CN112739845A - 掩模板及制备方法、精细金属掩模板、掩模装置及使用方法 - Google Patents

掩模板及制备方法、精细金属掩模板、掩模装置及使用方法 Download PDF

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CN112739845A
CN112739845A CN201980002731.0A CN201980002731A CN112739845A CN 112739845 A CN112739845 A CN 112739845A CN 201980002731 A CN201980002731 A CN 201980002731A CN 112739845 A CN112739845 A CN 112739845A
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China
Prior art keywords
mask
shielding
mask plate
fine metal
projection
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CN201980002731.0A
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CN112739845B (zh
Inventor
徐鹏
牛彤
嵇凤丽
吴建鹏
张国栋
赵钰
何潘婷
杜森
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority claimed from CN201921410333.6U external-priority patent/CN210420132U/zh
Priority claimed from CN201910801463.0A external-priority patent/CN112501558A/zh
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Publication of CN112739845A publication Critical patent/CN112739845A/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C17/00—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
    • B05C17/06—Stencils
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B05C21/005—Masking devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

一种掩模板(500)及制备方法、精细金属掩模板、掩模装置及使用方法，该掩模板包括：至少一个开口区(510)和围绕且限定至少一个开口区(510)的遮挡部。遮挡部包括主体部分(530)和至少一个凸出部(540)，在至少一个开口区(510)的每个开口区(510)内，凸出部(540)在主体部分(530)的面对开口区(510)的一侧向开口区(510)伸出；主体部分(530)包括位于凸出部(540)的与开口区(510)相反的一侧且延伸方向与凸出部(540)的延伸方向相同的边缘(51)，主体部分(530)的位于边缘(51)与凸出部(540)之间的部分和凸出部(540)中的至少之一包括减薄部分，减薄部分的厚度小于遮挡部的其他部分的厚度。上述结构的掩模板(500)，可以有效地改善凸出部(540)的应力分布情况，减弱或避免掩模板(500)在拉伸张网后凸出部(540)的下垂现象，使掩模板(500)的精度得到显著地提升。

Description

PCT国内申请，说明书已公开。

Claims (32)

  1. PCT国内申请，权利要求书已公开。
CN201980002731.0A 2019-08-28 2019-11-29 掩模板及制备方法、精细金属掩模板、掩模装置及使用方法 Active CN112739845B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CN201921410333.6U CN210420132U (zh) 2019-08-28 2019-08-28 掩膜版及掩膜装置
CN2019108014630 2019-08-28
CN201910801463.0A CN112501558A (zh) 2019-08-28 2019-08-28 掩膜版、掩膜装置及掩膜版的设计优化方法
CN2019214103336 2019-08-28
PCT/CN2019/122085 WO2021036067A1 (zh) 2019-08-28 2019-11-29 掩模板及制备方法、精细金属掩模板、掩模装置及使用方法

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CN112739845B CN112739845B (zh) 2023-01-10

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US (1) US11560615B2 (zh)
CN (1) CN112739845B (zh)
WO (1) WO2021036067A1 (zh)

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CN113604777A (zh) * 2021-08-20 2021-11-05 京东方科技集团股份有限公司 一种支撑板、掩膜板及其制备方法
CN115305440A (zh) * 2022-08-17 2022-11-08 京东方科技集团股份有限公司 一种掩膜板及其制备方法、显示面板的制备装置

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WO2021092759A1 (zh) * 2019-11-12 2021-05-20 京东方科技集团股份有限公司 掩模板
KR20210088802A (ko) * 2020-01-06 2021-07-15 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
CN111575648B (zh) * 2020-06-23 2022-07-15 京东方科技集团股份有限公司 掩膜板组件及其制造方法
KR20220056914A (ko) * 2020-10-28 2022-05-09 삼성디스플레이 주식회사 마스크 프레임 및 이를 포함하는 증착 장치
CN114134460B (zh) * 2021-11-29 2023-06-06 昆山国显光电有限公司 掩膜板
CN116083842A (zh) * 2023-01-03 2023-05-09 京东方科技集团股份有限公司 掩膜板组件

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CN113604777A (zh) * 2021-08-20 2021-11-05 京东方科技集团股份有限公司 一种支撑板、掩膜板及其制备方法
CN115305440A (zh) * 2022-08-17 2022-11-08 京东方科技集团股份有限公司 一种掩膜板及其制备方法、显示面板的制备装置

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WO2021036067A1 (zh) 2021-03-04
CN112739845B (zh) 2023-01-10
US20210404049A1 (en) 2021-12-30
US11560615B2 (en) 2023-01-24

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