CN206188918U - External material device of throwing - Google Patents
External material device of throwing Download PDFInfo
- Publication number
- CN206188918U CN206188918U CN201621240806.9U CN201621240806U CN206188918U CN 206188918 U CN206188918 U CN 206188918U CN 201621240806 U CN201621240806 U CN 201621240806U CN 206188918 U CN206188918 U CN 206188918U
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- bellows
- frame
- feeding barrel
- plate valve
- connecting plate
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Abstract
The utility model belongs to the technical field of vertical pulling silicon single crystal stove equipment technique and specifically relates to an external material device of throwing is related to, including frame and the charging barrel of setting in the frame, still including fixing the plate valve that revolves that is used for connecting the single crystal growing furnace at the frame lower extreme, charging barrel fixed connection is in the frame upper end, it slides between plate valve and the charging barrel to lie in in the frame soon is provided with the base, be equipped with the connecting plate on the base, the connecting plate and revolve the plate valve between be equipped with collapsible first bellows, be equipped with the second bellows between charging barrel and the connecting plate, communicate each other between first bellows and the second bellows, first bellows endotheca is equipped with the quartz capsule, the one end fixed connection of quartz capsule is on the connecting plate, lie in in the frame and revolve fixedly connected with guide rail between plate valve and the feeding barrel, the utility model discloses simple structure, convenient operation, the material is thrown to the single crystal growing furnace repeatedly to can the aplit -second control quartz capsule stretch out or contract, has improved the efficiency of throwing the material.
Description
Technical field
The utility model is related to Czochralski silicon single crystal furnace equipment technical field, more particularly, to a kind of external charging device.
Background technology
In monocrystal silicon straight pull method growth course, polysilicon raw materials carry out melt, crystal pulling in being put into silica crucible.Single crystal growing furnace
After the completion of crystal pulling, not so single crystal growing furnace can not can cause single crystal growing furnace fragmentation and cannot use with air contact, prepare the life of a new stove
Producing needs to do many numerous and diverse previous works, including blowing out cooling, prepurging, discharging, vacuumize with material etc. operation, these early stages
Work wastes substantial amounts of time and energy consumption.Single crystal growing furnace is after the completion of a silicon single crystal draws, it is possible to use external connection feeds intake
Device, continues to put into polysilicon chip, to draw many crystal bars.
Common external connection charging device volume ratio is larger, installs more time-consuming, it is impossible to effectively shift repeatedly
And feed intake, reduce the efficiency that feeds intake.
Utility model content
The technical problems to be solved in the utility model is：In order to solve common external connection charging device volume ratio compared with
Greatly, install more time-consuming, it is impossible to effectively shift repeatedly and feed intake, the problem of the efficiency that feeds intake is reduced, now there is provided one
Plant external charging device.
The utility model solves the technical scheme that its technical problem used：A kind of external charging device, including frame
And it is arranged on the feeding barrel in frame, it is described to feed intake also including being fixed on the pressuring rotating plate valve for connecting single crystal growing furnace of frame lower end
Bucket is fixedly connected on the frame upper end, slip between the pressuring rotating plate valve and the feeding barrel is located in the frame and is provided with base
Seat, the pedestal is provided with connecting plate, contractile first bellows is provided between the connecting plate and the pressuring rotating plate valve, described
The second bellows connected with feeding barrel, first bellows and the second bellows are provided between feeding barrel and the connecting plate
Between be interconnected, the feeding barrel has upper end charging aperture and lower end discharging opening, and feeding barrel upper end charging aperture is provided with
Closure, is interconnected between feeding barrel lower end charging aperture and the second bellows, and stone is arranged with first bellows
Ying Guan, one end of the quartz ampoule is fixedly connected on the connecting plate；
It is located in the frame and guide rail is fixedly connected between the pressuring rotating plate valve and feeding tube, is located in the frame described
Between pressuring rotating plate valve and feeding tube rotate be provided with screw mandrel, the pedestal is slidably arranged on the guide rail, the pedestal with it is described
Threads of lead screw is connected, and one end of the screw mandrel is provided with the motor rotated for drive screw, and the motor is fixedly connected on described
In frame.Pedestal can be controlled to be slided on guide rail by adjusting screw mandrel, so as to control the quartz ampoule that connecting plate is fixedly connected on
Stretch out pressuring rotating plate valve or be contracted in the first bellows, be shipped to the material in barrel in single crystal growing furnace by realization, due to single crystal growing furnace
It is inside negative pressure state, so first fixing pressuring rotating plate valve and single crystal growing furnace, now pressuring rotating plate valve is to be closed, quartz ampoule is to receive
In the first bellows, the closure on feeding barrel seals up feeding barrel for contracting, and to feeding barrel inside and the first bellows
Vacuumized simultaneously with the second bellows, when the pressure in feeding barrel is identical with the pressure in single crystal growing furnace, now opened
Pressuring rotating plate valve, motor drives leading screw to rotate makes pedestal be moved to pressuring rotating plate valve direction, and drives quartz ampoule to stretch out and enter into single crystal growing furnace
Interior, it is possible to which that single crystal growing furnace is fed intake, realization feeds intake repeatedly.
Further, feeding barrel lower end discharging opening is provided with for inserting of controlling feeding barrel to be connected with the second bellows
Plate valve.Number that feeding barrel feeds intake when feeding intake and adjustment can be controlled to feed intake feeding intake in the unit interval by push-pull valve
Amount, facilitates staff to operate.
Further, head pressure gauge is set on the feeding barrel.Feeding barrel can quickly and easily be understood by pressure gauge
Interior pressure condition, facilitates staff to operate.
The beneficial effects of the utility model are：The external charging device of the utility model when in use, can by adjusting screw mandrel
To control pedestal to be slided on guide rail, so that the quartz ampoule for controlling connecting plate to be fixedly connected on stretches out pressuring rotating plate valve or is contracted in
In one bellows, be shipped to the material in barrel in single crystal growing furnace by realization, due to being negative pressure state in single crystal growing furnace, so first will
Pressuring rotating plate valve is fixed with single crystal growing furnace, and now pressuring rotating plate valve is to be closed, and quartz ampoule is contracted in the first bellows, is fed intake
Closure on bucket seals up feeding barrel, and to being taken out in feeding barrel inside and the first bellows and the second bellows simultaneously
Vacuum, when the pressure in feeding barrel is identical with the pressure in single crystal growing furnace, now opens pressuring rotating plate valve, and motor drives leading screw to rotate to be made
Pedestal is moved to pressuring rotating plate valve direction, and drives quartz ampoule to stretch out and enter into single crystal growing furnace, it is possible to which single crystal growing furnace is fed intake,
Realization feeds intake repeatedly, and the utility model simple structure is easy to operate, can quickly control stretching out or shrinking for quartz ampoule, instead
It is multiple that single crystal growing furnace is fed intake, improve the efficiency for feeding intake.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the front view of the external charging device of the utility model；
Fig. 2 is the structural representation of pedestal, guide rail and the screw mandrel of the external charging device of the utility model.
In figure：1st, frame, 2, feeding barrel, 3, single crystal growing furnace, 4, pressuring rotating plate valve, 5, pedestal, 6, connecting plate, the 7, first bellows,
8th, the second bellows, 9, closure, 10, quartz ampoule, 11, guide rail, 12, screw mandrel, 13, push-pull valve, 14, pressure gauge, 15, motor.
Specific embodiment
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are simplified schematic diagram,
Basic structure of the present utility model is only illustrated in a schematic way, therefore it only shows the composition relevant with the utility model.
Embodiment
As illustrated in fig. 1 and 2, a kind of external charging device, including frame 1 and the feeding barrel 2 being arranged in frame 1, also wrap
The pressuring rotating plate valve 4 for connecting single crystal growing furnace 3 for being fixed on the lower end of frame 1 is included, the feeding barrel 2 is fixedly connected in the frame 1
End, is located at slip between the pressuring rotating plate valve 4 and the feeding barrel 2 and is provided with pedestal 5 in the frame 1, the pedestal 5 is provided with
Connecting plate 6, is provided with contractile first bellows 7 between the connecting plate 6 and the pressuring rotating plate valve 4, the feeding barrel 2 with it is described
The second bellows 8 connected with feeding barrel 2, phase between the bellows 8 of first bellows 7 and second are provided between connecting plate 6
Intercommunicated, the feeding barrel 2 has upper end charging aperture and lower end discharging opening, and the upper end charging aperture of the feeding barrel 2 is provided with sealing
Lid 9, is interconnected between the lower end charging aperture of the feeding barrel 2 and the second bellows 8, and stone is arranged with first bellows 7
English pipe 10, one end of the quartz ampoule 10 is fixedly connected on the connecting plate 6；
It is located in the frame 1 and guide rail 11 is fixedly connected between the pressuring rotating plate valve 4 and feeding barrel 2, the frame 1 is upper
Rotated between the pressuring rotating plate valve 4 and feeding barrel 2 and be provided with screw mandrel 12, the pedestal 5 is slidably arranged on the guide rail 11, institute
State pedestal 5 to be threadedly coupled with the screw mandrel 12, one end of the screw mandrel 12 is provided with the motor 15 rotated for drive screw 12, institute
Motor 15 is stated to be fixedly connected in the frame 1.
The push-pull valve 13 for controlling feeding barrel 2 to be connected with the second bellows 8 is provided with the feeding barrel 2.
Head pressure gauge 14 is set on the feeding barrel 2.
When in use, when unused, quartz ampoule 10 is contracted in the first bellows 7 above-mentioned external charging device,
The pressuring rotating plate valve 4 of the lower end of frame 1 is fixedly connected on single crystal growing furnace 3 first, and pressuring rotating plate valve 4 is also in closed mode, feeds intake
Push-pull valve 13 on bucket 2 is also in closed mode, and now material will not be entered into the second bellows 8 from feeding barrel 2, revolved
Plate valve 4 is tightly connected with single crystal growing furnace 3 by flange, and the closure 9 on feeding barrel 2 is covered, to the bellows of feeding barrel 2 and first
7 and second are vacuumized in bellows 8, observe pressure gauge 14, and when the pressure in pressure reaches single crystal growing furnace 3, stopping is taken out true
Sky, first opens pressuring rotating plate valve 4, and motor 15 is accessed by external power source, and by the keying of peripheral control unit controlled motor 15, starts electricity
Machine 15 drives screw mandrel 12 to rotate, so that pedestal 5 is slided on guide rail 11 and moved to the direction of pressuring rotating plate valve 4, while driving connection
The first bellows 7 on plate 6 shrinks and the second bellows 8 extends, and the quartz ampoule 10 in the first bellows 7 extends and is inserted into list
In brilliant stove 3, push-pull valve 13 is now opened, charging material of the material in control feeding barrel 2 within the unit interval；When having fed intake
Bi Shi, is first shut off push-pull valve 13, starts motor 15 and drives screw mandrel 12 to rotate, while band moving base 5 is slided simultaneously on guide rail 11
Moved to the direction of feeding barrel 2, now the first bellows 7 on connecting plate 6 extends and the second bellows 8 shrinks, quartz ampoule 10 takes off
From single crystal growing furnace 3 and it is contracted in the first bellows 7, closes pressuring rotating plate valve 4, frame 1 is removed.
Above-mentioned is enlightenment according to desirable embodiment of the present utility model, by above-mentioned description, relevant staff
Various changes and amendments can be carried out in the range of without departing from this utility model technological thought completely.This practicality
New technical scope is not limited to the content on specification, it is necessary to determine its according to right technical
Scope.
Claims (3)
1. a kind of external charging device, including frame (1) and the feeding barrel (2) being arranged in frame (1), it is characterised in that：Also
The pressuring rotating plate valve (4) for connecting single crystal growing furnace (3) including being fixed on frame (1) lower end, the feeding barrel (2) is fixedly connected on institute
Frame (1) upper end is stated, slip between the pressuring rotating plate valve (4) and the feeding barrel (2) is located on the frame (1) and is provided with pedestal
(5), the pedestal (5) is provided with connecting plate (6), and contractile is provided between the connecting plate (6) and the pressuring rotating plate valve (4)
One bellows (7), is provided with the second bellows connected with feeding barrel (2) between the feeding barrel (2) and the connecting plate (6)
(8), it is interconnected between first bellows (7) and the second bellows (8), the feeding barrel (2) is with upper end charging aperture
And lower end discharging opening, feeding barrel (2) upper end charging aperture is provided with closure (9), feeding barrel (2) the lower end charging aperture and
It is interconnected between second bellows (8), quartz ampoule (10), the quartz ampoule (10) is arranged with first bellows (7)
One end be fixedly connected on the connecting plate (6)；
It is located on the frame (1) and guide rail (11), the frame is fixedly connected between the pressuring rotating plate valve (4) and feeding barrel (2)
(1) it is located to be rotated between the pressuring rotating plate valve (4) and feeding barrel (2) on and is provided with screw mandrel (12), the pedestal (5) is slidably arranged in
On the guide rail (11), the pedestal (5) is threadedly coupled with the screw mandrel (12), and one end of the screw mandrel (12) is provided with for driving
The motor (15) that dynamic screw mandrel (12) is rotated, the motor (15) is fixedly connected in the frame (1).
2. external charging device according to claim 1, it is characterised in that：Feeding barrel (2) lower end discharging opening is set
There is the push-pull valve (13) for controlling feeding barrel (2) to be connected with the second bellows (8).
3. the external charging device described in any one according to claim 1-2, it is characterised in that：Set on the feeding barrel (2)
Put a pressure gauge (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621240806.9U CN206188918U (en) | 2016-11-17 | 2016-11-17 | External material device of throwing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621240806.9U CN206188918U (en) | 2016-11-17 | 2016-11-17 | External material device of throwing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206188918U true CN206188918U (en) | 2017-05-24 |
Family
ID=58726081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621240806.9U Active CN206188918U (en) | 2016-11-17 | 2016-11-17 | External material device of throwing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206188918U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108515188A (en) * | 2018-05-21 | 2018-09-11 | 宁德市星宇科技有限公司 | A kind of hydrogen breaks the feeding mechanism of equipment |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
-
2016
- 2016-11-17 CN CN201621240806.9U patent/CN206188918U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108515188A (en) * | 2018-05-21 | 2018-09-11 | 宁德市星宇科技有限公司 | A kind of hydrogen breaks the feeding mechanism of equipment |
| CN115369477A (en) * | 2022-09-26 | 2022-11-22 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
| CN115369477B (en) * | 2022-09-26 | 2023-02-21 | 浙江求是半导体设备有限公司 | Crystal growth furnace repeated feeding device |
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