KR102627640B1 - Teaching system of robot assembly provided in vacuum chamber - Google Patents

Abstract

The present invention relates to a teaching system for a robot assembly provided in a vacuum chamber. In particular, the image data acquired by the image acquisition module as well as the displacement measurement module is measured to determine the positional misalignment of the robot assembly operating in the vacuum chamber. By configuring the analysis to take into account the distance data, the positional misalignment of the robot assembly can be accurately and easily analyzed in real time to determine the need for teaching. Furthermore, the correction value is automatically calculated to automatically correct the robot assembly in real time. It relates to a teaching system for a robot assembly provided in a vacuum chamber that enables the teaching of a robot assembly.
The present invention's constituent means for forming a teaching system for a robot assembly provided in a vacuum chamber include, in the teaching system for a robot assembly provided in a vacuum chamber, a reference mark at at least one preset position included in the movement path of the robot assembly. An image acquisition module for acquiring an image, a displacement measurement module for measuring the distance to the robot assembly at at least one preset position included in the movement path of the robot assembly, image data acquired by the image acquisition module and the displacement measurement A teaching module that analyzes the distance data measured by the module to determine the need for teaching the robot assembly in real time and calculates a calibration correction value when it is determined that teaching is necessary. A teaching module receives the calibration correction value from the teaching module to teach the robot assembly. It is characterized by including a control module that controls and performs calibration.

Description

Teaching system of robot assembly provided in vacuum chamber { Teaching system of robot assembly provided in vacuum chamber }

The present invention relates to a teaching system for a robot assembly provided in a vacuum chamber. In particular, in order to determine the positional misalignment of a robot assembly operating in a vacuum chamber, the image data acquired by the image acquisition module as well as the measurement by the displacement measurement module By configuring the analysis to take into account the distance data, the positional misalignment of the robot assembly can be accurately and easily analyzed in real time to determine the need for teaching. Furthermore, the correction value is automatically calculated to automatically correct the robot assembly in real time. It relates to a teaching system for a robot assembly provided in a vacuum chamber that enables the teaching of a robot assembly.

Generally, industrial robots repeatedly move along taught coordinates. Industrial robots must always accurately reach their starting point or destination in order to faithfully perform a given task. If the robot's actual arrival location is different in the previous cycle and the next cycle for the same target location, the work may be affected.

Repeatability is a specification that indicates how much the robot's actual position error will be when the robot repeatedly moves to the same location. Since the target position in the program stored in the robot is the same, the robot must always reach the same position, but a certain degree of error cannot be avoided due to the physical limitations of the robot.

Regarding the prior art, Republic of Korea Patent Registration No. 10-1329322 (hereinafter referred to as “prior art document”) is an automatic teaching of a substrate transfer robot in which a vision camera is installed on a plate and a reference indicator is attached to a jig wafer in the form of a sticker. A device is being proposed.

However, in the prior art literature, the position of the substrate transfer robot arm must be corrected based on 2D image data captured through a vision camera, so the height of the substrate transfer robot cannot be accurately determined, so the substrate transfer robot arm moves. A problem arises in that movement errors are bound to occur between the desired coordinates and the actual movement location.

In other words, the prior art document cannot accurately determine the positional misalignment of the robot arm and perform accurate position correction because it must be determined whether the position of the robot arm is outside the designated position only by using a vision camera. , Furthermore, it has the disadvantage that accurate titing of the robot arm cannot be performed automatically.

Republic of Korea Patent Registration No. 10-1329322 (Publication date: 2013.11.14., Title of invention: Automatic teaching device for substrate transfer robot)

The present invention was created to solve the problems of the prior art as described above. In order to determine the positional misalignment of a robot assembly operating in a vacuum chamber, the image data acquired by the image acquisition module is measured by the displacement measurement module. By configuring the analysis to take into account the distance data, the positional misalignment of the robot assembly can be accurately and easily analyzed in real time to determine the need for teaching. Furthermore, the correction value is automatically calculated to automatically correct the robot assembly in real time. The purpose is to provide a teaching system for a robot assembly provided in a vacuum chamber that enables the teaching of robot assemblies.

The constituent means of the teaching system of the robot assembly provided in the vacuum chamber of the present invention proposed to solve the above problems are included in the movement path of the robot assembly in the teaching system of the robot assembly provided in the vacuum chamber. An image acquisition module for acquiring an image of a reference mark at at least one preset position, a displacement measurement module for measuring the distance to the robot assembly at at least one preset position included in the movement path of the robot assembly, and the image acquisition module A teaching module that analyzes the image data acquired by and the distance data measured by the displacement measurement module to determine the need for teaching the robot assembly in real time and calculates a correction value when it is determined that teaching is necessary, from the teaching module It is characterized by comprising a control module that receives a calibration correction value and controls the robot assembly to perform calibration.

Here, the displacement measurement module disposed inside the vacuum chamber is characterized as a laser displacement sensor.

In addition, the teaching module performs a first position alignment judgment by comparing and analyzing the image data acquired by the image acquisition module with preset image reference data to determine whether the position of the robot assembly is outside the tolerance range. And, by comparing and analyzing the distance data measured by the displacement measurement module with preset distance reference data, a second position alignment determination is performed to determine whether the position of the robot assembly is outside the tolerance range. do.

Here, if the teaching module determines that the position of the robot assembly is outside the tolerance range in any one of determining whether the first position is aligned and determining whether the second position is aligned, it is determined that position correction of the robot assembly is necessary. It is characterized by determining and calculating a calibration correction value for the image data and a calibration correction value for the distance data.

Here, the control module receives the calibration correction value for the image data and the calibration correction value for the distance data from the teaching module, and performs primary calibration for the robot assembly by reflecting the calibration correction value for the distance data. After performing the calibration, secondary calibration is performed on the robot assembly by reflecting the calibration correction value for the image data.

Here, the control module is characterized in that it performs the first calibration and the second calibration by controlling at least one of the angle, moving speed, force, return to origin, and power of the robot assembly.

According to the teaching system for a robot assembly provided in a vacuum chamber, which has the problems and solutions described above, not only the image data acquired by the image acquisition module is used to determine the positional misalignment of the robot assembly operating in the vacuum chamber. Since it is configured to analyze the distance data measured by the displacement measurement module, it accurately and easily analyzes the positional misalignment of the robot assembly in real time to determine the need for teaching, and further automatically calculates the correction value in real time. The advantage arises that automatic calibration of the robot assembly can be performed.

Figure 1 is a schematic configuration diagram of a teaching system for a robot assembly provided in a vacuum chamber according to an embodiment of the present invention.
Figure 2 is a block diagram of a teaching module constituting a teaching system for a robot assembly provided in a vacuum chamber according to an embodiment of the present invention.

Hereinafter, with reference to the attached drawings, a preferred embodiment of a teaching system for a robot assembly provided in a vacuum chamber according to the present invention having the above problems, solutions, and effects will be described in detail.

Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the drawings, identical or corresponding components will be assigned the same reference numerals and redundant description thereof will be omitted. .

In the following embodiments, terms such as include or have mean that the features or components described in the specification exist, and do not exclude in advance the possibility of adding one or more other features or components.

In the drawings, the sizes of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are shown arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is shown.

Figure 1 is a schematic configuration diagram of a teaching system for a robot assembly provided in a vacuum chamber according to an embodiment of the present invention, and Figure 2 is a schematic diagram configuring a teaching system for a robot assembly provided in a vacuum chamber according to an embodiment of the present invention. This is a block diagram of the teaching module.

As shown in FIG. 1, the teaching system 100 of a robot assembly provided in a vacuum chamber according to an embodiment of the present invention is a reference mark when the robot assembly 30 in the vacuum chamber 10 arrives at a preset position. An image acquisition module 50 for acquiring an image, a displacement measurement module 70 for measuring the distance to the robot assembly 30 when the robot assembly 30 in the vacuum chamber 10 arrives at a preset position, and the vacuum chamber ( 10) A teaching module 90 disposed inside or outside the robot assembly 30 to determine the need for teaching and calculates a correction value, and a teaching module 90 disposed inside or outside the vacuum chamber 10. It is configured to include a control module 80 that performs calibration of the robot assembly 30 using the calibration correction value transmitted from.

The robot assembly 30 is provided in the vacuum chamber 10 and performs various tasks. For example, the robot assembly 30 may be installed in the vacuum chamber 10 to transfer glass to be processed from the conveyor 1 to the work stage 3.

The robot assembly 30 may correspond to various industrial robots such as robots for transferring semiconductor wafers, robots for automobile assembly lines, robots for logistics transfer, inspection robots, clean room robots, LCD manufacturing robots, and precision stages. , it is generally programmed to repeat the same task over a pre-entered path for a long period of time.

The robot assembly 30 needs to be monitored to see whether the movement path and work position are accurately implemented, and if an error in the work position is found, the need for teaching is determined according to the operation of the teaching module 90. When it is determined that teaching is necessary, calibration correction values are generated. Then, the control module 80 performs an operation to calibrate the robot assembly 30 using the calibration correction value calculated by the teaching module 90.

The robot assembly 30 can be configured in various forms as long as it can repeatedly perform a given task or operation within the vacuum chamber 10. However, the robot assembly 30 includes at least one link 31 and a hand 33 connected to the end of the link 31. The link 31 is multi-jointed with the robot assembly 30 so that it can move to various positions and have various movements. Additionally, the hand 33 performs an operation of picking up or supporting a specific object (glass, etc.).

As the robot assembly 30 repeatedly moves the input path as part of the automation equipment, it may deviate from the path or deviate from the designated position due to internal and external factors, so it is difficult to determine whether it deviates from the movement path or from the designated position. etc. need to be continuously monitored and analyzed. Monitoring and analysis of the robot assembly 30 are performed by the teaching module 90, and it is determined whether there is a need for teaching. If it is determined that there is a need for teaching, a calibration correction value is calculated so that it can be corrected.

In order to determine in real time whether calibration of the robot assembly 30 is necessary, data that can confirm the position and alignment of the robot assembly 30 at a designated location must be obtained. For this purpose, the present invention includes an image acquisition module 50 and a displacement measurement module 70. That is, in the present invention, in order to determine whether teaching is necessary due to positional misalignment of the robot assembly 30, not only the image data acquired from the image acquisition module 50 is considered, but also the displacement measurement module. The distance data from the robot assembly 30 measured in (70) is also considered.

The image acquisition module 30 performs an operation of acquiring an image of a reference mark at at least one preset location included in the movement path of the robot assembly 30. The preset position is preferably at least one, for example, in Figure 1 the robot assembly 30 has a moving path between the conveyor 1 and the work stage 3, where the at least one The preset position may include a position when the hand 33 of the robot assembly 30 arrives on the conveyor 1 and a position when it arrives on the work stage 3.

The robot assembly 30 may continuously move at the at least one preset position, but preferably includes an operation of momentarily stopping at the at least one preset position. In order to accurately acquire the image of the reference mark by the image acquisition module 30, the robot assembly 30 is momentarily stopped, and at this time, the image acquisition module 30 acquires the image of the reference mark. It is desirable.

The reference mark is formed on the robot assembly 30 or placed at a specific point inside the vacuum chamber 10. The reference mark is preferably formed in the form of two or more straight lines intersecting or in the form of a polygon.

When the reference mark is formed on the robot assembly 30, the reference mark is preferably formed on the surface of the hand 33 of the robot assembly 30, and the reference mark is located inside the vacuum chamber 10. When placed at a specific point, the surface of the structure near the preset position corresponding to the position at which the image of the reference mark is acquired by the image acquisition module 50, specifically the surface of the conveyor 1 and the work stage (3) ) is preferably formed on the surface. Of course, when the reference mark is formed on the surface of the conveyor 1 and the surface of the work stage 3, it is preferable that it be formed in a position that is not damaged or obscured by a moving object (glass, etc.).

Meanwhile, the arrangement position of the image acquisition module 50 may be changed or determined depending on where the reference mark is formed. Specifically, the image acquisition module 50 is mounted on the robot assembly 30 or disposed inside or outside the vacuum chamber 10.

Specifically, when the reference mark is placed at a specific point inside the vacuum chamber 10, the surface of the conveyor 1 and the work stage 3 specifically correspond to the structure surface near the preset position. When formed on a surface, the image acquisition module 50 may be placed on the robot assembly 30, more specifically on the link 31 or the hand 33, and may be mounted on the hand 33. It is more desirable.

In this case, the image acquisition module 50 mounted on the robot assembly 30 moves to a specific point inside the vacuum chamber 10, specifically, when the robot assembly 30 momentarily stops at a preset position. An operation may be performed to photograph reference marks formed on the surface of the conveyor 1 and the surface of the work stage 3, which correspond to the surface of the structure near the setting position.

When the image acquisition module 50 is placed on the robot assembly 30, the image acquisition module 50 is fixedly arranged to prevent subtle changes in posture, so that the robot assembly 30 is momentarily moved from the preset position. When stopped, an image of the reference mark is acquired while always looking in the same direction and position. Accordingly, when the movement path of the robot assembly 30 deviates or is misaligned, the image data of the reference mark captured by the image acquisition module 50 indicates that the robot assembly 30 is on the normal movement path or is in an aligned state. The teaching module 90 determines the necessity of teaching the robot assembly 30 based on this, and is different from the reference image data of the reference mark taken in the present state, such as misalignment and path deviation of the robot assembly 30. can be determined, and ultimately, the need for teaching can be determined, and finally, an operation to calculate a correction value can be performed.

Meanwhile, when the reference mark is formed on the robot assembly 30, specifically the hand 33, the image acquisition module 50 is configured to determine the reference mark formed on the hand 33 of the robot assembly 30. If image data can be acquired by shooting an image, it can be placed in various locations inside or outside the vacuum chamber 10.

Specifically, in this case, the image acquisition module 50 is disposed inside the vacuum chamber 10, as shown in FIG. 1, and includes at least one device included in the movement path of the robot assembly 30. It is placed near a setting position, specifically a position where the robot assembly 30 momentarily stops. Accordingly, the image acquisition module 50 performs an operation of photographing a reference mark formed on the hand 33 of the robot assembly 30 when the robot assembly 30 momentarily stops at a preset position.

Additionally, the image acquisition module 50 may be placed outside the vacuum chamber 10. However, in this case, it is preferable that a transparent window through which the interior can be photographed from the outside is formed in the vacuum chamber 10. Accordingly, the image acquisition module 50 disposed outside the vacuum chamber 10 can detect the inside of the vacuum chamber 10 through the window from the outside, specifically, the robot assembly 30 at a preset position. Image data can be obtained by photographing a reference mark formed on the hand 33 of the robot assembly 30 in a stopped state.

Ultimately, the image acquisition module 50 can perform an operation of photographing a reference mark formed on the hand 33 of the robot assembly 30 when the robot assembly 30 momentarily stops at a preset position. there is.

When the image acquisition module 50 is placed inside or outside the vacuum chamber 10, the image acquisition module 50 is fixedly arranged to prevent subtle changes in posture, always looking in the same direction and position. Obtain an image of the reference mark. Accordingly, when the movement path of the robot assembly 30 deviates or is misaligned, the image data of the reference mark captured by the image acquisition module 50 indicates that the robot assembly 30 is on the normal movement path or is in an aligned state. The teaching module 90 determines the need for teaching the robot assembly 30 and calculates a correction value based on this, and the teaching module 90 determines the need for teaching the robot assembly 30 and calculates a correction value. Misalignment and path deviation of the assembly 30 can be determined, the necessity of teaching can be determined through this, and finally, an operation of calculating a correction value can be performed.

Separately from the above-described image acquisition module 50, a displacement measurement module 70 is provided to obtain data that can determine the need for teaching the robot assembly 30. The displacement measurement module 70 is configured to control the robot assembly ( An operation is performed to measure the distance to the robot assembly 30 at at least one preset position included in the movement path of the robot assembly 30).

That is, the displacement measurement module 70 performs an operation of measuring the distance between itself and the robot assembly 30 when the robot assembly 30 momentarily stops at a preset position. More specifically, the displacement measurement module 70 performs an operation of acquiring distance data by measuring the distance between itself and the hand 33 of the robot assembly 30 at a preset position of the robot assembly 30. Perform.

The displacement measurement module 70 is disposed inside or outside the vacuum chamber 10. That is, the displacement measurement module 70 may be disposed not only inside but also outside the vacuum chamber 10. The displacement measurement module 70 can adopt and apply various displacement measurement sensors as long as it can measure the distance to the robot assembly 30 while the robot assembly 30 is momentarily stopped at a preset position.

The displacement measurement module 70 can be applied by selecting any one of various displacement measurement sensors such as a laser displacement sensor, ultrasonic sensor, optical sensor, and electron beam sensor, but the displacement measurement module 70 is used in the vacuum chamber 10. It is preferable that it is placed inside, and in consideration of this, it is preferable that the displacement measurement module 70 adopts and applies a laser displacement sensor. That is, it is preferable that the displacement measurement module 70 disposed inside the vacuum chamber 10 is a laser displacement sensor.

More specifically, the displacement measurement module 70 is preferably disposed near the robot assembly 30, that is, inside the vacuum chamber 10, in order to more accurately measure the distance to the robot assembly 30. However, since the vacuum chamber 10 is in a vacuum state, ultrasonic waves or light cannot ensure accurate distance measurement due to refraction, whereas a laser has good straight-line propagation and can be free from refraction in a vacuum state. Therefore, it is preferable that the displacement measurement module 70 applied to the present invention is a laser displacement sensor disposed inside the vacuum chamber 10, and this laser displacement sensor is included in the movement path of the robot assembly 30. An operation is performed to measure the distance to the robot assembly 30 at at least one preset position.

Ultimately, the displacement measurement module 70, specifically the laser displacement sensor, measures the distance to the robot assembly 30, specifically the hand 33, when the robot assembly 30 momentarily stops at a preset position. The action can be performed.

When the displacement measurement module 70 is placed inside or outside the vacuum chamber 10, the displacement measurement module 70 is fixedly disposed to prevent subtle changes in posture and always faces the same direction and position. Measure the distance to the robot assembly 30 to obtain distance data. Accordingly, when the movement path of the robot assembly 30 deviates or is misaligned, the distance data related to the robot assembly 30 captured by the side measurement module 70 indicates that the robot assembly 30 is not on the normal movement path. or is different from the reference distance data measured in the aligned state, and the teaching module 90, which determines the necessity of teaching the robot assembly 30 through this, causes misalignment and path deviation of the robot assembly 30. etc. can be determined, through which the necessity of teaching can be determined, and finally, an operation of calculating a correction value can be performed.

The image acquisition module 50 and the displacement measurement module 70 each have a communication unit or connection interface. Accordingly, the image acquisition module 50 and the displacement measurement module 70 may perform data communication with the teaching module 90 disposed inside or outside the vacuum chamber 10. Ultimately, the image acquisition module 50 can transmit image data obtained by photographing a reference mark to the teaching module 90, and the displacement measurement module 70 also measures the distance to the robot assembly 30 and The acquired distance data can be transmitted to the teaching module 90.

The teaching module 90 analyzes the image data acquired by the image acquisition module 50 and the distance data measured by the displacement measurement module 70 to determine the need for teaching the robot assembly 30 in real time. And if it is determined that teaching is necessary, an operation to calculate a calibration correction value is performed.

The teaching module 90 analyzes the image data and distance data to monitor whether the robot assembly 30 is off the path, out of alignment, or out of the correct position, and further determines the degree to which it is out of the correct position. , the degree of deviation from the alignment state, the degree of deviation from the path, for example, the degree of deviation from the reference coordinate in the x, y, and z directions, and the rotation angle from the reference angle are calculated to determine the need for teaching.

Specifically, the teaching module 90 compares and analyzes the image data acquired by the image acquisition module 50 with preset image reference data to determine whether the position of the robot assembly 30 is outside the tolerance range. A determination is made to determine whether the first position is aligned, and the distance data measured by the displacement measurement module 70 is compared and analyzed with preset distance reference data to determine whether the position of the robot assembly 30 is outside the tolerance range. An operation is performed to determine whether the second position is aligned.

The teaching module 90 stores reference data related to the coordinates, rotation angle, etc. of a specific point of the robot assembly 30 or a specific point of the hand at a preset position of the robot assembly 30 through the storage unit 99. Taking care of it. That is, reference data related to the coordinate value and rotation angle at the fixed position of the robot assembly 30 are stored and managed in the storage unit 99 of the teaching module 90.

The teaching module 90 uses the image acquisition module 50 when the robot assembly 30 is in the correct position (aligned position in the initially taught state, determined position, position on the path, etc.) from the preset position. The reference image data obtained through this is stored and managed in the storage unit 99, and through this reference image data, reference data regarding the coordinate value and rotation angle of the robot assembly 30 are stored and managed in the storage unit 99. .

In addition, the teaching module 90 is configured to measure the displacement measurement module 70 when the robot assembly 30 is in the correct position (aligned position in the initially taught state, determined position, position on the path, etc.) from the preset position. ) is stored and managed in the storage unit 99, and reference data regarding the coordinate value and rotation angle of the robot assembly 30 is stored in the storage unit 99 through this reference distance data. Manage.

Accordingly, the teaching module 90 stores the image data acquired and transmitted by the image acquisition module 50 through the analysis unit 95 under the control of the control unit 91 in the storage unit 99 and manages the dictionary. A first position alignment that can calculate the difference between coordinate values and rotation angle by comparing and analyzing it with image reference data set in and determines whether the difference between the coordinate value and rotation angle is outside a preset tolerance range. A determination process can be performed. As a result of determining whether the first position is aligned, the control unit 91 of the teaching module 90 provides teaching for the robot assembly 30 when the difference value between the coordinate value and the rotation angle is outside a preset tolerance range. It is judged to be necessary.

Specifically, the reference coordinate value and reference rotation angle related to the image reference data are stored and managed in the storage unit 99, and the transmitted image data can be analyzed to calculate the related coordinate value and reference rotation angle, The difference between the reference coordinate value and reference rotation angle and the related coordinate value and reference rotation angle calculated by analyzing the transmitted image data can be calculated.

In addition, the teaching module 90 stores and manages the tolerance range for the position of the robot assembly 30 in the storage unit 99. The tolerance range is a range that deviates from the reference coordinate value and the reference rotation angle, but is not problematic enough to teach the robot assembly 30 and is deviated to the extent that the robot assembly 30 can continuously perform normal tasks and operations. means.

Accordingly, the teaching module 90 performs a first position alignment determination process to determine whether the difference between the coordinate value and the rotation angle is outside the preset tolerance range. If it is determined that the first position alignment is outside the tolerance range, it is determined that teaching is necessary through correction of the coordinate values and rotation angle of the robot assembly 30. That is, if the control unit 91 of the teaching module 90 determines that the first position is aligned outside the tolerance range through the analysis unit 95, it determines that there is a need to teach the robot assembly. The determination is made and the analysis unit 95 is controlled to calculate calibration values such as coordinate values and rotation angles for calibration of the robot assembly 30.

In addition, the teaching module 90 compares and analyzes the distance data acquired and transmitted by the displacement measurement module 70 with preset distance reference data stored and managed in the storage unit 99 to obtain coordinate values and rotation angles. The difference value can be calculated, and a second position alignment determination process can be performed to determine whether the difference value between the coordinate value and the rotation angle is outside a preset tolerance range. The teaching module 90 determines whether there is a need to teach the robot assembly according to the result of the second position alignment determination process by the analysis unit 95.

Specifically, the reference coordinate value and reference rotation angle related to the distance reference data are stored and managed in the storage unit 99, and the transmitted distance data can be analyzed to calculate the related coordinate value and reference rotation angle, The difference between the reference coordinate value and the reference rotation angle and the related coordinate value and reference rotation angle calculated by analyzing the transmitted distance data can be calculated.

In addition, the teaching module 90 stores and manages the tolerance range for the position of the robot assembly through the storage unit 99. The tolerance range is a range that deviates from the reference coordinate value and the reference rotation angle, but is not problematic enough to teach the robot assembly 30 and is deviated to the extent that the robot assembly 30 can continuously perform normal tasks and operations. means.

Accordingly, the teaching module 90 performs a second position alignment determination process to determine whether the difference between the coordinate value and the rotation angle is outside the preset tolerance range. If it is determined that the second position is outside the tolerance range through the alignment determination process, it may be determined that teaching is necessary through correction of the coordinate values and rotation angle of the robot assembly 30. That is, if the control unit 91 of the teaching module 90 determines that the second position alignment is outside the tolerance range as a result of analysis by the analysis unit 95, it provides teaching on the robot assembly. is determined to be necessary, and the analysis unit 95 is controlled again to calculate coordinate values and rotation angles corresponding to calibration correction values for teaching the robot assembly 30.

If the teaching module 90 determines that the position of the robot assembly 30 is outside the tolerance range in either the first position alignment determination or the second position alignment determination, the robot assembly 30 ), it is determined that position correction is necessary, and the position correction correction value, specifically, the correction correction value for image data and the correction correction value for distance data are calculated.

Specifically, the image data obtained from the image acquisition module 50 is compared and analyzed with reference image data to determine that the position of the robot assembly 30 is outside the tolerance range or the position of the robot assembly 30 obtained from the displacement measurement module 70 is determined to be outside the tolerance range. If the position of the robot assembly 30 is determined to be outside the tolerance range by comparing and analyzing the distance data with the reference distance data, or if the position of the robot assembly 30 is judged to be outside the tolerance range in both cases, the teaching module (90) determines that the robot assembly 30 is misaligned or deviates from the designated path and calculates position correction values, specifically, correction values for image data and correction values for distance data, so that teaching can proceed. do.

As shown in FIG. 2, the teaching module 90 according to the present invention that performs this operation includes a control unit 91, and image data acquired from the image acquisition module 50 under the control of the control unit 91. An input unit 93 receives the distance data obtained from the displacement measurement module 70, and determines whether the first position is aligned or not and determines whether the second position is aligned according to the control of the control unit 91. When it is determined that teaching is necessary by the analysis unit 95 and the control unit 91, it is determined that position correction of the robot assembly 30 is necessary under the control of the control unit 91, and a calibration correction value is provided, Specifically, it includes a correction unit 97 that performs an operation of calculating a calibration correction value for image data and a calibration correction value for distance data, and a storage unit 99 for storing and managing the above-mentioned reference value, error tolerance range, etc. It is composed.

The control unit 91 controls the overall operation of the teaching module 90. That is, the control unit 91 controls the operations of the input unit 93, analysis unit 95, correction unit 97, and storage unit 99.

The input unit 93 is connected wired or wirelessly to the image acquisition module 50 and the displacement measurement module 70 under the control of the control unit 91 and receives acquired image data and distance data, respectively. The control unit 91 controls the input unit 93 so that the acquired image data and distance data can be input in real time.

Image data and distance data input in real time through the input unit 93 are transmitted to the analysis unit 95 under the control of the control unit 91 and analyzed. That is, the analysis unit 95 receives and analyzes the image data and distance data under the control of the control unit 91. The analysis unit 95 performs the above-described operations for determining whether the first position is aligned and whether the second position is aligned under the control of the control unit 91.

That is, the analysis unit 95 compares and analyzes the image data acquired by the image acquisition module 50 with preset image reference data under the control of the control unit 91 to determine the position of the robot assembly 30. The robot assembly 30 performs a first position alignment judgment to determine whether it is outside the tolerance range, and compares and analyzes the distance data measured by the displacement measurement module 70 with preset distance reference data. An operation of determining whether the second position is aligned is performed to determine whether the position of is outside the tolerance range.

According to the determination result of the analysis unit 95, the control unit 91 determines whether the first position is aligned or whether the second position is aligned, and the position of the robot assembly 30 is within the tolerance range. If it is determined that it is out of the range, it is determined that teaching is necessary because the position of the robot assembly needs to be corrected.

As a result of the determination, if it is determined that teaching about the robot assembly is necessary, the control unit 91 controls the correction unit 97 to provide calibration correction values and distance data related to the image data required to calibrate the robot assembly. Calculate the calibration correction value for . That is, the correction unit 97 performs an operation of calculating a correction value for image data and a correction value for distance data under the control of the control unit 91.

The correction value for the image data and the correction value for the distance data calculated by the correction unit 97 include the amount of movement in the x, y, and z directions compared to the reference value of the robot assembly 30, the rotation angle compared to the reference value, etc. do.

When the calibration correction value for the image data and the calibration correction value for the distance data are calculated by the correction unit 97, the control unit 91 transmits them to the control module 80. The position of the robot assembly 30 can be corrected under control.

Then, the control module 80 receives the calibration correction value for the image data and the calibration correction value for the distance data from the teaching module 90, and reflects the calibration correction value for the distance data to form the robot assembly. After performing the first calibration on 30, a secondary calibration is performed on the robot assembly 30 by reflecting the calibration correction value for the image data.

Specifically, the control module 80 corrects the position of the z-axis of the robot assembly through a correction value related to distance data so that it is within a range that allows precise correction using a correction value related to image data (primary correction). Then, the x-axis, y-axis, and z-axis of the robot assembly are precisely adjusted, and the position for twist and rotation angle displacement on the plane is precisely corrected (secondary correction) through the correction values for the image data. Control as much as possible.

In this way, the position correction of the robot assembly using the calibration correction value related to the distance data is first performed, and then the precise position correction of the robot assembly is performed using the calibration correction value related to the image data, which prevents the robot assembly from moving excessively in the z-axis from the correct position. This is because the position correction of the z-axis is inevitably performed inaccurately with the calibration correction value for the image data acquired by the image acquisition module 50 when it is separated, and in this case, it is difficult to perform the next precise position correction.

Meanwhile, as described above, the control unit 91 of the teaching module 90 determines whether the first position is aligned or whether the second position is aligned. In either case, the position of the robot assembly is outside the tolerance range. If it is determined that position correction of the robot assembly is necessary through the correction unit 97, control is performed to calculate a correction value for the image data and a correction value for the distance data.

That is, if the control unit 91 determines that only one of the distance data and image data is outside the tolerance range, it determines that teaching is necessary, and for correction, the control unit 91 determines that teaching is necessary, and for correction, the control unit 91 determines that a correction value for the image data (a correction value for the distance data) is required for correction. Because not only the calibration correction value) but also the calibration correction value for the distance data (the calibration correction value for the image data) are calculated unconditionally, and both of these calibration correction values are reflected so that the robot assembly can be calibrated, the robot assembly Precise correction may be possible.

The control module 80 controls various elements of the robot assembly 30 during the process of performing the primary and secondary calibration. Specifically, the control module 80 performs the first calibration and the second calibration by controlling at least one of the angle, moving speed, force, return to origin, and power of the robot assembly 30.

Although embodiments according to the present invention have been described above, they are merely illustrative, and those skilled in the art will understand that various modifications and equivalent scope of embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the following patent claims.

1: Conveyor 3: Work stage
10: Vacuum chamber 30: Robot assembly
31: Link 33: Hand
50: Image acquisition module 70: Displacement measurement module
80: control module
90: Teaching module 91: Control unit
93: input unit 95: analysis unit
97: correction unit 99: storage unit
100: Teaching system for robot assembly provided in a vacuum chamber

Claims (6)

In the teaching system for a robot assembly provided in a vacuum chamber,
an image acquisition module that acquires an image of a reference mark at at least one preset location included in the movement path of the robot assembly;
a displacement measurement module that measures the distance to the robot assembly at at least one preset position included in the movement path of the robot assembly;
a teaching module that analyzes the image data acquired by the image acquisition module and the distance data measured by the displacement measurement module to determine the need for teaching the robot assembly in real time and calculates a calibration correction value when it is determined that teaching is necessary;
It includes a control module that receives a calibration correction value from the teaching module and controls the robot assembly to perform calibration,
The reference mark is placed at a specific point inside the vacuum chamber, the image acquisition module is mounted on the hand of the robot assembly to acquire an image of the reference mark, and the image acquisition module is configured to prevent a slight change in posture. It is fixedly placed on the hand of the robot assembly, and when the robot assembly momentarily stops at a preset position, an image of the reference mark is acquired while always looking in the same direction and position,
The teaching module compares and analyzes the image data acquired by the image acquisition module with preset image reference data to determine whether the position of the robot assembly is outside the tolerance range, and determines whether the first position is aligned, Performing a second position alignment judgment to determine whether the position of the robot assembly is outside the tolerance range by comparing and analyzing the distance data measured by the displacement measurement module with preset distance reference data,
If the teaching module determines that the position of the robot assembly is outside the tolerance range in any one of determining whether the first position is aligned and determining whether the second position is aligned, it determines that position correction of the robot assembly is necessary. Calculate a calibration correction value for the image data and a calibration correction value for the distance data,
The control module receives a calibration correction value for the image data and a calibration correction value for the distance data from the teaching module, and reflects the calibration correction value for the distance data to determine the z-axis position of the robot assembly in the image data. After performing a primary calibration on the robot assembly so that precise calibration by the calibration correction value related to the robot assembly is within a possible range, performing a secondary calibration on the robot assembly by reflecting the calibration correction value regarding the image data,
The control module is a teaching system for a robot assembly provided in a vacuum chamber, wherein the control module performs the first calibration and the second calibration by controlling at least one of the angle, moving speed, force, return to origin, and power of the robot assembly.
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