CN112192055A - 激光加工方法以及激光加工装置 - Google Patents

激光加工方法以及激光加工装置 Download PDF

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Publication number
CN112192055A
CN112192055A CN202010649379.4A CN202010649379A CN112192055A CN 112192055 A CN112192055 A CN 112192055A CN 202010649379 A CN202010649379 A CN 202010649379A CN 112192055 A CN112192055 A CN 112192055A
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CN
China
Prior art keywords
hole
laser
substrate
penetration
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010649379.4A
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English (en)
Chinese (zh)
Inventor
伊藤靖
市川健一
佐伯勇辉
西部达矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Via Mechanics Ltd filed Critical Via Mechanics Ltd
Publication of CN112192055A publication Critical patent/CN112192055A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
CN202010649379.4A 2019-07-08 2020-07-08 激光加工方法以及激光加工装置 Pending CN112192055A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-126915 2019-07-08
JP2019126915A JP7251904B2 (ja) 2019-07-08 2019-07-08 レーザ加工方法及レーザ加工装置

Publications (1)

Publication Number Publication Date
CN112192055A true CN112192055A (zh) 2021-01-08

Family

ID=74006034

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010649379.4A Pending CN112192055A (zh) 2019-07-08 2020-07-08 激光加工方法以及激光加工装置

Country Status (4)

Country Link
JP (1) JP7251904B2 (ja)
KR (1) KR20210006294A (ja)
CN (1) CN112192055A (ja)
TW (1) TWI821580B (ja)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08103879A (ja) * 1994-10-04 1996-04-23 Matsushita Electric Ind Co Ltd レーザ加工機
DE19949501A1 (de) * 1999-10-14 2001-04-19 Volkswagen Ag Verfahren zum Einbringen von Vertiefungen in Kunststoffteilen
CN103240529A (zh) * 2012-02-09 2013-08-14 株式会社迪思科 激光加工装置
CN105328350A (zh) * 2015-10-09 2016-02-17 江苏大金激光科技有限公司 自动检测穿孔的激光切割头
CN107824989A (zh) * 2017-10-26 2018-03-23 大族激光科技产业集团股份有限公司 一种激光穿孔的检测方法及系统
JP6482740B1 (ja) * 2018-05-07 2019-03-13 三菱電機株式会社 レーザ加工機、制御装置および判定方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2864005B2 (ja) 1996-05-17 1999-03-03 住友重機械工業株式会社 トータルパルスエネルギー積算量検出によるレーザ加工補償システム
JP3118203B2 (ja) * 1997-03-27 2000-12-18 住友重機械工業株式会社 レーザ加工方法
JP3920710B2 (ja) 2002-06-04 2007-05-30 日立ビアメカニクス株式会社 レーザ加工方法
CN104002051B (zh) * 2014-06-03 2015-10-28 湖南大学 一种用于激光焊接的垂直检测装置和检测方法
JP6443251B2 (ja) 2015-07-17 2018-12-26 トヨタ自動車株式会社 レーザ穴あけ装置
CN106735944A (zh) * 2016-12-16 2017-05-31 江苏大学 一种基于穿透检测技术的改进型激光微孔制造实验方法
JP2018202449A (ja) 2017-06-02 2018-12-27 日本電気硝子株式会社 レーザー加工方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08103879A (ja) * 1994-10-04 1996-04-23 Matsushita Electric Ind Co Ltd レーザ加工機
DE19949501A1 (de) * 1999-10-14 2001-04-19 Volkswagen Ag Verfahren zum Einbringen von Vertiefungen in Kunststoffteilen
CN103240529A (zh) * 2012-02-09 2013-08-14 株式会社迪思科 激光加工装置
CN105328350A (zh) * 2015-10-09 2016-02-17 江苏大金激光科技有限公司 自动检测穿孔的激光切割头
CN107824989A (zh) * 2017-10-26 2018-03-23 大族激光科技产业集团股份有限公司 一种激光穿孔的检测方法及系统
JP6482740B1 (ja) * 2018-05-07 2019-03-13 三菱電機株式会社 レーザ加工機、制御装置および判定方法

Also Published As

Publication number Publication date
JP7251904B2 (ja) 2023-04-04
TWI821580B (zh) 2023-11-11
KR20210006294A (ko) 2021-01-18
TW202103831A (zh) 2021-02-01
JP2021011410A (ja) 2021-02-04

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