CN109791948A - 带有背侧本体接触部的深沟槽有源器件 - Google Patents
带有背侧本体接触部的深沟槽有源器件 Download PDFInfo
- Publication number
- CN109791948A CN109791948A CN201780054488.8A CN201780054488A CN109791948A CN 109791948 A CN109791948 A CN 109791948A CN 201780054488 A CN201780054488 A CN 201780054488A CN 109791948 A CN109791948 A CN 109791948A
- Authority
- CN
- China
- Prior art keywords
- backside
- layer
- gate
- integrated circuit
- coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
- H10D86/215—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI comprising FinFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5223—Capacitor integral with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/24—Supports; Mounting means by structural association with other equipment or articles with receiving set
- H01Q1/241—Supports; Mounting means by structural association with other equipment or articles with receiving set used in mobile communications, e.g. GSM
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
- H10D30/024—Manufacture or treatment of FETs having insulated gates [IGFET] of fin field-effect transistors [FinFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/62—Fin field-effect transistors [FinFET]
- H10D30/6211—Fin field-effect transistors [FinFET] having fin-shaped semiconductor bodies integral with the bulk semiconductor substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6708—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect
- H10D30/6711—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device for preventing the kink effect or the snapback effect, e.g. discharging the minority carriers of the channel region for preventing bipolar effect by using electrodes contacting the supplementary regions or layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/113—Isolations within a component, i.e. internal isolations
- H10D62/115—Dielectric isolations, e.g. air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6605—High-frequency electrical connections
- H01L2223/6616—Vertical connections, e.g. vias
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Manufacturing & Machinery (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/257,823 US9812580B1 (en) | 2016-09-06 | 2016-09-06 | Deep trench active device with backside body contact |
| US15/257,823 | 2016-09-06 | ||
| PCT/US2017/045349 WO2018048529A1 (en) | 2016-09-06 | 2017-08-03 | Deep trench active device with backside body contact |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109791948A true CN109791948A (zh) | 2019-05-21 |
Family
ID=59684050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780054488.8A Pending CN109791948A (zh) | 2016-09-06 | 2017-08-03 | 带有背侧本体接触部的深沟槽有源器件 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9812580B1 (enExample) |
| EP (1) | EP3510636A1 (enExample) |
| JP (1) | JP2019530218A (enExample) |
| KR (1) | KR20190045909A (enExample) |
| CN (1) | CN109791948A (enExample) |
| BR (1) | BR112019003900A2 (enExample) |
| WO (1) | WO2018048529A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110504240B (zh) * | 2018-05-16 | 2021-08-13 | 联华电子股份有限公司 | 半导体元件及其制造方法 |
| CN109524355B (zh) * | 2018-10-30 | 2020-11-10 | 上海集成电路研发中心有限公司 | 一种半导体器件的结构和形成方法 |
| CN109545785B (zh) * | 2018-10-31 | 2023-01-31 | 上海集成电路研发中心有限公司 | 一种半导体器件结构和制备方法 |
| CN109545802B (zh) * | 2018-12-14 | 2021-01-12 | 上海微阱电子科技有限公司 | 一种绝缘体上半导体器件结构和形成方法 |
| CN109616472B (zh) * | 2018-12-14 | 2022-11-15 | 上海微阱电子科技有限公司 | 一种半导体器件结构和形成方法 |
| CN109891585B (zh) * | 2019-01-30 | 2020-03-27 | 长江存储科技有限责任公司 | 具有垂直扩散板的电容器结构 |
| CN109923666B (zh) * | 2019-01-30 | 2020-05-26 | 长江存储科技有限责任公司 | 具有垂直扩散板的电容器结构 |
| KR102642279B1 (ko) * | 2019-02-18 | 2024-02-28 | 양쯔 메모리 테크놀로지스 씨오., 엘티디. | 새로운 커패시터 구조 및 이를 형성하는 방법 |
| TWI741935B (zh) | 2020-04-28 | 2021-10-01 | 台灣積體電路製造股份有限公司 | 半導體元件與其製作方法 |
| DE102020122151A1 (de) * | 2020-04-28 | 2021-10-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Halbleitervorrichtung und verfahren |
| US11349004B2 (en) * | 2020-04-28 | 2022-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside vias in semiconductor device |
| US11355410B2 (en) * | 2020-04-28 | 2022-06-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Thermal dissipation in semiconductor devices |
| US11251308B2 (en) | 2020-04-28 | 2022-02-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and method |
| DE102020131611B4 (de) | 2020-05-28 | 2025-03-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Halbleitervorrichtung mit luftspalten und verfahren zu deren herstellung |
| CN120280431B (zh) * | 2025-06-04 | 2025-09-30 | 长飞先进半导体(武汉)有限公司 | 半导体器件及制作方法、功率模块、功率转换电路和车辆 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110244302A1 (en) * | 2010-03-30 | 2011-10-06 | Medtronic, Inc. | High density capacitor array patterns |
| US20120007180A1 (en) * | 2010-07-06 | 2012-01-12 | Globalfoundries Singapore PTE, LTD. | FinFET with novel body contact for multiple Vt applications |
| US20160172527A1 (en) * | 2012-12-03 | 2016-06-16 | Sandia Corporation | Photodetector with Interdigitated Nanoelectrode Grating Antenna |
| US20160254231A1 (en) * | 2013-03-27 | 2016-09-01 | Qualcomm Incorporated | Methods of Making Integrated Circuit Assembly with Faraday Cage |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2948018B2 (ja) * | 1992-03-17 | 1999-09-13 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
| US5889298A (en) | 1993-04-30 | 1999-03-30 | Texas Instruments Incorporated | Vertical JFET field effect transistor |
| JP3884266B2 (ja) * | 2001-02-19 | 2007-02-21 | 株式会社東芝 | 半導体メモリ装置及びその製造方法 |
| US6838722B2 (en) | 2002-03-22 | 2005-01-04 | Siliconix Incorporated | Structures of and methods of fabricating trench-gated MIS devices |
| JP2003309182A (ja) * | 2002-04-17 | 2003-10-31 | Hitachi Ltd | 半導体装置の製造方法及び半導体装置 |
| US6861701B2 (en) | 2003-03-05 | 2005-03-01 | Advanced Analogic Technologies, Inc. | Trench power MOSFET with planarized gate bus |
| JP4869546B2 (ja) * | 2003-05-23 | 2012-02-08 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP2005353657A (ja) * | 2004-06-08 | 2005-12-22 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| DE102005030585B4 (de) * | 2005-06-30 | 2011-07-28 | Globalfoundries Inc. | Halbleiterbauelement mit einem vertikalen Entkopplungskondensator und Verfahren zu seiner Herstellung |
| JP2009088241A (ja) * | 2007-09-28 | 2009-04-23 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| JP5487625B2 (ja) * | 2009-01-22 | 2014-05-07 | ソニー株式会社 | 半導体装置 |
| US9159825B2 (en) | 2010-10-12 | 2015-10-13 | Silanna Semiconductor U.S.A., Inc. | Double-sided vertical semiconductor device with thinned substrate |
| US9496255B2 (en) * | 2011-11-16 | 2016-11-15 | Qualcomm Incorporated | Stacked CMOS chipset having an insulating layer and a secondary layer and method of forming same |
| US8735993B2 (en) * | 2012-01-31 | 2014-05-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFET body contact and method of making same |
| US9148194B2 (en) * | 2012-07-07 | 2015-09-29 | Skyworks Solutions, Inc. | Radio-frequency switch system having improved intermodulation distortion performance |
| US8748245B1 (en) | 2013-03-27 | 2014-06-10 | Io Semiconductor, Inc. | Semiconductor-on-insulator integrated circuit with interconnect below the insulator |
-
2016
- 2016-09-06 US US15/257,823 patent/US9812580B1/en not_active Expired - Fee Related
-
2017
- 2017-08-03 BR BR112019003900-7A patent/BR112019003900A2/pt not_active IP Right Cessation
- 2017-08-03 EP EP17755340.1A patent/EP3510636A1/en not_active Withdrawn
- 2017-08-03 WO PCT/US2017/045349 patent/WO2018048529A1/en not_active Ceased
- 2017-08-03 CN CN201780054488.8A patent/CN109791948A/zh active Pending
- 2017-08-03 JP JP2019512208A patent/JP2019530218A/ja active Pending
- 2017-08-03 KR KR1020197006280A patent/KR20190045909A/ko not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110244302A1 (en) * | 2010-03-30 | 2011-10-06 | Medtronic, Inc. | High density capacitor array patterns |
| US20120007180A1 (en) * | 2010-07-06 | 2012-01-12 | Globalfoundries Singapore PTE, LTD. | FinFET with novel body contact for multiple Vt applications |
| US20160172527A1 (en) * | 2012-12-03 | 2016-06-16 | Sandia Corporation | Photodetector with Interdigitated Nanoelectrode Grating Antenna |
| US20160254231A1 (en) * | 2013-03-27 | 2016-09-01 | Qualcomm Incorporated | Methods of Making Integrated Circuit Assembly with Faraday Cage |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018048529A1 (en) | 2018-03-15 |
| KR20190045909A (ko) | 2019-05-03 |
| JP2019530218A (ja) | 2019-10-17 |
| US9812580B1 (en) | 2017-11-07 |
| BR112019003900A2 (pt) | 2019-05-21 |
| EP3510636A1 (en) | 2019-07-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190521 |
|
| WD01 | Invention patent application deemed withdrawn after publication |