CN106929909B - A kind of electro-beam floating zone domain smelting furnace and method of smelting - Google Patents
A kind of electro-beam floating zone domain smelting furnace and method of smelting Download PDFInfo
- Publication number
- CN106929909B CN106929909B CN201511021618.7A CN201511021618A CN106929909B CN 106929909 B CN106929909 B CN 106929909B CN 201511021618 A CN201511021618 A CN 201511021618A CN 106929909 B CN106929909 B CN 106929909B
- Authority
- CN
- China
- Prior art keywords
- furnace chamber
- furnace
- smelting
- charge
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
The invention discloses a kind of electro-beam floating zone domain smelting furnace and method of smelting, include the applying argon gas fast cooling system, water cooling system and high vacuum unit of a furnace body and arranging；Furnace body is made of upper furnace chamber and lower furnace chamber, and when working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing；In the intracorporal working region of furnace, it is fixedly installed with the fixed device of charging for fixing charge bar, and be equipped with a ring-type electron gun, electron gun mobile system is arranged for ring-type electron gun, the material rotating mechanism of lower charge mechanism rotation can be driven by being also arranged one.Method of smelting is under high vacuum environment, fuel rod realizes the effect of narrow regions fusing under the action of high energy heat, material is then maintained among charge bar by means of its liquid surface tension in melting zone, it is slowly moved in same direction along axial direction simultaneously, in entire complicated physical and chemical process, gas evolution, impurity evaporation simultaneously generate monocrystalline, to reach Smelting Effect.
Description
Technical field
The present invention relates to the melting technique of high-purity refractory metal more particularly to a kind of electro-beam floating zone domain smelting furnace and melt
Smelting method.
Background technique
With the rapid development of science and technology, many high-tech sectors such as Aeronautics and Astronautics, military project, nuclear energy and bioengineering
And associated equipment manufacturing industry and automatically control industry technology also rapid advances, high-purity refractory metal and its alloy monocrystalline material because
Itself superior physics and chemical property, mechanical property are also increasingly paid close attention to by technician.Many researchs both domestic and external
Mechanism also makes very big investment to the preparation method of this high-purity infusibility and alloy monocrystalline structural material.
The main operational principle of electron-beam smelting technology is that electron gun (cathode) is quiet in high pressure by the electronics of heating transmitting
High-power electron beam is formed under the acceleration of electric field, electron beam is wanted the metal of melting by bombardment after focusing, melts refractory metal.
General electron-beam melting system (such as a kind of electron beam furnace) includes electron-beam smelting furnace body (containing electron gun, furnace body, earthenware
Crucible and cooling body) and matched auxiliary equipment (vacuum system, high voltage power supply and low-tension supply) and operating system etc..Vacuum
System provides vacuum working environment for electron beam furnace；High voltage power supply for the electronics that electron gun is launched provide acceleration voltage and
To the bombarding voltage etc. of cathode block；Low-tension supply is primarily used to provide electric current to focusing, deflection and scanning coil, and then is used to
The electronics that control electron gun is launched enables accurately to bombard by the technique requirement of design to the charge bar being melted.
But the electron gun setting of current electron-beam smelting furnace body be all using fixed form, to some high-purity infusibilities and
The Smelting Effect of alloy monocrystalline structural material is bad；And the method for existing electron-beam smelting is usually first to melt metal to be processed
To change, holding obtains the charge bar of new performance materials (purify and monocrystal material is made) in crucible, in recombination, during these,
Easily there are crucibles to be contaminated problem, and the final products purity obtained after melting is caused not reach requirement.
Summary of the invention
The main object of the present invention is to provide a kind of electro-beam floating zone domain smelting furnace that heating efficiency is high, can using the equipment
To prepare high-purity infusibility and alloy monocrystalline structural material.
To achieve the above object, the present invention takes following design scheme:
A kind of electro-beam floating zone domain smelting furnace includes applying argon gas fast cooling system, the water cooling system of a furnace body and arranging
And high vacuum unit；
The furnace body is made of upper furnace chamber and lower furnace chamber；Wherein, lower furnace chamber is fixed on furnace body base, and upper furnace chamber is arranged
There is a upper furnace chamber hoisting mechanism that can be lifted and be transferred, when working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing；
In the intracorporal working region of furnace, it is fixedly installed with the fixed device of charging for fixing charge bar；
A ring-type electron gun is equipped in furnace body, set position can make to charge charge bar clamped by fixed device along wherein
Axis passes through.
In the smelting furnace of the electro-beam floating zone domain, electron gun mobile system is arranged for ring-type electron gun, the electron gun is mobile
System is driven using servo electric jar and is had water-cooling system.
In the smelting furnace of the electro-beam floating zone domain, the fixed device of the charging includes upper charge mechanism and lower charge mechanism,
Two opposite head ends of the two are respectively provided with the collet for gripping charge bar.
In the smelting furnace of the electro-beam floating zone domain, the material rotating mechanism of lower charge mechanism rotation can be driven by being arranged one.
In the smelting furnace of the electro-beam floating zone domain, the upper furnace chamber is furnished with observation window, and the observation window is from outside to inside successively
Install protective glass, seal glass and one group of reflecting glass.
In the smelting furnace of the electro-beam floating zone domain, one group of reflecting glass is obliquely installed, and the reflecting glass of the group that
This is parallel.
In the smelting furnace of the electro-beam floating zone domain, a centering body is arranged for upper and lower charge mechanism, includes an eccentric method
A blue and adjustment mounting flange, eccentric flange and adjustment mounting flange are spherical and non-concentric be connected to each other；Upper charge mechanism has
With deck on eccentric flange, the two is arranged concentrically outer male structure；Upper charge mechanism is fixedly connected with adjustment mounting flange.
In the smelting furnace of the electro-beam floating zone domain, also there is following one of structures:
1) the upper furnace chamber hoisting mechanism by left and right two guide upright posts wear furnace body rack cross and it is fixed thereto；
2) it is equipped with for realizing automatically controlled human-machine operation panel to electro-beam floating zone domain smelting furnace；
3) furnace chamber takes out mouth containing high vacuum on.
It is a further object of the present invention to provide a kind of methods of electro-beam floating zone melting, not only can letter using this method
Change fusion process, and the product purity obtained after melting can be higher.
To achieve the above object, the present invention takes following design scheme:
A kind of electro-beam floating zone domain method of smelting has above-mentioned electro-beam floating zone domain smelting furnace, method of smelting
Specific step is as follows:
A) upper furnace chamber is raised to by rational position by upper furnace chamber hoisting mechanism first and locked, guarantee that burner hearth opens wide；
B) according between charge mechanism lower end in the length adjustment of preprocessing charge bar and lower charge mechanism upper end away from
From making it coincide with charge bar length, while charge bar both ends being fixed with the collet in the mechanism end portion that charges above and below respectively；
C) upper furnace chamber hoisting mechanism is discharged, furnace chamber and, completion feeding sealed with the sealing of lower furnace chamber in landing；
D) to water cooling system normal operation, high vacuum unit is started to reach the vacuum of requirement by human-machine operation panel
Degree；
E) high and low pressure power-supply system is controlled, ring-type electron gun is opened；
F) servo electric jar is controlled, rifle mobile mechanism is adjusted, position set by ring-type electron gun is made to be in charge bar lowermost end
In plane, at the uniform velocity moved upwards by the speed of setting；
G) control servo motor drives the rotation speed of material rotating mechanism, at the uniform velocity rotation charge bar, primary molten until meeting
Refining requires；
H) terminate melting, or be transferred to the melting of step a progress next time.
In the method for smelting of the electro-beam floating zone domain, also there is following characterization methods: in the step b, upper and lower clothing
Expect that the collet of mechanism end to off-centre operation centering method is just used with one heart, if eccentric state occurs in upper and lower charge mechanism, leads to
It crosses to the circumference of eccentric flange to adjustment, to its center, position deviation is corrected.
Electro-beam floating zone domain of the present invention method of smelting is the typical case side for preparing high-purity infusibility and alloy monocrystalline structural material
Method.This method is substantially under high vacuum environment, and fuel rod realizes the effect of narrow regions fusing under the action of high energy heat, is melted
Material is then maintained among charge bar by means of its liquid surface tension in area, while slowly being moved in same direction along axial direction, In
In entire complicated physical and chemical process, gas evolution, impurity evaporation simultaneously generate monocrystalline, to reach Smelting Effect.Electron beam
Floating zone melting furnace prepares high pure metal and monocrystalline equipment to be dedicated, can be under conditions of high vacuum using this equipment, will
The infusibilities such as tungsten, molybdenum, tantalum, niobium, titanium, zirconium, hafnium, active metal etc. are purified and are drawn into monocrystalline, can also by Al2O3, jewel,
The insulating materials such as ceramics heating degassing etc..The equipment is acted on from the electronics of emission of cathode in Potential distribution by ring-type electron gun
Under, charge bar is banged by aggregation and accelerator
Hit region heating fusing.
The invention has the advantages that
1. electron gun using annular rifle, avoids being directly facing for filament and material, material in fusion process can be eliminated
Pollution of the splash of generation to filament, extends the service life of filament；And it is equipped with electron gun mobile system simultaneously, compared with other transmissions
Mode has many advantages, such as that novel design is exquisite, small in size, precision is high, fully synchronized, self-locking property is good, hygienic；
2. being also equipped with material rotating mechanism in the present invention, it can guarantee that the uniform melting of material and crystal are normal at melting
Growth；
3. small compared with resistance heating region is more due to ring-type electron gun electron beam sweep length of the invention, melting zone with to
The temperature gradient of smelting area is obvious, and during electron gun moves up and down, the melt form of any melting range is more susceptible to
The effect of its surface tension controls, therefore heating efficiency is high, and temperature gradient is easily controllable；
4. not having to be equipped with crucible, thus exist without the problem of crucible pollution, also effectively saves the space of equipment and be fabricated to
This；
Detailed description of the invention
Fig. 1 is electro-beam floating zone domain furnace construction schematic diagram (main view) of the present invention.
Fig. 2 is electro-beam floating zone domain furnace construction schematic diagram (side view) of the present invention.
Fig. 3 is observation window structural schematic diagram of the present invention.
Fig. 4 is the fixed device partial structure diagram of present invention charging.
In figure: the upper furnace chamber of 1-；2- vacuum observation window；3- argon filling air cooling system；The upper charge mechanism of 4-；5- charge bar；Under 7-
Charge mechanism；Furnace chamber under 8-；9- material rotating mechanism；10- servo motor；11- servo electric jar；12- furnace body base；13- rifle
Mobile mechanism；The upper furnace chamber hoisting mechanism of 14-；15- human-machine operation panel；16- high vacuum unit；17- eccentric flange；18- adjustment
Mounting flange；201- protective glass；202- seal glass；203- reflecting glass.
With reference to the accompanying drawing and specific embodiment the present invention is described further.
Specific embodiment
Referring to figure 1 and figure 2, electro-beam floating zone domain of the present invention smelting furnace use vertical structure, mainly include including
Furnace body base, upper furnace chamber, lower furnace chamber, upper furnace chamber hoisting mechanism, upper charge mechanism, lower charge mechanism, ring-type electron gun, rifle are mobile
Mechanism, material rotating mechanism, high vacuum unit, vacuum observation window, man-machine control panel, argon filling air cooling system, cooling water system
System.Wherein rifle mobile mechanism ginseng is driven with servo electric jar, and material rotating mechanism is driven using servo motor, in corresponding servo
Under controller action, precise movement is realized by the control of man-machine operation bench, obtains the crystalline material of complete performance.
Furnace body of the invention is made of upper furnace chamber and lower furnace chamber, is all made of Double water-cooled welding structure, to reduce molten
The deformation and weldering leakage problem that high temperature generates when refining.Furnace body base 12 is fixed with basis, and lower furnace chamber 8 is fixed on furnace body base 12,
Upper furnace chamber hoisting mechanism 14 by left and right two guide upright posts wear furnace body rack cross and it is fixed thereto.Upper furnace chamber hoisting mechanism can
Upper furnace chamber is lifted and transferred, when working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing.Upper furnace chamber hoisting mechanism 14
It actually is molten room switching mechanism；For the ease of charging and start-up of the furnace, by pulley and the additional counterweight of wire mechanism, furnace in lifting
Room 1, and hoisting mechanism left and right pillar is respectively equipped with dragging track and directive wheel, and there is mechanical position limitation in terminal position, is protected with this
The flexible of furnace chamber opening and closing is demonstrate,proved, it is light to become, steadily.
Upper furnace chamber takes out mouth and vacuum observation window 2 containing high vacuum, and quick argon filling cooling system 3 is arranged.
Vacuum observation window 2 of the invention be according to light principle of reflection design optical path, and observation window be made into it is mazy, to subtract
Few mechanically deform, is resistant to 450 DEG C of baking, shown in Figure 3, which successively installs 201 (lead of protective glass from outside to inside
Glass protecting screen), seal glass 202 and one group of reflecting glass 203, one group of reflecting glass 203 is obliquely installed, and the group is anti-
Penetrating glass 203 (using 2 pieces in the present embodiment) is parallel each other.The protective glass 201 (use lead glass protecting screen for
It is good), injury of the X-ray of high pressure generation to human body can be eliminated.The effect of reflecting glass: equipment is during high melt
The sputtering of liquid gaseous state fusant can be generated, it is possible to condensation coating can be caused to observation window, common observation window will lead to observation window mistake
Effect, is unable to monitor internal melting state；After one group of reflecting glass, incident angle is angled with glass, has both made in list
After layer glass is plated, melting state can also be reflected into human eye, simultaneously by another side reflecting mirror by light principle of reflection
Strong light can also be filtered off, eyes are protected.Adjustable glass baffle plate is housed on window, guarantees clearly see in entire fusion process
Examine material.The design of this vacuum observation window 2, it is ensured that still worked normally after occurring the molten plating of surface layer of glass inside furnace chamber.
The fixed device of charging of the invention is made of upper charge mechanism 4, lower charge mechanism 7 respectively, and charge bar 5 passes through upper and lower
The grips of charge mechanism are fixed；After the closing of upper furnace chamber 1, upper and lower charge mechanism is in vacuum melting room, inside
Equal water flowing circulating cooling；Upper charge mechanism 4 is installed on lower 7 machinery frame of charge mechanism, is adjusted up and down according to charge bar length；Up and down
Collet to just with one heart use off-centre operation centering technology, it is shown in Figure 4, eccentric flange 17 is fitted on upper charge mechanism
With adjustment mounting flange 18, eccentric flange 17 with adjust that mounting flange 18 is spherical connects, center line is in eccentric state,
Charge mechanism is installed in middle eccentric flange upper end, and (in the present embodiment, upper charge mechanism is with outer male structure with deck in eccentric method
On orchid), the two is arranged concentrically, and positional relationship is consistent；Upper charge mechanism 4 is fixedly connected with adjustment mounting flange 18.If up and down
There is eccentric state in charge mechanism, can be inclined to its center in a certain range by the circumference to eccentric flange to adjustment
Difference is corrected, to solve the problems, such as the fixed device collet out-of-alignment up and down that charges, is avoided and is drawn in charge bar rotary course
Rise get stuck, material is shapeless, material damage and phenomena such as equipment damage.
Electron gun of the invention uses autoacceleration formula annular rifle, and hollow cathode is made of oxygen-free copper, and water cooling is simultaneously grounded.By lamp
The electronics that silk generates is allowed to deflect, focus and accelerate by the Potential distribution that grid and anode generate, and is existed by the bombardment of cathode narrow slit
On material.The structure of this rifle avoids being directly facing for filament and material, eliminates the splashing that material generates in fusion process
Pollution of the object to filament, extends the service life of filament.Circular anode Gap size is adjusted, melting zone width can be changed, it is advantageous in this way
The material big in melting diameter, smelt surface tension is small.In the present embodiment, position set by the ring-type electron gun can make charging solid
Determine charge bar 5 clamped by device to pass through along its central axes.
In the present invention, it is equipped with electron gun mobile system 13, by having water-cooling system, is driven, is had using servo electric jar
There is the advantages that high-precision, movement is steady, low noise, and Operation and Maintenance is simple.Electron gun can move up and down, and range is
500mm；Movement speed control exists: 0.5mm/min~50mm/min, and speed is adjustable, is usually operated at 2mm/min or so.It should
Mechanism is novel linear executing agency, compared with other kinds of drive, with novel design is exquisite, small in size, precision is high, completely same
Step, the advantages that self-locking property is good, hygienic.
It is also equipped with material rotating mechanism 9 in the present invention, is directly driven by servo motor 10.It ensure that material in melting
Uniform melting and crystal normal growth, to meet the optimum efficiency of melting.1~20 rev/min of the revolving speed of bar 5, speed is adjustable, leads to
Often run at 2~3 revs/min.
Water-cooling system of the invention is equipped with controlled valve, flow control valve, temperature per water all the way using all the way one control
The devices such as meter, and flowmeter is set at electron gun and material device and carries out flow alarm function and chain monitoring, reach more preferable with this
Cooling effect.
Electronic control technology in the present invention, which belongs to the prior art, to be realized, do not repeat herein.
The course of work of the present invention is to equip fuel rod by upper and lower material folding to fix, and is to be sent out according to ring-type electron gun from cathode
The electronics penetrated is by the Potential distribution deflection that cathode and anode generate, focusing and accelerates, and is bombarded by the narrow slit of anode onto material,
Since the bombardment of electronics is as a result, the fusing that heats up in the very big energy of the concentration of local of charge bar, fusant material is in own face
Smelting area is formed under tension force effect, realizes the purification to high temperature refractory material and the generation effect of crystal.Entire melting
Journey has the advantages that heating efficiency is high, temperature gradient is easily controllable, pollutes without crucible, in current industry and it is following have it is very big
Develop potential energy.
The various embodiments described above can be subject to without departing from the scope of the invention several variations, therefore above illustrate to include to answer
It is considered as illustrative, rather than the protection scope to limit the present patent application patent.
Claims (4)
1. a kind of electro-beam floating zone domain smelting furnace, include the applying argon gas fast cooling system of a furnace body and arranging, water cooling system and
High vacuum unit；It is characterized by:
The furnace body is made of upper furnace chamber and lower furnace chamber；Wherein, lower furnace chamber is fixed on furnace body base, and upper furnace chamber is equipped can
The upper furnace chamber hoisting mechanism for being lifted and being transferred, when working condition, upper furnace chamber is docked with lower furnace chamber longitudinal sealing；
In the intracorporal working region of furnace, it is fixedly installed with the fixed device of charging for fixing charge bar；
It is equipped with a ring-type electron gun in furnace body, electron gun mobile system, the electron gun mobile system is arranged for ring-type electron gun
Water-cooling system is driven and had using servo electric jar, and position set by the ring-type electron gun can make to charge clamped by fixed device
Charge bar is passed through along its central axes；
The fixed device of the charging includes upper charge mechanism and lower charge mechanism, and two opposite head ends of the two, which are respectively provided with, to be used for
Grip the collet of charge bar；The material rotating mechanism of lower charge mechanism rotation can be driven by being arranged one；
For upper and lower charge mechanism be arranged a centering body, include an eccentric flange and one adjustment mounting flange, eccentric flange and
Adjustment mounting flange is spherical and non-concentric is connected to each other；Upper charge mechanism has outer male structure with deck on eccentric flange,
The two is arranged concentrically；Upper charge mechanism is fixedly connected with adjustment mounting flange；
The upper furnace chamber is furnished with observation window, and it is anti-that which successively installs protective glass, seal glass and one group from outside to inside
Penetrate glass, one group of reflecting glass is obliquely installed, and the reflecting glass of the group be each other it is parallel, the observation window be equipped with adjustable glass
Glass baffle, so that can clear view material during entire melt.
2. electro-beam floating zone domain as described in claim 1 smelting furnace, it is characterised in that also have following one of structures:
1) the upper furnace chamber hoisting mechanism by left and right two guide upright posts wear furnace body rack cross and it is fixed thereto；
2) it is equipped with for realizing automatically controlled human-machine operation panel to electro-beam floating zone domain smelting furnace；
3) furnace chamber takes out mouth containing high vacuum on.
3. a kind of electro-beam floating zone domain method of smelting, molten with electro-beam floating zone domain any in claim 1 to 2
Furnace, it is characterised in that specific step is as follows for method of smelting:
A) upper furnace chamber is raised to by rational position by upper furnace chamber hoisting mechanism first and locked, guarantee that burner hearth opens wide；
B) according to the distance between charge mechanism lower end in the length adjustment of preprocessing charge bar and lower charge mechanism upper end, make
It coincide with charge bar length, while charge bar both ends being fixed with the collet in upper and lower charging mechanism end portion respectively；
C) upper furnace chamber hoisting mechanism is discharged, furnace chamber and, completion feeding sealed with the sealing of lower furnace chamber in landing；
D) to water cooling system normal operation, high vacuum unit is started to reach the vacuum degree of requirement by human-machine operation panel；
E) high-low voltage power source system is controlled, ring-type electron gun is opened；
F) servo electric jar is controlled, rifle mobile mechanism is adjusted, position set by ring-type electron gun is made to be in the plane of charge bar lowermost end
On, it is at the uniform velocity moved upwards by the speed of setting；
G) control servo motor drives the rotation speed of material rotating mechanism, at the uniform velocity rotation charge bar, wants until meeting melting once
It asks；
H) terminate melting, or be transferred to the melting of step a progress next time.
4. electro-beam floating zone domain as claimed in claim 3 method of smelting, it is characterised in that also have following characterization methods:
In the step b, the collet in the upper and lower mechanism end portion that charges to off-centre operation centering method is just used with one heart, if upper and lower charging
There is eccentric state in mechanism, and by the circumference to eccentric flange to adjustment, to its center, position deviation is corrected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511021618.7A CN106929909B (en) | 2015-12-31 | 2015-12-31 | A kind of electro-beam floating zone domain smelting furnace and method of smelting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511021618.7A CN106929909B (en) | 2015-12-31 | 2015-12-31 | A kind of electro-beam floating zone domain smelting furnace and method of smelting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106929909A CN106929909A (en) | 2017-07-07 |
| CN106929909B true CN106929909B (en) | 2019-10-29 |
Family
ID=59441007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511021618.7A Active CN106929909B (en) | 2015-12-31 | 2015-12-31 | A kind of electro-beam floating zone domain smelting furnace and method of smelting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106929909B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111118596A (en) * | 2020-01-09 | 2020-05-08 | 有研工程技术研究院有限公司 | Multifunctional electron beam zone smelting furnace |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201373663Y (en) * | 2008-12-29 | 2009-12-30 | 北京有色金属研究总院 | Electron beam zone refining furnace with adjustable mutual position of beam confining electrode and accelerating anode |
| CN101892519A (en) * | 2010-07-20 | 2010-11-24 | 西安理工晶体科技有限公司 | Silicon core furnace repeatedly pulling multiple silicon cores in one heat |
| CN201752361U (en) * | 2010-07-15 | 2011-03-02 | 广东新宝电器股份有限公司 | Visual toaster |
| CN203007468U (en) * | 2012-12-19 | 2013-06-19 | 北京有色金属研究总院 | Electron beam zone melting furnace for carrying out suspended region purification on material |
| CN103882509A (en) * | 2012-12-19 | 2014-06-25 | 北京有色金属研究总院 | Electron beam zone melting furnace and method for carrying out float zone purification on material |
| CN104765385A (en) * | 2015-03-29 | 2015-07-08 | 西安赛隆金属材料有限责任公司 | Electron beam selected area melting atmosphere adjust and control system and method |
| CN105002553A (en) * | 2015-07-29 | 2015-10-28 | 哈尔滨工业大学（威海） | Annular electron beam crucible-free zone smelting device used in vacuum environment |
| CN205313712U (en) * | 2015-12-31 | 2016-06-15 | 北京有色金属研究总院 | Electron beam hangs floating zone territory smelting pot |
-
2015
- 2015-12-31 CN CN201511021618.7A patent/CN106929909B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201373663Y (en) * | 2008-12-29 | 2009-12-30 | 北京有色金属研究总院 | Electron beam zone refining furnace with adjustable mutual position of beam confining electrode and accelerating anode |
| CN201752361U (en) * | 2010-07-15 | 2011-03-02 | 广东新宝电器股份有限公司 | Visual toaster |
| CN101892519A (en) * | 2010-07-20 | 2010-11-24 | 西安理工晶体科技有限公司 | Silicon core furnace repeatedly pulling multiple silicon cores in one heat |
| CN203007468U (en) * | 2012-12-19 | 2013-06-19 | 北京有色金属研究总院 | Electron beam zone melting furnace for carrying out suspended region purification on material |
| CN103882509A (en) * | 2012-12-19 | 2014-06-25 | 北京有色金属研究总院 | Electron beam zone melting furnace and method for carrying out float zone purification on material |
| CN104765385A (en) * | 2015-03-29 | 2015-07-08 | 西安赛隆金属材料有限责任公司 | Electron beam selected area melting atmosphere adjust and control system and method |
| CN105002553A (en) * | 2015-07-29 | 2015-10-28 | 哈尔滨工业大学（威海） | Annular electron beam crucible-free zone smelting device used in vacuum environment |
| CN205313712U (en) * | 2015-12-31 | 2016-06-15 | 北京有色金属研究总院 | Electron beam hangs floating zone territory smelting pot |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106929909A (en) | 2017-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2075357B1 (en) | Apparatus for producing single crystal silicon | |
| US20210062359A1 (en) | Method for Growing Large-size Crystal By Laser Assisted Heating and Dedicated Device | |
| CN104451892A (en) | Multistage graphite heating system of sapphire crystal growth equipment and using method of multistage graphite heating system | |
| CN103882509A (en) | Electron beam zone melting furnace and method for carrying out float zone purification on material | |
| CN107574322A (en) | A kind of method that electronic torch melting technology High Purity prepares nickel base superalloy | |
| CN106929909B (en) | A kind of electro-beam floating zone domain smelting furnace and method of smelting | |
| WO2019223255A1 (en) | Rod hanging apparatus and optical fiber drawing system | |
| KR101574749B1 (en) | Upper heater for manufacturing single crystal, single crystal manufacturing apparatus and single crystal manufacturing method | |
| CN107606946A (en) | The apparatus and method that a kind of high-frequency plasma starts fusing in cold crucible | |
| CN102154699A (en) | Method for growing sapphire monocrystal and growth equipment | |
| CN205313712U (en) | Electron beam hangs floating zone territory smelting pot | |
| CN203007468U (en) | Electron beam zone melting furnace for carrying out suspended region purification on material | |
| JP4184725B2 (en) | Single crystal semiconductor manufacturing method and single crystal semiconductor manufacturing apparatus | |
| CN100374626C (en) | Method and device for growing sapphire crystal by laser | |
| CN111118596A (en) | Multifunctional electron beam zone smelting furnace | |
| EP1686201B1 (en) | Pulling-down apparatus | |
| JPH10158091A (en) | Device for producing single crystal and production of single crystal, using the same | |
| CN105648530A (en) | Kyropoulos-process sapphire crystal growth furnace capable of replacing seed crystals on line | |
| CN212270276U (en) | Multifunctional electron beam zone smelting furnace | |
| CN117098877A (en) | Intraocular lens furnace and intraocular lens furnace system including same | |
| US20180320288A1 (en) | Method of manufacturing silicon single crystal | |
| CN111206160A (en) | Electron beam horizontal furnace | |
| CN213687809U (en) | Argon blowing stirrer of suspension smelting equipment | |
| US4951298A (en) | Closed remelting furnace having several horizontally movable furnace lower portions | |
| JP6365700B2 (en) | Single crystal pulling device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20190625 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Applicant after: Research Institute of engineering and Technology Co., Ltd. Address before: No. 2, Xinjie street, Xicheng District, Beijing, Beijing Applicant before: General Research Institute for Nonferrous Metals |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |