CN111390380B - 印刷电路板的激光加工方法及其激光加工机 - Google Patents

印刷电路板的激光加工方法及其激光加工机 Download PDF

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Publication number
CN111390380B
CN111390380B CN201911394353.3A CN201911394353A CN111390380B CN 111390380 B CN111390380 B CN 111390380B CN 201911394353 A CN201911394353 A CN 201911394353A CN 111390380 B CN111390380 B CN 111390380B
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China
Prior art keywords
laser
aperture
diameter
hole
processing
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CN201911394353.3A
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English (en)
Chinese (zh)
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CN111390380A (zh
Inventor
荒井邦男
金谷保彦
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Ofuna Technology Co ltd
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Ofuna Technology Co ltd
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Publication of CN111390380A publication Critical patent/CN111390380A/zh
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laser Beam Processing (AREA)
CN201911394353.3A 2019-01-01 2019-12-30 印刷电路板的激光加工方法及其激光加工机 Active CN111390380B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019008844 2019-01-01
JP2019-008844 2019-01-01

Publications (2)

Publication Number Publication Date
CN111390380A CN111390380A (zh) 2020-07-10
CN111390380B true CN111390380B (zh) 2022-06-28

Family

ID=71415006

Family Applications (1)

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CN201911394353.3A Active CN111390380B (zh) 2019-01-01 2019-12-30 印刷电路板的激光加工方法及其激光加工机

Country Status (4)

Country Link
JP (2) JP2020109820A (enExample)
KR (1) KR102410764B1 (enExample)
CN (1) CN111390380B (enExample)
TW (1) TWI705749B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022098586A (ja) * 2020-12-22 2022-07-04 大船企業日本株式会社 プリント基板レーザ加工装置に装着されるアパーチャにおける加工点パワーの調整方法と、該プリント基板レーザ加工装置に装着されるアパーチャにおける加工点パワーの調整方法を実施してなるプリント基板レーザ加工装置
JP2022105463A (ja) * 2021-01-02 2022-07-14 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
JP7780063B2 (ja) * 2021-03-12 2025-12-04 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
CN114273777A (zh) * 2021-12-14 2022-04-05 深圳市韵腾激光科技有限公司 一种提升电路板钻孔效率的激光加工系统
CN118829079B (zh) * 2023-10-24 2025-09-09 健鼎（无锡）电子有限公司 电路板加工方法及激光加工设备
TWI872784B (zh) * 2023-11-06 2025-02-11 健鼎科技股份有限公司 電路板加工方法及雷射加工設備

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245071A (ja) * 1998-03-02 1999-09-14 Sumitomo Heavy Ind Ltd レーザ加工装置
WO2018181678A1 (ja) * 2017-03-30 2018-10-04 太陽誘電株式会社 配線基板及びその製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09107168A (ja) * 1995-08-07 1997-04-22 Mitsubishi Electric Corp 配線基板のレーザ加工方法、配線基板のレーザ加工装置及び配線基板加工用の炭酸ガスレーザ発振器
JP3126316B2 (ja) * 1996-11-20 2001-01-22 イビデン株式会社 多層プリント配線板の製造装置及び製造方法
JP3883708B2 (ja) 1998-09-11 2007-02-21 日立ビアメカニクス株式会社 レーザ加工機におけるアパーチャ交換装置
JP4489899B2 (ja) 2000-03-08 2010-06-23 イビデン株式会社 多層プリント配線板用両面回路基板の製造方法
JP2003053560A (ja) 2001-08-09 2003-02-26 Ngk Spark Plug Co Ltd レーザ加工方法及びプリント配線基板の製造方法
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske
JP2003136267A (ja) 2001-11-01 2003-05-14 Hitachi Via Mechanics Ltd レーザ加工方法およびレーザ加工装置
JP2003204137A (ja) 2002-01-09 2003-07-18 Hitachi Via Mechanics Ltd レーザー穴あけ加工方法
CN101372071B (zh) * 2008-09-12 2011-06-08 上海美维科技有限公司 一种采用二氧化碳激光直接钻盲孔的方法
EP2377375B1 (en) * 2008-12-13 2016-01-27 M-Solv Limited Method and apparatus for laser machining relatively narrow and relatively wide structures
GB2507542B (en) * 2012-11-02 2016-01-13 M Solv Ltd Apparatus and Method for forming fine scale structures in the surface of a substrate to different depths
CN106063393B (zh) * 2015-02-16 2019-03-22 日本梅克特隆株式会社 柔性印刷布线板的制造方法
CN105025669B (zh) * 2015-07-28 2018-08-10 维嘉数控科技（苏州）有限公司 Uv激光钻孔的方法及具有盲孔的印刷电路板
JP6682146B2 (ja) * 2016-12-12 2020-04-15 住友重機械工業株式会社 レーザパルス切出装置及びレーザ加工方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11245071A (ja) * 1998-03-02 1999-09-14 Sumitomo Heavy Ind Ltd レーザ加工装置
WO2018181678A1 (ja) * 2017-03-30 2018-10-04 太陽誘電株式会社 配線基板及びその製造方法

Also Published As

Publication number Publication date
JP2020108904A (ja) 2020-07-16
TWI705749B (zh) 2020-09-21
TW202027578A (zh) 2020-07-16
JP7098093B2 (ja) 2022-07-11
KR102410764B1 (ko) 2022-06-21
CN111390380A (zh) 2020-07-10
JP2020109820A (ja) 2020-07-16
KR20200084299A (ko) 2020-07-10

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