On;Second rotary shaft(35)It is also rotatably connected on by corresponding bearing by its underpart under being located at The second bearing seat of side(34)On, and the second rotary shaft(35)Lower end and the second rotational deceleration case(33)Output shaft pass Dynamic connection;

Second mobile bearing(38)There are 2, be oppositely arranged above and below point, and is located at 2 second bearing seats(34)Between, And it is slidably connected at the second rotary shaft(35)On;2 the second mobile bearings(38)Also and second support arm(11)It is fixed Connection, so that second support arm(11)It is fixedly connected on second and rotates and upgrades mechanism(3)On;The second movable axis being located above Bearing(38-1)Be additionally provided with screw hole up and down, or be fixedly connected there are one screw hole axis vertical be arranged nut;

Described second promotes reduction box(31)Second rotary shaft is fixedly connected on by its babinet(35)Upper end at;Described Second promotes motor(30)Second promotion reduction box is fixedly connected on by its engine base(31)Babinet on, and second promoted motor (30)Output shaft and second promoted reduction box(31)Input shaft be sequentially connected;

Second lead screw(37)Vertical is arranged, and end promotes reduction box with second thereon(31)Output shaft be fixedly connected, And second lead screw(37)With the second mobile bearing being located above(38-1)Screw thread flexible connection is carried out by screw hole or nut; Therefore, the second electric rotating machine(32)Pass through the second rotational deceleration case(33)Drive the second rotary shaft(35)Rotation, enable to Second lead screw(37)Around the second rotary shaft(35)Center axis thereof, and then pass sequentially through the second movable axis being located above Bearing(38-1)And second support arm(11)Drive the second attached cylinder(13)Around the second rotary shaft(35)Central axis turned It is dynamic;And second promotes motor(30)Reduction box is promoted by second(31)Drive the second lead screw(37)Rotation, enable to position The second mobile bearing in top(38-1)Relative to column(1)It is moved in the up-down direction, and then passes through second Arm(11)Drive the second attached cylinder(13)Carry out the movement of upward and downward therewith together;

In use, the second attached cylinder(14)Also it is at different positions, including being in and bell(100)Phase Bell is left in the crystal pulling position of cooperation(100)And it is located at bell(100)The raised position of surface and in the up-down direction It leaves the region of bell and is capable of the unloading position of safe discharging;Described second rotates and upgrades mechanism(3)Enable to second Support arm(12)Drive the second attached cylinder(14)Mechanism is rotated and upgraded around second(3)Central axis rotation, refer to so that Two attached cylinders(14)It is converted into the rotation of raised position by unloading position, or turning for unloading position is converted by raised position It is dynamic;Described second rotates and upgrades mechanism(3)Enable to second support arm(12)Drive the second attached cylinder(14)Relative to column (1)Movement along the vertical direction refers to so that the second attached cylinder(14)The movement of crystal pulling position is converted by raised position, or It is by the movement of crystal pulling evolution to raised position;

Described first rotates and upgrades mechanism(2)It is arranged in column(1)Side on, second rotates and upgrades mechanism(3)Then it is arranged On the other side corresponding thereto.

3. dual rotary pulling apparatus according to claim 2, it is characterised in that:Column(1)For rectangular open tubular column, column (1)It is fixedly connected in fixed structure piece by its lower end;First rotates and upgrades mechanism(2)It is arranged in column(1)A side Namely on main side, second rotates and upgrades mechanism(3)Then it is arranged on another side opposite with the side namely trailing flank.

4. dual rotary pulling apparatus according to claim 3, it is characterised in that:Control system further includes approaching switch(41) With induction plate(42);

It is described close to switch(41)There are 8, is divided into 2 groups, every group 4;Close to switch(41)Equipped with inductive signal output end;The One group includes the first close switch close to switching(41-1), second close to switch(41-2), third close to switch(41-3)With Four close switches(41-4);Second group includes the 5th close switch close to switching(41-5), the 6th close to switch(41-6), the 7th Close to switch(41-7)With the 8th close switch(41-8);First group rotates and upgrades mechanism close to when switch use with first(2) It matches;Second group rotates and upgrades mechanism close to when switch use with second(3)It matches;

First group is mounted on column close to switch(1)Main side on;Wherein, the first close switch(41-1)Positioned at lower section, Two close switches(41-2)Positioned at the first close switch(41-1)Top, third close to switch(41-3)It approaches and opens positioned at second It closes(41-2)Top, the 4th close to switch(41-4)With the close switch of third(41-3)On sustained height, and the 4th connects Nearly switch(41-4)Third is left close to switch(41-3)Certain distance;

Second group is mounted on column close to switch(1)Trailing flank on, and the 5th close to switch(41-5)Location and the One close switch(41-1)It is corresponding, the 6th close switch(41-6)Location and the second close switch(41-2)Relatively It answers, the 7th close switch(41-7)Location and the close switch of third(41-3)It is corresponding, the 8th close switch(41-8) Location and the 4th close switch(41-4)It is corresponding;

Incude plate(42)Also there are 8, respectively incude plate(42)With corresponding one close switch(41)It is corresponding;And first Incude plate(42-1)With the second induction plate(42-2)It is each attached to underlying first mobile bearing(28-2)On, and Second induction plate(42-2)Positioned at the top of the first induction plate 42-1;Third incudes plate(42-3)With the 4th induction plate (42-4)It is each attached to the first rotary shaft(25)Peripheral surface on, and with third close to switch(41-3)Positioned at sustained height Place, and this two induction plates are separated by certain radian each other;5th induction plate and 6th sense answer plate fixed In underlying second mobile bearing(38-2)On, and 6th sense answers plate to be located at the 5th top for incuding plate;7th Induction plate and the 8th induction plate are each attached to the second rotary shaft(35)Peripheral surface on, and with the 7th close to switch position In place of sustained height, and this two induction plates are separated by certain radian each other;

Described is each close to switch(41)Inductive signal output end and master controller(40)Induction plate position signal it is defeated Enter end electrical connection or and master controller(40)Induction plate position signal input terminal connected by wireless signal.

5. dual rotary pulling apparatus according to claim 4, it is characterised in that:Control system further includes pressuring rotating plate valve(43), Argon inlet valve and weighing sensor(44);

First shift mechanism(15)Including the first rope(17);Second shift mechanism(16)Including the second rope(18);Institute The weighing sensor stated(44)There are 2, they are the first weighing sensors(44-1)With the second weighing sensor(44-2);First Weighing sensor(44-1)By its induction end and the first rope(17)It is connected, the second weighing sensor(44-2)By its induction end With the second rope(18)It is connected;It is each to retransmit sensor(44)It is equipped with weighing-up wave output end, the output end and master controller (40)Weigh inductive signal input terminal electrical connection or wireless signal connection;

The pressuring rotating plate valve(43)There are 3, is equipped with control terminal, the pressuring rotating plate valve(43)Including the first pressuring rotating plate valve(43-1), Second pressuring rotating plate valve(43-2)With third pressuring rotating plate valve(43-3);First pressuring rotating plate valve(43-1)Mounted on the first attached cylinder(13)Lower end On position, the second pressuring rotating plate valve(43-2)Mounted on the second attached cylinder(14)Lower end position on, third pressuring rotating plate valve(43-3)Installation In bell(100)On, and third pressuring rotating plate valve(43-3)It is equipped with and vacuumizes interface, and this vacuumizes interface and third pressuring rotating plate valve (43-3)The inner cavity of external tapping be connected;The argon inlet valve has 3, is equipped with control terminal, and be installed in column (1)On;

The argon inlet valve(45)It is equipped with control terminal, argon inlet valve(45)Including the first argon inlet valve(45-1), Second argon inlet valve(45-2)With third argon inlet valve(45-3), they set, and there are one shared input ports, and the first argon Gas intake valve(45-1)Delivery outlet by corresponding connecting tube with positioned at the first attached cylinder(13)Upper-end part of driving argon gas Access port is connected, the second argon inlet valve(45-2)Delivery outlet by corresponding connecting tube with positioned at the second attached cylinder (14)The argon gas access port of upper-end part of driving be connected, third argon inlet valve(45-3)Delivery outlet pass through corresponding connecting tube And with the bell positioned at single crystal growing furnace(100)On argon gas access port be connected;

Each pressuring rotating plate valve(43)Control terminal and described three argon inlet valves(45)Control terminal and master controller(40) Control signal output electrical connection or connected by wireless signal.

6. dual rotary pulling apparatus according to claim 2, it is characterised in that:It further include the first lock shaft block(26)With second Lock shaft block(36);The first lock shaft block(26)It is equipped with mounting hole in one end of its horizontal direction, the other end is equipped with for being arranged The circular hole of lead screw;First lock shaft block(26)First rotary shaft is fixed in by its mounting hole tight fit(25)On, and in above-below direction It is upper to be located at 2 the first mobile bearings(28)Between;First lead screw(27)Lower end pass through the first lock shaft block(26)Be used for The circular hole of lead screw is set, and the two is slidably matched;

The second lock shaft block(36)It is equipped with mounting hole in one end of its horizontal direction, the other end is equipped with the circle for lead screw to be arranged Hole;Second lock shaft block(36)Second rotary shaft is fixed in by its mounting hole tight fit(35)On, and it is located at 2 in the up-down direction Second mobile bearing(38)Between;Second lead screw(37)Lower end pass through the second lock shaft block(36)For that lead screw is arranged to be another One end circular hole, and the two is slidably matched.

7. dual rotary pulling apparatus according to claim 2, it is characterised in that:It further include first shaft coupling(29)With second Shaft coupling(39);First rotary shaft(25)Lower end pass through first shaft coupling(29)With the first rotational deceleration case(23)'s Output shaft is sequentially connected;Second rotary shaft(35)Lower end pass through second shaft coupling(39)With the second rotational deceleration case (33)Output shaft be sequentially connected.