CN111800087B - 集成电路装置、振荡器、电子设备以及移动体 - Google Patents

集成电路装置、振荡器、电子设备以及移动体 Download PDF

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Publication number
CN111800087B
CN111800087B CN202010235030.6A CN202010235030A CN111800087B CN 111800087 B CN111800087 B CN 111800087B CN 202010235030 A CN202010235030 A CN 202010235030A CN 111800087 B CN111800087 B CN 111800087B
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Prior art keywords
circuit
integrated circuit
pad
oscillation
circuit device
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CN202010235030.6A
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Chinese (zh)
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CN111800087A (zh
Inventor
泽田光章
井伊巨树
板坂洋佑
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/362—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier being a single transistor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02—Details
    • H03B5/04—Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
    • H03B5/366—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current
    • H03B5/368—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device and comprising means for varying the frequency by a variable voltage or current the means being voltage variable capacitance diodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L1/00—Stabilisation of generator output against variations of physical values, e.g. power supply
    • H03L1/02—Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B2200/00—Indexing scheme relating to details of oscillators covered by H03B
    • H03B2200/003—Circuit elements of oscillators
    • H03B2200/0034—Circuit elements of oscillators including a buffer amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B2200/00—Indexing scheme relating to details of oscillators covered by H03B
    • H03B2200/006—Functional aspects of oscillators
    • H03B2200/0062—Bias and operating point
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0557—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the other elements being buried in the substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN202010235030.6A 2019-04-01 2020-03-30 集成电路装置、振荡器、电子设备以及移动体 Active CN111800087B (zh)

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Application Number Priority Date Filing Date Title
CN202310606189.8A CN116566327A (zh) 2019-04-01 2020-03-30 集成电路装置和振荡器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019069775A JP7371344B2 (ja) 2019-04-01 2019-04-01 集積回路装置、発振器、電子機器及び移動体
JP2019-069775 2019-04-01

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CN111800087B true CN111800087B (zh) 2023-06-13

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US (1) US11038463B2 (enExample)
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CN (2) CN111800087B (enExample)

Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
JP7567400B2 (ja) * 2020-11-26 2024-10-16 セイコーエプソン株式会社 振動デバイス
JP7581797B2 (ja) * 2020-11-26 2024-11-13 セイコーエプソン株式会社 振動デバイス
JP7625868B2 (ja) * 2021-01-25 2025-02-04 セイコーエプソン株式会社 集積回路装置及び発振器
JP7596817B2 (ja) * 2021-01-27 2024-12-10 セイコーエプソン株式会社 振動デバイス
JP7655039B2 (ja) * 2021-03-29 2025-04-02 セイコーエプソン株式会社 集積回路装置、デバイス及び製造方法
JP2023073610A (ja) * 2021-11-16 2023-05-26 セイコーエプソン株式会社 回路装置及び発振器
JP7786227B2 (ja) * 2022-01-31 2025-12-16 セイコーエプソン株式会社 発振器の製造方法及び発振器群
JP2024108397A (ja) * 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス
JP2024136548A (ja) * 2023-03-24 2024-10-04 セイコーエプソン株式会社 回路装置、発振器

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JP2018098428A (ja) * 2016-12-16 2018-06-21 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
CN109217822A (zh) * 2017-06-29 2019-01-15 精工爱普生株式会社 振动器件、电子设备和移动体

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JP3030951B2 (ja) * 1991-08-09 2000-04-10 セイコーエプソン株式会社 半導体集積装置
US5500628A (en) * 1995-01-24 1996-03-19 Motorola, Inc. Double-sided oscillator package and method of coupling components thereto
JP2006054269A (ja) 2004-08-10 2006-02-23 Epson Toyocom Corp 圧電発振器用ｉｃとこれを用いた圧電発振器
JP4600663B2 (ja) 2004-12-07 2010-12-15 セイコーエプソン株式会社 温度補償型圧電発振器
JP4712493B2 (ja) 2005-08-31 2011-06-29 京セラキンセキ株式会社 温度補償型水晶発振器
JP5926578B2 (ja) 2012-02-29 2016-05-25 京セラクリスタルデバイス株式会社 圧電デバイス
JP6481276B2 (ja) 2014-07-18 2019-03-13 セイコーエプソン株式会社 無線通信装置、電子機器及び移動体
JP2016134738A (ja) 2015-01-19 2016-07-25 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP6540943B2 (ja) 2015-01-22 2019-07-10 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP6536780B2 (ja) 2015-01-22 2019-07-03 セイコーエプソン株式会社 半導体回路装置、発振器、電子機器および移動体
JP6561487B2 (ja) 2015-02-16 2019-08-21 セイコーエプソン株式会社 発振回路、発振器、電子機器および移動体
JP6759539B2 (ja) * 2015-08-06 2020-09-23 セイコーエプソン株式会社 発振器、電子機器および基地局
JP6680121B2 (ja) 2016-01-06 2020-04-15 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
US10177770B2 (en) 2016-01-06 2019-01-08 Seiko Epson Corporation Circuit device, oscillator, electronic apparatus, and vehicle
JP6798121B2 (ja) 2016-03-18 2020-12-09 セイコーエプソン株式会社 発振器、電子機器および移動体
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JP2018098428A (ja) * 2016-12-16 2018-06-21 セイコーエプソン株式会社 回路装置、発振器、電子機器及び移動体
CN109217822A (zh) * 2017-06-29 2019-01-15 精工爱普生株式会社 振动器件、电子设备和移动体

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US20200313619A1 (en) 2020-10-01
JP2020170885A (ja) 2020-10-15
CN111800087A (zh) 2020-10-20
JP7371344B2 (ja) 2023-10-31
CN116566327A (zh) 2023-08-08
US11038463B2 (en) 2021-06-15

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