CN210122597U - Feeding device - Google Patents
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- CN210122597U CN210122597U CN201920807641.6U CN201920807641U CN210122597U CN 210122597 U CN210122597 U CN 210122597U CN 201920807641 U CN201920807641 U CN 201920807641U CN 210122597 U CN210122597 U CN 210122597U
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Abstract
The utility model discloses a feeding device relates to silicon material processing technology field, and the main objective provides one kind can prevent that the raw materials from colliding the feeding device of graphite draft tube when reinforced. The utility model discloses a main technical scheme does: a charging device, comprising: the loading part is provided with a feeding hole and a discharging hole at two ends; the closing part, first closed door sets up at the discharge gate, and rotate and connect in the loading portion, the second is closed the door and is set up at the discharge gate, and rotate and connect in the loading portion, the mounting is connected in the control lever, the one end of first connecting part rotates and connects in first closed door, the other end rotates and connects in the mounting, the one end of second connecting part rotates and connects in the second closed door, the other end rotates and connects in the mounting, control lever sliding connection is in the loading portion, a direction that is used for driving the mechanism that opens and shuts orientation or keeps away from the discharge gate removes, make first closed door and second closed door open or seal the discharge gate. The utility model discloses mainly used silicon material processing.
Description
Technical Field
The utility model relates to a silicon material processing technology field especially relates to a feeding device.
Background
In the production of single crystal silicon, which is a semiconductor material generally used in the manufacture of integrated circuits and other electronic components, polycrystalline silicon is placed in a quartz crucible, subjected to a high temperature to melt, and then a seed crystal is lowered from the top into the molten polycrystalline silicon, and the molten seed crystal is recrystallized from the periphery by controlling the temperature of the liquid surface to produce an aligned single crystal silicon rod.
The existing feeding device generally comprises a barrel, an adjusting rod and a switch door, wherein the adjusting rod is arranged in the barrel, the switch door is arranged on one side of the barrel and is connected with the adjusting rod, raw materials are placed in the barrel, when the feeding is needed, the adjusting rod is moved towards the direction of the switch door to open the switch door, so that the feeding is completed, however, as the adjusting rod is arranged in the barrel and the switch door is of a trapezoidal structure, the material block in the barrel is limited by the position of the adjusting rod, and after the switch door is opened, the raw materials can slide towards the inside of the single crystal furnace along the slope of the switch door, so that the raw materials and a graphite guide cylinder in the single crystal furnace collide with each other, graphite slag falls into a solution, the carbon content in the silicon rod is higher, the quality of the silicon rod is reduced, the adjusting rod is replaced by a connecting rope by another existing feeder, the switch door sets to two shutoff doors, through connecting opening or closing of two shutoff doors of rope control, however, because it is flexible material to connect the rope, leads to opening size asynchronous of two shutoff doors, causes the unloading inhomogeneous to the operation can lead to connecting the rope extension under high temperature environment for a long time, still can lead to connecting the rope fracture when serious, thereby causes the charging means to damage.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the utility model provides a feeding device, the main objective provides a feeding device that can prevent raw materials collision graphite draft tube when reinforced.
In order to achieve the above object, the utility model mainly provides the following technical scheme:
a charging device, comprising:
the loading part is used for loading raw materials, and two ends of the loading part are provided with a feeding hole and a discharging hole;
the sealing part comprises a control rod, an opening and closing mechanism, a first sealing door and a second sealing door, the first sealing door is arranged at the discharge port and is rotatably connected to the loading part, the second sealing door is arranged at the discharge port and is rotatably connected to the loading part, the opening and closing mechanism comprises a fixing part, a first connecting part and a second connecting part, the fixing part is connected to the control rod, one end of the first connecting part is rotatably connected to the first sealing door, the other end of the first connecting part is rotatably connected to the fixing part, one end of the second connecting part is rotatably connected to the second sealing door, the other end of the second connecting part is rotatably connected to the fixing part, the control rod is arranged at the outer side of the loading part and is slidably connected to the loading part and used for driving the opening and closing mechanism to move towards or away from the direction of the discharge port, so that the first closing door and the second closing door open or close the discharge hole.
Further, first connecting part includes head rod and first connecting gear, the one end of head rod connect in first connecting gear, the other end rotate connect in first closed door, second connecting part includes second connecting rod and second connecting gear, the one end of second connecting rod connect in the second connecting gear, the other end rotate connect in the second closed door, first connecting gear with second connecting gear intermeshing.
Further, the loading portion is including loading the barrel and solid fixed ring, gu fixed ring sets up the outside of loading the barrel, feed inlet and discharge gate set up respectively the both ends of barrel, control lever sliding connection in gu fixed ring.
Furthermore, the control rod comprises a first control rod and a second control rod, the opening and closing mechanism comprises a first opening and closing mechanism and a second opening and closing mechanism, the first control rod and the second control rod are arranged on two sides of the barrel respectively, one end of the first opening and closing mechanism is connected to the first control rod, the other end of the first opening and closing mechanism is connected to the first closing door and the second closing door in a rotating mode, one end of the second opening and closing mechanism is connected to the second control rod, and the other end of the second opening and closing mechanism is connected to the first closing door and the second closing door in a rotating mode.
Further, a fixing part is arranged on the fixing ring and used for controlling the moving position of the control rod.
Further, the driving mechanism is arranged at the top of the single crystal furnace, and the driving mechanism is respectively connected to the first control rod and the second control rod and is used for controlling the first control rod and the second control rod to move along the axial direction of the cylinder.
Furthermore, the control rod further comprises a connecting rod, one side of the connecting rod is respectively connected to the first control rod and the second control rod, and the other side of the connecting rod is connected to the driving mechanism and used for controlling the first control rod and the second control rod to move along the axial direction of the cylinder.
Compared with the prior art, the utility model discloses following technological effect has:
in the technical scheme provided by the embodiment of the utility model, the loading part is used for loading raw materials, and the two ends of the loading part are provided with a feeding hole and a discharging hole; the closing part is used for controlling the opening or closing of the first closing door and the second closing door, the closing part comprises a control rod, an opening and closing mechanism, the first closing door and the second closing door, the first closing door is arranged at the discharge port and is rotatably connected to the loading part, the second closing door is arranged at the discharge port and is rotatably connected to the loading part, the opening and closing mechanism comprises a fixing part, a first connecting part and a second connecting part, the fixing part is connected to the control rod, one end of the first connecting part is rotatably connected to the first closing door, the other end of the first connecting part is rotatably connected to the fixing part, one end of the second connecting part is rotatably connected to the second closing door, the other end of the second connecting part is rotatably connected to the fixing part, the control rod is arranged at the outer side of the loading part and is slidably connected to the loading part and is used for driving the opening and closing mechanism to move towards the direction, compared with the prior art, the adjusting rod is arranged in the barrel, the switch door is arranged on one side of the barrel and is connected with the adjusting rod, raw materials are placed in the barrel, when the raw materials need to be fed, the adjusting rod is moved towards the direction of the switch door, the switch door is opened, and feeding is finished, however, as the adjusting rod is arranged in the barrel and the switch door is of a trapezoidal structure, the material block in the barrel is limited by the position of the adjusting rod, and after the switch door is opened, the raw materials can slide towards the single crystal furnace along the slope of the switch door, so that the raw materials and a graphite guide cylinder in the single crystal furnace collide with each other, graphite slag falls into a solution, the carbon content in the silicon rod is higher, the quality of the silicon rod is reduced, the adjusting rod is replaced by another existing feeder, the switch door is provided with two plugging doors, and the opening or closing of the two plugging doors is controlled by the connecting, however, because the connection rope is flexible material to the operation can lead to connecting the rope extension under high temperature environment for a long time, still can lead to connecting the rope fracture when serious, thereby cause the charging means to damage, the embodiment of the utility model provides an, through setting up the control lever in the outside of loading portion, increase the size of throwing the material, and, drive the direction removal of mechanism orientation discharge gate that opens and shuts through the control lever, make first adapting unit and second adapting unit rotate around the center of mounting simultaneously, not only can prevent that the raw materials from colliding the graphite draft tube, can also make first closed door and second closed door open simultaneously, reach the even technological effect of unloading.
Drawings
Fig. 1 is a schematic structural diagram of a feeding device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an opening and closing mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a use state of a feeding device according to an embodiment of the present invention;
fig. 4 is a left side view structural schematic diagram of a feeding device provided by the embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
As shown in fig. 1 to 4, a charging device includes:
a loading part 1, wherein the loading part 1 is used for loading raw materials, and both ends of the loading part 1 are provided with a feed inlet 111 and a discharge outlet 112;
a sealing part which comprises a control rod 21, an opening and closing mechanism 22, a first sealing door 23 and a second sealing door 24, wherein the first sealing door 23 is arranged at the discharge hole 112, and rotatably coupled to the loading portion 1, the second closing door 24 is disposed at the discharge port 112 and rotatably coupled to the loading portion 1, the opening and closing mechanism 22 includes a fixing member 221, a first coupling member 222, and a second coupling member 223, the fixing member 221 is coupled to the control lever 21, one end of the first coupling member 222 is rotatably coupled to the first closing door 23, the other end is rotatably coupled to the fixing member 221, one end of the second coupling member 223 is rotatably coupled to the second closing door 24, the other end is rotatably coupled to the fixing member 221, the control lever 21 is disposed at an outer side of the loading portion 1, and is slidably connected to the loading portion 1, and is configured to drive the opening and closing mechanism 22 to move towards or away from the discharge port 112, so that the first closing door 23 and the second closing door 24 open or close the discharge port 112.
In the technical scheme provided by the embodiment of the utility model, the loading part 1 is used for loading raw materials, and the two ends of the loading part 1 are provided with a feeding hole 111 and a discharging hole 112; the closing part is used for controlling the opening or closing of the first closing door 23 and the second closing door 24, the closing part comprises a control rod 21, an opening and closing mechanism 22, the first closing door 23 and the second closing door 24, the first closing door 23 is arranged at the discharge port 112 and is rotatably connected to the loading part 1, the second closing door 24 is arranged at the discharge port 112 and is rotatably connected to the loading part 1, the opening and closing mechanism 22 comprises a fixing part 221, a first connecting part 222 and a second connecting part 223, the fixing part 221 is connected to the control rod 21, one end of the first connecting part 222 is rotatably connected to the first closing door 23, the other end of the first connecting part is rotatably connected to the fixing part 221, one end of the second connecting part 223 is rotatably connected to the second closing door 24, the other end of the second connecting part is rotatably connected to the fixing part 221, the control rod 21 is arranged at the outer side of the loading part 1 and is slidably connected to the loading part 1 for driving, compared with the prior art, the first closing door 23 and the second closing door 24 open or close the discharge hole 112, the adjusting rod is arranged in the barrel 11, the opening and closing door is arranged at one side of the barrel 11 and is connected with the adjusting rod, the raw material is placed in the barrel 11, when the material needs to be fed, the adjusting rod moves towards the direction of the opening and closing door to open the opening and closing door, so that the feeding is completed, however, as the adjusting rod is arranged in the barrel 11 and the opening and closing door is in a trapezoidal structure, the material block in the barrel 11 is limited by the position of the adjusting rod, and after the opening and closing door is opened, the raw material can slide towards the single crystal furnace along the slope of the opening and closing door, so that the raw material and a graphite guide cylinder in the single crystal furnace collide with each other, graphite slag falls into a molten body, so that the carbon content in the silicon rod is higher, the quality of the silicon rod is reduced, two shutoff doors are set to the switch door, through opening or closing of connecting two shutoff doors of rope control, however, because it is flexible material to connect the rope, and the operation can lead to connecting the rope extension under high temperature environment for a long time, still can lead to connecting the rope fracture when serious, thereby cause the charging means to damage, in the embodiment of the utility model, through setting up the control lever 21 in the outside of loading portion 1, increase the size of throwing the material, and, drive the direction removal of mechanism 22 towards discharge gate 112 that opens and shuts through control lever 21, make first adapting unit 222 and second adapting unit 223 rotate around the center of mounting 221 simultaneously, thereby make first closed door 23 and second closed door 24 open simultaneously, reach the even technological effect of unloading.
The loading part 1 is used for loading raw materials, the loading part 1 is used for loading the raw materials, two ends of the loading part 1 are provided with a feeding hole 111 and a discharging hole 112, the loading part 1 comprises a barrel body 11 and a fixing ring 12, the barrel body 11 is used for loading the raw materials, one end of the barrel body 11 is provided with the feeding hole 111, the other end of the barrel body 11 is provided with the discharging hole 112, and the fixing ring 12 is arranged on the outer wall of the barrel body 11 and is used for limiting the moving position of the control rod 21; the closing part is used for controlling the opening or closing of the first closing door 23 and the second closing door 24, the closing part comprises a control rod 21, an opening and closing mechanism 22, the first closing door 23 and the second closing door 24, the first closing door 23 is arranged at the discharge port 112 and is rotatably connected to the barrel 11, the second closing door 24 is arranged at the discharge port 112 and is rotatably connected to the barrel 11, the opening and closing mechanism 22 comprises a fixing part 221, a first connecting part 222 and a second connecting part 223, the fixing part 221 is connected to the control rod 21, one end of the first connecting part 222 is rotatably connected to the first closing door 23, the other end of the first connecting part is rotatably connected to the fixing part 221, one end of the second connecting part 223 is rotatably connected to the second closing door 24, the other end of the second connecting part is rotatably connected to the fixing part 221, the control rod 21 is arranged at the outer side of the loading part 1 and is slidably connected to the loading part 1 for, the first closing door 23 and the second closing door 24 open or close the discharge port 112, the control rod 21 is slidably connected to the fixing ring 12 and can move towards or away from the discharge port 112, when the control rod 21 moves towards the discharge port 112, the first connecting part 222 and the second connecting part 223 of the opening and closing mechanism 22 rotate around the center of the fixing part 221, one end of the first connecting part 222 and one end of the second connecting part 223 are separated from each other, the first closing door 23 rotates around the connecting position of the cylinder 11 and the first closing door 23, the second closing door 24 rotates around the connecting position of the cylinder 11 and the second closing door 24, so that the discharge port 112 is opened, and as the connections among the control rod 21, the opening and closing mechanism 22, the first closing door 23 and the second closing door 24 are all rigid structures, the size of the discharge port 112 can be effectively controlled by the moving position of the control rod 21, and then the speed of control unloading, the embodiment of the utility model provides an in, through setting up the control lever 21 in the outside of loading portion 1, increase the size of throwing the material to, drive the direction removal of mechanism 22 towards discharge gate 112 that opens and shuts through control lever 21, make first connecting part 222 and second connecting part 223 rotate around the center of mounting 221 simultaneously, thereby make first door 23 and second door 24 of closing open simultaneously, reach the technological effect of even unloading.
Further, the first connection part 222 includes a first connection rod and a first connection gear, one end of the first connection rod is connected to the first connection gear, the other end of the first connection rod is rotatably connected to the first closing door 23, the second connection part 223 includes a second connection rod and a second connection gear, one end of the second connection rod is connected to the second connection gear, the other end of the second connection rod is rotatably connected to the second closing door 24, and the first connection gear and the second connection gear are engaged with each other. In this embodiment, the opening and closing mechanism 22 is further defined, the first connecting part 222 includes a first connecting rod and a first connecting gear, the second connecting part 223 includes a second connecting rod and a second connecting gear, the first connecting gear and the second connecting gear are disposed in the fixing part 221, and the first connecting gear and the second connecting gear are engaged with each other, and at the same time, the first connecting gear and the second connecting gear can rotate around their central axes, one end of the first connecting rod is connected to the first connecting gear, and the other end is rotatably connected to the first closing door 23, when the control rod 21 moves towards the direction of the discharge hole 112, the first connecting gear and the second connecting gear rotate around their axes, so that the other end of the first connecting rod and the other end of the second connecting rod are separated from each other, the first closing door 23 rotates around the connecting position of the cylinder 11 and the first closing door 23, the second closing door 24 rotates around the connecting position of the cylinder 11 and the second closing door 24, therefore, the discharge port 112 is opened, the raw material in the barrel 11 is discharged through the discharge port 112, and as the first closing door 23 and the second closing door 24 are connected to the barrel 11, when the discharge port 112 is opened by the first closing door 23 and the second closing door 24, the first closing door 23 moves towards the direction far away from the second closing door 24, so that the raw material drops from the position between the first closing door 23 and the second closing door 24, and the technical effect of preventing the raw material from colliding with the graphite guide cylinder in the feeding process is achieved.
Further, as shown in fig. 4, the control rod 21 includes a first control rod 211 and a second control rod 212, the opening and closing mechanism 22 includes a first opening and closing mechanism 224 and a second opening and closing mechanism 225, the first control rod 211 and the second control rod 212 are respectively disposed at two sides of the barrel 11, one end of the first opening and closing mechanism 224 is connected to the first control rod 211, the other end is respectively rotatably connected to the first closing door 23 and the second closing door 24, one end of the second opening and closing mechanism 225 is connected to the second control rod 212, and the other end is respectively rotatably connected to the first closing door 23 and the second closing door 24. In this embodiment, the control rod 21 and the opening and closing mechanism 22 are further defined, because one end of the first closing door 23 and one end of the second closing door 24 are rotatably connected to the barrel 11, and the other end of the first closing door 23 and the other end of the second closing door 24 are located at the middle position of the discharge port 112, and are required to bear the weight of the raw material in the barrel 11, in order to improve the support performance of the first closing door 23 and the second closing door 24, a first control rod 211 and a second control rod 212 are respectively arranged at two sides of the barrel 11, one end of the first opening and closing mechanism 224 is connected to the first control rod 211, the other end is connected to the first closing door 23 and the second closing door 24, one end of the second opening and closing mechanism 225 is connected to the second control rod 212, the other end is connected to the first closing door 23 and the second closing door 24, when the discharge port 112 needs to be opened, the first control rod 211 and the second control rod 212 are simultaneously moved towards the direction of the discharge port 112, so that the first closing door 23 and the second closing, thereby achieving the technical effect of improving the supportability of the first closing door 23 and the second closing door 24.
Further, a fixing part is added, which is provided on the fixing ring 12 for controlling the moving position of the control lever 21. In this embodiment, a fixing component is added, the fixing component is used for limiting the moving position of the control rod 21, before feeding, raw materials need to be poured into the barrel 11, at this time, the first closing door 23 and the second closing door 24 are in a closed state, therefore, the fixing component fixes the control rod 21, when feeding is needed, the fixing component is opened, the control rod 21 moves towards the direction of the discharge port 112, so that the first closing door 23 and the second closing door 24 are opened, of course, the fixing component can also adjust the sliding speed of the control rod 21 in the fixing ring 12, so as to achieve the technical effect of controlling the opening size of the discharge port 112; optionally, the fixed part can adopt remote control equipment to control the fixed part to reach the technological effect of conveniently adjusting the position of control lever 21, optionally, set up the screw thread seat in the fixed part, set up the external screw thread on control lever 21, external screw thread and screw thread seat interconnect, the rotation through the screw thread seat drives the direction removal of control lever 21 orientation or keeping away from discharge gate 112, thereby reach the technological effect of conveniently adjusting the shift position of control lever 21.
Further, as shown in fig. 4, a driving mechanism 3 is added, the driving mechanism 3 is disposed at the top of the single crystal furnace, and the driving mechanism 3 is connected to the first control rod 211 and the second control rod 212, respectively, for controlling the first control rod 211 and the second control rod 212 to move along the axial direction of the cylinder 11. In this embodiment, the driving mechanism 3 is added, the driving mechanism 3 is used for driving the first control rod 211 and the second control rod 212 to move, and the driving mechanism 3 is affected due to the higher temperature in the single crystal furnace, therefore, the driving mechanism 3 is arranged at the top of the single crystal furnace, the first control rod 211 and the second control rod 212 are simultaneously connected to the driving mechanism 3, and the driving mechanism 3 drives the first control rod 211 and the second control rod 212 to move towards or away from the discharge hole 112, so that the service life of the feeding device is prolonged.
Further, as shown in fig. 4, the control rod 21 further includes a connecting rod 4, one side of the connecting rod 4 is connected to the first control rod 211 and the second control rod 212, and the other side is connected to the driving mechanism 3, for controlling the first control rod 211 and the second control rod 212 to move along the axial direction of the cylinder 11. In this embodiment, the control rod 21 is further defined, the connecting rod 4 is used for connecting the control rod 21 and the driving mechanism 3, and the purpose is to facilitate the driving mechanism 3 to control the movement of the first control rod 211 and the second control rod 212 at the same time, because the first closing door 23 and the second closing door 24 need to be opened at the same time to keep the blanking uniform, therefore, the first control rod 211 and the second control rod 212 are connected through the connecting rod 4, the driving mechanism 3 is connected to the connecting rod 4, when the driving mechanism 3 drives the connecting rod 4 to move towards the direction of the discharge port 112, the first control rod 211 and the second control rod 212 move at the same time, so that the first closing door 23 and the second closing door 24 are opened at the same time, and the technical effect of uniform blanking is further achieved.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. A charging device, comprising:
the loading part is used for loading raw materials, and two ends of the loading part are provided with a feeding hole and a discharging hole;
the sealing part comprises a control rod, an opening and closing mechanism, a first sealing door and a second sealing door, the first sealing door is arranged at the discharge port and is rotatably connected to the loading part, the second sealing door is arranged at the discharge port and is rotatably connected to the loading part, the opening and closing mechanism comprises a fixing part, a first connecting part and a second connecting part, the fixing part is connected to the control rod, one end of the first connecting part is rotatably connected to the first sealing door, the other end of the first connecting part is rotatably connected to the fixing part, one end of the second connecting part is rotatably connected to the second sealing door, the other end of the second connecting part is rotatably connected to the fixing part, the control rod is arranged at the outer side of the loading part and is slidably connected to the loading part and used for driving the opening and closing mechanism to move towards or away from the direction of the discharge port, so that the first closing door and the second closing door open or close the discharge hole.
2. The charging device according to claim 1,
first adapting unit includes head rod and first connecting gear, the one end of head rod connect in first connecting gear, the other end rotate connect in first closed door, second adapting unit includes second connecting rod and second connecting gear, the one end of second connecting rod connect in second connecting gear, the other end rotate connect in the second closed door, first connecting gear with second connecting gear intermeshing.
3. The charging device according to claim 1 or 2,
the loading portion is including loading the barrel and solid fixed ring, gu fixed ring sets up the outside of loading the barrel, feed inlet and discharge gate set up respectively the both ends of barrel, control lever sliding connection in gu fixed ring.
4. The charging device according to claim 3,
the control rod comprises a first control rod and a second control rod, the opening and closing mechanism comprises a first opening and closing mechanism and a second opening and closing mechanism, the first control rod and the second control rod are arranged on two sides of the barrel respectively, one end of the first opening and closing mechanism is connected to the first control rod, the other end of the first opening and closing mechanism is connected to the first sealing door and the second sealing door in a rotating mode, one end of the second opening and closing mechanism is connected to the second control rod, and the other end of the second opening and closing mechanism is connected to the first sealing door and the second sealing door in a rotating mode.
5. The charging device according to claim 3, characterized by further comprising:
and the fixing part is arranged on the fixing ring and used for controlling the moving position of the control rod.
6. The charging device according to claim 4, characterized by further comprising:
the driving mechanism is arranged at the top of the single crystal furnace, and the driving mechanism is respectively connected to the first control rod and the second control rod and is used for controlling the first control rod and the second control rod to move along the axial direction of the cylinder.
7. The charging device according to claim 6,
the control rod further comprises a connecting rod, one side of the connecting rod is connected to the first control rod and the second control rod respectively, and the other side of the connecting rod is connected to the driving mechanism and used for controlling the first control rod and the second control rod to move along the axial direction of the barrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920807641.6U CN210122597U (en) | 2019-05-31 | 2019-05-31 | Feeding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920807641.6U CN210122597U (en) | 2019-05-31 | 2019-05-31 | Feeding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210122597U true CN210122597U (en) | 2020-03-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920807641.6U Active CN210122597U (en) | 2019-05-31 | 2019-05-31 | Feeding device |
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| Country | Link |
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| CN (1) | CN210122597U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114686978A (en) * | 2022-03-24 | 2022-07-01 | 徐州鑫晶半导体科技有限公司 | Feeding assembly, single crystal growing device with same and feeding method |
-
2019
- 2019-05-31 CN CN201920807641.6U patent/CN210122597U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114686978A (en) * | 2022-03-24 | 2022-07-01 | 徐州鑫晶半导体科技有限公司 | Feeding assembly, single crystal growing device with same and feeding method |
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