CN110545957B - 工件的切断方法及接合部件 - Google Patents

工件的切断方法及接合部件 Download PDF

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Publication number
CN110545957B
CN110545957B CN201880026727.3A CN201880026727A CN110545957B CN 110545957 B CN110545957 B CN 110545957B CN 201880026727 A CN201880026727 A CN 201880026727A CN 110545957 B CN110545957 B CN 110545957B
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CN
China
Prior art keywords
workpiece
wire
fixed abrasive
grindstone
joining member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880026727.3A
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English (en)
Chinese (zh)
Other versions
CN110545957A (zh
Inventor
丰田史朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of CN110545957A publication Critical patent/CN110545957A/zh
Application granted granted Critical
Publication of CN110545957B publication Critical patent/CN110545957B/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0616—Grinders for cutting-off using a tool turning around the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN201880026727.3A 2017-05-02 2018-03-20 工件的切断方法及接合部件 Active CN110545957B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-091908 2017-05-02
JP2017091908 2017-05-02
PCT/JP2018/010922 WO2018203448A1 (ja) 2017-05-02 2018-03-20 ワークの切断方法及び接合部材

Publications (2)

Publication Number Publication Date
CN110545957A CN110545957A (zh) 2019-12-06
CN110545957B true CN110545957B (zh) 2021-07-23

Family

ID=64016055

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880026727.3A Active CN110545957B (zh) 2017-05-02 2018-03-20 工件的切断方法及接合部件

Country Status (5)

Country Link
JP (1) JP6835213B2 (ja)
KR (1) KR102476617B1 (ja)
CN (1) CN110545957B (ja)
TW (1) TWI717592B (ja)
WO (1) WO2018203448A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6969579B2 (ja) * 2019-01-15 2021-11-24 信越半導体株式会社 ワークの切断方法及びワイヤソー

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11240008A (ja) * 1998-02-24 1999-09-07 Sumitomo Metal Ind Ltd ウェーハのスライス方法
JP2010058249A (ja) * 2008-09-05 2010-03-18 Shin Etsu Handotai Co Ltd インゴット切断装置及び切断方法
JP2011031386A (ja) * 2009-07-10 2011-02-17 Mitsubishi Chemicals Corp 電着式固定砥粒ワイヤーおよびこれを用いた結晶スライス方法
CN103240805A (zh) * 2012-02-09 2013-08-14 硅电子股份公司 从工件同时切割多个切片的设备和方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114583A (en) * 1977-03-17 1978-10-06 Sony Corp Method of cutting ingot
JPH0283163A (ja) * 1988-09-19 1990-03-23 Hitachi Ltd 砥石ドレッシング方法
US5878737A (en) * 1997-07-07 1999-03-09 Laser Technology West Limited Apparatus and method for slicing a workpiece utilizing a diamond impregnated wire
AU2000251024A1 (en) * 2000-05-31 2001-12-11 Memc Electronic Materials S.P.A. Wire saw and process for slicing multiple semiconductor ingots
WO2005095076A1 (en) * 2004-03-30 2005-10-13 Solaicx, Inc. Method and apparatus for cutting ultra thin silicon wafers
JP2006268923A (ja) * 2005-03-22 2006-10-05 Fuji Photo Film Co Ltd 磁気記録媒体の表面処理方法
JP5263536B2 (ja) 2009-07-14 2013-08-14 信越半導体株式会社 ワークの切断方法
JP5853946B2 (ja) * 2012-01-06 2016-02-09 信越化学工業株式会社 外周切断刃の製造方法
US10252357B2 (en) * 2012-12-04 2019-04-09 Meyer Burger Ag Wire management system
DE102013219468B4 (de) * 2013-09-26 2015-04-23 Siltronic Ag Verfahren zum gleichzeitigen Trennen einer Vielzahl von Scheiben von einem Werkstück
JP5994766B2 (ja) * 2013-11-21 2016-09-21 信越半導体株式会社 ワークの切断方法
DE102015200198B4 (de) * 2014-04-04 2020-01-16 Siltronic Ag Verfahren zum Abtrennen von Halbleiterscheiben von einem Werkstück mit einem Sägedraht
DE102014208187B4 (de) * 2014-04-30 2023-07-06 Siltronic Ag Verfahren zum gleichzeitigen Trennen einer Vielzahl von Scheiben mit besonders gleichmäßiger Dicke von einem Werkstück

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11240008A (ja) * 1998-02-24 1999-09-07 Sumitomo Metal Ind Ltd ウェーハのスライス方法
JP2010058249A (ja) * 2008-09-05 2010-03-18 Shin Etsu Handotai Co Ltd インゴット切断装置及び切断方法
JP2011031386A (ja) * 2009-07-10 2011-02-17 Mitsubishi Chemicals Corp 電着式固定砥粒ワイヤーおよびこれを用いた結晶スライス方法
CN103240805A (zh) * 2012-02-09 2013-08-14 硅电子股份公司 从工件同时切割多个切片的设备和方法

Also Published As

Publication number Publication date
KR20200002845A (ko) 2020-01-08
WO2018203448A1 (ja) 2018-11-08
JP6835213B2 (ja) 2021-02-24
TWI717592B (zh) 2021-02-01
KR102476617B1 (ko) 2022-12-12
JPWO2018203448A1 (ja) 2020-01-23
TW201843725A (zh) 2018-12-16
CN110545957A (zh) 2019-12-06

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