CN109070537B - 载体释脱技术 - Google Patents
载体释脱技术 Download PDFInfo
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- CN109070537B CN109070537B CN201780029194.XA CN201780029194A CN109070537B CN 109070537 B CN109070537 B CN 109070537B CN 201780029194 A CN201780029194 A CN 201780029194A CN 109070537 B CN109070537 B CN 109070537B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10D30/6758—Thin-film transistors [TFT] characterised by the insulating substrates
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Quality & Reliability (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Liquid Crystal (AREA)
- Laminated Bodies (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Led Device Packages (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Optical Filters (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111311652.3A CN114013119B (zh) | 2016-05-11 | 2017-05-11 | 处理方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1608279.4 | 2016-05-11 | ||
| GB1608279.4A GB2554040B (en) | 2016-05-11 | 2016-05-11 | Carrier release |
| PCT/EP2017/061319 WO2017194672A1 (en) | 2016-05-11 | 2017-05-11 | Carrier release |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111311652.3A Division CN114013119B (zh) | 2016-05-11 | 2017-05-11 | 处理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109070537A CN109070537A (zh) | 2018-12-21 |
| CN109070537B true CN109070537B (zh) | 2021-11-23 |
Family
ID=56297533
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780029194.XA Active CN109070537B (zh) | 2016-05-11 | 2017-05-11 | 载体释脱技术 |
| CN202111311652.3A Active CN114013119B (zh) | 2016-05-11 | 2017-05-11 | 处理方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111311652.3A Active CN114013119B (zh) | 2016-05-11 | 2017-05-11 | 处理方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10658401B2 (enExample) |
| JP (2) | JP7030063B2 (enExample) |
| KR (2) | KR102401448B1 (enExample) |
| CN (2) | CN109070537B (enExample) |
| GB (2) | GB2607246B (enExample) |
| RU (1) | RU2763361C2 (enExample) |
| TW (2) | TWI739827B (enExample) |
| WO (1) | WO2017194672A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2607246B (en) * | 2016-05-11 | 2023-03-22 | Flexenable Ltd | Carrier release |
| GB2568240B (en) * | 2017-11-03 | 2023-01-25 | Flexenable Ltd | Method of producing liquid crystal devices comprising a polariser component between two lc cells |
| US10964582B2 (en) * | 2019-06-24 | 2021-03-30 | Palo Alto Research Center Incorporated | Transfer substrate utilizing selectable surface adhesion transfer elements |
| GB2593418B (en) | 2019-10-10 | 2023-12-13 | Flexenable Tech Limited | Liquid crystal devices |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009040930A (ja) * | 2007-08-10 | 2009-02-26 | Nitto Denko Corp | 被着体の剥離方法、及び、該被着体の剥離方法に使用される加熱剥離型粘着シート |
| CN102655119A (zh) * | 2011-03-04 | 2012-09-05 | 日东电工株式会社 | 薄膜基板的制造方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722440A (ja) * | 1993-07-06 | 1995-01-24 | Toshiba Chem Corp | 半導体素子の取付け方法 |
| JPH0850282A (ja) * | 1994-05-30 | 1996-02-20 | Sanyo Electric Co Ltd | 表示装置の製造方法 |
| JP2000241822A (ja) * | 1999-02-17 | 2000-09-08 | Seiko Epson Corp | 液晶パネルの製造方法 |
| JP2000241823A (ja) * | 1999-02-17 | 2000-09-08 | Seiko Epson Corp | 液晶パネルの製造方法 |
| JP2000248243A (ja) * | 1999-03-03 | 2000-09-12 | Seiko Epson Corp | 接着シート及び液晶パネルの製造方法 |
| JP2000351947A (ja) * | 1999-06-14 | 2000-12-19 | Nitto Denko Corp | 加熱剥離型粘着シート |
| WO2003042319A1 (fr) * | 2001-11-15 | 2003-05-22 | Sekisui Chemical Co., Ltd. | Materiau adhesif, procede pour detacher un materiau adhesif et ruban adhesif autocollant |
| JP4220766B2 (ja) * | 2002-12-02 | 2009-02-04 | 積水化学工業株式会社 | 離型シート及びセラミックグリーンシートの転写方法 |
| JP4637588B2 (ja) * | 2003-01-15 | 2011-02-23 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| JP2005255829A (ja) * | 2004-03-11 | 2005-09-22 | Nitto Denko Corp | 加熱剥離型粘着シートおよび被着体の加工方法 |
| JP5173672B2 (ja) * | 2008-08-21 | 2013-04-03 | 協立化学産業株式会社 | 接着剤により貼り合された複数の光学機能性部材の剥離方法 |
| GB2481187B (en) * | 2010-06-04 | 2014-10-29 | Plastic Logic Ltd | Processing substrates |
| JP2012149181A (ja) * | 2011-01-19 | 2012-08-09 | Nitto Denko Corp | 両面粘着テープ又はシート、および被着体の加工方法 |
| WO2013021560A1 (ja) * | 2011-08-05 | 2013-02-14 | パナソニック株式会社 | フレキシブルデバイスの製造方法 |
| KR101773652B1 (ko) * | 2013-04-09 | 2017-09-12 | 주식회사 엘지화학 | 적층체의 제조방법 및 이를 이용하여 제조된 적층체 |
| CN105492557B (zh) * | 2013-08-29 | 2018-11-02 | 三井化学东赛璐株式会社 | 粘接膜和半导体装置的制造方法 |
| GB2607246B (en) * | 2016-05-11 | 2023-03-22 | Flexenable Ltd | Carrier release |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009040930A (ja) * | 2007-08-10 | 2009-02-26 | Nitto Denko Corp | 被着体の剥離方法、及び、該被着体の剥離方法に使用される加熱剥離型粘着シート |
| CN102655119A (zh) * | 2011-03-04 | 2012-09-05 | 日东电工株式会社 | 薄膜基板的制造方法 |
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| JP2022069475A (ja) | 2022-05-11 |
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| US11362120B2 (en) | 2022-06-14 |
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| US10658401B2 (en) | 2020-05-19 |
| RU2763361C2 (ru) | 2021-12-28 |
| TW202212931A (zh) | 2022-04-01 |
| KR102577280B1 (ko) | 2023-09-12 |
| US20190148417A1 (en) | 2019-05-16 |
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| GB2554040B (en) | 2023-01-25 |
| US20200243575A1 (en) | 2020-07-30 |
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| JP7030063B2 (ja) | 2022-03-04 |
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