CN109103257A - 高可靠性深沟槽功率mos器件 - Google Patents
高可靠性深沟槽功率mos器件 Download PDFInfo
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- CN109103257A CN109103257A CN201810744757.XA CN201810744757A CN109103257A CN 109103257 A CN109103257 A CN 109103257A CN 201810744757 A CN201810744757 A CN 201810744757A CN 109103257 A CN109103257 A CN 109103257A
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- polycrystalline silicon
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 45
- 229920005591 polysilicon Polymers 0.000 claims abstract description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 239000010703 silicon Substances 0.000 claims abstract description 7
- 239000012535 impurity Substances 0.000 claims abstract description 5
- 238000009413 insulation Methods 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000013459 approach Methods 0.000 abstract description 5
- 230000000903 blocking effect Effects 0.000 abstract description 4
- 239000012141 concentrate Substances 0.000 abstract description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810744757.XA CN109103257A (zh) | 2018-07-09 | 2018-07-09 | 高可靠性深沟槽功率mos器件 |
Applications Claiming Priority (1)
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CN201810744757.XA CN109103257A (zh) | 2018-07-09 | 2018-07-09 | 高可靠性深沟槽功率mos器件 |
Publications (1)
Publication Number | Publication Date |
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CN109103257A true CN109103257A (zh) | 2018-12-28 |
Family
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Family Applications (1)
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CN201810744757.XA Pending CN109103257A (zh) | 2018-07-09 | 2018-07-09 | 高可靠性深沟槽功率mos器件 |
Country Status (1)
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CN (1) | CN109103257A (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113611747A (zh) * | 2021-08-04 | 2021-11-05 | 济南市半导体元件实验所 | 集成势垒夹断二极管的sgt功率mos器件及加工工艺 |
CN113838913A (zh) * | 2021-09-23 | 2021-12-24 | 电子科技大学 | 分段式注入的自钳位igbt器件及其制作方法 |
CN113838920A (zh) * | 2021-09-23 | 2021-12-24 | 电子科技大学 | 一种具有自偏置pmos的分离栅cstbt及其制作方法 |
CN116705724A (zh) * | 2023-06-27 | 2023-09-05 | 先之科半导体科技(东莞)有限公司 | 一种便于维护且使用寿命长的mos晶体管 |
CN117497568A (zh) * | 2023-12-27 | 2024-02-02 | 天狼芯半导体(成都)有限公司 | 具有左右栅结构的sgtmos器件及其制备方法、芯片 |
Citations (11)
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US20050151190A1 (en) * | 2003-11-14 | 2005-07-14 | Infineon Technologies Ag | Power transistor arrangement and method for fabricating it |
JP2006093457A (ja) * | 2004-09-24 | 2006-04-06 | Toyota Motor Corp | 絶縁ゲート型半導体装置 |
CN101626033A (zh) * | 2008-07-09 | 2010-01-13 | 飞兆半导体公司 | 屏蔽栅沟槽fet结构及其形成方法 |
CN101719516A (zh) * | 2009-11-20 | 2010-06-02 | 苏州硅能半导体科技股份有限公司 | 一种低栅极电荷深沟槽功率mos器件及其制造方法 |
CN102956684A (zh) * | 2011-08-25 | 2013-03-06 | 万国半导体股份有限公司 | 集成晶胞的掩埋场环场效应晶体管植入空穴供应通路 |
US20140103426A1 (en) * | 2012-10-12 | 2014-04-17 | Fu-Yuan Hsieh | Trench metal oxide semiconductor field effect transistor with multiple trenched source-body contacts for reducing gate charge |
CN103855018A (zh) * | 2012-12-04 | 2014-06-11 | 上海华虹宏力半导体制造有限公司 | 沟槽底部进行离子注入调节bv和改善导通电阻的方法 |
US20170278837A1 (en) * | 2016-03-25 | 2017-09-28 | Force Mos Technology Co., Ltd | Semiconductor power device having shielded gate structure and esd clamp diode manufactured with less mask process |
CN107731908A (zh) * | 2017-10-24 | 2018-02-23 | 贵州芯长征科技有限公司 | 提高耐压的屏蔽栅mosfet结构及其制备方法 |
US20180102361A1 (en) * | 2016-10-06 | 2018-04-12 | Toyota Jidosha Kabushiki Kaisha | Switching device |
CN208835068U (zh) * | 2018-07-09 | 2019-05-07 | 苏州硅能半导体科技股份有限公司 | 高可靠性深沟槽功率mos器件 |
-
2018
- 2018-07-09 CN CN201810744757.XA patent/CN109103257A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050151190A1 (en) * | 2003-11-14 | 2005-07-14 | Infineon Technologies Ag | Power transistor arrangement and method for fabricating it |
JP2006093457A (ja) * | 2004-09-24 | 2006-04-06 | Toyota Motor Corp | 絶縁ゲート型半導体装置 |
CN101626033A (zh) * | 2008-07-09 | 2010-01-13 | 飞兆半导体公司 | 屏蔽栅沟槽fet结构及其形成方法 |
CN101719516A (zh) * | 2009-11-20 | 2010-06-02 | 苏州硅能半导体科技股份有限公司 | 一种低栅极电荷深沟槽功率mos器件及其制造方法 |
CN102956684A (zh) * | 2011-08-25 | 2013-03-06 | 万国半导体股份有限公司 | 集成晶胞的掩埋场环场效应晶体管植入空穴供应通路 |
US20140103426A1 (en) * | 2012-10-12 | 2014-04-17 | Fu-Yuan Hsieh | Trench metal oxide semiconductor field effect transistor with multiple trenched source-body contacts for reducing gate charge |
CN103855018A (zh) * | 2012-12-04 | 2014-06-11 | 上海华虹宏力半导体制造有限公司 | 沟槽底部进行离子注入调节bv和改善导通电阻的方法 |
US20170278837A1 (en) * | 2016-03-25 | 2017-09-28 | Force Mos Technology Co., Ltd | Semiconductor power device having shielded gate structure and esd clamp diode manufactured with less mask process |
US20180102361A1 (en) * | 2016-10-06 | 2018-04-12 | Toyota Jidosha Kabushiki Kaisha | Switching device |
CN107731908A (zh) * | 2017-10-24 | 2018-02-23 | 贵州芯长征科技有限公司 | 提高耐压的屏蔽栅mosfet结构及其制备方法 |
CN208835068U (zh) * | 2018-07-09 | 2019-05-07 | 苏州硅能半导体科技股份有限公司 | 高可靠性深沟槽功率mos器件 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113611747A (zh) * | 2021-08-04 | 2021-11-05 | 济南市半导体元件实验所 | 集成势垒夹断二极管的sgt功率mos器件及加工工艺 |
CN113838913A (zh) * | 2021-09-23 | 2021-12-24 | 电子科技大学 | 分段式注入的自钳位igbt器件及其制作方法 |
CN113838920A (zh) * | 2021-09-23 | 2021-12-24 | 电子科技大学 | 一种具有自偏置pmos的分离栅cstbt及其制作方法 |
CN113838913B (zh) * | 2021-09-23 | 2023-04-28 | 电子科技大学 | 分段式注入的自钳位igbt器件及其制作方法 |
CN113838920B (zh) * | 2021-09-23 | 2023-04-28 | 电子科技大学 | 一种具有自偏置pmos的分离栅cstbt及其制作方法 |
CN116705724A (zh) * | 2023-06-27 | 2023-09-05 | 先之科半导体科技(东莞)有限公司 | 一种便于维护且使用寿命长的mos晶体管 |
CN116705724B (zh) * | 2023-06-27 | 2024-03-22 | 先之科半导体科技(东莞)有限公司 | 一种便于维护且使用寿命长的mos晶体管 |
CN117497568A (zh) * | 2023-12-27 | 2024-02-02 | 天狼芯半导体(成都)有限公司 | 具有左右栅结构的sgtmos器件及其制备方法、芯片 |
CN117497568B (zh) * | 2023-12-27 | 2024-04-19 | 天狼芯半导体(成都)有限公司 | 具有左右栅结构的sgtmos器件及其制备方法、芯片 |
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Effective date of registration: 20240204 Address after: 518000 Room 201, building A, 1 front Bay Road, Shenzhen Qianhai cooperation zone, Shenzhen, Guangdong Applicant after: Shenzhen Hemeiyuan Technology Co.,Ltd. Country or region after: China Address before: Room 501, Building NW20, Suzhou Nano City, No. 99 Jinjihu Avenue, Industrial Park, Suzhou City, Jiangsu Province, 215126 Applicant before: SUZHOU SILIKRON SEMICONDUCTOR TECHNOLOGY CO.,LTD. Country or region before: China |
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Effective date of registration: 20240318 Address after: Room 306, Building 2, No.1 Qingshan Road, High tech Zone, Suzhou City, Jiangsu Province, 215100 Applicant after: New Silicon Microelectronics (Suzhou) Co.,Ltd. Country or region after: China Address before: 518000 Room 201, building A, 1 front Bay Road, Shenzhen Qianhai cooperation zone, Shenzhen, Guangdong Applicant before: Shenzhen Hemeiyuan Technology Co.,Ltd. Country or region before: China |