CN110871402A - Thinning grinding wheel for sapphire substrate - Google Patents
Thinning grinding wheel for sapphire substrate Download PDFInfo
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- CN110871402A CN110871402A CN201911205968.7A CN201911205968A CN110871402A CN 110871402 A CN110871402 A CN 110871402A CN 201911205968 A CN201911205968 A CN 201911205968A CN 110871402 A CN110871402 A CN 110871402A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/14—Lapping plates for working plane surfaces characterised by the composition or properties of the plate materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a thinning grinding wheel for a sapphire substrate, which comprises a base body; the base body is provided with a central hole; the base body is provided with a first ring of grinding wheel teeth, a second ring of grinding wheel teeth and a third ring of grinding wheel teeth; the first ring of grinding gear teeth are positioned at the edge of the base body; and the second circle of grinding wheel teeth are positioned between the first circle of grinding wheel teeth and the third circle of grinding wheel teeth. The grinding wheel tooth structure with three circles is designed, the gaps are used as chip grooves, and meanwhile, the grinding wheel teeth are subjected to formula design, so that the surface quality of a ground product is improved, and the yield is improved.
Description
The invention belongs to divisional application of invention application with the name of thinning grinding wheel for sapphire substrate, application date of 2017, 12 and 30 months and application number of 2017114924865, and belongs to the technical part of products.
Technical Field
The invention belongs to the field of cutting knife equipment, and particularly relates to a thinning grinding wheel for a sapphire substrate.
Background
The sapphire crystal has extremely high hardness, excellent optical and mechanical properties and good thermal conductivity, and good wear resistance and weather resistance, so that the sapphire crystal is an ideal LED substrate material. The sapphire substrate is mature in production and processing technology at present, stable in quality and applicable to the high-temperature growth process; in addition, the sapphire substrate has high mechanical strength, and is beneficial to processing and cleaning. Therefore, the substrate material is mainly sapphire. In recent years, the technology of the LED taking sapphire as a substrate is rapidly developed, and the LED substrate occupies more than 90% of the market share; most of the productivity of sapphire substrates is put into the production of epitaxial wafers. From the development history of the LED, the scale expansion and application of the LED backlight and the LED illumination promote the vigorous development of the LED industry. From the industry chain, the explosion of the requirements of the LED backlight and the LED illumination stimulates the LED packaging factory and the upstream requirements thereof, the vigorous demand promotes the LED market development, and drives the demand of the sapphire epitaxial wafer.
In the LED manufacturing process, the sapphire is required to be subjected to processes of slicing, grinding, chamfering, polishing (reducing from 0.4mm to about 0.1mm) and the like, and the more the later stages of the processes, the more the processing precision and the difficulty are gradually increased. The polishing process plays a key role in the quality of the sapphire substrate; however, since sapphire has a Mohs hardness of 9, which is second only to diamond, it is very difficult to thin and planarize the surface. The difficulty of the sapphire thinning process is that the sapphire substrate is damaged or scratches are left on the surface due to overlarge stress during grinding of the grinding wheel, a slice with a deep scratch is also broken in the lapping process, the deep scratch is mainly caused by the fact that the grinding wheel is worn, falls off and scratches the surface of the grinding wheel in the machining process, and the production line is low in yield, low in efficiency and high in cost. Meanwhile, the ceramic thinning grinding wheel is an important tool applied in the prior art, so that a new grinding wheel needs to be designed for effectively reducing the stress and the surface scratch depth of the sapphire substrate.
Disclosure of Invention
The invention discloses a thinning grinding wheel for a sapphire substrate, which is characterized in that a three-circle grinding wheel tooth structure is designed, gaps are used as chip grooves, and meanwhile, grinding wheel teeth are subjected to formula design, so that the surface quality of a ground product is improved, and the yield is improved.
The following technical scheme is adopted:
a thinning grinding wheel for a sapphire substrate comprises a base body; the base body is provided with a central hole; the base body is provided with a first ring of grinding wheel teeth, a second ring of grinding wheel teeth and a third ring of grinding wheel teeth; the first ring of grinding gear teeth are positioned at the edge of the base body; the second circle of grinding wheel teeth are positioned between the first circle of grinding wheel teeth and the third circle of grinding wheel teeth; the preparation method of the grinding wheel teeth comprises the following steps:
(1) adding titanium dioxide whiskers into a cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding aluminum phosphate, stirring for 2 hours, naturally cooling, and crushing to obtain a modifier;
(2) sieving a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
(3) and curing the hot-pressed blank to obtain the grinding wheel teeth.
The invention also discloses a grinding wheel tooth and a preparation method thereof, and the grinding wheel tooth comprises the following steps:
(1) adding titanium dioxide whiskers into a cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding aluminum phosphate, stirring for 2 hours, naturally cooling, and crushing to obtain a modifier;
(2) sieving a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
(3) and curing the hot-pressed blank to obtain the grinding wheel teeth.
In the invention, the grinding wheel teeth are combined with the base body in a bonding mode, the base body belongs to the conventional part, is generally circular and is provided with a central hole for installation.
In the invention, the height of the grinding wheel teeth is 12mm, the width of the grinding wheel teeth is 7mm, the distance between adjacent grinding wheel teeth is 0.8-1 mm, and the length of the grinding wheel teeth is designed according to the size of a substrate; the grinding wheel teeth with proper sizes can be stabilized on the base body, and meanwhile, slag falling is avoided under high-speed friction.
In the invention, the clearance between the first circle of grinding wheel teeth and the second circle of grinding wheel teeth is 0.5-0.6 mm, and the clearance between the second circle of grinding wheel teeth and the third circle of grinding wheel teeth is 0.5-0.6 mm; can accord with the demand of sapphire attenuate area, do not influence the chip removal again, solve the problem of current round emery wheel teeth chip removal difficulty.
In the invention, the volume percentages of the raw materials in the mixture are as follows:
18 to 19 percent of diamond
35 to 40 percent of epoxy resin powder
6 to 12 percent of silicon carbide
8-12% of aluminum oxide
8-15% of metal cobalt
1-1.2% of 4-methylbenzyl alcohol
6 to 8 percent of modifier
When the modifier is prepared, the mass ratio of the titanium dioxide whisker, the cyanate ester monomer and the aluminum phosphate is 12: 100: 19.
The existing sapphire substrate thinning grinding wheel is a ceramic grinding wheel, can provide heat resistance sharpness, but has chipping falling, and greatly influences the product quality; the invention discloses a resin grinding wheel for the first time, and the aluminum oxide and the silicon carbide are introduced into the formula, so that the strength can be greatly improved, meanwhile, a proper amount of modifier is added, the self-sharpening capability, the bonding capability and the wear resistance of the grinding wheel can be improved, especially, the addition of 4-methyl benzyl alcohol greatly reduces the defects of organic and inorganic interfaces, and the good friction quality and stability of the grinding wheel are maintained.
In the invention, the grain diameter of the diamond is 34-40 μm; the diamond has small granularity, is beneficial to smoothing the friction surface in processing, and avoids the sapphire material from generating a corner collapse and the crack defect; while providing good dispersion.
In the invention, the size of the titanium oxide whisker is nano, the diameter is 50nm, and the length is 600 nm; the strength of the grinding wheel teeth can be increased, and the influence of overlong on the compactness of a system is avoided; the particle size of the aluminum phosphate is 20-28 mu m, and the aluminum phosphate can provide excellent bonding force and certain flame retardant capability.
In the technical scheme, the hot pressing temperature is 180 ℃, the pressure is 66KN, the time is 15min, a stable blank can be formed, meanwhile, the system has a certain curing degree, a good foundation is provided for subsequent curing, and meanwhile, in the hot pressing process, 4-methyl benzyl alcohol can play the roles of a compatilizer and an extender, so that the problem of interface defects between particles and epoxy is solved.
In the technical scheme, the curing temperature is 200 ℃ and the curing time is 2 hours. The curing after hot pressing can not only avoid the shrinkage defect during single curing, but also meet the requirements of resin curing, especially exert the modification effect of cyanate ester, provide good heat resistance and strength, and obtain excellent product performance.
In the technical scheme, the mixture is ball-milled and then sieved by a 300-mesh sieve to obtain a molding material; in the prior art, a commonly used mixing method is a splayed mixing method, which is simple to operate and can uniformly disperse most components, but the method is long in time consumption and cannot break soft aggregates, and is particularly not suitable for resin powder.
The resin-based diamond grinding wheel has good friction, and can ensure that the stress borne by a workpiece is reduced to the minimum compared with a ceramic grinding wheel under the same processing condition, thereby avoiding the defects of bending and microcrack caused by processing. The parameters of the existing grinding wheel machining product are as follows: roughness Rz is less than or equal to 6 mu m, parallelism is less than or equal to 5 mu m, processing time is 19s, and service life is 1400P; the parameters of the thinning grinding wheel processing product for the sapphire substrate are as follows: roughness Rz is less than or equal to 1.6 mu m, parallelism is less than or equal to 2.1 mu m, processing beat is 11s, and service life is 3000P.
Drawings
FIG. 1 is a schematic view of a thinned grinding wheel for a sapphire substrate according to an embodiment;
the grinding wheel comprises a base body 1, a base body 2, a center hole 3, a first ring of grinding wheel teeth, a second ring of grinding wheel teeth 4, a second ring of grinding wheel teeth 5 and a third ring of grinding wheel teeth.
Detailed Description
In the embodiment, the particle size of the diamond is 34-40 μm; the diameter of the titanium oxide whisker is 50nm, and the length of the titanium oxide whisker is 600 nm; the particle size of the aluminum phosphate is 20-28 mu m, and other raw materials are not limited.
Example one
See fig. 1; a thinning grinding wheel for a sapphire substrate comprises a base body 1; the base body is provided with a central hole 2; the base body is provided with a first ring of grinding gear teeth 3, a second ring of grinding gear teeth 4 and a third ring of grinding gear teeth 5; the first ring of grinding gear teeth are positioned at the edge of the base body; the second circle of grinding wheel teeth are positioned between the first circle of grinding wheel teeth and the third circle of grinding wheel teeth; the height of the grinding wheel teeth is 12mm, the width of the grinding wheel teeth is 7mm, and the distance between every two adjacent grinding wheel teeth is 1 mm; the clearance between the first circle of grinding wheel teeth and the second circle of grinding wheel teeth is 0.6mm, and the clearance between the second circle of grinding wheel teeth and the third circle of grinding wheel teeth is 0.5 mm;
the preparation method of the grinding wheel teeth comprises the following steps:
(1) adding 1.2 kg of titanium dioxide whisker into 10 kg of cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding 1.9 kg of aluminum phosphate, stirring for 2 hours, naturally cooling and crushing to obtain a modifier;
(2) ball-milling a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier (120 rpm/min for 3.5 hours), and then sieving the mixture through a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
in the mixture, the volume percentages of the raw materials are as follows:
18 percent of diamond
40 percent of epoxy resin powder
12 percent of silicon carbide
12 percent of alumina
10 percent of metallic cobalt
4-methylbenzyl alcohol 1%
7 percent of modifier
(3) Solidifying the hot-pressed green body to obtain a grinding wheel tooth;
and (3) bonding the grinding wheel teeth on the base body in an adhesive mode to obtain the thinned grinding wheel for the sapphire substrate, wherein the wear-resisting coefficient at 20 ℃ is 0.04.
Processing parameters of the sapphire substrate: roughness Rz is less than or equal to 1.6 mu m, parallelism is less than or equal to 2.1 mu m, processing beat is 11s, and service life is 3000P.
Example two
A thinning grinding wheel for a sapphire substrate is consistent in structure and embodiment, and the preparation method comprises the following steps:
(1) adding 1.2 kg of titanium dioxide whisker into 10 kg of cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding 1.9 kg of aluminum phosphate, stirring for 2 hours, naturally cooling and crushing to obtain a modifier;
(2) ball-milling a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier (120 rpm/min for 3.5 hours), and then sieving the mixture through a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
in the mixture, the volume percentages of the raw materials are as follows:
19 percent of diamond
36 percent of epoxy resin powder
11 percent of silicon carbide
10 percent of alumina
15 percent of metallic cobalt
4-methylbenzyl alcohol 1%
8 percent of modifier
(3) Solidifying the hot-pressed green body to obtain a grinding wheel tooth;
and (3) bonding the grinding wheel teeth on the base body in an adhesive mode to obtain the thinned grinding wheel for the sapphire substrate, wherein the wear-resisting coefficient at 20 ℃ is 0.04.
Processing parameters of the sapphire substrate: roughness Rz is less than or equal to 1.6 mu m, parallelism is less than or equal to 2.2 mu m, processing beat is 11s, and service life is 3000P.
Comparative example 1
A thinning grinding wheel for a sapphire substrate is consistent in structure and embodiment, and the preparation method comprises the following steps:
(1) ball-milling a mixture of diamond, epoxy resin powder, silicon carbide, aluminum oxide, metal cobalt and 4-methyl benzyl alcohol (120 rpm/min, 3.5 hours) and then sieving the mixture by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
in the mixture, the volume percentages of the raw materials are as follows:
23 percent of diamond
40 percent of epoxy resin powder
11 percent of silicon carbide
10 percent of alumina
15 percent of metallic cobalt
4-methylbenzyl alcohol 1%
(3) Solidifying the hot-pressed green body to obtain a grinding wheel tooth;
and (3) bonding the grinding wheel teeth on the base body in an adhesive mode to obtain the thinned grinding wheel for the sapphire substrate, wherein the wear-resisting coefficient at 20 ℃ is 0.09.
Processing parameters of the sapphire substrate: roughness Rz is less than or equal to 4.5 mu m, parallelism is less than or equal to 3.2 mu m, processing time is 16s, and service life is 1900P.
Comparative example No. two
A thinning grinding wheel for a sapphire substrate is consistent in structure and embodiment, and the preparation method comprises the following steps:
(1) adding 1.2 kg of titanium dioxide whisker into 10 kg of cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding 1.9 kg of aluminum phosphate, stirring for 2 hours, naturally cooling and crushing to obtain a modifier;
(2) ball-milling a mixture of diamond, epoxy resin powder, silicon carbide, aluminum oxide, metal cobalt and a modifier (120 rpm/min, 3.5 hours) and then sieving the mixture by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
in the mixture, the volume percentages of the raw materials are as follows:
19 percent of diamond
36 percent of epoxy resin powder
11 percent of silicon carbide
10 percent of alumina
15 percent of metallic cobalt
9 percent of modifier
(3) Solidifying the hot-pressed green body to obtain a grinding wheel tooth;
and (3) bonding the grinding wheel teeth on the base body in an adhesive mode to obtain the thinned grinding wheel for the sapphire substrate, wherein the wear-resisting coefficient at 20 ℃ is 0.08.
Processing parameters of the sapphire substrate: roughness Rz is less than or equal to 3.2 mu m, parallelism is less than or equal to 2.5 mu m, processing tact is 13s, and service life is 2100P.
The parameters of the prior ceramic grinding wheel for processing the sapphire substrate are as follows: roughness Rz is less than or equal to 6 mu m, parallelism is less than or equal to 5 mu m, processing time is 19s, and service life is 1400P.
Claims (6)
1. A thinning grinding wheel for a sapphire substrate comprises a base body; the base body is provided with a central hole; the base body is provided with a first ring of grinding wheel teeth, a second ring of grinding wheel teeth and a third ring of grinding wheel teeth; the first ring of grinding gear teeth are positioned at the edge of the base body; the second circle of grinding wheel teeth are positioned between the first circle of grinding wheel teeth and the third circle of grinding wheel teeth; the preparation method of the grinding wheel teeth comprises the following steps:
(1) adding titanium dioxide whiskers into a cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding aluminum phosphate, stirring for 2 hours, naturally cooling, and crushing to obtain a modifier;
(2) sieving a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
(3) and curing the hot-pressed blank to obtain the grinding wheel teeth.
2. The grinding wheel for thinning a sapphire substrate according to claim 1, wherein the grinding wheel teeth are bonded to the base by means of bonding; the height of the grinding wheel teeth is 12mm, the width of the grinding wheel teeth is 7mm, and the distance between every two adjacent grinding wheel teeth is 0.8-1 mm; the clearance between the first circle of grinding wheel teeth and the second circle of grinding wheel teeth is 0.5-0.6 mm, and the clearance between the second circle of grinding wheel teeth and the third circle of grinding wheel teeth is 0.5-0.6 mm.
3. The thinning grinding wheel for the sapphire substrate according to claim 1, wherein the mass ratio of the titanium dioxide whisker, the cyanate ester monomer and the aluminum phosphate is 12: 100: 19 when the modifier is prepared;
in the mixture, the volume percentages of the raw materials are as follows:
18 to 19 percent of diamond
35 to 40 percent of epoxy resin powder
6 to 12 percent of silicon carbide
8-12% of aluminum oxide
8-15% of metal cobalt
1-1.2% of 4-methylbenzyl alcohol
6-8% of a modifier.
4. The thinning grinding wheel for the sapphire substrate according to claim 1, wherein the diamond has a particle size of 34 to 40 μm; the diameter of the titanium oxide whisker is 50nm, and the length of the titanium oxide whisker is 600 nm; the particle size of the aluminum phosphate is 20-28 micrometers; the hot pressing temperature is 180 ℃, the pressure is 66KN, and the time is 15 min; the curing temperature was 200 ℃ and the curing time was 2 hours.
5. The grinding wheel for thinning the sapphire substrate according to claim 1, wherein the method for manufacturing the grinding wheel for thinning the sapphire substrate comprises the steps of:
(1) adding titanium dioxide whiskers into a cyanate ester monomer, stirring for 30 minutes at 150 ℃, adding aluminum phosphate, stirring for 2 hours, naturally cooling, and crushing to obtain a modifier;
(2) sieving a mixture of diamond, epoxy resin powder, silicon carbide, alumina, metal cobalt, 4-methyl benzyl alcohol and a modifier by a 300-mesh sieve to obtain a molding material; hot-pressing the molding material to obtain a hot-pressed green body;
(3) solidifying the hot-pressed green body to obtain grinding wheel teeth for thinning the sapphire substrate;
(4) and bonding the grinding wheel teeth on the base body in an adhesive mode to obtain the thinned grinding wheel for the sapphire substrate.
6. The thinning grinding wheel for the sapphire substrate according to claim 5, wherein the mass ratio of the titanium dioxide whisker, the cyanate ester monomer and the aluminum phosphate is 12: 100: 19 when the modifier is prepared;
in the mixture, the volume percentages of the raw materials are as follows:
18 to 19 percent of diamond
35 to 40 percent of epoxy resin powder
6 to 12 percent of silicon carbide
8-12% of aluminum oxide
8-15% of metal cobalt
1-1.2% of 4-methylbenzyl alcohol
6 to 8 percent of modifier
The particle size of the diamond is 34-40 mu m; the diameter of the titanium oxide whisker is 50nm, and the length of the titanium oxide whisker is 600 nm; the particle size of the aluminum phosphate is 20-28 micrometers; the hot pressing temperature is 180 ℃, the pressure is 66KN, and the time is 15 min; the curing temperature is 200 ℃, and the curing time is 2 hours;
the height of the grinding wheel teeth is 12mm, the width of the grinding wheel teeth is 7mm, and the distance between every two adjacent grinding wheel teeth is 0.8-1 mm; the clearance between the first circle of grinding wheel teeth and the second circle of grinding wheel teeth is 0.5-0.6 mm, and the clearance between the second circle of grinding wheel teeth and the third circle of grinding wheel teeth is 0.5-0.6 mm.
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| CN201711492486.5A CN108453619B (en) | 2017-12-30 | 2017-12-30 | Thinning grinding wheel for sapphire substrate |
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| CN110871402B (en) * | 2017-12-30 | 2020-11-27 | 苏州赛尔科技有限公司 | Thinning grinding wheel for sapphire substrate |
| CN110125822B (en) * | 2019-04-29 | 2021-06-15 | 宁波大学 | Fixed grinding tool for grinding sapphire substrate wafer and preparation method thereof |
| CN110815070B (en) * | 2019-11-06 | 2022-04-01 | 西安奕斯伟材料科技有限公司 | Grinding wheel |
| CN110722465A (en) * | 2019-11-06 | 2020-01-24 | 西安奕斯伟硅片技术有限公司 | Silicon chip thinning grinding wheel |
| CN111360608B (en) * | 2020-03-06 | 2021-08-27 | 徐州鑫晶半导体科技有限公司 | Control method for double-sided thinning grinding water flow |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108453619B (en) | 2020-02-21 |
| CN110774170A (en) | 2020-02-11 |
| CN110774170B (en) | 2021-04-09 |
| CN110871402B (en) | 2020-11-27 |
| CN108453619A (en) | 2018-08-28 |
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