CN110228063B - 机器人系统、设备制造装置、设备制造方法以及教学位置调整方法 - Google Patents

机器人系统、设备制造装置、设备制造方法以及教学位置调整方法 Download PDF

Info

Publication number
CN110228063B
CN110228063B CN201811567522.4A CN201811567522A CN110228063B CN 110228063 B CN110228063 B CN 110228063B CN 201811567522 A CN201811567522 A CN 201811567522A CN 110228063 B CN110228063 B CN 110228063B
Authority
CN
China
Prior art keywords
robot
robot hand
teaching
production line
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201811567522.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN110228063A (zh
Inventor
丸山洋一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Tokki Corp
Original Assignee
Canon Tokki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Tokki Corp filed Critical Canon Tokki Corp
Publication of CN110228063A publication Critical patent/CN110228063A/zh
Application granted granted Critical
Publication of CN110228063B publication Critical patent/CN110228063B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0096—Programme-controlled manipulators co-operating with a working support, e.g. work-table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/022—Optical sensing devices using lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/023—Optical sensing devices including video camera means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1612—Programme controls characterised by the hand, wrist, grip control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
    • G09B25/00—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes
    • G09B25/02—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes of industrial processes; of machinery
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Automation & Control Theory (AREA)
  • Educational Technology (AREA)
  • Educational Administration (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
CN201811567522.4A 2018-03-05 2018-12-20 机器人系统、设备制造装置、设备制造方法以及教学位置调整方法 Active CN110228063B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020180026050A KR101957096B1 (ko) 2018-03-05 2018-03-05 로봇 시스템, 디바이스 제조 장치, 디바이스 제조 방법 및 티칭 위치 조정방법
KR10-2018-0026050 2018-03-05

Publications (2)

Publication Number Publication Date
CN110228063A CN110228063A (zh) 2019-09-13
CN110228063B true CN110228063B (zh) 2022-08-30

Family

ID=65758586

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811567522.4A Active CN110228063B (zh) 2018-03-05 2018-12-20 机器人系统、设备制造装置、设备制造方法以及教学位置调整方法

Country Status (3)

Country Link
JP (2) JP2019153776A (ja)
KR (1) KR101957096B1 (ja)
CN (1) CN110228063B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11279032B2 (en) * 2019-04-11 2022-03-22 Applied Materials, Inc. Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots
CN110370271B (zh) * 2019-04-30 2020-09-25 杭州亿恒科技有限公司 工业串联机器人的关节传动比误差校准方法
DE102019130820A1 (de) * 2019-11-14 2021-05-20 Webasto SE Verfahren und ein System zum Laden einer Batterie eines Elektrofahrzeugs
US11370114B2 (en) 2019-12-09 2022-06-28 Applied Materials, Inc. Autoteach enclosure system
JP7456357B2 (ja) * 2020-11-16 2024-03-27 株式会社島津製作所 バイアル供給システム及びガスクロマトグラフィ分析システム
KR102627640B1 (ko) * 2021-09-16 2024-01-23 에스엔피 주식회사 진공 챔버에 구비되는 로봇 조립체의 티칭 시스템
KR102627226B1 (ko) * 2021-09-16 2024-01-19 에스엔피 주식회사 진공 챔버에 구비되는 로봇 조립체의 모니터링 시스템

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1070174A (ja) * 1996-08-27 1998-03-10 Toshiba Corp ウェハの位置決め装置及び方法
JPH11254359A (ja) * 1998-03-12 1999-09-21 Toyota Autom Loom Works Ltd 部材搬送システム
JP2000097625A (ja) * 1998-09-18 2000-04-07 Matsushita Electric Ind Co Ltd ウエハ位置合わせ用光学式リニアセンサの位置自動補正方法とこれに使用する半導体加工装置
JP2003110004A (ja) * 2001-09-28 2003-04-11 Assist Japan Kk ウェハ搬送における位置補正方法
JP2006321046A (ja) * 2006-08-04 2006-11-30 Denso Corp 多関節型ロボットの制御方法
CN101036984A (zh) * 2006-03-13 2007-09-19 发那科株式会社 示教位置修正装置以及示教位置修正方法
CN102881618A (zh) * 2011-07-15 2013-01-16 东京毅力科创株式会社 基板搬送装置、基板处理系统和基板搬送方法
CN104044131A (zh) * 2013-03-15 2014-09-17 株式会社安川电机 机器人系统、校正方法及被加工物制造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4359365B2 (ja) * 1999-08-26 2009-11-04 キヤノンアネルバ株式会社 基板処理装置及び基板処理装置における基板位置ずれ補正方法
JP5159010B2 (ja) * 2000-09-08 2013-03-06 株式会社半導体エネルギー研究所 発光装置の作製方法
US20040123804A1 (en) * 2002-09-20 2004-07-01 Semiconductor Energy Laboratory Co., Ltd. Fabrication system and manufacturing method of light emitting device
CN101223010A (zh) * 2005-07-15 2008-07-16 株式会社安川电机 晶片位置示教方法及示教夹具装置
JP4869852B2 (ja) * 2006-09-28 2012-02-08 株式会社ダイヘン 搬送用ロボットの教示方法
KR101091265B1 (ko) * 2008-12-03 2011-12-07 현대중공업 주식회사 다관절 로봇의 핸드 위치 점검 장치 및 방법
JP2010162611A (ja) * 2009-01-13 2010-07-29 Ulvac Japan Ltd 相対ティーチング方法
JP2012094554A (ja) * 2009-01-14 2012-05-17 Canon Anelva Corp 真空処理装置、電子部品の製造方法及び真空処理プログラム
US8459922B2 (en) * 2009-11-13 2013-06-11 Brooks Automation, Inc. Manipulator auto-teach and position correction system
JP2015032617A (ja) * 2013-07-31 2015-02-16 株式会社ダイヘン 搬送ロボットの教示データ補正方法、および搬送システム
KR20160055010A (ko) * 2014-11-07 2016-05-17 삼성전자주식회사 웨이퍼 이송 로봇 및 그 제어 방법
JP7094115B2 (ja) * 2018-02-16 2022-07-01 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1070174A (ja) * 1996-08-27 1998-03-10 Toshiba Corp ウェハの位置決め装置及び方法
JPH11254359A (ja) * 1998-03-12 1999-09-21 Toyota Autom Loom Works Ltd 部材搬送システム
JP2000097625A (ja) * 1998-09-18 2000-04-07 Matsushita Electric Ind Co Ltd ウエハ位置合わせ用光学式リニアセンサの位置自動補正方法とこれに使用する半導体加工装置
JP2003110004A (ja) * 2001-09-28 2003-04-11 Assist Japan Kk ウェハ搬送における位置補正方法
CN101036984A (zh) * 2006-03-13 2007-09-19 发那科株式会社 示教位置修正装置以及示教位置修正方法
JP2006321046A (ja) * 2006-08-04 2006-11-30 Denso Corp 多関節型ロボットの制御方法
CN102881618A (zh) * 2011-07-15 2013-01-16 东京毅力科创株式会社 基板搬送装置、基板处理系统和基板搬送方法
CN104044131A (zh) * 2013-03-15 2014-09-17 株式会社安川电机 机器人系统、校正方法及被加工物制造方法

Also Published As

Publication number Publication date
JP6999018B2 (ja) 2022-01-18
CN110228063A (zh) 2019-09-13
JP2021073682A (ja) 2021-05-13
JP2019153776A (ja) 2019-09-12
KR101957096B1 (ko) 2019-03-11

Similar Documents

Publication Publication Date Title
CN110228063B (zh) 机器人系统、设备制造装置、设备制造方法以及教学位置调整方法
CN114952898A (zh) 机器人系统、设备制造装置、设备制造方法、教学位置调整方法及计算机可读取记录介质
JP5561260B2 (ja) ロボットシステム及び撮像方法
US11173608B2 (en) Work robot and work position correction method
US10020216B1 (en) Robot diagnosing method
CN110154038B (zh) 机器人的位置信息恢复方法
JP2002118162A (ja) 被処理体の処理システムの搬送位置合わせ方法及び被処理体の処理システム
JP2020116717A (ja) ロボット制御システム
JP2017168619A (ja) 部品搭載方法および部品実装装置
CN110303505B (zh) 机器人的位置信息恢复方法
JP7129788B2 (ja) 産業用ロボットの補正値算出方法
JP2009004400A (ja) 実装機および部品吸着装置
JP7106608B2 (ja) マーク検出装置、アライメント装置、成膜装置、マーク検出方法、および、成膜方法
JP2009212251A (ja) 部品移載装置
JP2009049251A (ja) ウエハ搬送装置
CN110153993B (zh) 工业用机器人的修正值计算方法
JP2019141931A (ja) 産業用ロボットの補正値算出方法
KR102003659B1 (ko) 로봇 시스템, 디바이스 제조 장치, 디바이스 제조 방법, 티칭 위치 조정 방법 및 컴퓨터 판독가능 기록 매체
CN111052337B (zh) 机器人的诊断方法
JP2008218488A (ja) 実装方法
JP7542218B2 (ja) 部品実装装置および部品実装方法
JP2003031642A (ja) 基板搬送装置、それを用いたペースト塗布装置、及びペースト塗布方法
US20240076127A1 (en) Ceiling storage system and control method thereof
JP7531760B1 (ja) 支援装置、支援システム、支援方法及びプログラム
JP7245971B2 (ja) 部品実装システムおよび実装基板の製造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant