CN110228063A - Robot system, device fabrication device, device manufacturing method and teaching location regulation method - Google Patents
Robot system, device fabrication device, device manufacturing method and teaching location regulation method Download PDFInfo
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- CN110228063A CN110228063A CN201811567522.4A CN201811567522A CN110228063A CN 110228063 A CN110228063 A CN 110228063A CN 201811567522 A CN201811567522 A CN 201811567522A CN 110228063 A CN110228063 A CN 110228063A
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- Prior art keywords
- robot
- robot hand
- teaching
- control mechanism
- information
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0096—Programme-controlled manipulators co-operating with a working support, e.g. work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/021—Optical sensing devices
- B25J19/022—Optical sensing devices using lasers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/021—Optical sensing devices
- B25J19/023—Optical sensing devices including video camera means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1602—Programme controls characterised by the control system, structure, architecture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1612—Programme controls characterised by the hand, wrist, grip control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1692—Calibration of manipulator
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B25/00—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes
- G09B25/02—Models for purposes not provided for in G09B23/00, e.g. full-sized devices for demonstration purposes of industrial processes; of machinery
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
Robot system of the invention, comprising: robot, the robot include that axle portion, one end can rotatably be linked to the robot arm of the axle portion and can rotatably be linked to the robot hand of the other end of the robot arm；Control the control mechanism of the movement of the robot；And measuring means, the measuring means is used to measure the position of the robot hand on the direction along the rotary shaft of robot hand rotation, the control mechanism adjusts the position on the direction of the robot hand based on the position on the direction determined by the measuring means.
Description
Technical field
The present invention relates to robot systems.
Background technique
Recently, in the production line of the organic EL display device to attract attention as panel display apparatus, using even
The robot of hand is linked on the multiple joint manipulator of linkage, by substrate and/or mask transfer to process chamber (for example, film forming
Room), channel room, surge chamber, mask storage chamber etc..
It is replaced robot is initially set when production line, or for machine maintenance human arm or robot
When robot arm or robot, in order to such robot can by substrate or mask transfer to correct target position,
The teaching of the starting point and step (rail) of the transporting operation for teaching robot is carried out before transporting operation starts
(teaching) operation.
It is generally known to there is operator to catch the direct teaching position of readiness of robot or base as the teaching method of robot
The method of the conveying position of plate, mask etc., operator are successively designated as transporting operation by operation panel operation robot
Starting point position method etc..
Information relevant to the position of readiness of robot being taught by teaching work and conveying position is deposited
Storage is in the control mechanism of robot, and in actual transporting operation, robot is according to the position of readiness and conveying position stored
Confidence breath, reproduces transporting operation.
In general, carrying out the conveying of the position of readiness about progress robot, the handover of substrate/mask manually by operator
The teaching of position.That is, operator manually carries out teaching work while visually confirming the movement of robot, therefore to work
The more demanding proficiency of dealer, teaching work expend the time.
Summary of the invention
The invention solves project
In the technology documented by patent document 1 (Japanese Unexamined Patent Publication 2012-54013), although conveying machine people can be made
Entirety moves up and down, but can not accurately control the position of robot hand.
For the present invention for solving such problems, its purpose is to provide one kind can accurately control robot hand
The robot system of position, device fabrication device, device manufacturing method and the method for adjustment for position of imparting knowledge to students.
The solution of project
The robot system of the 1st aspect of the present invention, comprising: robot, the robot include that axle portion, one end can revolve
It is linked to the robot arm of the axle portion and can rotatably be linked to the other end of the robot arm with turning
Robot hand；Control the control mechanism of the movement of the robot；And measuring means, the measuring means is for measuring edge
The position of the robot hand on the direction of the rotary shaft of robot hand rotation, the control mechanism be based on by
The position on the direction that the measuring means determines, adjusts the position on the direction of the robot hand.
The device fabrication device of the 2nd aspect of the present invention, comprising: multiple chambers；And robot system, the robot
System is used for the conveying between the multiple chamber, and, by conveying body, the robot system is described in the 1st aspect of the present invention
Robot system.
The device manufacturing method of the 3rd aspect of the present invention, comprising: the stage of preparation machine people's system, the robot system
Have the robot including robot hand and controls the control mechanism of the movement of the robot；Multiple teaching positions are stored
In stage in the storage unit of the control mechanism of the robot system, the multiple teaching position includes for equipment
Multiple conveying positions that substrate should be transported；The robot hand is arranged in specified position, by along the machine
The measuring means separated on the direction of the rotary shaft of device human hand rotation, to the position of the robot hand in said direction
The stage being measured；The 1st information relevant to the position of the robot hand that determines in said direction is stored
Stage in the storage unit；It has carried out in the control mechanism for being arranged the robot hand in the predetermined bits
In the state of the control set, the rank of the position of the robot hand in said direction is measured again using the measuring means
Section；The 2nd letter relevant to the position of the robot hand in said direction determined based on the 1st information and again
Breath, calculates the stage of the position offset of the robot hand in said direction；The position in said direction is inclined
In the case that shifting amount is more than defined threshold value, based on the position offset on the direction, to being stored in the storage unit
To letter in the relevant information in the multiple teaching position, relevant with the position of the robot hand in said direction
Cease the stage to make corrections.
The teaching location regulation method of the 3rd aspect of the present invention is the robot with conveying machine people and control mechanism
Teaching location regulation method in system, the conveying machine people includes robot hand, and the control mechanism controls the machine
The movement of device people, wherein include: that multiple teaching positions of the robot are stored in the storage unit of the control mechanism
Stage, multiple teaching positions of the robot include the multiple conveying positions that should be transported by conveying body；By the machine
Human hand is arranged in specified position, passes through the measuring machine separated on the direction of the rotary shaft rotated along the robot hand
Structure, the stage that the position of the robot hand in said direction is measured；By with the robot that determines
Relevant 1st information in the position of portion in said direction is stored in the stage in the storage unit；It is carried out in the control mechanism
In the state of for the control of the specified position to be arranged in the robot hand, surveyed again using the measuring means
The stage of the fixed position of the robot hand in said direction；Determine based on the 1st information and again with it is described
Relevant 2nd information in the position of robot hand in said direction, measures the position of the robot hand in said direction
Set the stage of offset；In the case that the position offset in said direction is more than defined threshold value, it is based on the side
The upward position offset, to store in the storage unit it is in information relevant to the multiple teaching position, with
The stage that the relevant information in the position of the robot hand in said direction makes corrections.
Invention effect
According to the present invention, it by measuring the position in the direction of the rotary shaft along robot hand, can accurately control
Robot processed.
Detailed description of the invention
Fig. 1 is the schematic diagram of a part of the production line of organic EL display device.
Fig. 2 is the schematic diagram of robot system of the invention.
Fig. 3 is the schematic diagram for the robot system of teaching position adjustment of the invention.
Specific embodiment
Hereinafter, being illustrated referring to attached drawing to the preferred embodiments of the present invention and embodiment.But reality below
Applying mode and embodiment illustratively indicates that preferred structure of the invention, the scope of the present invention are not limited to these knots
Structure.In addition, in the following description, the hardware configuration and software configuration of device, the process of processing, manufacturing condition, size, material
Matter, shape etc. are recorded as long as no specific, just do not mean that the scope of the present invention being defined in this.
<electrical equipment lines>
Fig. 1 is the top view for being schematically illustrated a part of the structure of production line of electronic equipment.
Manufacture of the production line of Fig. 1 for example for the display panel of the organic EL display device of smart phone.In intelligence
In the case where the display panel of mobile phone, such as at full-scale (about 1500mm × about 1850mm) or hemisect size is (about
1500mm × about 925mm) substrate on carry out the film forming of organic EL after, which is fabricated to the face of multiple small sizes
Plate.
Usually as shown in Figure 1, the film forming unit 1 of the production line of organic EL display device has the processing carried out to substrate 10
Multiple film forming room 11 of (such as film forming), the multiple masks for storing the mask before and after use store chamber 12 and configuration at it
The carrying room 13 in center.
In carrying room 13, substrate 10 is transported between multiple film forming room 11, stores chamber 12 in film forming room 11 and mask
Between setting conveying mask robot 14.Robot 14 is, for example, to have to be equipped on multiple joint manipulator to keep substrate 10
The robot of the construction of robot.It is described in detail referring to structure of the Fig. 2 to robot 14 of the invention.In the present embodiment
In, enumerating robot 14 is that the example for transporting the conveying machine people of substrate, mask is illustrated, but the present invention is not limited to
This, can also apply to other robots.
Film formation device (also referred to as evaporation coating device) is provided in each film forming room 11.In film formation device, it is accommodated in evaporation
The evaporation material in source is heated by the heaters and evaporates, via on mask evaporation to substrate.Automatically carried out by film formation device with
The handover of the substrate 10 of robot 14, substrate 10 and the adjustment (alignment) of the relative position of mask, the consolidating on mask of substrate 10
A series of film-forming process such as fixed, film forming (vapor deposition).Film formation device is also possible to tool, and there are two double mounting table (Dual of mounting table
Stage) type.In the film formation device of double mounting bench-types, during forming a film to the substrate 10 for moving in a mounting table,
Other substrates 10 for being moved to other mounting tables are aligned.
In mask storage chamber 12, by mask used in the film formation process in film forming room 11 and the mask used point
Two box storages.The mask used is transported to the box of mask storage chamber 12 by robot 14 from film forming room 11, will be accommodated in
Mask stores the new mask transfer in other boxes of chamber 12 to film forming room 11.
On the film forming unit 1 of the production line of organic EL display device, it is linked with channel room 15 and surge chamber 16, the channel
Room 15 transmits the substrate 10 from upstream side to film forming unit 1 on the flow direction of substrate 10, which is used for will
Other film forming unit transmitting of the substrate 10 of film process downstream are completed in the film forming unit 1.The machine of carrying room 13
Device people 14 receives substrate 10, and one in the film forming room 11 being transported in the film forming unit 1 from the channel room 15 of upstream side.Separately
Outside, robot 14 receives the substrate 10 that film process in the film forming unit 1 are completed from one of multiple film forming room 11, and by its
It is transported to the surge chamber 16 with downstream side connection.
In this way, robot 14 transports substrate between the various chambers being configured at around carrying room 13 and mask is such
By conveying body.
Film forming unit 1 of the invention is illustrated referring to Fig.1, but it's not limited to that for film forming unit 1 of the invention,
Also it can have other kinds of chamber, the configuration between chamber also can change.
Hereinafter, being illustrated to the structure for the robot system for including robot 14.
<robot system>
Fig. 2 illustratively illustrates the construction of the robot system including robot 14.
In the following description, using with the rotation of the interconnecting piece of robot arm and robot hand with robot 14
The parallel direction of shaft is the XYZ coordinate system of Z axis.When the direction of Z axis is set as 3 direction, by the side of perpendicular X-axis
To and the direction of Y-axis in any one direction be set as the 1st direction, other direction is set as the 2nd direction.In addition, with θ indicate with
Rotation angle centered on Z-direction, by the direction of rotation using centered on Z-direction as rotation angular direction.
Robot system of the invention includes the control mechanism 25 of robot 14 and the movement for controlling robot 14.
Robot 14 includes the base portion 21 that the bottom surface of carrying room 13 is arranged in, from base portion 21 to vertical direction or Z axis
Direction (the 3rd direction) extend and the axle portion 22 that can move in the Z-axis direction and in a manner of it can rotate with the connection of axle portion 22
Robot arm 23.In Fig. 2 (a), the robot that robot 14 has a robot arm 23, but machine are illustrated
Device people 14 can also have two or more robot arms 23.Thereby, it is possible to improve the conveying of substrate 10, mask
Efficiency can shorten activity time.
The structure that robot arm 23 can have multiple arms to link in a manner of it can mutually rotate via joint portion
It makes.For example, robot arm 23 can include that one end can rotatably be linked to the 1st arm 231 of axle portion 22, one end and the
The 2nd arm 232 that the other end of 1 arm 231 can rotatably link.In Fig. 2 (a), illustrates two arms and pass through joint
The structure that portion mutually can rotationally link, but the present invention is not limited to this, can also have the length there are two arm in arm
The structure that can be stretched on degree direction with respect to slide displacement.Although the description of the 1st arm 231 in a manner of it can rotate and axis
The case where portion 22 links, but the present invention is not limited to this, and the 1st arm 231 also can be fixedly connected with axle portion 22, replaces
Axle portion 22 itself can also rotate.
Robot hand 24 is provided in a manner of it can rotate in the other end of the 2nd arm 232.Robot hand 24 has
Having can be by the construction of substrate and mask mounting on it.Although not shown in Fig. 2, robot hand 24 is for stabilization
Ground supporting substrates, can have with the length direction of robot hand 24 (from the interconnecting piece with robot arm towards machine
The direction of the free front end of human hand) multiple supporting parts for upwardly extending of side for intersecting.In substrate/mask of robot hand 24
Mounting surface, the in order to prevent damage of substrate 10 are able to carry out fluorine coating etc..In addition, in conveying, substrate 10 exists on the way in order to prevent
It moves or falls on robot hand 24, also may include holding mechanism as handle sturcture.
The robot 14 of the invention having configuration which is by adjusting the 1st arm 231 centered on axle portion 22
Rotate angle between angle, the 2nd arm 232 and the robot hand 24 between angle, the 1st arm 231 and the 2nd arm 232,
The height of axle portion 22, be able to carry out the linear movement of the substrate or mask that are positioned on robot hand 24, moving in rotation and
Their compound movement, the position for any desired that substrate or mask can be made to be moved in XYZ coordinate system.
Robot system of the invention includes the control mechanism 25 for controlling the movement of robot 14.Control mechanism 25 can lead to
The computer with processor, memory, reservoir, I/O etc. is crossed to realize.For example, control mechanism 25 includes being stored with to be used for
The storage unit 251 and execution for controlling the program of the transporting operation of robot 14 are stored in the program of the storage unit 251 to control machine
The processor 252 of device people 14.As computer, general personal computer can be used, embedded computer also can be used
Or PLC (programmable logic controller (PLC)).Alternatively, part or all of the function of control mechanism 25 can also be by ASIC or FPGA
Such circuit is constituted.In the present embodiment, the case where being provided separately to control mechanism 25 with robot 14 is illustrated, but this
It's not limited to that for invention, and robot 14 can also have control mechanism 25.
In storage unit 251, the (standby with multiple teaching positions of the transporting operation for controlling robot 14 can be stored
Position and conveying position) relevant information.The letter relevant to teaching position that control mechanism 25 is stored based on storage unit 251
Breath, is controlled, so that robot hand 24 can be mobile to corresponding position.
As shown in Fig. 2 (b), robot 14 have the 1st arm driving portion 2311 for rotating the axis of the 1st arm 231,
The 2nd arm driving portion 2321 for rotating the axis of the 2nd arm 24, the robot for rotating the axis of robot hand 24
Hand-drive portion 242 and lifting driving portion 221 for vertically driving axle portion 22.
Such driving portion respectively includes servo motor (not shown) and power transfer mechanism (not shown).From servo motor
Via power transfer mechanism to the axis transmitting rotary power of the axis of the 1st arm 231, the axis of the 2nd arm 232, robot hand 24,
The 1st arm 231, the 2nd arm 232 and robot hand 24 rotate respectively as a result,.
Lifting driving portion 221 is set to the base portion 21 of robot 14, by the inclusion of the ball screw framework of rotating electric machine
To realize.For example, lifting driving portion 221 include lead screw shaft, the ball nut that is constituted in a manner of being screwed togather with the lead screw shaft and
It is configured to the rotating electric machine for rotating lead screw shaft.In this case, axle portion 22 is fixed on ball nut, with the rotation of lead screw shaft
And with one lifting of ball nut.
Control mechanism 25 is by obtaining the angle with the angle position of the 1st arm 231, the 2nd arm 232 from these driving portions
The highly relevant information of position, the angle position of robot hand 24 and axle portion 22 can feed back each driving portion
Control.Robot hand 24 can be accurately mobile to teaching position as a result,.
<teaching of robot>
As is explained in reference to fig. 1, robot 14 film forming unit 1 in multiple film forming room 11 and channel room 15 or
Substrate 10 is transported between surge chamber 16.
It is illustrated in case where transporting substrate 10 from channel room 15 to the 1st film forming room 11a by robot 14, from
The robot arm 23 of robot 14 is shunk (that is, the arthrogryposis of robot arm 23, so that the 1st arm and the 2nd arm
Between angle become smaller) and robot hand 24 free front end be directed toward channel room 15 state the 1st position of readiness, make machine
(position becomes the teaching position relative to channel room for the position that moves out of the manpower arm 23 on the substrate-placing platform into channel room 15
Set) it stretches out, the substrate 10 on the substrate-placing platform of receiving channel room 15 retracts robot arm 23 again, and it is standby to return to the 1st
Position.
Then, robot arm 23 is rotated centered on axle portion 22, is directed toward the 1st to the free front end of robot hand 24
The 2nd position of readiness (becoming other teaching positions) of film forming room 11a is mobile.In this state, make robot arm 23 again
It stretches out, the position (the teaching position relative to the 1st film forming room) for moving in substrate to the 1st film forming room 11a is moved to, thus by substrate
It moves in the 1st film forming room 11a.Later, robot hand 24 returns to the 2nd position of readiness.
The transporting operation of the move-in/move-out of such substrate is repeated, until whole film forming in the film forming unit 1
Processing terminate, until which is passed to the surge chamber 16 in the downstream side of the flowing of substrate.In order to favorably accomplish this
The transporting operation of sample carried out by robot 14, by the move-in/move-out with position of readiness and substrate 10 in the film forming unit 1
The relevant information in position is stored in the storage unit 251 of control mechanism 25 as the information of teaching position.
It will be to relevant location information (for example, X, Y, Z, θ coordinate value of the position) teaching in teaching position to robot 14
Operation (measuring the position, the operation stored it in the storage unit 251 of control mechanism 25) be known as teaching work, this will
Robot 14 be arranged when form a film unit 1 or in order to safeguard and by robot arm 23 or robot hand 24 removing or more
When changing, carried out by operator.
Teaching work carries out in the following way, that is, operator moves robot 14 bit by bit by operation panel
It is dynamic, meanwhile, so that robot hand 24 is moved to each teaching position, based on it is on the teaching position, centered on axle portion 22
Rotation angle, the 2nd arm 232 and robot between the rotation angle of 1st arm 23, the 1st arm 231 and the 2nd arm 232
The relevant information in position of the Z-direction of rotation angle, axle portion 22 between portion 24, calculates the coordinate value of the teaching position, will
It is stored in control mechanism 25.At this point, driving portion 2311, the 2nd arm from the axis of the 1st arm 231 such as each rotation angle value
The driving portion 2321 of 232 axis, the driving portion 242 of the axis of robot hand 24, axle portion 22 lifting driving portion 221 obtain.
Such teaching work usually carries out in the following way, that is, operation panel is manually operated in operator, makes robot
14 robot arm 23 and/or robot hand 24 rotation or flexible, but can also be by using being set to each teaching position
Robot hand 24 is guided to target position and obtains the location information by the guide portion set.Alternatively, it is also possible to pass through sensing
Device identifies the mark being arranged on the robot hand 24 for being moved to target position, obtains the side of the coordinate value of the teaching position
Formula carries out teaching work.
In addition, in the case that relativeness between chambers is fixed, for example, in the indoor teaching position (base of each chamber
The move-in/move-out position of plate) from the axle portion 22 of robot 14 be positioned essentially at same distance in the case where (that is, with robot
The case where being configured on circular arc centered on 14) under, also can promptly it be carried out using the opposite positional relationship between these chambers
For the teaching work of other chambers (teaching position).
In addition, teaching work generally carries out in the state that substrate 10 is not placed in robot hand 24, but also can
It is carried out in the state that substrate 10 is placed in robot hand 24.Thereby, it is possible to carry out meeting actual conveying situation just
True teaching.In particular, in order to which correctly teaching machine human hand 24 is preferably loaded by substrate 10 to the height of Z-direction
Teaching work is carried out in the state of robot hand 24.
<for adjusting the robot system of teaching position>
Hereinafter, referring to Fig. 3 to the machine for adjusting teaching position (position of readiness and conveying position) for through the invention
Device people's system is illustrated.
After carrying out the maintenance of 23/ robot hand 24 of initial setting or robot arm of robot 14,
When actually using the conveying substrate of robot 14 or mask, there are robot arm 23, robot hand 24 and life is constituted
The case where other parts collision of producing line.For example, passing through robot 14 in film forming unit 1 for substrate 10 or mask transfer to respectively
During in chamber, robot hand 24 etc. and the substrate holders, base such as film forming room 11, channel room 15, surge chamber 16 sometimes
Plate mounting table or substrate supporting portion collide, and covering in mask storage box or the box in chamber 12 may be stored with mask
Die support portion collides.
If applying mechanical impact, robot hand 24 and machine to robot hand 24 and robot arm 23 etc.
Device manpower arm 23 itself is possible to deform, and the joint portion between them can also deform.
For example, even if not colliding, due to the enlargement of substrate, weight of the robot hand 24 itself due to substrate 10
And it deforms or joint portion deforms, the shifting of robot hand 24 due to being continuously applied the load in the joint portion of robot 14
Dynamic position sometimes from initial teaching when it is different.
In this case, even if the information relevant to teaching position that control mechanism 25 is stored based on storage unit 251, makes
For making robot hand 24 be moved to the order of the teaching position under the driving portion of each joint portion and lifting driving portion 221
It reaches, robot hand 24 does not move to the teaching position yet, and mobile to the position deviated from now on.That is, even if to make by
The substrate 10 that robot 24 is kept is mobile to the teaching position (position of readiness and conveying position) being stored in control mechanism 25,
Substrate will not be moved to the position imagined in teaching, but mobile to the position offset up in X, Y, Z, the side θ.Due to this
The positional shift of sample further becomes during the conveying of substrate or mask with a possibility that collision such as other devices of production line
Greatly, moreover, unfavorable condition can also be generated to the processing of substrate (for example, film forming).
In particular, different from semiconductor substrate, the size of display base plate is very big, therefore the relaxation of robot hand 24
Also become larger, the risk of collision becomes larger, to Z-direction positional shift a possibility that also become larger.Therefore, it is necessary to the robots that makes corrections
The positional shift of portion 24 in the Z-axis direction.
In the prior art, if being judged as due to being generated due tos collision of robot 14 etc. in robot hand 24 Deng in this way
Positional shift, the transporting operation of the robot 14 different position in the position of teaching or different tracks when from teaching carry out,
Teaching is then executed again to all teaching positions in film forming unit 1 (position of readiness and move-in/move-out position etc. transport position)
Operation.
But in the production line of organic EL display device, the teaching position of robot 14 includes: to be provided with being configured at
The position of substrate and mask is loaded in the process chamber (film forming room) on the carrying room periphery of robot 14, stores chamber 12 in mask
Multiple positions such as the position of the mask before and after middle storage use, the position for joining substrate in channel room 15 and surge chamber 16,
Therefore is quite expended to the teaching work of each position the time.
Moreover, there are two robot arms 23 for the tool of robot 14 sometimes, and thus, it is possible to carry out more during the unit time
More transporting operation, for the position of each teaching, it is necessary to teaching is additionally carried out under atmosphere opening state and vacuum state, because
This needs up to tens of times teaching works, spends tens of hours in teaching work, exist in this phase in large-scale production line
Between manufacturing line stop the problem of.
In the present invention, due to collision robot 14 etc., the position of the especially robot hand 24 of robot 14
In the case where setting offset, teaching work again is not executed to all teaching positions in film forming unit 1, measure predetermined bits
It sets and (in the present embodiment, is referred to as origin position, origin position is for example also possible to the indoor substrate/mask of specific chamber
Conveying position) at robot hand 24 position offset, based on this, to other it is multiple teaching positions position believe
Breath makes corrections.Thereby, it is possible to omit the teaching work for being directed to other multiple teaching positions, teaching work can be shortened again and spent
The time taken.
As shown in figure 3, the robot system 30 of the invention for this includes robot 14, control mechanism 25 and measurement
Mechanism 31.
The measuring means 31 of robot system 30 of the invention passes through the height of mensuration machine human hand 24, i.e. to Z-direction
Position, the position offset of the robot hand 24 in Z-direction can be calculated.
Measuring means 31 is to be arranged on origin position (for example, the substrate in channel room 15 moves out in robot hand 24
Position) in the state of be capable of mensuration machine human hand 24 height mode, be set to and robot hand 24 in origin position
Corresponding position.For example, in the case where the substrate that origin position is channel room 15 moves out position, the setting of measuring means 31 from
The following table of robot hand 24 is positioned away from towards Z-direction, so as to the lower section of the substrate-placing platform in channel room 15
Detect the height of the lower surface of robot hand 24.
Measuring means 31 for example preferably by laser beam is reflected in the lower surface of robot hand 24, and detects return
The laser beam come, so as to the laser sensor 311 of the height of mensuration machine human hand 24, but the present invention is not limited to
This is also possible to other mechanisms as long as being able to detect the height of robot hand 24.
For example, measuring means 31 of the invention is also possible to camera for shooting.Using camera for shooting, energy
The degree (focal length) of enough focuses using the image taken by camera is come the height of mensuration machine human hand 24.Using shooting
It uses camera as in the case where measuring means 31, transparency window can be set in the bottom surface of channel room 15, shooting is set outside it
With camera, camera for shooting can also be arranged in however, the present invention is not limited thereto in channel room 15.
In this way, passing through the height of the 31 mensuration machine human hand 24 of measuring means as laser sensor or camera for shooting
Degree, is capable of the position offset of mensuration machine human hand 24, the especially position offset in Z-direction.
That is, due to collision etc. and robot 14 generate positional shift before (for example, initial teaching work it
Afterwards), robot hand 24 is set to origin position, by the height of 31 mensuration machine human hand 24 of measuring means, thus, it is possible to
Access the position phase in the Z-direction of the robot hand 24 in the case where being arranged on origin position with robot hand 24
The information (reference position information, the 1st information) of pass.With the X-direction of robot hand 24, Y direction and centered on Z axis
Rotation angular direction on the relevant information in position for example can by robot hand 24 be arranged along robot hand 24
The multiple marks configured on length direction (from the interconnecting piece with robot arm towards the direction of the free front end of robot hand)
Will (241) or the linear mark extended on the length direction of robot hand 24, and using camera for shooting etc. to its into
Row shooting is to obtain.
The reference position information of the robot hand 24 obtained in this way includes at least and robot hand in the Z-axis direction
The relevant information in 24 position, the storage unit of control mechanism 25 is stored in as the reference position information of robot hand
In 251.
Later, it in the case where positional shift having occurred in collision due to conveying machine people 14 etc., carries out for by machine
Device human hand 24 be arranged in origin position control (even if carrying out such control, due to the deformation etc. generated by collision etc.,
Robot hand 24 can not be moved to the origin position before collision), pass through the mensuration machine human hand 24 again of measuring means 31
Position, thus obtain again and location information after positional shift, in the Z-direction of robot hand 24 have occurred.It is logical
The base stored in the location information (the 2nd information) and storage unit 251 crossed in the Z-direction for the robot hand 24 that will be obtained again
Quasi- location information is compared, and can obtain the position offset (Δ in the Z-direction of the robot hand 24 of collision front and back
Z).X-direction, Z-direction and the position offset (Δ rotated on angular direction centered on Z axis of robot hand 24
X, Δ Y, Δ θ) also by the reference position information in all directions that will be pre-stored within storage unit 251 and the counterparty after collision
Upward information relevant to position, which is compared, to be obtained.
That is, in the present invention, before robot hand 24 generates positional shift, passing through 31 mensuration machine people of measuring means
The position of hand 24, the base position of computing machine human hand 24, and be stored in advance in control mechanism 25.Then, exist
Collision due to robot hand 24 etc. and in the case where positional shift has occurred, carry out for by robot hand 24 again
It is arranged to after the control of origin position, the deviation post of computing machine human hand 24, according to calculated position and benchmark position
The difference set, the position offset (Δ Z) of computing machine human hand 24.
In this way, according to the present invention, by calculating because of robot with the measuring means mensuration machine human hand such as laser sensor
Collision of hand etc. and generate robot hand specific position position offset (especially in vertical direction/Z-direction
On position offset), and maked corrections based on the position offset calculated with other multiple teaching positions of conveying movement (to
Seat in the plane is set and transfer position) relevant information.As a result, without the teaching work again for other multiple teaching positions, only
Equipment can be rerunned by the confirmation operation for position of imparting knowledge to students, can substantially shorten the time it takes of imparting knowledge to students again
In the present embodiment, substrates in the multiple teaching positions to form a film in unit 1, channel room 15 position is moved out to set
For the origin position of the position offset for mensuration machine human hand 24.This is because multiple religions usually in film forming unit 1
Degree set in, the conveying position of channel room 15 be the farthest position of axle portion 22 from robot 14, be due to robot hand
24 collision and the position offset that generates becomes maximum position.In addition, in the case where channel room 15, and under chamber
The film forming room 11 that evaporation source is arranged in portion is different, also has the advantages that be easy that measuring means 31 is arranged in the lower section of substrate-placing platform.
But origin position of the invention is not limited to the position that the substrate of channel room 15 moves out, and is also possible to other
Chamber (for example, film forming room, surge chamber, mask store chamber) in conveying position, be also possible to transport indoor position (example
Any of such as transport indoor position of readiness).By the way that origin position is set as transporting in indoor multiple position of readiness
Any one, the setting of measuring means 31 becomes easier to.In turn, origin position of the invention is also possible to not be film forming unit 1
Teaching position the 3rd position.
<method of adjustment and device manufacturing method of teaching position>
Hereinafter, to other in unit 1 of forming a film that maked corrections based on the position offset of the origin position of robot hand 24
The method of multiple teaching positions and the method that equipment as organic EL display device is manufactured using this method are said
It is bright.
The calculating of position offset in the Z-direction of robot hand 24 can pass through feedback control or feedback control loop
It controls to carry out.
When passing through feedback control calculating position offset, firstly, robot hand 24 is arranged in origin position, pass through survey
Determine the position in the Z-direction of 31 mensuration machine human hand 24 of mechanism, and is stored in control as reference position information (the 1st information)
In the storage unit 251 of mechanism 25 processed.
In the case where positional shift has occurred in collision due to robot hand 24 etc., carrying out for by machine
Human hand 24 is set to after the control of origin position, using measuring means 31 again mensuration machine human hand 24 in Z-direction
On position, information (the 2nd information) relevant to the position in the Z-direction measured again and will be stored in storage unit 251
Reference position information be compared, find out the 1st position offset.
Then, make the mobile first position offset of robot hand 24, utilize 31 mensuration machine manpower of measuring means again
The position of portion 24 in the Z-axis direction, is compared with the reference position information stored.
In the case where the position in the Z-direction of the robot hand 24 determined is different from reference position information, meter
Second position offset is calculated, the mobile second position offset of robot hand 24 is made.
Identical process is repeated, becomes in the position of the Z-direction of robot hand 24 and is initially stored in storage unit 251
At the time of base position, the 1st position offset so far, the 2nd position offset etc. are all added up to, as
For adjusting the compensating value of other teaching positions.
When by feedback loop control come calculating position offset, firstly, robot hand 24 is set in origin position,
It is deposited by the position in the Z-direction of 31 mensuration machine human hand 24 of measuring means, and as reference position information (the 1st information)
Storage is in the storage unit 251 of control mechanism 25.
In the case where positional shift has occurred in collision due to robot hand 24 etc., carrying out for by machine
Human hand 24 is set to after the control of origin position, utilizes the Z-direction of the mensuration machine human hand 24 again of measuring means 31
On position, information (the second information) relevant to the position in the Z-direction measured again and storage unit will be stored on one side
Reference position information in 251 is compared, and moves robot hand 24 along Z-direction.
If the position of current robot hand 24 in the Z-axis direction and the base position one for being stored in storage unit 251
It causes, then stops movement of the robot hand 24 to Z-direction.Using total moving distance of robot hand 24 so far as
For the compensating value of other teaching positions.
The method that other teaching positions are adjusted based on compensating value calculated in this way is illustrated.
Firstly, robot is taught in multiple teaching positions (carrying position and position of readiness) that substrate 10 should be handled upside down
14.That is, being stored in control mechanism 25 for the location information of multiple conveying positions and position of readiness as teaching location information
In storage unit 251 (S1).
The robot hand 24 of robot 14 is arranged on the one i.e. origin position (S2) in multiple teaching positions.So
Afterwards, by the position of the Z-direction of 31 mensuration machine human hand 24 of measuring means, the calculated machine of the measurement result will be based on
The location information of human hand 24 is stored in depositing for control mechanism 25 as the reference position information (the 1st information) of robot hand 24
In storage portion 251 (S3).
Later, due to during conveying due to the collision of other parts etc. with film forming unit 1 and in robot 14
Deformation of generation etc. and in the case where robot hand 24 produces positional shift, in order to measure the position offset, carry out
For robot hand 24 to be set to the control (S4) of origin position again.That is, to the input of the driving portion of robot 14 and original
The corresponding location information in point position.But the deformation etc. due to generating by collision etc., robot hand 24 can not be moved to and touch
Origin position before hitting, and it is moved to the position removed from it.Be moved to the position of the robot hand 24 of the position of offset by
Measuring means 31 measures (S5) again.
Control mechanism 25 is according to information (the second information) relevant to the position of robot hand 24 measured again and in advance
The relevant information in the base position being first stored in the storage unit 251 of control mechanism 25 (first information) calculates collision front and back
The position offset of robot hand 24.Structure according to the present invention can measure the position offset of Z-direction.Similarly, also
Measure the position offset in the X-direction, Y direction and the direction θ of mechanical manpower 24.
Control mechanism 25 is by the position offset measured and is directed to X-direction, Y direction, Z-direction and the direction θ
Predetermined threshold value is compared respectively.If it is determined that in X-direction, Y direction, Z-direction and any in the direction θ
Position offset on direction is more than the threshold value of the direction, then control mechanism 25 is based on position offset in this direction, to depositing
The location information opposite with multiple teaching positions that storage portion 251 is stored is modified.
For example, by by the corresponding direction of the position offset of the calculated direction of control mechanism 25 and other teaching positions
Location information be added or carry out subtraction come the location information for the corresponding teaching position that makes corrections.
If maked corrections location information to all teaching positions, try to make robot according to the teaching position after correction
14 movements thereby confirm that whether robot hand 24 can be by the correction and the other parts of film forming unit 1 for position of imparting knowledge to students
Ground is not collided is moved to target position just.If it is confirmed that robot 14 can carry out removing to multiple teaching positions without problems
Movement is sent, then starts again at substrate/mask conveying based on robot 14.
In this way, teaching location regulation method according to the present invention, generates the other parts with the unit 1 that forms a film in robot 14
After collision etc., instead of executing teaching work to multiple the whole of teaching position, the robot hand 24 of origin position is only measured
Position offset, carry out for other teaching positions correction.Thereby, it is possible to substantially shorten teaching after robot 14 collides again
Learn operation the time it takes.
In the present embodiment, it illustrates the case where making robot hand 24 that positional shift have occurred due to collision etc.
Under, carrying out the control for robot hand 24 to be arranged in origin position and then the position of secondary measurement labeling section 241
The case where, but the present invention is not limited to this, even if not colliding, can also use more than certain time in robot 14
Later, control and then secondary mensuration machine human hand 24 for robot hand 24 to be arranged in origin position are being carried out
Position.Thereby, it is possible to by robot caused by the lasting deformation using caused joint portion etc. robot 14
14 with film forming unit 1 other parts collide the case where prevent trouble before it happens.
Above-described embodiment indicates an example of the invention, and the present invention is not limited to the structures of above-described embodiment, can also
To be appropriately deformed in the range of this technology thought.
Description of symbols
1: film forming unit
11: film forming room's (process chamber)
12: mask stores chamber
13: carrying room
14: robot
15: channel room
16: surge chamber
22: axle portion
23: robot arm
24: robot hand
25: control mechanism
31: measuring means
241: labeling section
Claims (21)
1. a kind of robot system, wherein include:
Robot, the robot include that axle portion, one end can rotatably be linked to robot arm, the Yi Jineng of the axle portion
The robot hand of enough other ends for being rotatably linked to the robot arm；
Control the control mechanism of the movement of the robot；And
Measuring means, the measuring means are used to measure the machine on the direction along the rotary shaft of robot hand rotation
The position of device human hand,
The control mechanism adjusts the robot hand based on the position on the direction determined by the measuring means
The direction on position.
2. robot system according to claim 1, wherein the control mechanism includes storage unit, storage unit storage
Information relevant to multiple teaching positions of the control of the movement for the robot.
3. robot system according to claim 2, wherein the control mechanism is arranged in the robot hand
In the state of specified position, the position phase with the robot hand in said direction that will be determined by the measuring means
The 1st information closed is stored in the storage unit.
4. robot system according to claim 3, wherein the control mechanism is based on the 1st information and the 2nd letter
Breath, to adjust the position of the robot hand in said direction, the 1st information is stored in the storage unit, described
2nd information is in the state that the control mechanism has carried out the robot hand control of the specified position is arranged in
The information relevant to the position of the robot hand in said direction determined by the measuring means.
5. robot system according to claim 4, wherein the control mechanism is based on the 1st information and the described 2nd
Information calculates the position offset of the robot hand in said direction.
6. robot system according to claim 5, wherein the control mechanism is more than regulation in the position offset
Threshold value in the case where, be based on the position offset, it is related to the multiple teaching position to what is stored in the storage unit
Information in, relevant to the position of the robot hand in said direction information makes corrections.
7. robot system according to claim 3, wherein measuring means setting from being arranged in the predetermined bits
The robot hand set is positioned away to the direction.
8. robot system according to claim 7, wherein the measuring means is laser sensor.
9. robot system according to claim 7, wherein the measuring means is camera for shooting.
10. robot system according to claim 9, wherein the control mechanism is based on being clapped by the camera for shooting
The degree of the focus of the image for the robot hand taken the photograph calculates the position on the direction of the robot hand.
11. robot system according to claim 5, wherein the control mechanism calculates institute's rheme by feedback control
Set offset.
12. robot system according to claim 5, wherein the control mechanism calculates institute by feedback loop control
State position offset.
13. robot system according to claim 3, wherein the specified position is one of the multiple teaching position.
14. teaching position regulator according to claim 13, wherein the teaching corresponding with the specified position
Position is in the multiple teaching position, the robot hand on the direction vertical with the axle portion most from the axle portion
Remote position.
15. a kind of device fabrication device, wherein include:
Multiple chambers；And
Robot system, the robot system are used to transported between the multiple chamber by conveying body,
The robot system is robot system described in any one of claims 1 to 14.
16. device fabrication device according to claim 15, wherein
The multiple chamber includes being conveyed by process chamber that conveying body is handled, storage the 2nd by the 2nd of conveying body the to the 1st
Body store chamber, the 1st by the channel room of the upstream side on the flow direction of conveying body and on the flow direction under
The surge chamber of side is swum,
Measuring means is set to the channel room, which is used for the robot hand along the system, robot
Position on the direction of the rotary shaft of the robot hand rotation of the robot of system is measured.
17. a kind of device manufacturing method, wherein include:
The stage of preparation machine people's system, the robot system have the robot including robot hand and control the machine
The control mechanism of the movement of people；
It is stage in the storage unit for the control mechanism that multiple teaching positions are stored in the robot system, the multiple
Teaching position includes the multiple conveying positions that should be transported for the substrate of equipment；
The robot hand is arranged in specified position, by the direction of the rotary shaft rotated along the robot hand
Upper isolated measuring means, the stage that the position of the robot hand in said direction is measured；
The 1st information relevant to the position of the robot hand that determines in said direction is stored in the storage unit
In stage；
In the state that the control mechanism has carried out the control for the robot hand to be arranged in the specified position,
Measure the stage of the position of the robot hand in said direction again using the measuring means；
The relevant to the position of the robot hand in said direction the 2nd determined based on the 1st information and again
Information calculates the stage of the position offset of the robot hand in said direction；
In the case that the position offset in said direction is more than defined threshold value, based on institute's rheme on the direction
Offset is set, in the information relevant to the multiple teaching position stored in the storage unit the and robot
The stage that the relevant information in the position of portion in said direction makes corrections.
18. device manufacturing method according to claim 17, wherein the specified position be the multiple teaching position it
One.
19. device manufacturing method according to claim 17, wherein in the stage for calculating the position offset, pass through
Feedback control calculates the position offset.
20. teaching location regulation method according to claim 17, wherein in the stage for calculating the position offset,
The position offset is calculated by feedback loop control.
21. a kind of teaching location regulation method is the teaching position having in the robot system of conveying machine people and control mechanism
Method of adjustment is set, the conveying machine people includes robot hand, and the control mechanism controls the movement of the robot,
In, comprising:
Multiple teaching positions of the robot are stored in the stage in the storage unit of the control mechanism, the robot
Multiple teaching positions include the multiple conveying positions that should be transported by conveying body；
The robot hand is arranged in specified position, by the direction of the rotary shaft rotated along the robot hand
Upper isolated measuring means, the stage that the position of the robot hand in said direction is measured；
The 1st information relevant to the position of the robot hand that determines in said direction is stored in the storage unit
In stage；
In the state that the control mechanism has carried out the control for the robot hand to be arranged in the specified position,
Measure the stage of the position of the robot hand in said direction again using the measuring means；
The relevant to the position of the robot hand in said direction the 2nd determined based on the 1st information and again
Information measures the stage of the position offset of the robot hand in said direction；
In the case that the position offset in said direction is more than defined threshold value, based on institute's rheme on the direction
Offset is set, in the information relevant to the multiple teaching position stored in the storage unit the and robot
The stage that the relevant information in the position of portion in said direction makes corrections.
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|---|---|---|---|
| KR10-2018-0026050 | 2018-03-05 | ||
| KR1020180026050A KR101957096B1 (en) | 2018-03-05 | 2018-03-05 | Robot system, Manufacturing apparatus of device, Manufacturing method of device and Method for adjusting teaching positions |
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| CN110228063A true CN110228063A (en) | 2019-09-13 |
| CN110228063B CN110228063B (en) | 2022-08-30 |
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| CN201811567522.4A Active CN110228063B (en) | 2018-03-05 | 2018-12-20 | Robot system, device manufacturing apparatus, device manufacturing method, and teaching position adjustment method |
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| Country | Link |
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| JP (2) | JP2019153776A (en) |
| KR (1) | KR101957096B1 (en) |
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| US11279032B2 (en) * | 2019-04-11 | 2022-03-22 | Applied Materials, Inc. | Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots |
| DE102019130820A1 (en) * | 2019-11-14 | 2021-05-20 | Webasto SE | Method and system for charging a battery of an electric vehicle |
| KR102627226B1 (en) * | 2021-09-16 | 2024-01-19 | 에스엔피 주식회사 | Monitoring system of robot assembly provided in vacuum chamber |
| KR102627640B1 (en) * | 2021-09-16 | 2024-01-23 | 에스엔피 주식회사 | Teaching system of robot assembly provided in vacuum chamber |
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Also Published As
| Publication number | Publication date |
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| JP6999018B2 (en) | 2022-01-18 |
| JP2021073682A (en) | 2021-05-13 |
| CN110228063B (en) | 2022-08-30 |
| JP2019153776A (en) | 2019-09-12 |
| KR101957096B1 (en) | 2019-03-11 |
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