CN102618919B - Charging device for single crystal furnace - Google Patents
Charging device for single crystal furnace Download PDFInfo
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- CN102618919B CN102618919B CN201210065031.6A CN201210065031A CN102618919B CN 102618919 B CN102618919 B CN 102618919B CN 201210065031 A CN201210065031 A CN 201210065031A CN 102618919 B CN102618919 B CN 102618919B
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- connecting cylinder
- guide rail
- outer tube
- interior pipe
- strut member
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Abstract
The invention discloses a charging device for a single crystal furnace. The charging device comprises a vacuum pump, a charger, a charging connecting cylinder, a hopper, an inner tube, an inner tube support piece, an outer tube, an outer tube support, a rotating motor and a linear movement guide rail; the upper part of the charger is connected with the vacuum pump through a vacuum tube; upper and lower ends of the charging connecting cylinder are respectively provided with a vacuum seal connecting flange; the upper end of the charging connecting cylinder is connected with the charger through the vacuum seal connecting flange; the rotating motor is arranged on the upper side of the charging connecting cylinder and coaxially drives the linear movement guide rail; the upper end of the hopper is fixed on the inner side of the upper part of the charging connecting cylinder; and the lower end of the hopper is connected with the inner tube. The charging device has the advantages that: under the control of the rotating motor and the linear movement guide rail, the charging is accurate and convenient, and the charging device charges quartz crucibles of single crystal furnaces in different models and sizes, and avoids energy waste.
Description
Technical field
The present invention relates to a kind of feeding device for single crystal furnace, especially relate to a kind of feeding device for single crystal furnace reinforced to single crystal growing furnace quartz crucible.
Background technology
Nowadays, most single crystal growing furnace all adopts the disposable method fed intake to quartz crucible, and many times quartz crucible all fails to fill it up with, and the heat energy that single crystal growing furnace need of production is a lot, this causes a lot of energy dissipation undoubtedly.And single crystal growing furnace majority is produced by czochralski crystal growing furnace, in process of production, after normally producing a stove, after temperature cooling Deng single crystal growing furnace, be suitable for people when operating, then carry out charging work, so not only waste the time, and the thermal field system of single crystal growing furnace will cool heating repeatedly, have a strong impact on the work-ing life of thermal field system, considerably increased the cost of monocrystalline silicon production enterprise.
Summary of the invention
The present invention mainly solves the technical problem existing for above-mentioned prior art, provide a kind of more convenient, accurately to the feeding device for single crystal furnace that single crystal growing furnace is reinforced.
Above-mentioned technical problem of the present invention is mainly solved by following technical proposals:
A kind of feeding device for single crystal furnace, comprise vacuum pump, feeder, reinforced connecting cylinder, funnel, interior pipe, interior pipe strut member, outer tube, outer tube supports, rotary electric machine and Linear-moving guide rail, described feeder top is connected with vacuum pump by valve tube, the reinforced upper and lower two ends of connecting cylinder are respectively provided with a vacuum-sealing joint flange, reinforced connecting cylinder upper end is connected with feeder by vacuum-sealing joint flange, rotary electric machine to be located on the upside of reinforced connecting cylinder and with Linear-moving guide rail coaxial drive, reinforced connecting cylinder upper inner is fixed in funnel upper end, funnel lower end is connected with interior pipe, reinforced connecting cylinder upper inner is fixed in interior pipe strut member one end, the interior pipe strut member the other end is fixed on interior pipe upper outside, outer tube strut member one end is connected with Linear-moving guide rail, the other end is fixed on outer tube upper outside, outside described outer tube socket and interior pipe.Screw thread is provided with outside described Linear-moving guide rail.Internal thread is provided with inside one end that described outer tube strut member is connected with Linear-moving guide rail.Described outer tube strut member and Linear-moving guide rail are spirally connected.
Beneficial effect of the present invention is: by the control of rotary electric machine and Linear-moving guide rail, makes reinforced more accurate, convenient, for the single crystal growing furnace quartz crucible of different model, size feeds in raw material, avoids energy dissipation.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present invention;
Fig. 2 is that the present invention feeds in raw material the structural representation of connecting cylinder.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, the technical scheme of invention is described in further detail.
Embodiment 1
As shown in Figure 1, a kind of feeding device for single crystal furnace, comprise vacuum pump 1, feeder 2, reinforced connecting cylinder 3, funnel 4, interior pipe 5, interior pipe strut member 6, outer tube 7, outer tube strut member 8, rotary electric machine 9 and Linear-moving guide rail 10, described feeder 2 top is connected with vacuum pump 1 by valve tube, reinforced connecting cylinder about 3 two ends are respectively provided with a vacuum-sealing flange, reinforced connecting cylinder 3 upper end is connected with feeder 2 by vacuum-sealing flange 11, rotary electric machine 9 to be located on the upside of reinforced connecting cylinder 3 and with Linear-moving guide rail 10 coaxial drive, reinforced connecting cylinder 3 upper inner is fixed in funnel 4 upper end, funnel 4 lower end is connected with interior pipe 5, reinforced connecting cylinder 3 upper inner is fixed in interior pipe strut member 6 one end, interior pipe strut member 6 the other end is fixed on interior pipe 5 upper outside, outer tube strut member 8 one end is connected with Linear-moving guide rail 10, the other end is fixed on outer tube 7 upper outside, described outer tube 7 be socketed with interior pipe 5 outside, screw thread is provided with outside described Linear-moving guide rail 10, internal thread is provided with inside one end that described outer tube strut member 8 is connected with Linear-moving guide rail 10, described outer tube strut member 8 is spirally connected with Linear-moving guide rail 10, reinforced connecting cylinder 3 lower end is provided with vacuum-sealing flange 12.By Linear-moving guide rail 10, outer tube 7 is stretched in furnace chamber, carry out feeding operation.
Claims (1)
1. a feeding device for single crystal furnace, it is characterized in that: comprise vacuum pump, feeder, reinforced connecting cylinder, funnel, interior pipe, interior pipe strut member, outer tube, outer tube strut member, rotary electric machine and Linear-moving guide rail, described feeder top is connected with vacuum pump by valve tube, the reinforced upper and lower two ends of connecting cylinder are respectively provided with a vacuum-sealing joint flange, reinforced connecting cylinder upper end is connected with feeder by vacuum-sealing joint flange, rotary electric machine to be located on the upside of reinforced connecting cylinder and with Linear-moving guide rail coaxial drive, reinforced connecting cylinder upper inner is fixed in funnel upper end, funnel lower end is connected with interior pipe, reinforced connecting cylinder upper inner is fixed in interior pipe strut member one end, the interior pipe strut member the other end is fixed on interior pipe upper outside, outer tube strut member one end is connected with Linear-moving guide rail, the other end is fixed on outer tube upper outside, outside described outer tube socket and interior pipe, be provided with screw thread outside described Linear-moving guide rail, be provided with internal thread inside one end that described outer tube strut member is connected with Linear-moving guide rail, described outer tube strut member and Linear-moving guide rail are spirally connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065031.6A CN102618919B (en) | 2012-03-13 | 2012-03-13 | Charging device for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065031.6A CN102618919B (en) | 2012-03-13 | 2012-03-13 | Charging device for single crystal furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102618919A CN102618919A (en) | 2012-08-01 |
| CN102618919B true CN102618919B (en) | 2015-05-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210065031.6A Active CN102618919B (en) | 2012-03-13 | 2012-03-13 | Charging device for single crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN102618919B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103849927A (en) * | 2012-11-30 | 2014-06-11 | 有研半导体材料股份有限公司 | Doping device and doping method using vertical pulling method to grow low resistivity single crystal silicon |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN103603056B (en) * | 2013-11-06 | 2016-04-13 | 江苏华盛天龙光电设备股份有限公司 | A kind of electric precision controls the outside feeder of crystal growing furnace |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05148072A (en) * | 1991-11-29 | 1993-06-15 | Nippon Steel Corp | Removal of polycrystalline material attached to crucible inner wall and equipment therefor |
| CN1153230A (en) * | 1995-10-31 | 1997-07-02 | Memc电子材料有限公司 | Solid material delivery system for furnace |
| CN201386144Y (en) * | 2009-04-03 | 2010-01-20 | 常州有则科技有限公司 | Doping hopper of single crystal furnace |
| CN202017072U (en) * | 2010-11-29 | 2011-10-26 | 镇江环太硅科技有限公司 | Secondary charging device for single crystal furnace |
| JP2011241127A (en) * | 2010-05-20 | 2011-12-01 | Ihi Corp | Method and device for preventing clogging of gallium feeding tube of gallium nitride crystal production device |
| CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
| CN202530195U (en) * | 2012-03-13 | 2012-11-14 | 杭州奔博科技有限公司 | Feeding device for single crystal furnace |
-
2012
- 2012-03-13 CN CN201210065031.6A patent/CN102618919B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05148072A (en) * | 1991-11-29 | 1993-06-15 | Nippon Steel Corp | Removal of polycrystalline material attached to crucible inner wall and equipment therefor |
| CN1153230A (en) * | 1995-10-31 | 1997-07-02 | Memc电子材料有限公司 | Solid material delivery system for furnace |
| CN201386144Y (en) * | 2009-04-03 | 2010-01-20 | 常州有则科技有限公司 | Doping hopper of single crystal furnace |
| JP2011241127A (en) * | 2010-05-20 | 2011-12-01 | Ihi Corp | Method and device for preventing clogging of gallium feeding tube of gallium nitride crystal production device |
| CN202017072U (en) * | 2010-11-29 | 2011-10-26 | 镇江环太硅科技有限公司 | Secondary charging device for single crystal furnace |
| CN102312285A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | External continuous feeding mechanism for monocrystal furnace |
| CN202530195U (en) * | 2012-03-13 | 2012-11-14 | 杭州奔博科技有限公司 | Feeding device for single crystal furnace |
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| Publication number | Publication date |
|---|---|
| CN102618919A (en) | 2012-08-01 |
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Effective date of registration: 20200102 Address after: 311106 Building 5, No. 530 Xingguo Road, Qianjiang Economic Development Zone, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou Boliya Precision Machinery Co.,Ltd. Address before: 311106, No. 16, No. 536, Shun Feng Road, Qianjiang Economic Development Zone, Zhejiang, Hangzhou Patentee before: Hangzhou BenBo Technology Co., Ltd. |