CN112376021A - 一种新型宽带增透膜及其制备方法 - Google Patents
一种新型宽带增透膜及其制备方法 Download PDFInfo
- Publication number
- CN112376021A CN112376021A CN202011266720.4A CN202011266720A CN112376021A CN 112376021 A CN112376021 A CN 112376021A CN 202011266720 A CN202011266720 A CN 202011266720A CN 112376021 A CN112376021 A CN 112376021A
- Authority
- CN
- China
- Prior art keywords
- film
- antireflection film
- layer
- film layer
- broadband antireflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002360 preparation method Methods 0.000 title abstract description 15
- 239000000758 substrate Substances 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 230000003472 neutralizing effect Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 230000003595 spectral effect Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000010408 film Substances 0.000 description 90
- 239000010949 copper Substances 0.000 description 19
- 238000002310 reflectometry Methods 0.000 description 7
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000003667 anti-reflective effect Effects 0.000 description 3
- 230000008033 biological extinction Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
- G02B1/116—Multilayers including electrically conducting layers
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011266720.4A CN112376021B (zh) | 2020-11-13 | 2020-11-13 | 一种宽带增透膜及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011266720.4A CN112376021B (zh) | 2020-11-13 | 2020-11-13 | 一种宽带增透膜及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN112376021A true CN112376021A (zh) | 2021-02-19 |
CN112376021B CN112376021B (zh) | 2023-03-31 |
Family
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Family Applications (1)
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CN202011266720.4A Active CN112376021B (zh) | 2020-11-13 | 2020-11-13 | 一种宽带增透膜及其制备方法 |
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CN (1) | CN112376021B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62186202A (ja) * | 1986-02-12 | 1987-08-14 | Seiko Epson Corp | プラスチツク光学部品の反射防止膜 |
CN2556656Y (zh) * | 2002-07-31 | 2003-06-18 | 张建樟 | 电视电脑减反膜镜片 |
CN102455445A (zh) * | 2010-10-25 | 2012-05-16 | 樊立冬 | 一种电脑减反膜镜片 |
CN108828695A (zh) * | 2018-06-25 | 2018-11-16 | 中国人民解放军国防科技大学 | 可用于红外隐身的光谱选择性发射材料及其制备方法 |
CN110806613A (zh) * | 2019-11-20 | 2020-02-18 | 张秋月 | 一种增强变色的红色光学变色薄片及其制备办法 |
-
2020
- 2020-11-13 CN CN202011266720.4A patent/CN112376021B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62186202A (ja) * | 1986-02-12 | 1987-08-14 | Seiko Epson Corp | プラスチツク光学部品の反射防止膜 |
CN2556656Y (zh) * | 2002-07-31 | 2003-06-18 | 张建樟 | 电视电脑减反膜镜片 |
CN102455445A (zh) * | 2010-10-25 | 2012-05-16 | 樊立冬 | 一种电脑减反膜镜片 |
CN108828695A (zh) * | 2018-06-25 | 2018-11-16 | 中国人民解放军国防科技大学 | 可用于红外隐身的光谱选择性发射材料及其制备方法 |
CN110806613A (zh) * | 2019-11-20 | 2020-02-18 | 张秋月 | 一种增强变色的红色光学变色薄片及其制备办法 |
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CN112376021B (zh) | 2023-03-31 |
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CB03 | Change of inventor or designer information |
Inventor after: Yuan Qinghai Inventor after: Lin Zhaowen Inventor after: Xie Yujiang Inventor after: Wang Ben Inventor before: Bao Ganghua Inventor before: Yuan Qinghai Inventor before: Lin Zhaowen Inventor before: Xie Yujiang Inventor before: Wang Ben |
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CB03 | Change of inventor or designer information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A broadband anti reflective film and its preparation method Granted publication date: 20230331 Pledgee: Agricultural Bank of China Limited Shanghai pilot Free Trade Zone New Area Branch Pledgor: SHANGHAI MIFENG LASER TECHNOLOGY Co.,Ltd. Registration number: Y2024980012603 |
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