CN112576950A - 多激光器光源 - Google Patents

多激光器光源 Download PDF

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Publication number
CN112576950A
CN112576950A CN202011581471.8A CN202011581471A CN112576950A CN 112576950 A CN112576950 A CN 112576950A CN 202011581471 A CN202011581471 A CN 202011581471A CN 112576950 A CN112576950 A CN 112576950A
Authority
CN
China
Prior art keywords
light
light source
mirror
array
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011581471.8A
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English (en)
Chinese (zh)
Inventor
约翰尼斯·米诺
格温·丹贝格
巴维恩·库马兰
安德斯·巴莱斯塔特
埃里克·扬·科扎克
吉尔·罗森菲尔德
埃兰·伊莱泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MTT Innovation Inc
Original Assignee
MTT Innovation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MTT Innovation Inc filed Critical MTT Innovation Inc
Publication of CN112576950A publication Critical patent/CN112576950A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
    • F21K9/60—Optical arrangements integrated in the light source, e.g. for improving the colour rendering index or the light extraction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
    • F21K9/60—Optical arrangements integrated in the light source, e.g. for improving the colour rendering index or the light extraction
    • F21K9/61—Optical arrangements integrated in the light source, e.g. for improving the colour rendering index or the light extraction using light guides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/90—Heating arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
    • H04N9/312—Driving therefor
    • H04N9/3126—Driving therefor for spatial light modulators in series
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
    • H04N9/3191—Testing thereof
    • H04N9/3194—Testing thereof including sensor feedback
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/30—Semiconductor lasers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Semiconductor Lasers (AREA)
  • Projection Apparatus (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Transforming Electric Information Into Light Information (AREA)
CN202011581471.8A 2014-08-14 2015-08-14 多激光器光源 Pending CN112576950A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462037543P 2014-08-14 2014-08-14
US62/037,543 2014-08-14
CN201580043254.4A CN106662753B (zh) 2014-08-14 2015-08-14 多激光器光源

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201580043254.4A Division CN106662753B (zh) 2014-08-14 2015-08-14 多激光器光源

Publications (1)

Publication Number Publication Date
CN112576950A true CN112576950A (zh) 2021-03-30

Family

ID=55303742

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202011581471.8A Pending CN112576950A (zh) 2014-08-14 2015-08-14 多激光器光源
CN201580043254.4A Active CN106662753B (zh) 2014-08-14 2015-08-14 多激光器光源

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201580043254.4A Active CN106662753B (zh) 2014-08-14 2015-08-14 多激光器光源

Country Status (6)

Country Link
US (4) US9874319B2 (https=)
EP (1) EP3180652A4 (https=)
JP (2) JP6791840B2 (https=)
CN (2) CN112576950A (https=)
CA (2) CA3238721A1 (https=)
WO (1) WO2016023133A1 (https=)

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CN115079404A (zh) * 2022-06-01 2022-09-20 武汉欧毅光学有限公司 一种具备双维扫描功能的激光振镜扫描系统
CN115356900A (zh) * 2022-09-05 2022-11-18 安徽国芯光刻技术有限公司 一种多波长激光混波照明光路结构
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