CN106400105A - External feeding device - Google Patents
External feeding device Download PDFInfo
- Publication number
- CN106400105A CN106400105A CN201611020224.4A CN201611020224A CN106400105A CN 106400105 A CN106400105 A CN 106400105A CN 201611020224 A CN201611020224 A CN 201611020224A CN 106400105 A CN106400105 A CN 106400105A
- Authority
- CN
- China
- Prior art keywords
- feeding barrel
- corrugated tube
- frame
- plate valve
- rotating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/002—Continuous growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to the technical field of czochralski silicon single crystal furnace equipment, in particular to an external feeding device. The external feeding device comprises a rack, a feeding barrel arranged on the rack and a rotary plate valve which is fixed at the lower end of the rack and used for connecting a single crystal furnace, wherein the feeding barrel is fixedly connected to the upper end of the rack; a base is glidingly arranged between the rotary plate valve and the feeding barrel on the rack; a connecting plate is arranged on the base; a retractable first corrugated pipe is arranged between the connecting plate and the rotary plate valve; a second corrugated pipe is arranged between the feeding barrel and the connecting plate; the first corrugated pipe and the second corrugated pipe communicate with each other; a quartz tube is sleeved with the first corrugated pipe, and one end of the quartz tube is fixedly connected onto the connecting plate; guide rails are fixedly connected between the rotary plate valve and the feeding barrel on the rack. The external feeding device is simple in structure and convenient to operate, can rapidly control the quartz tube to extend or retract, feeds the single crystal furnace repeatedly, and improves the feeding efficiency.
Description
Technical field
The present invention relates to Czochralski silicon single crystal furnace equipment technical field, especially relate to a kind of external charging device.
Background technology
In monocrystal silicon straight pull method growth course, polysilicon raw materials are put into and are carried out melt, crystal pulling in silica crucible.Single crystal growing furnace
After the completion of crystal pulling, not so single crystal growing furnace can not can cause single crystal growing furnace fragmentation cannot use with air contact, prepare the life of a new stove
Produce and need to do much numerous and diverse previous work, including operations such as blowing out cooling, prepurging, discharging, evacuation and materials, these early stages
Work wastes substantial amounts of time and energy consumption.Single crystal growing furnace is after the completion of a silicon single crystal draws, it is possible to use external connection feeds intake
Device, continues to put into polysilicon chip, to draw many crystal bars.
Common external connection charging device volume ratio is larger, install more time-consuming it is impossible to effectively repeatedly shift
And feed intake, reduce the efficiency that feeds intake.
Content of the invention
The technical problem to be solved in the present invention is：Larger in order to solve common external connection charging device volume ratio, peace
Fill more time-consuming it is impossible to effectively repeatedly shifting and feed intake, reduce the problem of the efficiency that feeds intake, now provide a kind of external
Charging device.
The technical solution adopted for the present invention to solve the technical problems is：A kind of external charging device, including frame and set
Put the feeding barrel in frame, also include the pressuring rotating plate valve for connecting single crystal growing furnace being fixed on frame lower end, described feeding barrel is solid
Surely it is connected to described frame upper end, described frame being located at slides between described pressuring rotating plate valve and described feeding barrel is provided with pedestal,
Described pedestal is provided with connecting plate, is provided with contractile first corrugated tube, described throwing between described connecting plate and described pressuring rotating plate valve
Be provided with the second corrugated tube connecting with feeding barrel between charging basket and described connecting plate, described first corrugated tube and the second corrugated tube it
Between be interconnected, described feeding barrel has upper end charging aperture and lower end discharging opening, and described feeding barrel upper end charging aperture is provided with close
Capping, is interconnected between described feeding barrel lower end charging aperture and the second corrugated tube, is arranged with quartz in described first corrugated tube
Pipe, one end of described quartz ampoule is fixedly connected on described connecting plate；
It is located in described frame and is fixedly connected with guide rail between described pressuring rotating plate valve and feeding tube, described frame is located at described
Between pressuring rotating plate valve and feeding tube rotate be provided with screw mandrel, described pedestal is slidably arranged on described guide rail, described pedestal with described
Threads of lead screw connects, and one end of described screw mandrel is provided with the motor rotating for drive screw, and described motor is fixedly connected on described
In frame.Pedestal can be controlled to slide on guide rail by adjusting screw mandrel, thus controlling the quartz ampoule that connecting plate is fixedly connected on
Stretch out pressuring rotating plate valve or be contracted in the first corrugated tube, realize the material in barrel being shipped in single crystal growing furnace, due to single crystal growing furnace
It is inside negative pressure state, so first fixing pressuring rotating plate valve and single crystal growing furnace, now pressuring rotating plate valve is in closed mode, quartz ampoule is to receive
In the first corrugated tube, feeding barrel is sealed up by the closure on feeding barrel for contracting, and to feeding barrel inside and the first corrugated tube
With carry out evacuation in the second corrugated tube simultaneously, when the pressure in feeding barrel is identical with the pressure in single crystal growing furnace, now open
Pressuring rotating plate valve, motor drives leading screw to rotate makes pedestal move to pressuring rotating plate valve direction, and drives quartz ampoule to stretch out and enter into single crystal growing furnace
Interior it is possible to feed intake to single crystal growing furnace, realize repeatedly feed intake.
Further, described feeding barrel lower end discharging opening is provided with for controlling what feeding barrel connected with the second corrugated tube to insert
Plate valve.The number that feeding barrel feeds intake when feeding intake can be controlled by push-pull valve and adjustment feeds intake feeding intake in the unit interval
Amount, facilitates operated by personnel.
Further, described feeding barrel arranges head pressure gauge.Feeding barrel can quickly and easily be understood by pressure gauge
Interior pressure condition, facilitates operated by personnel.
The invention has the beneficial effects as follows：The external charging device of the present invention, when using, can control base by adjusting screw mandrel
Seat slides on guide rail, thus controlling the quartz ampoule that connecting plate is fixedly connected on to stretch out pressuring rotating plate valve or be contracted in the first corrugated tube
Interior, realize the material in barrel is shipped in single crystal growing furnace, due to being negative pressure state in single crystal growing furnace, thus first by pressuring rotating plate valve with
Single crystal growing furnace is fixed, and now pressuring rotating plate valve is in closed mode, and quartz ampoule is contracted in the first corrugated tube, close on feeding barrel
Feeding barrel is sealed up by capping, and carries out evacuation in feeding barrel inside and the first corrugated tube and the second corrugated tube simultaneously, when
When pressure in feeding barrel is identical with the pressure in single crystal growing furnace, now open pressuring rotating plate valve, motor drive leading screw rotate make pedestal to
Pressuring rotating plate valve direction is moved, and drives quartz ampoule to stretch out and enter in single crystal growing furnace it is possible to feed intake to single crystal growing furnace, realizes anti-
Composite feeding-material, present configuration is simple, easy to operate, is capable of stretching out or shrinking, repeatedly to single crystal growing furnace of quick control quartz ampoule
Fed intake, improve the efficiency feeding intake.
Brief description
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the front view of the external charging device of the present invention；
Fig. 2 is the structural representation of pedestal, guide rail and the screw mandrel of the external charging device of the present invention.
In figure：1st, frame, 2, feeding barrel, 3, single crystal growing furnace, 4, pressuring rotating plate valve, 5, pedestal, 6, connecting plate, the 7, first corrugated tube,
8th, the second corrugated tube, 9, closure, 10, quartz ampoule, 11, guide rail, 12, screw mandrel, 13, push-pull valve, 14, pressure gauge, 15, motor.
Specific embodiment
Presently in connection with accompanying drawing, the present invention will be further described in detail.These accompanying drawings are the schematic diagram of simplification, only with
Illustration illustrates the basic structure of the present invention, and therefore it only shows the composition relevant with the present invention.
Embodiment
As illustrated in fig. 1 and 2, a kind of external charging device, including frame 1 and be arranged on feeding barrel 2 in frame 1, also wraps
Include the pressuring rotating plate valve 4 for connecting single crystal growing furnace 3 being fixed on frame 1 lower end, described feeding barrel 2 is fixedly connected in described frame 1
End, described frame 1 being located at slides between described pressuring rotating plate valve 4 and described feeding barrel 2 is provided with pedestal 5, and described pedestal 5 is provided with
Connecting plate 6, is provided with contractile first corrugated tube 7 between described connecting plate 6 and described pressuring rotating plate valve 4, described feeding barrel 2 with described
It is provided with the second corrugated tube 8 connecting with feeding barrel 2, phase between described first corrugated tube 7 and the second corrugated tube 8 between connecting plate 6
Intercommunicated, described feeding barrel 2 has upper end charging aperture and lower end discharging opening, and described feeding barrel 2 upper end charging aperture is provided with sealing
Lid 9, is interconnected between described feeding barrel 2 lower end charging aperture and the second corrugated tube 8, is arranged with stone in described first corrugated tube 7
English pipe 10, one end of described quartz ampoule 10 is fixedly connected on described connecting plate 6；
It is located in described frame 1 and between described pressuring rotating plate valve 4 and feeding barrel 2, is fixedly connected with guide rail 11, described frame 1 is upper
Rotate between described pressuring rotating plate valve 4 and feeding barrel 2 and be provided with screw mandrel 12, described pedestal 5 is slidably arranged on described guide rail 11, institute
State pedestal 5 to threaded with described screw mandrel 12, one end of described screw mandrel 12 is provided with the motor 15 rotating for drive screw 12, institute
State motor 15 to be fixedly connected in described frame 1.
Push-pull valve 13 for controlling feeding barrel 2 to be connected with the second corrugated tube 8 is provided with described feeding barrel 2.
Head pressure gauge 14 is arranged on described feeding barrel 2.
When using, when not using, quartz ampoule 10 is contracted in the first corrugated tube 7 above-mentioned external charging device,
First the pressuring rotating plate valve 4 of frame 1 lower end is fixedly connected on single crystal growing furnace 3, and pressuring rotating plate valve 4 is also in closed mode, feeds intake
Push-pull valve 13 on bucket 2 is also in closed mode, and now material will not enter in the second corrugated tube 8 in feeding barrel 2, rotation
Plate valve 4 is to be tightly connected with single crystal growing furnace 3 by flange, and the closure 9 on feeding barrel 2 covers, to feeding barrel 2 and the first corrugated tube
7 and second carry out evacuation in corrugated tube 8, observe pressure gauge 14, when pressure reaches the pressure in single crystal growing furnace 3, stop taking out true
Sky, first opens pressuring rotating plate valve 4, and motor 15 is accessed by external power source, and the keying by peripheral control unit controlled motor 15, starts electricity
Machine 15 drives screw mandrel 12 to rotate, so that pedestal 5 slides on guide rail 11 and moves to pressuring rotating plate valve 4 direction, band is dynamically connected simultaneously
The first corrugated tube 7 on plate 6 shrinks and the second corrugated tube 8 extends, and the quartz ampoule 10 in the first corrugated tube 7 extends and is inserted into list
In brilliant stove 3, now open push-pull valve 13, control charging within the unit interval for the material in feeding barrel 2 to expect；When having fed intake
Bi Shi, is first shut off push-pull valve 13, starts motor 15 and drives screw mandrel 12 to rotate, band moving base 5 slides simultaneously on guide rail 11 simultaneously
Move to feeding barrel 2 direction, now the first corrugated tube 7 on connecting plate 6 extends and the second corrugated tube 8 shrinks, quartz ampoule 10 takes off
From single crystal growing furnace 3 and be contracted in the first corrugated tube 7, close pressuring rotating plate valve 4, frame 1 is removed.
The above-mentioned desirable embodiment according to the present invention is enlightenment, and by above-mentioned description, relevant staff is complete
Various change and modification can be carried out in the range of without departing from this invention technological thought.This invention technical
The content that scope is not limited in description it is necessary to determine its technical scope according to right.
Claims (3)
1. a kind of external charging device, including frame (1) and be arranged on feeding barrel (2) in frame (1) it is characterised in that：Also
Including the pressuring rotating plate valve (4) for connecting single crystal growing furnace (3) being fixed on frame (1) lower end, described feeding barrel (2) is fixedly connected on institute
State frame (1) upper end, described frame (1) is upper to be provided with pedestal positioned at sliding between described pressuring rotating plate valve (4) and described feeding barrel (2)
(5), described pedestal (5) is provided with connecting plate (6), is provided with contractile between described connecting plate (6) and described pressuring rotating plate valve (4)
One corrugated tube (7), is provided with, between described feeding barrel (2) and described connecting plate (6), the second corrugated tube connecting with feeding barrel (2)
(8), it is interconnected between described first corrugated tube (7) and the second corrugated tube (8), described feeding barrel (2) has upper end charging aperture
And lower end discharging opening, described feeding barrel (2) upper end charging aperture is provided with closure (9), described feeding barrel (2) lower end charging aperture and
Second corrugated tube is interconnected between (8), is arranged with quartz ampoule (10), described quartz ampoule (10) in described first corrugated tube (7)
One end be fixedly connected on described connecting plate (6)；
Upper being located at of described frame (1) is fixedly connected with guide rail (11), described frame between described pressuring rotating plate valve (4) and feeding barrel (2)
(1) above it is located to rotate between described pressuring rotating plate valve (4) and feeding barrel (2) and is provided with screw mandrel (12), described pedestal (5) is slidably arranged in
On described guide rail (11), described pedestal (5) is threadeded with described screw mandrel (12), and one end of described screw mandrel (12) is provided with for driving
The motor (15) that dynamic screw mandrel (12) rotates, described motor (15) is fixedly connected in described frame (1).
2. external charging device according to claim 1 it is characterised in that：The discharging opening setting of described feeding barrel (2) lower end
There is the push-pull valve (13) for controlling feeding barrel (2) to connect with the second corrugated tube (8).
3. the external charging device according to any one of claim 1-2 it is characterised in that：Set on described feeding barrel (2)
Put a pressure gauge (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611020224.4A CN106400105A (en) | 2016-11-17 | 2016-11-17 | External feeding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611020224.4A CN106400105A (en) | 2016-11-17 | 2016-11-17 | External feeding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106400105A true CN106400105A (en) | 2017-02-15 |
Family
ID=58068635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611020224.4A Pending CN106400105A (en) | 2016-11-17 | 2016-11-17 | External feeding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106400105A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306513A (en) * | 2017-07-27 | 2019-02-05 | 隆基绿能科技股份有限公司 | Material delivery system and crystal growth system |
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
-
2016
- 2016-11-17 CN CN201611020224.4A patent/CN106400105A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109306513A (en) * | 2017-07-27 | 2019-02-05 | 隆基绿能科技股份有限公司 | Material delivery system and crystal growth system |
| CN109306513B (en) * | 2017-07-27 | 2021-06-08 | 隆基绿能科技股份有限公司 | Material feeding device and crystal growth system |
| CN109440184A (en) * | 2018-12-19 | 2019-03-08 | 浙江晶盛机电股份有限公司 | A kind of single crystal growing furnace continuous dosing conveying mechanism |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
| CN115369477B (en) * | 2022-09-26 | 2023-02-21 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170215 |
|
| WD01 | Invention patent application deemed withdrawn after publication |