CN204342919U - Silicon core stove seed crystal hangs and discharger - Google Patents
Silicon core stove seed crystal hangs and discharger Download PDFInfo
- Publication number
- CN204342919U CN204342919U CN201420735841.2U CN201420735841U CN204342919U CN 204342919 U CN204342919 U CN 204342919U CN 201420735841 U CN201420735841 U CN 201420735841U CN 204342919 U CN204342919 U CN 204342919U
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- China
- Prior art keywords
- seed crystal
- suspension rod
- silicon core
- frame
- disc
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Abstract
The utility model discloses a kind of silicon core stove seed crystal to hang and discharger, it comprises and connects suspension rod and disc and unload and put frame, the servo motor shaft of silicon core stove former handle system side arranges horizontally disposed disc and unloads the centre hole putting frame and be connected by sunk key with servo motor shaft; Put the circular arc through hole that the frame center of circle is the center of circle unloading to put frame is provided with to unload; Connecting suspension rod split is movably arranged in circular arc through hole; Connect suspension rod top and be provided with connecting joint, be fixedly connected with by sunk key with seed crystal dish at connection boom foot; Connection suspension rod below connecting joint is provided with placement disk, the outer of placing disk is provided with detent.Advantage is: connect suspension rod and disc and unload that to put shelf structure simple and practical, connects the clamping of suspension rod and unloads and put handoff procedure smoothness, manual, electronicly all can freely control; The production production efficiency of silicon core stove is significantly promoted.
Description
Technical field:
The utility model relates to a kind of support equipment of silicon core stove, particularly relates to a kind of silicon core stove seed crystal and hangs and discharger.
Background technology:
Silicon core stove is mainly used in the drawing device of polysilicon deposition carrier silicon core.Its principle is the polycrystalline silicon columnar bar of certain diameter and length, is vertically in the sealed furnace cylinder of the argon atmosphere of certain pressure, and polycrystalline silicon columnar bar upper end face is molten into liquid state under the effect of high frequency magnetic field.Seed crystal dish holds one group of seed crystal and rely on own wt effect from top to bottom under rope traction, seed crystal through after radio-frequency coil with the liquid part welding of polycrystalline silicon columnar bar upper end.Then, wireline, under the traction of servomotor, slowly promotes by certain speed, and simultaneously under the effect of liquid tension, seed crystal drives liquid-state silicon material to rise, cool, solidify, and so, just completes one group of silicon core and draw when lift height reaches certain size.The silicon core stove of former use, stove can only draw at every turn one group of 5 silicon core just blowing out take out silicon core and change new seed crystal.
Utility model content:
The purpose of this utility model is to provide a kind of silicon core stove seed crystal improving multicore silicon core stove production efficiency to hang and discharger.
The utility model is implemented by following technical scheme: silicon core stove seed crystal hangs and discharger, and it comprises and connects suspension rod and disc and unload and put frame, at the servomotor that the handle system side of silicon core stove is provided with; The motor shaft vertical of described servomotor is arranged; Horizontally disposed described disc is unloaded the centre hole putting frame and is connected by sunk key with described servo motor shaft; Described unload to put frame is provided with put with described unloading the circular arc through hole that the frame center of circle is the center of circle; The split of described connection suspension rod is movably arranged in described circular arc through hole; Described connection suspension rod top is provided with connecting joint, is fixedly connected with seed crystal dish at described connection boom foot by sunk key; Connection suspension rod below described connecting joint is provided with described placement disk, the outer of described placement disk is provided with detent.
Be crystal pulling position at the middle part of described circular arc through hole; Described disc outside described crystal pulling position unloads that to put frame be uncovered structure, and the described disc inside described crystal pulling position is unloaded to put on frame and is provided with the arc groove corresponding with described connection suspension rod outer wall shape; The described circular arc through hole of side, described crystal pulling position is that seed crystal places track, places evenly distributedly in track be provided with plural seed crystal and place position at described seed crystal; The described circular arc through hole of described crystal pulling position opposite side is that track placed by silicon core, places the evenly distributed silicon core placing bit quantity corresponding with described seed crystal that is provided with in track place position at described silicon core; Place at each described seed crystal described circular arc through hole edge that position and described silicon core place position to be equipped with the arc corresponding with the placement disc-shape of described connection suspension rod and to unload and put groove edge; Unload described in placing inside position at each described seed crystal put groove along on be vertically provided with the tommy corresponding with described detent shape, described arc unloads the center of circle of putting groove edge, the center of described tommy and described disc and unloads the center of circle of putting frame and be placed on straight line.
Advantage of the present utility model:
Connect suspension rod and disc and unload that to put shelf structure simple and practical, connect the clamping of suspension rod and unload and put handoff procedure smoothness, manual, electronicly all can freely to control; Particularly the device ensures seed crystal dish to be clamped rear seed crystal and do not send out displacement with the corresponding directivity of porous radio-frequency coil.Improve the accuracy that silicon core stove seed crystal dish is placed, shorten seed crystal and place and regulation time, the production efficiency of silicon core stove is significantly risen.
Accompanying drawing illustrates:
Fig. 1 is the structural representation connecting suspension rod.
Fig. 2 is that disc unloads the structural representation putting frame.
Fig. 3 is that disc unloads the use schematic diagram putting frame.
Fig. 4 is use schematic diagram of the present utility model.
Connect suspension rod 1, disc unload put frame 2, silicon core stove 3, handle system 4, servomotor motor shaft 5, centre hole 6, circular arc through hole 7, connecting joint 8, seed crystal dish 9, place disk 10, detent 11, crystal pulling position 12, arc groove 13, seed crystal places track 14, seed crystal places position 15, track 16 placed by silicon core, position 17 placed by silicon core, arc unload put groove along 18, tommy 19.
Embodiment: as shown in Figures 1 to 4, silicon core stove seed crystal hangs and discharger, and it comprises and connects suspension rod 1 and disc and unload and put frame 2, at the servomotor that handle system 4 side of silicon core stove 3 is provided with; Servo motor shaft 5 is vertically arranged; Horizontally disposed disc is unloaded the centre hole 6 putting frame 2 and is connected by sunk key with servo motor shaft 5; Unload to put frame 2 to be provided with to unload with disc in disc and put the circular arc through hole 7 that frame 2 center of circle is the center of circle; Connecting suspension rod 1 split is movably arranged in circular arc through hole 7; Connect suspension rod 1 top and be provided with connecting joint 8, be fixedly connected with by sunk key with seed crystal dish 9 bottom connection suspension rod 1, each seed crystal dish 9 arranges five seed crystals; Connection suspension rod 1 below connecting joint 8 is provided with and places disk 10, the outer of placing disk 10 is provided with detent 11; Be crystal pulling position 12 at the middle part of circular arc through hole 7; Disc outside crystal pulling position 12 is unloaded and is put frame 2 for uncovered structure, and the disc inside crystal pulling position 12 is unloaded to put on frame 2 and is provided with the arc groove 13 corresponding with handle system 4 outer wall shape; The circular arc through hole 7 of side, crystal pulling position 12 is that seed crystal places track 14, places evenly distributedly in track 14 be provided with two seed crystals and place positions 15 at seed crystal; The circular arc through hole 7 of crystal pulling position 12 opposite side is silicon core placement track 16, places the evenly distributed silicon core placing position 15 quantity corresponding with seed crystal that is provided with in track 16 place position 17 at silicon core; Place at each seed crystal circular arc through hole 7 edge that position 15 and silicon core place position 17 to be equipped with the arc corresponding with placement disk 10 shape being connected suspension rod 1 and to unload and put groove along 18; Unload at each seed crystal arc placed inside position 15 and put groove along being vertically provided with the tommy 19 corresponding with detent 11 shape on 18, arc unloads to be put the center of circle of groove along 18, the center of tommy 19 and disc and unloads the center of circle of putting frame 2 and be placed on straight line, ensure that disc is unloaded the seed crystal putting frame 2 and placed position 15 when rotating to crystal pulling position 12, on the seed crystal dish 9 of connection suspension rod 1 bottom that handle system 4 captures, seed crystal is corresponding with the hole of the radio-frequency coil of silicon core stove.
Operation instruction: during use, disc is unloaded crystal pulling position 12 correspondence of putting frame 2 and is arranged on handle system 4 sidepiece, crystal pulling position 12 place arc groove 13 is convenient to handle system 4 upper and lower displacement and is carried out pulling operation; Two seed crystals placement positions 15 arrange one respectively with handle system 4 bottom and is connected suspension rod 1, the tommy 19 that seed crystal is placed on position 15 is accurately connected in detent 11; Below handle system 4, arrange one connect suspension rod 1, carry out the drawing of silicon core; After drawing completes, unloaded by described driven by servomotor disc and put frame 2 and rotate, be discharged into the silicon core that silicon core places track 16 inner side place on position 17 by completing connection suspension rod 1 that silicon core draws, and seed crystal is placed outermost seed crystal in track 14 and place position 15 and rotate to below handle system 4; The connection suspension rod 1 of below is picked up by handle system 4; Unloaded by described servomotor rotational circle dish type and put frame 2 and to be aimed at below handle system 4 crystal pulling position 12 and again carry out the drawing of silicon core, the seed crystal repeated below connection suspension rod 1 that seed crystal places in position 15 by above-mentioned action has all drawn; Realize the success of disposable placement seed crystal, finally realize the target that single stove seed crystal does not do blowing out adjustment production 15 and above silicon core.
Claims (2)
1. silicon core stove seed crystal hangs and discharger, it is characterized in that, it comprises and connects suspension rod and disc and unload and put frame, unloads the centre hole putting frame be connected by sunk key with former servo motor shaft in horizontally disposed described disc; Described unload to put frame is provided with put with described unloading the circular arc through hole that the frame center of circle is the center of circle; The split of described connection suspension rod is movably arranged in described circular arc through hole; Described connection suspension rod top is provided with connecting joint, is fixedly connected with seed crystal dish at described connection boom foot by sunk key; Connection suspension rod below described connecting joint is provided with placement disk, the outer of described placement disk is provided with detent.
2. silicon core stove seed crystal according to claim 1 hangs and discharger, and it is characterized in that, be crystal pulling position at the middle part of described circular arc through hole; Described disc outside described crystal pulling position unloads that to put frame be uncovered structure, and the described disc inside described crystal pulling position is unloaded to put on frame and is provided with the arc groove corresponding with described connection suspension rod outer wall shape; The described circular arc through hole of side, described crystal pulling position is that seed crystal places track, places evenly distributedly in track be provided with plural seed crystal and place position at described seed crystal; The described circular arc through hole of described crystal pulling position opposite side is that track placed by silicon core, places the evenly distributed silicon core placing bit quantity corresponding with described seed crystal that is provided with in track place position at described silicon core; Place at each described seed crystal described circular arc through hole edge that position and described silicon core place position to be equipped with the arc corresponding with the placement disc-shape of described connection suspension rod and to unload and put groove edge; Unload described in placing inside position at each described seed crystal put groove along on be vertically provided with the tommy corresponding with described detent shape, described arc unloads the center of circle of putting groove edge, the center of described tommy and described disc and unloads the center of circle of putting frame and be placed on straight line.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420735841.2U CN204342919U (en) | 2014-11-29 | 2014-11-29 | Silicon core stove seed crystal hangs and discharger |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201420735841.2U CN204342919U (en) | 2014-11-29 | 2014-11-29 | Silicon core stove seed crystal hangs and discharger |
Publications (1)
Publication Number | Publication Date |
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CN204342919U true CN204342919U (en) | 2015-05-20 |
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ID=53226203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201420735841.2U Expired - Fee Related CN204342919U (en) | 2014-11-29 | 2014-11-29 | Silicon core stove seed crystal hangs and discharger |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113061976A (en) * | 2021-03-25 | 2021-07-02 | 杨伟洛 | Monocrystalline silicon drawing device based on Czochralski method |
CN114132931A (en) * | 2021-12-17 | 2022-03-04 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation device and method for polycrystalline silicon production |
-
2014
- 2014-11-29 CN CN201420735841.2U patent/CN204342919U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113061976A (en) * | 2021-03-25 | 2021-07-02 | 杨伟洛 | Monocrystalline silicon drawing device based on Czochralski method |
CN114132931A (en) * | 2021-12-17 | 2022-03-04 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation device and method for polycrystalline silicon production |
CN114132931B (en) * | 2021-12-17 | 2023-07-04 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation method for producing polycrystalline silicon |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150520 Termination date: 20211129 |