CN220846332U - Single crystal furnace with automatic feeding function - Google Patents

Abstract

The utility model relates to the technical field of single crystal furnaces, and provides a single crystal furnace with an automatic feeding function, which comprises a single crystal furnace body, wherein the single crystal furnace body comprises a furnace body, a furnace cover, a crucible, a heating ring, a furnace barrel and a lifting head, feeding columns are fixedly arranged on the periphery of the outer side of the furnace body, one sides of the bottom ends of the four feeding columns are communicated with extrusion pipelines, the outer sides of the tail ends of the extrusion pipelines are rotationally connected with the outer sides of the crucible, the outer sides of the extrusion pipelines are alternately connected with the inner side walls of the furnace body, an outer cover is arranged on the outer sides of the top ends of the feeding columns, an electric telescopic rod is fixedly arranged on the inner side walls of the outer cover, and a vacuum seat is fixedly arranged at the telescopic end of the electric telescopic rod.

Description

Single crystal furnace with automatic feeding function

Technical Field

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace with an automatic feeding function.

Background

The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas (nitrogen and helium are mainly) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like.

The Chinese patent discloses an automatic feeding device of an electric arc furnace, the publication number is CN207944120U, the automatic feeding device comprises a first feeding device, a material distributing device, a second feeding device and a control device, the first feeding device, the material distributing device and the second feeding device are sequentially connected, the second feeding device is connected with a feeding port of the electric arc furnace, a first guide groove is arranged in the second feeding device, the first guide groove is in a ladder shape, a buffer bin is arranged below the first feeding device, the buffer bin is connected with the first feeding device through a conveying pipe, a baffle is arranged in the conveying pipe, and the baffle is connected with the control device; and this feeding device carries out the staged transport to the raw materials of material loading in-process only, after having low temperature material to get into the single crystal growing furnace body, just can lead to the inside raw materials that melts of its crucible to produce the influence to the shaping of single crystal causes the influence, and this feeding device can lead to the raw materials to carry outside air into the single crystal growing furnace body inside owing to the transportation of raw materials, and the raw materials to the inside heating of single crystal growing furnace body causes the influence, has reduced whole single crystal growing furnace through feeding device's reinforced effect then.

Disclosure of utility model

The utility model provides a single crystal furnace with an automatic feeding function, which solves the problem that in the related art, a feeding device can carry external gas into the single crystal furnace body due to the conveying of raw materials in the using process, and the influence is caused on the raw materials heated in the single crystal furnace body.

The technical scheme of the utility model is as follows:

The utility model provides a single crystal growing furnace with automatic material feeding function, includes the single crystal growing furnace body, the single crystal growing furnace body includes furnace body, bell, crucible, heating ring, a stove section of thick bamboo, carries the pull head, the outside of furnace body is fixed mounting all around has the material post that adds, four the bottom one side intercommunication of material post has the extrusion line, the terminal outside of extrusion line rotates with the outside of crucible and is connected, the outside of extrusion line alternates with the inside wall of furnace body and is connected, the dustcoat is installed in the top outside of material post, the inside wall fixed mounting of dustcoat has electric telescopic handle, electric telescopic handle's expansion end fixed mounting has the vacuum seat, the outside of vacuum seat respectively with the inside wall sliding connection of top and the dustcoat of material post, the inside rotation of bottom of material post is connected with the extrusion screw rod.

Preferably, the inside of vacuum seat rotates respectively and is connected with extraction bull stick and transition bull stick, the equal fixed mounting of top and the one end of transition bull stick of extraction bull stick has first conical gear, the other end sliding connection of transition bull stick has the axis of rotation.

Preferably, the inner side of the top end of the feeding column is respectively and rotatably connected with a first ejector rod and a transition swivel, and a second bevel gear is fixedly arranged at the bottom end of the first ejector rod and the other end of the transition swivel, wherein one end of the second bevel gear is fixedly connected with the other end of the rotating shaft.

Preferably, top and bottom outside fixed mounting of the material loading post have top ring and bottom ring, one of them top inboard rotation of top ring and bottom ring is connected with second ejector pin and bottom rod respectively.

Preferably, the top of second ejector pin and first ejector pin is all fixed mounting has first gear, the outside meshing of first gear is connected with first ring gear, the outside of first ring gear is connected with the inside wall rotation of material column and top ring respectively, the top fixed mounting of second ejector pin has first motor.

Preferably, the bottom rod and the bottom end of the extrusion screw are fixedly provided with a second gear, the outer side of the second gear is meshed with a second toothed ring, the outer side of the second toothed ring is respectively and rotatably connected with the feeding column and the inner side wall of the bottom ring, and the top end of the bottom rod is fixedly provided with a second motor.

Preferably, the bottom inner wall fixed mounting of furnace body has the main motor, the output of main motor and the bottom fixed connection of crucible, the outside of crucible is rotated with the inside wall of heating ring and is connected, the bottom of furnace body and the bottom swing joint of bell, the top sliding connection of a stove section of thick bamboo has the pull head.

Preferably, a switch panel is installed on the outer side of the single crystal furnace body, an electric telescopic rod switch, a first motor switch, a second motor switch and a main motor switch are fixedly installed on the surface of the switch panel respectively, and the electric telescopic rod, the first motor, the second motor and the main motor are electrically connected with an external power supply through the electric telescopic rod switch, the first motor switch, the second motor switch and the main motor switch respectively.

The utility model has the beneficial effects that:

1. The raw materials required by the single crystal furnace body can be added into the single crystal furnace body through the feeding column, the raw materials at the top position of the vacuum seat can slide back and forth in the outer cover and the top position of the heating column through the vacuum seat, when the raw materials at the top position of the vacuum seat enter the inside of the feeding column, the feeding position of the feeding column and the storage position of the extrusion screw rod are separated through the action of the vacuum seat, the vacuum seat is enabled to separate the feeding column through the rotation action of the arranged extraction rotating rod in the inside of the vacuum seat, the air contained in the raw materials at the bottom position of the feeding column is extracted outwards, and meanwhile the raw materials are accelerated to enter the crucible through the heating ring for heating transition through the action of the extrusion screw rod for feeding treatment, so that the feeding convenience of the whole single crystal furnace is improved.

2. The transition swivel through setting up rotates along with one of them conical gear to can make its inboard axis of rotation rotate equally, when the vacuum seat removes to heating column top position and separates, the axis of rotation just can insert the inside of transition bull stick, thereby drive the transition bull stick through the axis of rotation and rotate, when the vacuum seat removes to the dustcoat inside, the axis of rotation breaks away from with the transition bull stick, thereby makes the inside extraction bull stick of vacuum seat stop rotating, has improved the convenience of integral charging operation then.

Drawings

The utility model will be described in further detail with reference to the drawings and the detailed description.

FIG. 1 is a schematic diagram of the overall structure of the present utility model;

FIG. 2 is a schematic diagram of the internal structure of the furnace body of the utility model;

FIG. 3 is a schematic view of the structure of an extrusion pipe according to the present utility model;

FIG. 4 is a schematic view of the internal structure of the feed column of the present utility model;

FIG. 5 is a schematic view of the internal structure of the vacuum seat of the present utility model;

In the figure: 1. a single crystal furnace body; 2. a furnace body; 3. a furnace cover; 4. a crucible; 5. a heating ring; 6. a furnace cylinder; 7. a pull head; 8. a material adding column; 81. a first ejector rod; 82. a transition swivel; 83. a second bevel gear; 9. extruding a pipe; 10. an outer cover; 11. an electric telescopic rod; 12. a vacuum seat; 121. extracting a rotating rod; 122. a transition rotating rod; 123. a first bevel gear; 124. a rotating shaft; 13. extruding a screw; 14. a top ring; 141. a second ejector rod; 142. a first gear; 143. a second toothed ring; 144. a first motor; 15. a bottom ring; 151. a bottom bar; 152. a second gear; 153. a second toothed ring; 154. a second motor; 16. and a main motor.

Detailed Description

The technical solutions of the embodiments of the present utility model will be clearly and completely described below in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

As shown in fig. 1-4, the single crystal furnace comprises a single crystal furnace body 1, the single crystal furnace body 1 comprises a furnace body 2, a furnace cover 3, a crucible 4, a heating ring 5, a furnace barrel 6 and a lifting head 7, a feeding column 8 is fixedly installed around the outer side of the furnace body 2, one sides of the bottom ends of the four feeding columns 8 are communicated with an extrusion pipeline 9, the outer side of the tail end of the extrusion pipeline 9 is rotationally connected with the outer side of the crucible 4, the outer side of the extrusion pipeline 9 is alternately connected with the inner side wall of the furnace body 2, an outer cover 10 is installed on the outer side of the top end of the feeding column 8, an electric telescopic rod 11 is fixedly installed on the inner side wall of the outer cover 10, a vacuum seat 12 is fixedly installed on the telescopic end of the electric telescopic rod 11, the outer side of the vacuum seat 12 is respectively in sliding connection with the inner side of the top end of the feeding column 8 and the inner side wall of the outer cover 10, and the inner side of the bottom end of the feeding column 8 is rotationally connected with an extrusion screw 13.

In this embodiment, when in use, the raw material inside the crucible 4 is heated by the heating ring 5, the crucible 4 rotates in the furnace body 2, the furnace cover 3 seals the top of the furnace body 2, after the raw material inside the crucible 4 melts, the raw material inside the crucible 4 can be inserted into the melted raw material through the lifting head 7 inside the furnace barrel 6, the crystal monocrystal on the lifting head 7 forms a single crystal rod through upward movement of the lifting head 7, when the raw material is required to be added into the crucible 4 inside the furnace body 2, the granular raw material is fed into the feeding column 8, after the raw material inside the feeding column 8 is fed into the feeding column 8, the raw material can be moved upward through the extrusion pipeline 9 and fed into the bottom end of the crucible 4 for feeding by the action of gravity and the like of the raw material, and when the raw material flows along with the extrusion pipeline 9, the extrusion pipe 9 is contacted with the outer side of the heating ring 5, so that the raw materials in the extrusion pipe 9 can be heated and transited through the action of the heating ring 5, the influence of the raw materials in the extrusion pipe 9 on the high-temperature raw materials in the extrusion pipe is reduced, the raw materials in the crucible 4 can be added, the vacuum seat 12 can slide back and forth at the inner side positions of the top ends of the outer cover 10 and the feeding column 8 through the action of the electric telescopic rod 11, the top ends of the feeding column 8 and the inner side of the bottom ends of the feeding column 8 are separated through the action of the vacuum seat 12, the influence of air in the raw materials entering the inner part of the feeding column 8 is reduced, the raw materials at the top ends of the feeding column 8 can be accelerated to move inwards through the extrusion screw 13 in the inner part of the feeding column 8 when the extraction of the raw materials at the bottom of the vacuum seat 12 is completed, thereby carry out the input to furnace body 2 inside and crucible 4 through the extrusion pipeline 9 of the position of feeding post 8 bottom, improved the reinforced convenience of whole single crystal growing furnace body 1 in succession.

Example 2

As shown in fig. 1 to 5, based on the same concept as that of the above embodiment 1, this embodiment also proposes that the inside of the vacuum seat 12 is rotatably connected with an extraction rotating rod 121 and a transition rotating rod 122, respectively, the top end of the extraction rotating rod 121 and one end of the transition rotating rod 122 are fixedly mounted with a first conical gear 123, the other end of the transition rotating rod 122 is slidably connected with a rotating shaft 124, the inside of the top end of the feeding column 8 is rotatably connected with a first ejector rod 81 and a transition rotating ring 82, respectively, the other ends of the bottom end of the first ejector rod 81 and the transition rotating ring 82 are fixedly mounted with a second conical gear 83, one end of one second conical gear 83 is fixedly connected with the other end of the rotating shaft 124, the top end and the outside of the bottom end of the feeding column 8 are fixedly mounted with a top ring 14 and a bottom ring 15, respectively, the inside of the top end of one top ring 14 and the bottom ring 15 is rotatably connected with a second ejector rod 141 and a bottom rod 151, the top ends of the second ejector rod 141 and the first ejector rod 81 are fixedly provided with a first gear 142, the outer side of the first gear 142 is meshed with a first toothed ring 143, the outer side of the first toothed ring 143 is respectively and rotatably connected with the inner side walls of the feeding column 8 and the ejector ring 14, the top end of the second ejector rod 141 is fixedly provided with a first motor 144, the bottom ends of the bottom rod 151 and the extrusion screw 13 are fixedly provided with a second gear 152, the outer side of the second gear 152 is meshed with a second toothed ring 153, the outer side of the second toothed ring 153 is respectively and rotatably connected with the inner side walls of the feeding column 8 and the bottom ring 15, the top end of the bottom rod 151 is fixedly provided with a second motor 154, the inner wall of the bottom end of the furnace body 2 is fixedly provided with a main motor 16, the output end of the main motor 16 is fixedly connected with the bottom end of the crucible 4, the outer side of the crucible 4 is rotatably connected with the inner side wall of the heating ring 5, the bottom end of the furnace body 2 is movably connected with the bottom end of the furnace cover 3, the top end of the furnace cylinder 6 is slidably connected with the lifting head 7, the switch panel is installed in the outside of furnace body 2, and the surface of switch panel is fixed mounting respectively and is had electric telescopic handle switch, first motor switch, second motor switch and main motor switch, and electric telescopic handle 11, first motor 144, second motor 154 and main motor 16 are through having electric telescopic handle switch, first motor switch, second motor switch and main motor switch and external power supply electric connection respectively.

In this embodiment, when the vacuum seat 12 moves to the top end of the feeding column 8 to separate the feeding column 8, the transition rotating rod 122 drives the extraction rotating rod 121 to rotate under the action of the first bevel gear 123 while rotating inside the vacuum seat 12, so that air at the bottom end position of the vacuum seat 12 can be extracted through the opening on the vacuum seat 12 and discharged to the opening on the top end of the vacuum seat 12, the vacuum seat 12 can slide relative to the rotating shaft 124 installed on the feeding column 8 while sliding, the first ejector rod 81 on the feeding column 8 rotates, the transition rotating ring 82 can be driven to synchronously rotate inside the feeding column 8 under the action of the second bevel gear 83, the rotating shaft 124 can rotate inside the feeding column 8 while rotating on the transition rotating ring 82 under the action of the second bevel gear 83, when the vacuum seat 12 separates the feeding column 8, the rotating shaft 124 is inserted into the vacuum seat 12 through the outer side of the vacuum seat 12 and connected with the transition rotating rod 122 in the vacuum seat 12, so that the transition rotating rod 122 contacted with the vacuum seat can be driven to synchronously rotate through the rotation of the rotating shaft 124, when the first ejector rod 81 is required to rotate, the second ejector rod 141 can be driven to rotate on the ejector ring 14 through the first motor 144, the first ejector rod 81 can rotate in the feeding column 8 through the action of the first gear 142 and the first toothed ring 143, and when the raw materials are required to be guided in the feeding column 8 by the extrusion screw 13, the bottom rod 151 can be driven to rotate on the bottom ring 15 through the second motor 154, and the extrusion screw 13 can rotate in the feeding column 8 through the action of the second toothed ring 153 and the second gear 152.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

Claims (8)

1. The utility model provides a single crystal growing furnace with automatic material conveying function, its characterized in that, including single crystal growing furnace body (1), single crystal growing furnace body (1) includes furnace body (2), bell (3), crucible (4), heating ring (5), stove section of thick bamboo (6), pull head (7), the outside of furnace body (2) is fixed mounting all around has material adding post (8), four the bottom one side intercommunication of material adding post (8) has extrusion pipe (9), the outside of the end of extrusion pipe (9) rotates with the outside of crucible (4) to be connected, the outside of extrusion pipe (9) alternates with the inside wall of furnace body (2) to be connected, dustcoat (10) are installed in the top outside of material adding post (8), the inside wall fixed mounting of dustcoat (10) has electric telescopic handle (11), the telescopic end fixed mounting of electric telescopic handle (11) has vacuum seat (12), the outside of vacuum seat (12) respectively with the inside top of material adding post (8) and the inside wall sliding connection of dustcoat (10), the inside rotation of the bottom of material adding post (8) is connected with extrusion screw rod (13).

2. The single crystal furnace with the automatic feeding function according to claim 1, wherein an extraction rotating rod (121) and a transition rotating rod (122) are respectively connected in a rotating manner in the vacuum seat (12), a first bevel gear (123) is fixedly installed at the top end of the extraction rotating rod (121) and one end of the transition rotating rod (122), and a rotating shaft (124) is slidably connected at the other end of the transition rotating rod (122).

3. The single crystal furnace with the automatic feeding function according to claim 2, wherein a first ejector rod (81) and a transition swivel (82) are respectively connected to the inner side of the top end of the feeding column (8) in a rotating mode, a second bevel gear (83) is fixedly arranged at the bottom end of the first ejector rod (81) and the other end of the transition swivel (82), and one end of one second bevel gear (83) is fixedly connected with the other end of the rotating shaft (124).

4. The single crystal furnace with the automatic feeding function according to claim 1, wherein a top ring (14) and a bottom ring (15) are fixedly arranged at the outer sides of the top end and the bottom end of the feeding column (8), and a second ejector rod (141) and a bottom rod (151) are respectively and rotatably connected to the inner sides of the top of one of the top ring (14) and the bottom ring (15).

5. The single crystal furnace with automatic feeding function according to claim 4, wherein the top ends of the second ejector rod (141) and the first ejector rod (81) are fixedly provided with a first gear (142), the outer side of the first gear (142) is in meshing connection with a first toothed ring (143), the outer side of the first toothed ring (143) is respectively in rotational connection with the inner side walls of the feeding column (8) and the ejector ring (14), and the top end of the second ejector rod (141) is fixedly provided with a first motor (144).

6. The single crystal furnace with the automatic feeding function according to claim 5, wherein the bottom ends of the bottom rod (151) and the extrusion screw (13) are fixedly provided with a second gear (152), the outer side of the second gear (152) is meshed with a second toothed ring (153), the outer side of the second toothed ring (153) is respectively connected with the feeding column (8) and the inner side wall of the bottom ring (15) in a rotating mode, and the top end of the bottom rod (151) is fixedly provided with a second motor (154).

7. The single crystal furnace with the automatic feeding function according to claim 6, wherein a main motor (16) is fixedly arranged on the inner wall of the bottom end of the furnace body (2), the output end of the main motor (16) is fixedly connected with the bottom end of the crucible (4), the outer side of the crucible (4) is rotationally connected with the inner side wall of the heating ring (5), the bottom end of the furnace body (2) is movably connected with the bottom end of the furnace cover (3), and the top end of the furnace cylinder (6) is slidably connected with a pull head (7).

8. The single crystal furnace with the automatic feeding function according to claim 7, wherein a switch panel is installed on the outer side of the furnace body (2), an electric telescopic rod switch, a first motor switch, a second motor switch and a main motor switch are fixedly installed on the surface of the switch panel respectively, and the electric telescopic rod (11), the first motor (144), the second motor (154) and the main motor (16) are electrically connected with an external power supply through the electric telescopic rod switch, the first motor switch, the second motor switch and the main motor switch respectively.