CN113048967B - 物理量检测装置的制造方法 - Google Patents
物理量检测装置的制造方法 Download PDFInfo
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- CN113048967B CN113048967B CN202110318966.XA CN202110318966A CN113048967B CN 113048967 B CN113048967 B CN 113048967B CN 202110318966 A CN202110318966 A CN 202110318966A CN 113048967 B CN113048967 B CN 113048967B
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
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- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
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- 229910000833 kovar Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110318966.XA CN113048967B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置的制造方法 |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015166480 | 2015-08-26 | ||
| JP2015-166480 | 2015-08-26 | ||
| JP2016117700A JP6733333B2 (ja) | 2015-08-26 | 2016-06-14 | 物理量検出デバイス、物理量検出デバイスの製造方法、電子機器及び移動体 |
| JP2016-117700 | 2016-06-14 | ||
| CN202110318966.XA CN113048967B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置的制造方法 |
| CN201610719483.XA CN106482719B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置及其制造方法、电子设备以及移动体 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610719483.XA Division CN106482719B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置及其制造方法、电子设备以及移动体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113048967A CN113048967A (zh) | 2021-06-29 |
| CN113048967B true CN113048967B (zh) | 2023-11-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610719483.XA Active CN106482719B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置及其制造方法、电子设备以及移动体 |
| CN202110318966.XA Active CN113048967B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置的制造方法 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610719483.XA Active CN106482719B (zh) | 2015-08-26 | 2016-08-24 | 物理量检测装置及其制造方法、电子设备以及移动体 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6733333B2 (ja) |
| CN (2) | CN106482719B (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6950444B2 (ja) * | 2017-10-18 | 2021-10-13 | セイコーエプソン株式会社 | 物理量センサー、電子機器、および移動体 |
| CN109269489A (zh) * | 2018-11-02 | 2019-01-25 | 广西大学 | 一种谐振陀螺仪固有刚性轴的检测装置及方法 |
| JP7283140B2 (ja) * | 2019-03-11 | 2023-05-30 | セイコーエプソン株式会社 | 振動デバイス、電子機器および移動体 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001041749A (ja) * | 1999-07-30 | 2001-02-16 | Ngk Insulators Ltd | 振動型ジャイロスコープ |
| CN101174297A (zh) * | 2006-11-01 | 2008-05-07 | 精工爱普生株式会社 | 印刷有磁性墨水字符的记录介质的处理方法和装置 |
| CN101563582A (zh) * | 2007-09-19 | 2009-10-21 | 株式会社村田制作所 | 复合传感器及加速度传感器 |
| CN102803897A (zh) * | 2009-06-12 | 2012-11-28 | 精工恩琵希株式会社 | 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法 |
| CN103115619A (zh) * | 2011-11-16 | 2013-05-22 | 精工爱普生株式会社 | 振子、振动装置及电子设备 |
| CN103363974A (zh) * | 2012-03-28 | 2013-10-23 | 精工爱普生株式会社 | 振动片、陀螺仪传感器、电子设备和移动体 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2785429B2 (ja) * | 1990-03-27 | 1998-08-13 | 松下電器産業株式会社 | 角速度センサ |
| CN103245339B (zh) * | 2012-02-14 | 2017-05-24 | 精工爱普生株式会社 | 振动片、传感器单元以及电子设备 |
| JP5970698B2 (ja) * | 2012-03-29 | 2016-08-17 | セイコーエプソン株式会社 | 振動片、センサーユニット、電子機器 |
| JP2014202616A (ja) * | 2013-04-05 | 2014-10-27 | セイコーエプソン株式会社 | 振動素子、電子デバイス、電子機器および移動体 |
| JP6160823B2 (ja) * | 2013-09-10 | 2017-07-12 | セイコーエプソン株式会社 | 物理量センサー、振動デバイス、電子機器および移動体 |
| JP6264535B2 (ja) * | 2013-11-13 | 2018-01-24 | セイコーエプソン株式会社 | 振動素子製造用基板、振動素子の製造方法、物理量検出装置、電子機器、および移動体 |
| JP6318590B2 (ja) * | 2013-12-05 | 2018-05-09 | セイコーエプソン株式会社 | 振動素子、振動子、振動デバイス、電子機器および移動体 |
-
2016
- 2016-06-14 JP JP2016117700A patent/JP6733333B2/ja active Active
- 2016-08-24 CN CN201610719483.XA patent/CN106482719B/zh active Active
- 2016-08-24 CN CN202110318966.XA patent/CN113048967B/zh active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001041749A (ja) * | 1999-07-30 | 2001-02-16 | Ngk Insulators Ltd | 振動型ジャイロスコープ |
| CN101174297A (zh) * | 2006-11-01 | 2008-05-07 | 精工爱普生株式会社 | 印刷有磁性墨水字符的记录介质的处理方法和装置 |
| CN101563582A (zh) * | 2007-09-19 | 2009-10-21 | 株式会社村田制作所 | 复合传感器及加速度传感器 |
| CN102803897A (zh) * | 2009-06-12 | 2012-11-28 | 精工恩琵希株式会社 | 物理量检测装置和物理量检测装置的控制方法、异常诊断系统和异常诊断方法 |
| CN103115619A (zh) * | 2011-11-16 | 2013-05-22 | 精工爱普生株式会社 | 振子、振动装置及电子设备 |
| CN103363974A (zh) * | 2012-03-28 | 2013-10-23 | 精工爱普生株式会社 | 振动片、陀螺仪传感器、电子设备和移动体 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106482719A (zh) | 2017-03-08 |
| JP2017044686A (ja) | 2017-03-02 |
| CN106482719B (zh) | 2021-12-28 |
| JP6733333B2 (ja) | 2020-07-29 |
| CN113048967A (zh) | 2021-06-29 |
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