CN110228063B - Robot system, device manufacturing apparatus, device manufacturing method, and teaching position adjustment method - Google Patents

Robot system, device manufacturing apparatus, device manufacturing method, and teaching position adjustment method Download PDF

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Publication number
CN110228063B
CN110228063B CN201811567522.4A CN201811567522A CN110228063B CN 110228063 B CN110228063 B CN 110228063B CN 201811567522 A CN201811567522 A CN 201811567522A CN 110228063 B CN110228063 B CN 110228063B
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robot
robot hand
teaching
production line
information
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CN110228063A (en
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丸山洋一
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Canon Tokki Corp
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Canon Tokki Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0096—Programme-controlled manipulators co-operating with a working support, e.g. work-table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/022—Optical sensing devices using lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B25J19/021—Optical sensing devices
    • B25J19/023—Optical sensing devices including video camera means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1612—Programme controls characterised by the hand, wrist, grip control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
    • G09B25/00—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes
    • G09B25/02—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes of industrial processes; of machinery
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Optics & Photonics (AREA)
  • Orthopedic Medicine & Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Educational Technology (AREA)
  • Educational Administration (AREA)
  • Business, Economics & Management (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The robot system of the present invention includes: a robot including a shaft portion, a robot arm portion having one end rotatably coupled to the shaft portion, and a robot hand rotatably coupled to the other end of the robot arm portion; a control mechanism for controlling the operation of the robot; and a measuring unit configured to measure a position of the robot hand in a direction along a rotation axis on which the robot hand rotates, wherein the control unit adjusts the position of the robot hand in the direction based on the position of the robot hand in the direction measured by the measuring unit.

Description

Robot system, device manufacturing apparatus, device manufacturing method, and teaching position adjustment method
Technical Field
The present invention relates to a robot system.
Background
In recent years, in a production line of an organic EL display device which has attracted attention as a flat panel display device, a robot having a hand coupled to a multi-joint arm of a link mechanism is used to transfer a substrate and/or a mask to a processing chamber (for example, a film forming chamber), a passage chamber, a buffer chamber, a mask storage chamber, and the like.
When a robot is first installed in a production line or when a robot arm or a robot hand is replaced for maintenance of the robot arm or the robot hand, in order for such a robot to be able to carry a substrate or a mask to a correct target position, a teaching (teaching) operation for teaching a start point and a step (carrying rail) of a carrying operation of the robot is performed before the carrying operation is started.
As a teaching method of a robot, a method in which an operator grasps a robot hand to directly teach a standby position, a transfer position of a substrate or a mask, and the like, a method in which an operator operates a robot through an operation panel to sequentially designate a position to be a starting point of a transfer operation, and the like are generally known.
Information on the standby position and the transport position of the robot hand taught by the teaching operation is stored in the control means of the robot, and during the actual transport operation, the robot reproduces the transport operation in accordance with the stored information on the standby position and the transport position.
Usually, an operator manually teaches a waiting position of a robot hand and a transfer position for transferring and receiving a substrate and a mask. That is, since the operator visually confirms the operation of the robot and manually performs the teaching operation, the operator is required to have high proficiency, which takes time for the teaching operation.
Disclosure of Invention
Problems to be solved by the invention
In the technique described in patent document 1 (japanese patent application laid-open No. 2012 and 54013), the entire transfer robot can be moved up and down, but the position of the robot hand cannot be controlled with high accuracy.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a robot system, a device manufacturing apparatus, a device manufacturing method, and a teaching position adjusting method, which are capable of controlling the position of a robot hand with high accuracy.
Means for solving the problems
A robot system according to a first aspect of the present invention includes: a robot including a shaft portion, a robot arm portion having one end rotatably coupled to the shaft portion, and a robot hand rotatably coupled to the other end of the robot arm portion; a control mechanism for controlling the operation of the robot; and a measuring unit configured to measure a position of the robot hand in a direction along a rotation axis on which the robot hand rotates, wherein the control unit adjusts the position of the robot hand in the direction based on the position of the robot hand in the direction measured by the measuring unit.
A device manufacturing apparatus according to a second aspect of the present invention includes: a plurality of chambers; and a robot system for conveying a conveyed object between the plurality of chambers, the robot system being the robot system according to the first aspect of the present invention.
A device manufacturing method according to a third aspect of the present invention includes: a step of preparing a robot system including a robot hand and a control mechanism for controlling the operation of the robot; a step of storing a plurality of teaching positions including a plurality of transfer positions at which substrates for the devices should be transferred in a storage section of the control means of the robot system; a step of setting the robot hand at a predetermined position and measuring a position of the robot hand in a direction along a rotation axis along which the robot hand rotates by a measuring mechanism separated in the direction; a step of storing 1 st information relating to the measured position of the robot hand in the direction in the storage unit; measuring the position of the robot hand in the direction again by the measuring means in a state where the control means controls the robot hand to be set at the predetermined position; calculating a positional displacement amount of the robot hand in the direction based on the 1 st information and the 2 nd information relating to the position of the robot hand in the direction measured again; and a step of correcting, when the amount of positional deviation in the direction exceeds a predetermined threshold value, information on the position of the robot hand in the direction, among the information on the plurality of teaching positions stored in the storage unit, based on the amount of positional deviation in the direction.
A teaching position adjustment method according to a third aspect of the present invention is a teaching position adjustment method in a robot system including a transfer robot including a robot hand and a control mechanism for controlling an operation of the robot, the teaching position adjustment method including: a step of storing a plurality of teaching positions of the robot including a plurality of conveying positions at which the object to be conveyed should be conveyed in a storage unit of the control means; a step of setting the robot hand at a predetermined position and measuring a position of the robot hand in a direction along a rotation axis along which the robot hand rotates by a measuring mechanism separated in the direction; a step of storing 1 st information relating to the measured position of the robot hand in the direction in the storage unit; measuring the position of the robot hand in the direction again by the measuring means in a state where the control means controls the robot hand to be set at the predetermined position; measuring a positional displacement amount of the robot hand in the direction based on the 1 st information and the 2 nd information relating to the position of the robot hand in the direction measured again; and a step of correcting, when the amount of positional displacement in the direction exceeds a predetermined threshold value, information relating to the position of the robot hand in the direction, among the information relating to the plurality of teaching positions stored in the storage unit, based on the amount of positional displacement in the direction.
Effects of the invention
According to the present invention, the robot can be controlled with high accuracy by measuring the position along the direction of the rotation axis of the robot hand.
Drawings
Fig. 1 is a schematic diagram of a part of a production line of an organic EL display device.
Fig. 2 is a schematic view of the robotic system of the present invention.
Fig. 3 is a schematic diagram of a robotic system for teaching position adjustment of the present invention.
Detailed Description
Preferred embodiments and examples of the present invention will be described below with reference to the accompanying drawings. However, the following embodiments and examples are illustrative of preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations. In the following description, unless otherwise specified, the hardware configuration and software configuration of the apparatus, the flow of the process, the manufacturing conditions, the size, the material, the shape, and the like are not intended to limit the scope of the present invention thereto.
< production line of electronic apparatus >
Fig. 1 is a plan view schematically illustrating a part of the structure of a production line of electronic devices.
The manufacturing line of fig. 1 is used for manufacturing a display panel of an organic EL display device for a smart phone, for example. In the case of a display panel for a smartphone, for example, after organic EL is formed on a substrate having a full size (about 1500mm × about 1850mm) or a half-cut size (about 1500mm × about 925mm), the substrate is cut to produce a plurality of small-sized panels.
As shown in fig. 1, a film formation unit 1 in a production line of an organic EL display device generally includes a plurality of film formation chambers 11 for performing processes (for example, film formation) on a substrate 10, a plurality of mask stocker chambers 12 for storing masks before and after use, and a transfer chamber 13 disposed at the center thereof.
In the transfer chamber 13, the substrate 10 is transferred between the plurality of film forming chambers 11, and a robot 14 for transferring a mask is provided between the film forming chambers 11 and the mask storage chamber 12. The robot 14 is, for example, a robot having a structure in which a robot hand for holding the substrate 10 is attached to a multi-joint arm. The structure of the robot 14 of the present invention will be described in detail with reference to fig. 2. In the present embodiment, an example is described in which the robot 14 is a transfer robot for transferring a substrate or a mask, but the present invention is not limited to this, and can be applied to other robots.
Each of the film forming chambers 11 is provided with a film forming device (also referred to as a vapor deposition device). In the film forming apparatus, a vapor deposition material stored in an evaporation source is heated and evaporated by a heater, and is deposited on a substrate through a mask. A series of film formation processes such as delivery and reception of the substrate 10 to and from the robot 14, adjustment (alignment) of the relative position between the substrate 10 and the mask, fixation of the substrate 10 to the mask, film formation (vapor deposition), and the like are automatically performed by the film formation apparatus. The film deposition apparatus may be of a Dual Stage (Dual Stage) type having two stages. In the film deposition apparatus of the dual stage type, while a film is deposited on a substrate 10 carried into one stage, another substrate 10 carried into another stage is aligned.
The mask stock chamber 12 stores the masks used in the film forming process in the film forming chamber 11 and the used masks in two cassettes. The robot 14 transports the used mask from the film forming chamber 11 to the cassette of the mask stocker 12, and transports a new mask stored in another cassette of the mask stocker 12 to the film forming chamber 11.
In a film forming unit 1 of a production line of an organic EL display device, a passage chamber 15 and a buffer chamber 16 are connected, the passage chamber 15 transferring a substrate 10 from an upstream side to the film forming unit 1 in a flow direction of the substrate 10, and the buffer chamber 16 transferring the substrate 10 having completed a film forming process in the film forming unit 1 to another film forming unit on a downstream side. The robot 14 of the transfer chamber 13 receives the substrate 10 from the upstream passage chamber 15 and transfers the substrate to one of the film forming chambers 11 in the film forming unit 1. The robot 14 receives the substrate 10 subjected to the film formation process in the film forming unit 1 from one of the plurality of film forming chambers 11, and conveys the substrate to a buffer chamber 16 connected to the downstream side.
In this way, the robot 14 transports objects to be transported such as substrates and masks between various chambers disposed around the transport chamber 13.
The film forming unit 1 of the present invention is described with reference to fig. 1, but the film forming unit 1 of the present invention is not limited thereto, and may have other types of chambers, and the arrangement between the chambers may be changed.
The configuration of a robot system including the robot 14 will be described below.
< robot System >
Fig. 2 exemplarily illustrates a configuration of a robot system including the robot 14.
In the following description, an XYZ coordinate system is used in which the Z axis is a direction parallel to the rotation axis of the robot arm portion of the robot 14 and the connection portion of the robot hand. When the direction of the Z axis is defined as the 3 rd direction, one of the directions of the X axis and the Y axis perpendicular thereto is defined as the 1 st direction, and the other direction is defined as the 2 nd direction. In addition, θ represents a rotation angle about the Z-axis direction, and a rotation direction about the Z-axis direction is defined as a rotation angle direction.
The robot system of the present invention includes a robot 14 and a control mechanism 25 for controlling the motion of the robot 14.
The robot 14 includes a base portion 21 provided on the bottom surface of the transfer chamber 13, a shaft portion 22 extending from the base portion 21 in the vertical direction or the Z-axis direction (3 rd direction) and movable in the Z-axis direction, and a robot arm portion 23 rotatably connected to the shaft portion 22. In fig. 2(a), the robot 14 having one robot arm portion 23 is illustrated, but the robot 14 may have two or more robot arm portions 23. This improves the efficiency of conveying the substrate 10 and the mask, and shortens the process time.
The robot arm portion 23 may have a structure in which a plurality of arms are connected to each other via joint portions so as to be rotatable with respect to each other. For example, the robot arm portion 23 may include a 1 st arm 231 having one end rotatably coupled to the shaft portion 22, and a 2 nd arm 232 having one end rotatably coupled to the other end of the 1 st arm 231. In fig. 2(a), the two arms are coupled to each other by the joint portion so as to be rotatable with respect to each other, but the present invention is not limited to this, and may have a structure in which the two arms are relatively slidably displaced in the longitudinal direction of the arms so as to be extendable and retractable. Although the case where the 1 st arm 231 is rotatably coupled to the shaft 22 has been described, the present invention is not limited to this, and the 1 st arm 231 may be fixedly coupled to the shaft 22, and instead the shaft 22 itself may be rotatable.
The other end of the 2 nd arm 232 is provided with a robot hand 24 so as to be rotatable. The robot hand 24 has a structure capable of placing a substrate and a mask thereon. Although not shown in fig. 2, the robot hand 24 may have a plurality of support portions extending in a direction intersecting the longitudinal direction of the robot hand 24 (the direction from the connection portion with the robot arm toward the free tip of the robot hand) in order to stably support the substrate. On the substrate/mask placing surface of the robot hand 24, fluorine coating or the like can be performed to prevent damage to the substrate 10. In addition, a holding mechanism such as a gripping mechanism may be provided to prevent the substrate 10 from moving or falling on the robot hand 24 during conveyance.
The robot 14 of the present invention having such a structure can perform linear movement, rotational movement, and combined movement of the substrate or the mask placed on the robot hand 24 by adjusting the rotation angle of the 1 st arm 231, the angle between the 1 st arm 231 and the 2 nd arm 232, the angle between the 2 nd arm 232 and the robot hand 24, and the height of the shaft 22 about the shaft 22, and can move the substrate or the mask to any desired position on the XYZ coordinate system.
The robot system of the present invention includes a control mechanism 25 that controls the operation of the robot 14. The control mechanism 25 may be implemented by a computer having a processor, memory, storage, I/O, etc. For example, the control unit 25 includes a storage unit 251 in which a program for controlling the transfer operation of the robot 14 is stored, and a processor 252 which executes the program stored in the storage unit 251 to control the robot 14. As the computer, a general-purpose personal computer may be used, or an embedded computer or a PLC (programmable logic controller) may be used. Alternatively, a part or all of the functions of the control unit 25 may be constituted by a circuit such as an ASIC or FPGA. In the present embodiment, a case where the control mechanism 25 is provided separately from the robot 14 is described, but the present invention is not limited to this, and the robot 14 may have the control mechanism 25.
The storage unit 251 can store information on a plurality of teaching positions (standby position and conveyance position) for controlling the conveyance operation of the robot 14. The control means 25 controls the robot hand 24 to be movable to a corresponding position based on the information on the teaching position stored in the storage unit 251.
As shown in fig. 2(b), the robot 14 includes a 1 st arm driving unit 2311 for rotating the axis of the 1 st arm 231, a 2 nd arm driving unit 2321 for rotating the axis of the 2 nd arm 24, a robot hand driving unit 242 for rotating the axis of the robot hand 24, and a vertical movement driving unit 221 for vertically driving the shaft 22.
Each of the driving units includes a servo motor (not shown) and a power transmission mechanism (not shown). The servo motor transmits rotational power to the shaft of the 1 st arm 231, the shaft of the 2 nd arm 232, and the shaft of the robot hand 24 via the power transmission mechanism, whereby the 1 st arm 231, the 2 nd arm 232, and the robot hand 24 rotate, respectively.
The elevation driving unit 221 is provided in the base unit 21 of the robot 14 and is implemented by a ball screw mechanism including a rotating motor. For example, the elevation driving unit 221 includes a screw shaft, a ball nut configured to be screwed with the screw shaft, and a rotating motor configured to rotate the screw shaft. In this case, the shaft portion 22 is fixed to the ball nut and moves up and down together with the ball nut as the screw shaft rotates.
The control mechanism 25 can perform feedback control on each driving unit by acquiring information on the angular position of the 1 st arm 231, the angular position of the 2 nd arm 232, the angular position of the robot hand 24, and the height of the shaft 22 from these driving units. Thereby, the robot hand 24 can be moved to the teaching position with high accuracy.
< teaching of robot >
As described with reference to fig. 1, the robot 14 transfers the substrate 10 between the plurality of film forming chambers 11 and the passage chamber 15 or the buffer chamber 16 in the film forming unit 1.
Taking as an example the case where the substrate 10 is transferred from the passage chamber 15 to the 1 st film forming chamber 11a by the robot 14, from the 1 st standby position where the robot arm 23 of the robot 14 is retracted (that is, the joint of the robot arm 23 is bent so that the angle between the 1 st arm and the 2 nd arm is reduced) and the free tip of the robot arm 24 is directed to the passage chamber 15, the robot arm 23 is extended to a carrying-out position on the substrate mounting table in the passage chamber 15 (this position becomes a teaching position with respect to the passage chamber), the substrate 10 on the substrate mounting table in the passage chamber 15 is received, the robot arm 23 is retracted again, and the substrate 10 is returned to the 1 st standby position.
Then, the robot arm portion 23 rotates about the shaft portion 22, and moves to the 2 nd standby position (becomes another teaching position) where the free tip of the robot arm portion 24 is directed to the 1 st film forming chamber 11 a. In this state, the robot arm 23 is extended again and moved to a position for carrying the substrate into the 1 st film forming chamber 11a (teaching position with respect to the 1 st film forming chamber), thereby carrying the substrate into the 1 st film forming chamber 11 a. After that, the robot hand 24 returns to the 2 nd standby position.
Such a transfer operation of carrying in/out the substrate is repeated until all the film formation processes in the film formation unit 1 are completed and the substrate is transferred to the buffer chamber 16 on the downstream side of the flow of the substrate. In order to smoothly complete the transfer operation by the robot 14, information on the standby position in the film deposition unit 1 and the loading/unloading position of the substrate 10 is stored as teaching position information in the storage unit 251 of the control mechanism 25.
The operation of teaching the robot 14 with the position information (e.g., X, Y, Z and θ coordinate values of the position) related to the teaching position (the operation of measuring the position and storing the measured position in the storage unit 251 of the control means 25) is referred to as teaching operation, and is performed by the operator when the robot 14 is installed in the film deposition machine group 1 or when the robot arm 23 or the robot hand 24 is removed or replaced for maintenance.
The teaching work is performed by moving the robot 14 little by the operator through the operation panel and moving the robot hand 24 to each teaching position, calculating the coordinate value of the teaching position based on the information on the rotation angle of the 1 st arm 23 around the shaft 22, the rotation angle between the 1 st arm 231 and the 2 nd arm 232, the rotation angle between the 2 nd arm 232 and the robot hand 24, and the position of the shaft 22 in the Z-axis direction at the teaching position, and storing the coordinate value in the control unit 25. At this time, the rotation angle values and the like are obtained from the driving unit 2311 of the axis of the 1 st arm 231, the driving unit 2321 of the axis of the 2 nd arm 232, the driving unit 242 of the axis of the robot hand 24, and the elevation driving unit 221 of the axis 22.
Such teaching work is usually performed by an operator manually operating the operation panel to rotate or expand and contract the robot arm 23 and/or the robot hand 24 of the robot 14, but the position information may be obtained by guiding the robot hand 24 to a target position using a guide provided at each teaching position. Further, the teaching operation may be performed so that a mark provided on the robot hand 24 moved to the target position is recognized by a sensor to obtain coordinate values of the teaching position.
In addition, even when the relative relationship between the chambers is fixed, for example, even when the teaching positions (substrate carrying-in/carrying-out positions) in the chambers are located at substantially the same distance from the shaft 22 of the robot 14 (that is, even when the teaching positions are arranged on an arc centered on the robot 14), teaching work for another chamber (teaching position) can be performed quickly by using the relative positional relationship between the chambers.
The teaching work is generally performed in a state where the substrate 10 is not placed on the robot hand 24, but may be performed in a state where the substrate 10 is placed on the robot hand 24. This makes it possible to accurately teach the conveying state in accordance with the actual conveying state. In particular, in order to accurately teach the height of the robot hand 24 in the Z-axis direction, it is preferable to perform teaching work in a state where the substrate 10 is placed on the robot hand 24.
< robot System for adjusting teaching position >
A robot system for adjusting teaching positions (standby position and transport position) according to the present invention will be described below with reference to fig. 3.
After the initial installation of the robot 14 or the maintenance of the robot arm portion 23/robot hand portion 24, when the robot 14 is actually used to transport a substrate or a mask, the robot arm portion 23 and the robot hand portion 24 may collide with other portions constituting the production line. For example, in the process of transferring the substrate 10 or the mask into each chamber by the robot 14 in the film formation unit 1, the robot hand 24 or the like may collide with the substrate holder, the substrate mounting table, or the substrate support portion such as the film formation chamber 11, the passage chamber 15, or the buffer chamber 16, and may collide with the mask storage cassette in the mask storage chamber 12 or the mask support portion in the cassette.
When a mechanical impact is applied to the robot hand 24, the robot arm portion 23, and the like, the robot hand 24 and the robot arm portion 23 themselves may be deformed, and the joint portion therebetween may also be deformed.
For example, even if a collision does not occur, the robot hand 24 itself is deformed by the weight of the base plate 10 due to an increase in the size of the base plate, or the joint portion is deformed due to a load continuously applied to the joint portion of the robot 14, and the moving position of the robot hand 24 sometimes differs from that in the first teaching.
In this case, even if the control means 25 issues a command for moving the robot hand 24 to the teaching position to the drive unit of each joint and the elevation drive unit 221 based on the information on the teaching position stored in the storage unit 251, the robot hand 24 does not move to the teaching position but moves to a position deviated from the present position. That is, even if the substrate 10 held by the robot hand 24 is moved to the teaching position (standby position and transfer position) stored in the control mechanism 25, the substrate is moved to a position shifted in the directions X, Y, Z and θ without moving to a position assumed during teaching. Such a positional deviation further increases the possibility of collision with other devices in the production line during the conveyance of the substrate or the mask, and causes a problem in the processing (e.g., film formation) of the substrate.
In particular, unlike the semiconductor substrate, since the display substrate is very large in size, the robot hand 24 is also greatly loosened, the risk of collision is high, and the possibility of positional deviation in the Z-axis direction is also high. Therefore, it is necessary to correct the positional deviation of the robot hand 24 in the Z-axis direction.
In the related art, if it is determined that the robot 14 performs a conveying operation at a position different from the position taught during teaching or on a different track due to a positional deviation of the robot hand 24 or the like caused by a collision or the like of the robot 14 as described above, the teaching operation is performed again at all teaching positions (conveying positions such as a standby position and a carrying-in/carrying-out position) in the film forming unit 1.
However, in the production line of the organic EL display device, teaching positions of the robot 14 include: since teaching work for each position takes time because of a plurality of positions such as a position where a substrate and a mask are placed in a processing chamber (film forming chamber) disposed around a transfer chamber where the robot 14 is disposed, a position where the mask before and after use is stored in the mask stocker chamber 12, and a position where the substrate is transferred to and from the passage chamber 15 and the buffer chamber 16.
Further, in the unit time period, the robot 14 may have two robot arms 23, thereby enabling more transport operations, and it is necessary to separately perform teaching in an open atmosphere state and a vacuum state for each teaching position, and therefore, in a large-scale production line, it is necessary to perform teaching work as many as several tens of times, it takes several tens of hours for teaching work, and the production line may be stopped during this period.
In the present invention, when the robot 14, particularly the robot hand 24, is displaced due to a collision or the like of the robot 14, the positional displacement amount of the robot hand 24 at a predetermined position (in the present embodiment, this is referred to as an origin position, and the origin position may be, for example, a substrate/mask transfer position in a specific chamber) is measured, instead of performing a re-teaching operation for all teaching positions in the film deposition unit 1, and the positional information of the other plural teaching positions is corrected based on this. Thus, teaching work for other teaching positions can be omitted, and the time taken for re-teaching work can be shortened.
As shown in fig. 3, the robot system 30 of the present invention used for this purpose includes the robot 14, the control means 25, and the measurement means 31.
The measurement mechanism 31 of the robot system 30 of the present invention can calculate the amount of positional displacement of the robot hand 24 in the Z-axis direction by measuring the height of the robot hand 24, that is, the position in the Z-direction.
The measurement mechanism 31 is provided at a position corresponding to the robot hand 24 at the origin position so as to be able to measure the height of the robot hand 24 in a state where the robot hand 24 is provided at the origin position (for example, a substrate carry-out position in the passage chamber 15). For example, when the origin position is the substrate carrying-out position of the passage chamber 15, the measurement mechanism 31 is provided at a position separated from the lower surface of the robot hand 24 in the Z-axis direction so that the height of the lower surface of the robot hand 24 can be detected below the substrate mounting table of the passage chamber 15.
The measuring means 31 is preferably a laser sensor 311 capable of measuring the height of the robot hand 24 by reflecting a laser beam on the lower surface of the robot hand 24 and detecting the returned laser beam, for example, but the present invention is not limited to this, and may be other means as long as the height of the robot hand 24 can be detected.
For example, the measuring unit 31 of the present invention may be an imaging camera. When the camera for imaging is used, the height of the robot hand 24 can be measured using the degree of focus (focal length) of an image captured by the camera. When an imaging camera is used as the measurement means 31, a transparent window may be provided on the bottom surface of the passage chamber 15 and an imaging camera may be provided outside the transparent window, but the present invention is not limited to this and an imaging camera may be provided in the passage chamber 15.
By measuring the height of the robot hand 24 by the measuring mechanism 31 such as a laser sensor or an imaging camera in this manner, the amount of positional deviation of the robot hand 24, particularly the amount of positional deviation in the Z-axis direction, can be measured.
That is, before a positional deviation occurs in the robot 14 due to a collision or the like (for example, after the first teaching work), the robot hand 24 is set at the origin position, and the height of the robot hand 24 is measured by the measuring mechanism 31, whereby information (reference position information, 1 st information) relating to the position of the robot hand 24 in the Z-axis direction in the case where the robot hand 24 is set at the origin position can be obtained. The information on the position of the robot hand 24 in the X-axis direction, the Y-axis direction, and the rotation angle direction around the Z-axis can be acquired by, for example, providing a plurality of marks (241) arranged in the longitudinal direction of the robot hand 24 (the direction from the connection portion with the robot arm toward the free tip of the robot hand) or a linear mark extending in the longitudinal direction of the robot hand 24 in the robot hand 24, and imaging the marks with an imaging camera or the like.
The reference position information of the robot hand 24 thus obtained includes at least information relating to the position of the robot hand 24 in the Z-axis direction, and is stored in the storage unit 251 of the control mechanism 25 as the reference position information of the robot hand.
Thereafter, when a positional deviation occurs due to a collision or the like of the transfer robot 14, control is performed to set the robot hand 24 at the origin position (even if such control is performed, the robot hand 24 cannot move to the origin position before the collision due to deformation or the like caused by the collision or the like), and the position of the robot hand 24 is measured again by the measurement mechanism 31, whereby positional information in the Z-axis direction of the robot hand 24 after the positional deviation occurs is acquired again. By comparing the re-acquired position information (2 nd information) of the robot hand 24 in the Z-axis direction with the reference position information stored in the storage unit 251, the amount of positional displacement (Δ Z) of the robot hand 24 in the Z-axis direction before and after the collision can be obtained. The positional displacement amounts (Δ X, Δ Y, Δ θ) in the X-axis direction, the Z-axis direction, and the rotation angle direction around the Z-axis of the robot hand 24 are also obtained by comparing reference position information in each direction stored in advance in the storage unit 251 with position-related information in the corresponding direction after the collision.
That is, in the present invention, before the robot hand 24 is displaced, the position of the robot hand 24 is measured by the measuring means 31, the reference position of the robot hand 24 is calculated, and the calculated reference position is stored in the control means 25 in advance. Then, when a positional shift occurs due to a collision or the like of the robot hand 24, after control for resetting the robot hand 24 to the original position is performed, the shift position of the robot hand 24 is calculated, and the positional shift amount (Δ Z) of the robot hand 24 is calculated from the difference between the calculated position and the reference position.
As described above, according to the present invention, the robot hand is measured by the measuring means such as the laser sensor, the amount of positional deviation of the robot hand at the specific position (particularly, the amount of positional deviation in the vertical direction/Z axis direction) due to the collision or the like of the robot hand is measured, and the information on the other teaching positions (standby position and conveyance position) of the conveyance operation is corrected based on the measured amount of positional deviation. Thus, the device can be rerun only by the confirmation work of the teaching position without performing the rerun work for other teaching positions, and the time taken for rerun can be greatly shortened
In the present embodiment, the substrate carry-out position of the passage chamber 15 among the plurality of teaching positions in the film deposition unit 1 is set as the origin position for measuring the positional deviation amount of the robot hand 24. This is because, of the plurality of teaching positions in the film forming unit 1, the transport position of the passage chamber 15 is usually the position farthest from the shaft 22 of the robot 14, and the position displacement amount due to the collision of the robot hand 24 is the largest. Further, in the case of the passage chamber 15, unlike the film forming chamber 11 in which a vapor deposition source is provided in the lower portion of the chamber, there is an advantage that the measurement mechanism 31 can be easily provided below the substrate mounting table.
However, the origin position in the present invention is not limited to the position of the passage chamber 15 from which the substrate is carried out, and may be a transfer position in another chamber (for example, a film forming chamber, a buffer chamber, or a mask stock chamber), or may be any of positions in the transfer chamber (for example, a standby position in the transfer chamber). By setting the origin position to any one of a plurality of standby positions in the conveying chamber, the measurement mechanism 31 can be more easily installed. Further, the origin position in the present invention may be a 3 rd position which is not the teaching position of the film forming unit 1.
< method for adjusting teaching position and method for manufacturing device >
Hereinafter, a method of correcting a plurality of other teaching positions in the film forming unit 1 based on the amount of positional deviation of the origin position of the robot hand 24 and a method of manufacturing an apparatus such as an organic EL display device using the method will be described.
The amount of positional displacement in the Z-axis direction of the robot hand 24 can be calculated by feedback control or feedback loop control.
When the positional deviation amount is calculated by the feedback control, first, the robot hand 24 is set at the origin position, the position of the robot hand 24 in the Z-axis direction is measured by the measuring means 31, and the measured position is stored as reference position information (1 st information) in the storage unit 251 of the control means 25.
When a positional deviation occurs due to a collision or the like of the robot hand 24, after control for setting the robot hand 24 at the origin position is performed, the position of the robot hand 24 in the Z-axis direction is measured again by the measurement mechanism 31, and information (2 nd information) related to the position in the Z-axis direction measured again is compared with the reference position information stored in the storage unit 251 to obtain the 1 st positional deviation amount.
Next, the robot hand 24 is moved by the first position displacement amount, the position of the robot hand 24 in the Z-axis direction is measured again by the measuring means 31, and the measured position is compared with the stored reference position information.
When the measured position of the robot hand 24 in the Z-axis direction is different from the reference position information, the second positional displacement amount is calculated, and the robot hand 24 is moved by the second positional displacement amount.
The same procedure is repeated, and when the position of the robot hand 24 in the Z-axis direction becomes the reference position first stored in the storage unit 251, the 1 st positional deviation amount, the 2 nd positional deviation amount, and the like up to this point are all summed up and used as a correction value for adjusting the other teaching positions.
When calculating the positional deviation amount by the feedback loop control, first, the robot hand 24 is set at the origin position, the position of the robot hand 24 in the Z-axis direction is measured by the measuring means 31, and the measured position is stored as reference position information (1 st information) in the storage unit 251 of the control means 25.
When a positional shift occurs due to a collision or the like of the robot hand 24, after control for setting the robot hand 24 at the origin position is performed, the position of the robot hand 24 in the Z-axis direction is measured again by the measurement mechanism 31, and the robot hand 24 is moved in the Z-axis direction while comparing information (second information) related to the position in the Z-axis direction measured again with the reference position information stored in the storage unit 251.
If the current position of the robot hand 24 in the Z-axis direction matches the reference position stored in the storage unit 251, the movement of the robot hand 24 in the Z-axis direction is stopped. The total distance traveled by the robot hand 24 up to this point is used as a correction value for the other teaching positions.
A method of adjusting the other teaching positions based on the correction value thus calculated will be described.
First, a plurality of teaching positions (a transfer position and a standby position) at which the substrate 10 is to be transferred are taught to the robot 14. That is, the position information of the plurality of conveyance positions and the standby position is stored as teaching position information in the storage unit 251 of the control means 25 (S1).
The robot hand 24 of the robot 14 is set at one of the plurality of teaching positions, i.e., the origin position (S2). Then, the position of the robot hand 24 in the Z-axis direction is measured by the measuring means 31, and the position information of the robot hand 24 calculated based on the measurement result is stored in the storage unit 251 of the control means 25 as reference position information (1 st information) of the robot hand 24 (S3).
Thereafter, when the robot hand 24 is displaced due to deformation of the robot 14 caused by collision with other parts of the film deposition unit 1 during conveyance, control is performed to reset the robot hand 24 to the original position in order to measure the amount of displacement (S4). That is, position information corresponding to the origin position is input to the driving unit of the robot 14. However, the robot hand 24 cannot move to the origin position before the collision due to deformation or the like caused by the collision or the like, and moves to a position apart from the origin position. The position of the robot hand 24 moved to the deviated position is measured again by the measuring mechanism 31 (S5).
The control means 25 calculates the amount of positional displacement of the robot hand 24 before and after the collision, based on the information (second information) related to the position of the robot hand 24 measured again and the information (first information) related to the reference position stored in advance in the storage unit 251 of the control means 25. According to the configuration of the present invention, the amount of positional displacement in the Z direction can be measured. Similarly, the positional displacement amounts in the X-axis direction, the Y-axis direction, and the θ direction of the robot hand 24 are also measured.
The control means 25 compares the measured amount of positional displacement with thresholds predetermined for the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction, respectively. If it is determined that the amount of positional deviation in any of the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction exceeds the threshold value for that direction, the control means 25 corrects the positional information relative to the plurality of teaching positions stored in the storage unit 251 based on the amount of positional deviation in that direction.
For example, the positional information of the teaching position is corrected by adding or subtracting the positional deviation amount in the direction calculated by the control means 25 to or from the positional information of the other teaching position in the corresponding direction.
If the position information is corrected for all the teaching positions, it is checked whether or not the robot hand 24 can move to the target position without colliding with other parts of the film forming unit 1 by trying to operate the robot 14 based on the corrected teaching positions. If it is confirmed that the robot 14 can perform the transfer operation to the plurality of teaching positions without any problem, the transfer of the substrate/mask by the robot 14 is resumed.
As described above, according to the teaching position adjusting method of the present invention, after the robot 14 collides with another part of the film deposition unit 1, instead of performing teaching work for all of the plurality of teaching positions, only the positional displacement amount of the robot hand 24 at the origin position is measured, and correction is performed for the other teaching positions. This can significantly reduce the time taken for the re-teaching operation after the collision of the robot 14.
In the present embodiment, the description has been given of the case where the position of the marker 241 is measured again after the control for setting the robot hand 24 at the origin position is performed in the case where the robot hand 24 is displaced due to a collision or the like, but the present invention is not limited to this, and the position of the robot hand 24 may be measured again after the robot 14 is used for a certain time or more and after the control for setting the robot hand 24 at the origin position is performed even if a collision or the like does not occur. This makes it possible to prevent the robot 14 from colliding with another part of the film deposition unit 1 due to deformation of the joint portion or the like caused by continuous use of the robot 14.
The above-described embodiment is an example of the present invention, and the present invention is not limited to the configuration of the above-described embodiment, and can be appropriately modified within the scope of the technical idea.
Description of the reference numerals
1: film forming machine set
11: film forming chamber (processing chamber)
12: mask storage chamber
13: conveying chamber
14: robot
15: passage chamber
16: buffer chamber
22: shaft part
23: robot arm
24: robot hand
25: control mechanism
31: measuring mechanism
241: marking part

Claims (14)

1. A production line of electronic devices, comprising:
a 1 st film forming unit including a transfer chamber and a film forming chamber provided around the transfer chamber and performing a film forming process on a substrate;
a robot provided in the transfer chamber, the robot including a shaft portion, a robot arm portion having one end rotatably connected to the shaft portion, and a robot hand portion rotatably connected to the other end of the robot arm portion and on which a substrate is placed;
a passage chamber disposed between the 1 st film forming unit and the 2 nd film forming unit, the 2 nd film forming unit being disposed upstream of the 1 st film forming unit in a substrate transport direction, the passage chamber being configured to transfer substrates from the 2 nd film forming unit to the 1 st film forming unit;
a control means for controlling the operation of the robot based on the information on the 1 st teaching position when the robot hand enters the passage chamber, and controlling the robot based on the information on the 2 nd teaching position when the robot hand enters the film forming chamber;
a measurement unit disposed in the passage chamber, the measurement unit measuring a position of the robot hand in a direction along a rotation axis along which the robot hand rotates, and calculating a positional displacement amount of the robot hand; and
and a correction unit configured to correct the information on the 1 st teaching position and the information on the 2 nd teaching position based on a position offset amount of the robot hand, the position offset amount of the robot hand being calculated based on the position of the robot hand measured by the measurement unit when the robot hand enters the passage chamber.
2. The production line of electronic devices according to claim 1, wherein the control mechanism includes a storage section that stores information relating to a plurality of teaching positions.
3. The production line of electronic devices according to claim 2, wherein the control means stores, in the storage unit, 1 st information regarding the position of the robot hand in the direction measured by the measurement means in a state where the robot hand is set at a predetermined position.
4. The production line of electronic devices according to claim 3, wherein the control means adjusts the position of the robot hand in the direction based on 1 st information stored in the storage unit and 2 nd information relating to the position of the robot hand in the direction measured by the measurement means in a state where the control means controls the robot hand to be set at the predetermined position.
5. The production line of electronic devices according to claim 4, wherein the control mechanism calculates the positional deviation amount based on the 1 st information and the 2 nd information.
6. The production line of electronic devices according to claim 5, wherein the control means corrects, based on the amount of positional deviation, information relating to the position of the robot hand in the direction, among the information relating to the plurality of teaching positions stored in the storage unit, when the amount of positional deviation exceeds a predetermined threshold.
7. The production line of electronic devices according to claim 3, wherein the measurement mechanism is provided at a position away from the robot hand provided at the predetermined position in the direction.
8. The production line of electronic devices of claim 7, wherein the measuring mechanism is a laser sensor.
9. The production line of electronic devices according to claim 7, wherein the measuring mechanism is a camera for photographing.
10. The production line of electronic devices according to claim 9, wherein the control means calculates the position in the direction of the robot hand based on a degree of focus of the image of the robot hand captured by the capturing camera.
11. The production line of electronic devices according to claim 5, wherein the control mechanism calculates the positional deviation amount by feedback control.
12. The production line of electronic devices as claimed in claim 5, wherein the control mechanism calculates the positional deviation amount by feedback loop control.
13. The production line of electronic devices of claim 3, wherein the prescribed location is one of the plurality of teaching locations.
14. The production line of electronic devices according to claim 13, wherein the teaching position corresponding to the prescribed position is a position of the plurality of teaching positions at which the robot hand is farthest from the shaft portion in a direction perpendicular to the shaft portion.
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